公开(公告)号：US5599394A

公开(公告)日：1997-02-04

申请号：US312733

申请日：1994-09-27

申请人： Manabu Yabe ,  Masaru Kitagawa ,  Takafumi Ohki ,  Mitsuhiro Fujita

发明人： Manabu Yabe ,  Masaru Kitagawa ,  Takafumi Ohki ,  Mitsuhiro Fujita

IPC分类号： B05C5/00 ,  B05C11/08 ,  B05C11/10 ,  F04B43/073 ,  H01L21/00 ,  H01L21/316

CPC分类号： H01L21/67011 ,  B05C11/08 ,  B05C11/1002 ,  F04B43/0733

摘要： A dispensing apparatus for delivering a silica coating solution in a fixed quantity from a liquid container to a surface of a substrate to form a silica film thereon. The liquid container storing the silica coating solution is connected to a diaphragm pump through a suction pipe. The diaphragm pump is connected to a nozzle through a delivery pipe. The coating solution in the liquid container is supplied to the nozzle by sucking and delivering action of the diaphragm pump. The coating solution is discharged from the nozzle to a surface of a substrate supported by a spin chuck of a spin coating apparatus.

摘要翻译： 一种用于将固定量的二氧化硅涂层溶液从液体容器输送到基底表面以在其上形成二氧化硅膜的分配装置。 储存二氧化硅涂布液的液体容器通过抽吸管连接到隔膜泵。 隔膜泵通过输送管连接到喷嘴。 液体容器中的涂布液通过隔膜泵的吸引和输送动作被供给到喷嘴。 涂布溶液从喷嘴排出到由旋涂装置的旋转卡盘支撑的基板的表面上。

公开(公告)号：US4569717A

公开(公告)日：1986-02-11

申请号：US611420

申请日：1984-05-17

申请人： Nobutoshi Ohgami ,  Masaru Kitagawa ,  Hisao Nishizawa ,  Masakazu Saita

发明人： Nobutoshi Ohgami ,  Masaru Kitagawa ,  Hisao Nishizawa ,  Masakazu Saita

IPC分类号： C23F4/00 ,  G03F1/68 ,  G03F1/84 ,  G01T1/185 ,  H01L21/306

CPC分类号： G03F1/68 ,  C23F4/00 ,  G03F1/84

摘要： In a method of surface treatment irradiating a part of a plate to be treated with light flux, detecting a quantity of transmitted light or reflected light on the plate corresponding to the light flux, detecting an end point of surface treatment based on the variation in the detected signal level the combination with the method of a step of detecting whether the detected signal level exceeds a predetermined target level within a predetermined period of time, a step of repeatedly setting up a new target level so long as the detected level is found exceeding the predetermined target level, and a step of determining the end point of the surface treatment at the moment when the detected signal level is found not exceeding the new target level.

摘要翻译： 在表面处理的方法中，用光束照射被处理板的一部分，检测对应于光通量的板上的透射光或反射光的量，基于该光束的变化来检测表面处理的终点 检测信号电平与在预定时间段内检测检测信号电平是否超过预定目标电平的步骤的方法的组合;只要发现检测到的电平超过了检测到的电平，则重复设置新的目标电平的步骤 预定目标水平，以及当发现检测到的信号电平不超过新的目标电平时确定表面处理的终点的步骤。

公开(公告)号：US20070059828A1

公开(公告)日：2007-03-15

申请号：US10578283

申请日：2004-11-05

申请人： Tetsuji Yamaoka ,  Yutaka Tokiwa ,  Masaru Kitagawa

发明人： Tetsuji Yamaoka ,  Yutaka Tokiwa ,  Masaru Kitagawa

IPC分类号： C12N15/00 ,  C08G63/91

CPC分类号： A61K31/7088 ,  A61K47/34 ,  A61K47/61 ,  C08F251/00 ,  C12N15/87

摘要： A carrier for nucleic acid molecule delivery formed from a saccharified copolymer comprising repeating unit (A) having a cationic group, saccharified repeating unit (B). There is further provided a carrier for nucleic acid molecule delivery formed from a saccharified copolymer comprising, in addition to the repeating units (A) and (B), repeating unit (C) having a hydrophobic substituent.

摘要翻译： 由包含具有阳离子基团的重复单元（A），糖化重复单元（B）的糖化共聚物形成的核酸分子递送载体。 还提供了由糖化共聚物形成的用于核酸分子递送的载体，除了具有疏水性取代基的重复单元（A）和（B））外，还包含重复单元（C）。

公开(公告)号：US5678116A

公开(公告)日：1997-10-14

申请号：US417133

申请日：1995-04-04

申请人： Kenji Sugimoto ,  Hiroaki Sugimoto ,  Masaru Kitagawa

发明人： Kenji Sugimoto ,  Hiroaki Sugimoto ,  Masaru Kitagawa

IPC分类号： G03F7/30 ,  G03F7/40 ,  H01L21/00 ,  G03D3/02 ,  G03D5/00

CPC分类号： H01L21/67051 ,  G03F7/3021 ,  G03F7/40

摘要： A method of processing a substrate includes the steps of developing a substrate having a photo-sensitive resin film formed on its surface; washing the substrate by supplying washing liquid to the surface of the substrate, and rotating the substrate on a perpendicular axis in a horizontal plane and thereby drying the surface of the substrate, and atmosphere in which the substrate is placed is adjusted to be at a pressure lower than the atmospheric pressure in the step of drying the surface of the substrate. Instead of or in addition to this, washing liquid in which prescribed gas is dissolved may be used in the step of washing the substrate. In this case, in the step of drying the surface of the substrate, washing liquid supplied to the surface of the substrate is preferably supersaturated with gas. A substrate processing apparatus including a controller for implementing such a method is also disclosed.

摘要翻译： 一种处理衬底的方法包括以下步骤：在其表面上形成具有光敏树脂膜的衬底; 通过向基板的表面供给洗涤液来洗涤基板，并使基板在水平面上的垂直轴上旋转，从而干燥基板的表面，并且将其中放置基板的气氛调节到压力 低于在干燥基材表面的步骤中的大气压。 代替或除此之外，在洗涤基底的步骤中可以使用其中溶解有规定气体的洗涤液。 在这种情况下，在干燥基板的表面的步骤中，供给到基板表面的洗涤液优选用气体过饱和。 还公开了一种包括用于实现这种方法的控制器的衬底处理设备。

公开(公告)号：US5601645A

公开(公告)日：1997-02-11

申请号：US326525

申请日：1994-10-20

申请人： Masahiro Nonomura ,  Masaru Kitagawa

发明人： Masahiro Nonomura ,  Masaru Kitagawa

IPC分类号： H01L21/683 ,  B05C11/08 ,  H01L21/00 ,  H01L21/027 ,  H01L21/304 ,  H01L21/306 ,  B05C11/02

CPC分类号： H01L21/6715 ,  B05C11/08

摘要： A substrate holder for use in a substrate spin treating apparatus carries out a desired treatment of a substrate by supplying treating liquid to a surface of the substrate while spinning the substrate. The substrate holder includes a turntable rotatable in a horizontal plane and a motor for rotating the turntable. Support pins are arranged on the turntable for supporting the substrate in a horizontal posture above and spaced from a surface of the turntable. A vertically movable disk of a size at least corresponding to the substrate is disposed between the turntable and the substrate being supported by the support pins. A raising and lowering device is provided for lowering the vertically movable disk to a lower position adjacent the turntable when the turntable is at rest, and raising the vertically movable disk to an upper position adjacent a substrate on the support pins when the turntable is in rotation to effect the treatment.

摘要翻译： 用于基板旋转处理装置的基板保持器通过在旋转基板的同时将处理液体供给到基板的表面来进行基板的期望处理。 基板保持器包括可在水平面中旋转的转台和用于旋转转盘的马达。 支撑销布置在转台上，用于以水平姿态支撑基板，并且在转台的表面上方并与转台的表面间隔开。 至少对应于基板的尺寸的可垂直移动的盘被设置在由支撑销支撑的转盘和基板之间。 提供升降装置，用于当转盘静止时将可垂直移动的盘降低到与转台相邻的下部位置，并且当转盘旋转时将升降装置升高到与支撑销上的基板相邻的上部位置 进行治疗。

公开(公告)号：US4693211A

公开(公告)日：1987-09-15

申请号：US810425

申请日：1985-12-18

申请人： Nobutoshi Ogami ,  Masaru Kitagawa

发明人： Nobutoshi Ogami ,  Masaru Kitagawa

IPC分类号： H01L21/027 ,  B05C11/00 ,  C23C16/44 ,  C23C16/455 ,  C23C16/54 ,  G03F7/26 ,  H01L21/461 ,  C23C16/00

CPC分类号： C23C16/45565 ,  C23C16/455 ,  C23C16/45517 ,  C23C16/54

摘要： A surface treatment apparatus is composed of a supporting die for holding a substrate thereon to heat or cool the substrate; a cover capable of advancing close to the supporting die or into point-to-point contact with the supporting die to define a treatment space over the entire upper surface of the substrate on the supporting die, said cover defining a hole for the introduction of a surface treatment agent into the treatment space; and an evacuation chamber provided on the peripheral side wall of the supporting die, whereby the surface treatment agent is allowed to flow out from the treatment space into the evacuation chamber. No substantial conduction of heat takes place from the supporting die by way of the cover. The thermal distribution of the supporting die is thus kept extremely uniform, whereby each surface treatment can be conducted uniformly. Furthermore, owing to the provision of the evacuation chamber around the supporting die, the vaporized surface treatment agent is not allowed to escape into the room. The apparatus is effective in applying an adhesion-enhancing agent to a substrate so that the adhesion of a photoresist to the substrate is facilitated.

摘要翻译： 表面处理装置由用于在其上保持基板以加热或冷却基板的支撑模具构成; 能够靠近所述支撑模具前进或与所述支撑模具进行点对点接触的盖子，以在所述支撑模具上的所述基板的整个上表面上限定处理空间，所述盖子限定用于引入 表面处理剂进入处理空间; 以及设置在支撑模具的周边侧壁上的排气室，由此使表面处理剂从处理空间流出到排气室内。 没有通过盖子从支撑模具发生实质的热传导。 因此，支撑模具的热分布保持非常均匀，由此可以均匀地进行各表面处理。 此外，由于在支撑模具周围设置了排气室，所以不允许蒸发的表面处理剂逃逸到房间中。 该设备在将粘附增强剂施加到基底上是有效的，使得光致抗蚀剂对基底的粘合变得容易。

公开(公告)号：US09181436B2

公开(公告)日：2015-11-10

申请号：US13498200

申请日：2010-09-27

申请人： Masaru Kitagawa ,  Kenji Nishimoto ,  Takumi Tanaka

发明人： Masaru Kitagawa ,  Kenji Nishimoto ,  Takumi Tanaka

IPC分类号： A61K8/02 ,  C09C3/10 ,  A61K8/60 ,  A61Q1/02 ,  A61Q1/06 ,  A61Q17/04

CPC分类号： C09C3/10 ,  A61K8/0241 ,  A61K8/602 ,  A61K2800/612 ,  A61Q1/02 ,  A61Q1/06 ,  A61Q17/04 ,  C09C1/028 ,  C09C1/24 ,  C09C1/3669 ,  C09C1/405 ,  C09C3/08

摘要： To provide cosmetic pigments that are human-body friendly with good skin adhesion and that provide good feeling, their production method, and cosmetics containing such cosmetic pigments which provide fresh and enriched feeling accordingly.Pigment surfaces are coated with mannosylerythritol lipid, which is glucolipids, consisting of mannose, sugar alcohol and a fatty acid as shown in the general expression (1) below: (Note: In the general expression, R1 and R2 denote aliphatic acyl group with carbon numbers 6 through 20, which can be either same or different. R3 and R4 denote hydrogen or acetyl group, which can be either same or different. n denotes an integer in the range of 2 to 4.)

摘要翻译： 为了提供具有良好的皮肤粘合性和提供良好的感觉，它们的制造方法的人体友好的化妆品颜料和含有这样的化妆品颜料的化妆品颜料，其相应地提供了新鲜和丰富的感觉。 如以下通式（1）所示，由甘油糖，糖醇和脂肪酸组成的甘油糖醇脂类，即甘油糖醇脂，其中包括甘油糖醇脂质（注意：通式中，R 1和R 2表示脂肪族酰基与碳 数字6至20可以相同或不同，R3和R4表示氢或乙酰基，其可以相同或不同，n表示2至4的整数。）

公开(公告)号：US20120183592A1

公开(公告)日：2012-07-19

申请号：US13498200

申请日：2010-09-27

申请人： Masaru Kitagawa ,  Kenji Nishimoto ,  Takumi Tanaka

发明人： Masaru Kitagawa ,  Kenji Nishimoto ,  Takumi Tanaka

IPC分类号： A61K8/02 ,  B05D7/24 ,  A61Q1/04 ,  A61Q1/12 ,  A61Q1/02 ,  A61K8/60 ,  A61Q17/04

CPC分类号： C09C3/10 ,  A61K8/0241 ,  A61K8/602 ,  A61K2800/612 ,  A61Q1/02 ,  A61Q1/06 ,  A61Q17/04 ,  C09C1/028 ,  C09C1/24 ,  C09C1/3669 ,  C09C1/405 ,  C09C3/08

摘要： To provide cosmetic pigments that are human-body friendly with good skin adhesion and that provide good feeling, their production method, and cosmetics containing such cosmetic pigments which provide fresh and enriched feeling accordingly.Pigment surfaces are coated with mannosylerythritol lipid, which is glucolipids, consisting of mannose, sugar alcohol and a fatty acid as shown in the general expression (1) below: (Note: In the general expression, R1 and R2 denote aliphatic acyl group with carbon numbers 6 through 20, which can be either same or different. R3 and R4 denote hydrogen or acetyl group, which can be either same or different. n denotes an integer in the range of 2 to 4.)

摘要翻译： 为了提供具有良好的皮肤粘合性和提供良好的感觉，它们的制造方法的人体友好的化妆品颜料和含有这样的化妆品颜料的化妆品颜料，其相应地提供了新鲜和丰富的感觉。 如以下通式（1）所示，由甘油糖，糖醇和脂肪酸组成的甘油糖醇脂类，即甘油糖醇脂，其中包括甘油糖醇脂质（注意：通式中，R 1和R 2表示脂肪族酰基与碳 数字6至20可以相同或不同，R3和R4表示氢或乙酰基，其可以相同或不同，n表示2至4的整数。）

公开(公告)号：US07754864B2

公开(公告)日：2010-07-13

申请号：US10530789

申请日：2003-10-10

申请人： Yutaka Tokiwa ,  Masaru Kitagawa ,  Kenji Yoshino ,  Shusaku Yanagidani ,  Takao Raku ,  Tetsuzo Totani ,  Hiromi Shimakawa

发明人： Yutaka Tokiwa ,  Masaru Kitagawa ,  Kenji Yoshino ,  Shusaku Yanagidani ,  Takao Raku ,  Tetsuzo Totani ,  Hiromi Shimakawa

IPC分类号： C07G3/00 ,  C07H15/00 ,  C07H17/00 ,  A61K31/70 ,  A01N43/04 ,  A61K8/18 ,  A61Q5/08 ,  A61Q19/02

CPC分类号： C07H15/203 ,  A61K8/602 ,  A61K31/201 ,  A61K31/375 ,  A61K31/7024 ,  A61K31/7034 ,  A61K2800/782 ,  A61Q5/08 ,  A61Q19/02 ,  A61Q19/08 ,  C07H13/06 ,  C12P19/46

摘要： Disclosed is a tyrosinase activity controlling agent comprising, as an active ingredient, a compound that has tyrosinase inhibiting or promoting activity, an external preparation comprising the controlling agent, and a process for producing the compound.

摘要翻译： 公开了一种酪氨酸酶活性控制剂，其包含具有酪氨酸酶抑制或促进活性的化合物作为活性成分，包含所述控制剂的外用制剂及其制备方法。

公开(公告)号：US06598571B1

公开(公告)日：2003-07-29

申请号：US10127757

申请日：2002-04-23

申请人： Kazuyoshi Harimoto ,  Yoshiyasu Nakano ,  Masaru Kitagawa ,  Nobuhiro Kasahara

发明人： Kazuyoshi Harimoto ,  Yoshiyasu Nakano ,  Masaru Kitagawa ,  Nobuhiro Kasahara

IPC分类号： F01L118

CPC分类号： F01L1/18 ,  F01L1/185 ,  F01L2105/02 ,  F01L2820/01 ,  F16C2240/40 ,  F16C2240/42 ,  Y10T74/20882

摘要： The cam follower with roller according to the present invention includes a cam follower body having a roller supporting portion integrally formed therein, a supporting shaft of which both ends are fixed to the roller supporting portion, and a roller rotatably supported to the supporting shaft with a plurality of needle rollers interposed. At least one of the supporting shaft, needle roller and roller is formed of heat-resisting steel, and the both ends of the supporting shaft is caulked to be fixed to the supporting portion.

摘要翻译： 根据本发明的具有滚子的凸轮从动件包括：凸轮随动体，其具有一体地形成在其中的辊支撑部，支撑轴的两端固定到辊支撑部;以及辊，可旋转地支撑在支撑轴上， 插入多个滚针。 支撑轴，滚针和滚子中的至少一个由耐热钢形成，并且支撑轴的两端被铆接固定到支撑部。