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公开(公告)号：US07209584B2
公开(公告)日：2007-04-24
申请号：US11079338
申请日：2005-03-15
CPC分类号： G03F1/26 , G03F1/84 , G06T7/001 , G06T2207/30148
摘要： A pattern inspection apparatus determines a difference of the measured dislocation of respective alignment marks of an opaque pattern and a phase shifting pattern (measurement difference), in addition to a difference between the both alignment mark positions in design (design difference). A difference between the measurement difference and the design difference is set as a difference in alignment mark position between the opaque pattern and the phase shifting pattern in a reference pattern which is later used in inspection. In this manner, by correcting one pattern data with respect to the other pattern data in the reference pattern, the displacement generated in the both patterns can be reflected, and the reference pattern data regarding an image of a sample which is actually observed can be created.
摘要翻译： 除了设计中的两个对准标记位置（设计差异）之外，图案检查装置还确定不透明图案的各个对准标记的测量位错与相移图案（测量差异）之间的差异。 测量差异和设计差异之间的差异被设置为稍后在检查中使用的参考图案中的不透明图案和相移图案之间的对准标记位置的差异。 以这种方式，通过相对于参考图案中的其他图案数据校正一个图案数据，可以反映两种图案中产生的位移，并且可以创建关于实际观察到的样本的图像的参考图案数据 。
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12.发明申请Pattern inspection system using image correction scheme with object-sensitive automatic mode switchability 有权模式检测系统采用具有对象敏感自动模式切换功能的图像校正方案公开(公告)号：US20070064993A1
公开(公告)日：2007-03-22
申请号：US11360580
申请日：2006-02-24
申请人： Junji Oaki , Shinji Sugihara
发明人： Junji Oaki , Shinji Sugihara
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G06T2207/30164
摘要： An image correction device for use in a pattern inspection apparatus is disclosed, which has automatic adaptability to variations in density of a pattern image of a workpiece being tested. The device is operable to identify a two-dimensional (2D) linear predictive model from the pattern image of interest and determine the amount of eccentricity of a centroid position of this model. This amount is then used to switch between a corrected pattern image due to the 2D linear prediction modeling and a corrected image that is interpolated by bicubic interpolation techniques. A pattern inspection method using the image correction technique is also disclosed.
摘要翻译： 公开了一种用于图案检查装置的图像校正装置，其具有对被测工件的图案图像的密度变化的自动适应性。 该装置可操作以从感兴趣的图案图像中识别二维（2D）线性预测模型，并确定该模型的质心位置的偏心量。 然后，该量用于在2D线性预测建模的校正图案图像与通过双三次插值技术进行内插的校正图像之间切换。 还公开了使用图像校正技术的图案检查方法。
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公开(公告)号：US07123345B2
公开(公告)日：2006-10-17
申请号：US10897120
申请日：2004-07-23
申请人： Shinji Sugihara , Riki Ogawa , Toru Tojo
发明人： Shinji Sugihara , Riki Ogawa , Toru Tojo
IPC分类号： G03B27/42
CPC分类号： G03F9/7088 , G03F7/70725 , G03F9/7003 , G03F9/7026 , G03F9/7034
摘要： An automatic focusing apparatus comprises a stage holding a substrate, an objective lens disposed facing the substrate surface, an illumination optics illuminating the substrate surface with a spotted light beam from an oblique direction, a photodetector detecting reflected light from the substrate surface, a position detection circuit detecting a vertical position of the substrate surface from an electric signal obtained from the photodetector to output a position signal, a correction circuit monitoring the position signal in real time and subtracting a surplus exceeding a signal change corresponding to a surface shape change of the substrate from the position signal, when a change amount per unit time of the position signal exceeds a predetermined level and outputting a corrected position signal, and a stage control circuit controlling the vertical position of the stage based on the corrected position signal.
摘要翻译： 一种自动对焦装置，包括：保持基板的台阶，与基板面对面配置的物镜;从倾斜方向用点状光束照射基板表面的照明光学元件;检测来自基板面的反射光的光电检测器;位置检测 检测从光电检测器获得的电信号的基板表面的垂直位置以输出位置信号，校正电路实时监控位置信号，并减去超过与基板的表面形状变化相对应的信号变化的剩余量 当位置信号的每单位时间的变化量超过预定值并输出校正的位置信号时，根据位置信号，以及基于校正位置信号控制舞台的垂直位置的舞台控制电路。
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公开(公告)号：US20060018530A1
公开(公告)日：2006-01-26
申请号：US11175360
申请日：2005-07-07
申请人： Junji Oaki , Shinji Sugihara , Ikunao Isomura , Toru Tojo
发明人： Junji Oaki , Shinji Sugihara , Ikunao Isomura , Toru Tojo
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G06T2207/30148
摘要： The present invention is to allow rapid detection of such a defect as buried in a pixel positional deviation, expansion/contraction noise or sensing noise on an image. A relationship between an inspection reference pattern image and a pattern image to be inspected is identified during inspection to construct a mathematical model obtained by absorbing (applying fitting on) a pixel positional deviation, expansion/contraction noise or sensing noise on an image, and a defect is detected by comparing a new inspection reference pattern image (model image) obtained by simulating the mathematical model and a pattern image to be inspected.
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公开(公告)号：US06883160B2
公开(公告)日：2005-04-19
申请号：US10252718
申请日：2002-09-24
CPC分类号： G03F1/26 , G03F1/84 , G06T7/001 , G06T2207/30148
摘要： A pattern inspection apparatus determines a difference of the measured dislocation of respective alignment marks of an opaque pattern and a phase shifting pattern (measurement difference), in addition to a difference between the both alignment mark positions in design (design difference). A difference between the measurement difference and the design difference is set as a difference in alignment mark position between the opaque pattern and the phase shifting pattern in a reference pattern which is later used in inspection. In this manner, by correcting one pattern data with respect to the other pattern data in the reference pattern, the displacement generated in the both patterns can be reflected, and the reference pattern data regarding an image of a sample which is actually observed can be created.
摘要翻译： 除了设计中的两个对准标记位置（设计差异）之外，图案检查装置还确定不透明图案的各个对准标记的测量位错与相移图案（测量差异）之间的差异。 测量差异和设计差异之间的差异被设置为稍后在检查中使用的参考图案中的不透明图案和相移图案之间的对准标记位置的差异。 以这种方式，通过相对于参考图案中的其他图案数据校正一个图案数据，可以反映两种图案中产生的位移，并且可以创建关于实际观察到的样本的图像的参考图案数据 。
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公开(公告)号：US5684371A
公开(公告)日：1997-11-04
申请号：US501188
申请日：1995-07-11
申请人： Jun Tarui , Shinji Sugihara , Akira Furukawa
发明人： Jun Tarui , Shinji Sugihara , Akira Furukawa
CPC分类号： H02H7/0838 , G01R31/42 , H02P7/04
摘要： A normal-direction mode which switches on first and fourth switches and in a mutually diagonal relationship of an H-type bridge circuit and switches off second and third switches also in a mutually diagonal relationship of the bridge circuit is executed for an on-duty time of an opening-degree command signal, and a reverse-direction mode which switches off the first and fourth switches and switches off the second and third switches is executed for an off-duty time of the opening-degree command signal. During normal operation, conduction of current to the H-type bridge circuit 70 and a coil is constantly performed irrespective of a degree of opening of a valve to be adjusted, and in a case where conduction is interrupted, it can be presumed that a broken wire has occurred in the H-type bridge circuit or coil, and determination of a broken wire can be made.
摘要翻译： 开启H型桥接电路的第一和第四开关以及相互斜对角关系的正常方式也在桥电路的相互对角线关系中断开第二和第三开关，以执行占空比时间 开启度指令信号的断开时间和开关次数指令信号的截止时间的逆向模式，并且关闭第一和第四开关并切断第二和第三开关的反向模式。 在正常操作期间，与H型桥式电路70和线圈的电流导通不断地进行调节的阀的打开程度，并且在导通被中断的情况下，可以推定为断开 在H型桥式电路或线圈中发生了线，并且可以确定断线。
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公开(公告)号：US09539542B2
公开(公告)日：2017-01-10
申请号：US13983022
申请日：2012-01-27
CPC分类号： B01D53/94 , B01D53/945 , B01D2255/1023 , B01D2255/1025 , B01D2255/2061 , B01D2255/2063 , B01D2255/407 , B01D2255/908 , B01J21/066 , B01J23/10 , B01J23/63 , B01J2523/3712 , C01G25/00 , F01N3/0864 , F01N3/101 , Y02T10/22
摘要： Provided is a catalyst for purifying an exhaust gas, the catalyst excelling in catalytic performance and oxygen storage capacity. The catalyst for purifying an exhaust gas is a catalyst for purifying an exhaust gas which includes a ceria-zirconia composite oxide having a pyrochlore structure and a ceria-zirconia composite oxide having a cubic crystal structure, wherein at least a part of the ceria-zirconia composite oxide is composited with the ceria-zirconia composite oxide.
摘要翻译： 提供了一种催化剂，该催化剂用于净化废气，该催化剂具有优异的催化性能和储氧能力。 用于净化废气的催化剂是用于净化废气的催化剂，其包括具有烧绿石结构的二氧化铈 - 氧化锆复合氧化物和具有立方晶体结构的二氧化铈 - 氧化锆复合氧化物，其中至少一部分氧化铈 - 氧化锆 复合氧化物与二氧化铈 - 氧化锆复合氧化物复合。
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公开(公告)号：US09530957B2
公开(公告)日：2016-12-27
申请号：US13446264
申请日：2012-04-13
申请人： Shinji Sugihara , Fumihito Koike , Yasushi Watanabe , Hideto Ando
发明人： Shinji Sugihara , Fumihito Koike , Yasushi Watanabe , Hideto Ando
CPC分类号： H01L43/08 , B82Y25/00 , G01R33/0206 , G01R33/093
摘要： A magnetic sensor includes magnetoresistive elements and a soft magnetic body. The magnetoresistive elements have multi layers including a magnetic layer and a nonmagnetic layer on a substrate, and exert a magnetoresistance effect. The soft magnetic body is electrically disconnected with the magnetoresistive elements, and converts a vertical magnetic field component from the outside into a magnetic field component in a horizontal direction so as to provide the magnetoresistive elements with the horizontally converted magnetic field component. The magnetoresistive elements have a pinned magnetic layer having a fixed magnetization direction and a free magnetic layer having a variable magnetization direction. The free magnetic layer is stacked on the pinned magnetic layer with a nonmagnetic layer interposed between the free magnetic layer and the pinned magnetic layer. The magnetization directions of the pinned magnetic layers of the magnetoresistive elements are the same direction. The magnetoresistive elements form a bridge circuit.
摘要翻译： 磁传感器包括磁阻元件和软磁体。 磁阻元件具有在基板上包括磁性层和非磁性层的多层，并施加磁阻效应。 软磁体与磁阻元件电气断开，并将来自外部的垂直磁场分量在水平方向上转换成磁场分量，从而为磁阻元件提供水平转换的磁场分量。 磁阻元件具有固定磁化方向的固定磁性层和具有可变磁化方向的自由磁性层。 自由磁性层被叠置在被钉扎的磁性层上，其中非磁性层介于自由磁性层和被钉扎的磁性层之间。 磁阻元件的钉扎磁性层的磁化方向是相同的方向。 磁阻元件形成桥接电路。
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公开(公告)号：US08850873B2
公开(公告)日：2014-10-07
申请号：US13546052
申请日：2012-07-11
CPC分类号： F02M25/08 , F02M25/0818 , F02M25/0827 , F02M25/089
摘要： A first determiner determines whether a pressure in a fuel tank is within a predetermined range when an ignition switch of an engine is on. A second determiner determines whether a valve allows or prohibits a communication between the fuel tank and a switch valve, when the first determiner determines that the pressure in the fuel tank is within the predetermined range. A control unit controls a pressure controlling portion based on a determination result of the first determiner and a determination result of the second determiner. A leak determiner determines whether the fuel tank has a leak of evaporated fuel based on a signal output from a first detector detecting a pressure in a detection passage and a signal output from a second detector detecting a pressure in the fuel tank.
摘要翻译： 当发动机的点火开关接通时，第一确定器确定燃料箱中的压力是否在预定范围内。 当第一确定器确定燃料箱中的压力在预定范围内时，第二确定器确定阀是否允许或禁止燃料箱和开关阀之间的连通。 控制单元基于第一确定器的确定结果和第二确定器的确定结果来控制压力控制部分。 泄漏确定器基于从检测到检测通道中的压力的第一检测器输出的信号和从检测到燃料箱中的压力的第二检测器输出的信号来确定燃料箱是否具有蒸发燃料的泄漏。
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公开(公告)号：US08800360B2
公开(公告)日：2014-08-12
申请号：US13210731
申请日：2011-08-16
CPC分类号： F04C18/344 , F02M25/0818 , F04C2240/81 , F04C2270/07 , F04C2270/18 , F04C2270/86
摘要： An ECU determines whether condensed water is present at a rotor and vanes based on an electric current, which flows in an electric motor that drives the rotor. When the condensed water is determined to be present, the ECU drives the motor for a predetermined time period. When the condensed water is determined to be absent, the ECU stores a pressure, which is sensed through a pressure sensor, as a first pressure. The ECU is adapted to sense an abnormality in a pump characteristic based on a value of the first pressure.
摘要翻译： ECU基于在驱动转子的电动机中流动的电流来确定冷凝水是否存在于转子和叶片上。 当冷凝水被确定存在时，ECU将马达驱动预定的时间段。 当冷凝水被确定为不存在时，ECU存储通过压力传感器感测的压力作为第一压力。 ECU适于基于第一压力的值感测泵特性中的异常。
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