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    Systems, methods and computer program products for detecting the position of a new alignment mark on a substrate based on fitting to sample alignment signals
    11.
    发明授权
    Systems, methods and computer program products for detecting the position of a new alignment mark on a substrate based on fitting to sample alignment signals 失效
    用于基于对样本对准信号的拟合来检测基板上新的对准标记的位置的系统，方法和计算机程序产品

    公开(公告)号：US6064486A

    公开(公告)日：2000-05-16

    申请号：US82851

    申请日：1998-05-21

    Applicant: Xun Chen ,  Amir A. Ghazanfarian ,  Mark A. McCord ,  R. Fabian W. Pease ,  Thomas Kailath

    Inventor： Xun Chen ,  Amir A. Ghazanfarian ,  Mark A. McCord ,  R. Fabian W. Pease ,  Thomas Kailath

    IPC: G03F9/00 ,  G01B9/02

    CPC classification number: G03F9/7092 ,  G03F9/70 ,  G03F9/7076

    Abstract: Systems, methods and computer program products detect a position of a new alignment mark on a substrate by producing an alignment signal model from sample alignment signals and fitting the new alignment signal to the alignment signal model. The alignment signal model may be produced from the multiple sample alignment signals using singular value decomposition, based on subspace decomposition of the alignment signals. By producing an alignment signal model from multiple sample alignment signals, asymmetries in the sample alignment marks and/or in the coatings that are fabricated on the sample alignment marks, may be taken into account when detecting the position of a new alignment mark.

    Abstract translation: 系统，方法和计算机程序产品通过从采样对准信号产生对准信号模型并将新的对准信号拟合到对准信号模型来检测基板上新对准标记的位置。 基于对准信号的子空间分解，可以使用奇异值分解从多个样本对准信号产生对准信号模型。 通过从多个样本对准信号产生对准信号模型，当检测到新的对准标记的位置时，可以考虑样品对准标记中的不对称性和/或在样品对准标记上制造的涂层中的不对称性。

    Mechanical stage support for a scanning tunneling microscope
    12.
    发明授权
    Mechanical stage support for a scanning tunneling microscope 失效
    扫描隧道显微镜的机械平台支撑

    公开(公告)号：US4925139A

    公开(公告)日：1990-05-15

    申请号：US345609

    申请日：1989-04-28

    Applicant: Mark A. McCord

    Inventor： Mark A. McCord

    IPC: G01B7/34 ,  F16M11/12 ,  G01B21/00 ,  G01N27/00 ,  G01Q10/02 ,  G01Q60/16 ,  G12B5/00

    CPC classification number: G01Q60/16 ,  B82Y35/00 ,  F16M11/043 ,  F16M11/18 ,  G01Q10/02 ,  Y10S248/913 ,  Y10S977/861

    Abstract: The present invention is an improved mechanism for the coarse adjustment of a scanning tunneling microscope stage. In the present invention the stage is moved by forces transmitted through rigid wire springs mounted on leaf spring assemblies which transmit the motion from rigidly mounted micrometer adjusting devices. It is intended that the coarse adjustment mechanism of the present invention will provide improved performance over coarse adjustment mechanisms presently available for STM applications.The present invention replaces separate sets of leaf springs for X and Y motion with a single set of four wire springs. This simplifies the design and increases the rigidity and stability by reducing the mechanical path length from the solid base to the X-Y-Z stage. The screw mechanisms are all directly connected to the rigid base. (This is made possible by the additional pairs of wire springs connected from the X and Y screws to the stage.) The following advantages are achieved: first, since the screw mechanisms do not move with the stage, driving mechanisms such as motors and gears can be simply connected; and, second, the rigidity and stability are again increased since the stage position is referenced directly to the base through all three screws rather than through intermediate support structures.

    Hydrodynamic human-powered propulsion mechanism
    13.
    发明授权
    Hydrodynamic human-powered propulsion mechanism 有权

    公开(公告)号：US10987546B2

    公开(公告)日：2021-04-27

    申请号：US16590188

    申请日：2019-10-01

    Applicant: Mark A. McCord

    Inventor： Mark A. McCord

    IPC: A63B31/08 ,  A63B31/11

    Abstract: One embodiment of improved swim fins consists of a right foot attachment (101) with an outer right blade (111) and an inner right blade (112) which is arranged such that it does not mechanically interfere with an inner left blade (113). The blades may include a pivot mechanism (220) that allows the blades to maintain an optimal angle of attack as the swimmer moves their legs up and down. In another embodiment, a right blade (1011) and a left blade (1013) are attached to the feet of a person who is propelled by the blades above the surface of the water as they pump their feet up and down, forming a human-powered hydrofoil. Other embodiments are described and shown.

    Automated inspection using cell-cell subtraction perpendicular to stage motion direction
    14.
    发明授权
    Automated inspection using cell-cell subtraction perpendicular to stage motion direction 有权
    使用垂直于舞台运动方向的细胞细胞减法进行自动检查

    公开(公告)号：US08106355B1

    公开(公告)日：2012-01-31

    申请号：US12163708

    申请日：2008-06-27

    Applicant: Jan Lauber ,  Mark A. McCord

    Inventor： Jan Lauber ,  Mark A. McCord

    IPC: G21K7/00

    CPC classification number: H01J37/28 ,  H01J2237/20285 ,  H01J2237/221 ,  H01J2237/2817

    Abstract: One embodiment relates to an apparatus for automated inspection of a semiconductor substrate. Processor-executable code is configured to control the stage electronics to move the substrate using a continuous motion in a substrate-translation direction and is configured to control the beam to scan it across the surface of the substrate and collect corresponding image data, scan lines of the scan being along a scan-line direction perpendicular to the substrate-translation direction. Processor-executable code is also configured to select from the image data two cells of the repeating pattern on the surface of the substrate, the two cells being displaced from each other by one or multiple cell heights in the scan-line direction. Finally, processor-executable code is configured to generate a difference image by subtracting image data from said two cells on a pixel-by-pixel basis. Other embodiments, aspects and features are also disclosed.

    Abstract translation: 一个实施例涉及用于半导体衬底的自动检查的设备。 处理器可执行代码被配置为控制平台电子设备以使其在基板平移方向上使用连续运动来移动基板，并且被配置成控制该波束跨越基板的表面进行扫描，并收集相应的图像数据，扫描线 扫描沿着垂直于衬底平移方向的扫描线方向。 处理器可执行代码还被配置为从图像数据中选择基板表面上的重复图案的两个单元，两个单元在扫描线方向上彼此移位一个或多个单元格高度。 最后，处理器可执行代码被配置为通过以逐个像素为基础从所述两个单元中减去图像数据来生成差分图像。 还公开了其它实施例，方面和特征。

    Portable scanning electron microscope
    16.
    发明申请
    Portable scanning electron microscope 审中-公开
    便携式扫描电子显微镜

    公开(公告)号：US20070145267A1

    公开(公告)日：2007-06-28

    申请号：US11450758

    申请日：2006-06-09

    Applicant: David L. Adler ,  Ady Levy ,  Mark A. McCord

    Inventor： David L. Adler ,  Ady Levy ,  Mark A. McCord

    IPC: G21K7/00

    CPC classification number: H01J37/06 ,  H01J37/04 ,  H01J37/228 ,  H01J37/28 ,  H01J2237/04924 ,  H01J2237/06316 ,  H01J2237/162 ,  H01J2237/2813

    Abstract: One embodiment relates to a portable scanning electron microscope (SEM) system. The system includes a portable SEM device including a CRT-type gun and deflectors to generate and scan the electron beam. Another embodiment relates to a portable SEM device which includes a CRT-type gun and deflectors to generate and scan the electron beam, a chamber through which the electron beam is scanned, and a detector in the chamber for detecting radiation emitted as a result of scanning the electron beam. Another embodiment relates to a method of obtaining an electron beam image of a surface of a bulk specimen where a portable SEM device is moved to the bulk specimen. Other embodiments and features are also disclosed.

    Abstract translation: 一个实施例涉及便携式扫描电子显微镜（SEM）系统。 该系统包括便携式SEM装置，其包括CRT型枪和用于产生和扫描电子束的偏转器。 另一个实施例涉及一种便携式SEM器件，其包括CRT型枪和用于产生和扫描电子束的偏转器，扫描电子束的腔室和用于检测作为扫描结果发射的辐射的腔室中的检测器 电子束。 另一实施例涉及一种获得便携式SEM装置移动到散装试样的散装试样的表面的电子束图像的方法。 还公开了其它实施例和特征。

    Method and apparatus for beam current fluctuation correction
    17.
    发明授权
    Method and apparatus for beam current fluctuation correction 有权
    射束电流波动校正的方法和装置

    公开(公告)号：US07091486B1

    公开(公告)日：2006-08-15

    申请号：US10938841

    申请日：2004-09-09

    Applicant: Mark A. McCord ,  Alan D. Brodie

    Inventor： Mark A. McCord ,  Alan D. Brodie

    IPC: G01N23/00 ,  G21K7/00

    CPC classification number: G01N23/04 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/09 ,  H01J37/24 ,  H01J37/244 ,  H01J37/28 ,  H01J37/3174

    Abstract: One embodiment disclosed relates to an electron beam imaging apparatus. An electron source is configured to generate an electron beam, and a beam-limiting aperture is configured to block a portion of the electron beam and to allow transmission of another portion of the electron beam through the aperture. A first detector is configured to detect scattered electrons emitted by the aperture due to the blocked portion of the electron beam. The imaging apparatus may also include a second detector configured to detect scattered electrons emitted by the sample due to impingement of the transmitted portion of the electron beam. A gain control device may also be included to adjust a gain of a detected signal derived from the second detector using a control signal derived from the first detector. Another embodiment disclosed relates to an electron beam lithography apparatus. The lithography apparatus may adjust a pixel dwell time based on a control signal derived from the scattered electrons emitted by the aperture.

    Abstract translation: 公开的一个实施例涉及一种电子束成像装置。 电子源被配置为产生电子束，并且束限制孔被配置为阻挡电子束的一部分并且允许电子束的另一部分通过孔传播。 第一检测器被配置为检测由于电子束的阻挡部分而由孔发射的散射电子。 成像装置还可以包括第二检测器，其被配置为检测由于电子束的透射部分的撞击而由样品发射的散射电子。 还可以包括增益控制装置，以使用从第一检测器导出的控制信号来调整从第二检测器导出的检测信号的增益。 所公开的另一实施例涉及电子束光刻设备。 光刻设备可以基于从孔径发射的散射电子得到的控制信号来调整像素驻留时间。

    X-ray mask containing a cantilevered tip for gap control and alignment
    19.
    发明授权
    X-ray mask containing a cantilevered tip for gap control and alignment 失效
    包含用于间隙控制和对准的悬臂尖端的X射线掩模

    公开(公告)号：US5150392A

    公开(公告)日：1992-09-22

    申请号：US756642

    申请日：1991-09-09

    Applicant: Fritz J. Hohn ,  Mark A. McCord

    Inventor： Fritz J. Hohn ,  Mark A. McCord

    IPC: G01Q10/00 ,  G01Q10/04 ,  G01Q60/04 ,  G01Q60/10 ,  G01Q80/00 ,  G03F1/22 ,  G03F9/00 ,  G05D3/00 ,  H01J37/304 ,  H01L21/027

    CPC classification number: G01Q60/04 ,  B82Y35/00 ,  G03F1/22 ,  G03F9/703 ,  G03F9/7061 ,  H01J37/3045 ,  B82Y10/00 ,  G01Q80/00

    Abstract: An X-ray mask membrane 12 is discussed wherein a cantilever and tip portion such as used on an atomic force or scanning tunneling microscope are fabricated directly as part of the mask. The mask is located over a wafer and the vertical (z) motion of the tip with respect to the wafer is achieved with a piezoelectric device which is mounted on a movable support above the cantilever. Piezoelectric device may be a tube having an electrode divided into quadrants so that the end of the tube could be positioned in three dimensions to allow for alignment of the end of the tube to the cantilever tip. X and Y motion of the tip and the mask membrane relative to the wafer is achieved by mounting the wafer on an x-y stage driven by piezoelectric or other transducers. The wafer includes a raised alignment mask on its upper surface. The wafer, mask membrane, and z piezoelectric tube are held rigidly but adjustably with respect to each other by a mechanical fixture. The z piezoelectric tube is lowered until it touches the cantilever; it is then lowered further by the designed gap spacing, deflecting the cantilever downward. The wafer is then raised until it is detected by the tip on the cantilever, either by sensing a tunneling current (STM) or a force (AFM). The wafer is now at the correct z gap setting, and is scanned back and forth in the x and y directions until the location of the alignment mark is determined by the cantilever tip following the contours of the alignment mark, thus setting the proper alignment between the wafer and the mask in the x, y direction.

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