Method for producing dielectric film, method for producing piezoelectric element, method for producing liquid-jet head, dielectric film, piezoelectric element, and liquid-jet apparatus
    11.
    发明授权
    Method for producing dielectric film, method for producing piezoelectric element, method for producing liquid-jet head, dielectric film, piezoelectric element, and liquid-jet apparatus 有权
    电介质膜的制造方法,压电元件的制造方法,液体喷射头的制造方法,电介质膜,压电元件,液体喷射装置

    公开(公告)号:US07757362B2

    公开(公告)日:2010-07-20

    申请号:US12167930

    申请日:2008-07-03

    IPC分类号: H01L41/22 H04R17/00

    摘要: A method for producing a dielectric film, comprising: a coating step of coating a colloidal solution containing an organometallic compound containing a metal constituting a dielectric film containing at least a lead component to form a dielectric precursor film; a drying step of drying the dielectric precursor film; a degreasing step of degreasing the dielectric precursor film; and a firing step of firing the dielectric precursor film to form a dielectric film, and wherein the drying step includes a first drying step of heating the dielectric precursor film to a temperature lower than the boiling point of a solvent, which is a main solvent of the material, and holding the dielectric precursor film at the temperature for a certain period of time to dry the dielectric precursor film, and a second drying step of drying the dielectric precursor film at a temperature in the range of 140° C., to 170° C., the degreasing step is performed at a degreasing temperature of 350° C. to 450° C. and at a heating-up rate of 15 [° C./sec] or higher, and the firing step is performed at a heating-up rate of 100 [° C./sec] to 150 [° C./sec].

    摘要翻译: 一种电介质膜的制造方法,其特征在于,包括:涂布包含含有构成含有至少含有铅成分的电介质膜的金属的有机金属化合物的胶体溶液以形成电介质前体膜的涂布步骤; 干燥所述电介质前体膜的干燥步骤; 脱脂步骤,使所述电介质前体膜脱脂; 以及烧制电介质前体膜以形成电介质膜的烧制步骤,其中干燥步骤包括将电介质前体膜加热至低于作为主要溶剂的溶剂的沸点的温度的第一干燥步骤 并且将介电前体膜在该温度下保持一定时间以干燥电介质前体膜;以及第二干燥步骤,在140℃的温度下将电介质前体膜干燥至170℃ ℃,脱脂步骤在350℃至450℃的脱脂温度和15℃/秒以上的加热速率下进行,并且烧成步骤在 升温速度为100 [℃/秒]至150℃/秒。

    Piezoelectric device and liquid jet head
    12.
    发明申请
    Piezoelectric device and liquid jet head 有权
    压电元件和液体喷头

    公开(公告)号:US20080018716A1

    公开(公告)日:2008-01-24

    申请号:US11879628

    申请日:2007-07-18

    IPC分类号: B41J2/045 H01L41/187

    摘要: A piezoelectric device including: a substrate; a lower electrode formed over the substrate; a piezoelectric layer formed over the lower electrode and including lead zirconate titanate; and an upper electrode formed over the piezoelectric layer, the lead zirconate titanate having a half-width of a peak of a (100) plane measured by an X-ray diffraction rocking curve method of 10 degrees or more and 25 degrees or less.

    摘要翻译: 一种压电装置,包括:基板; 形成在所述基板上的下电极; 形成在下电极上并包括锆钛酸铅的压电层; 和形成在压电层上的上电极,通过X射线衍射摇摆曲线法测量的具有(100)面的峰的半值宽度为10度以上且25度以下的钛酸铅钛酸铅。

    Actuator device, liquid-jet head and liquid-jet apparatus
    13.
    发明申请
    Actuator device, liquid-jet head and liquid-jet apparatus 有权
    执行器装置,喷液头和液体喷射装置

    公开(公告)号:US20080012911A1

    公开(公告)日:2008-01-17

    申请号:US11730644

    申请日:2007-04-03

    IPC分类号: B41J2/045

    摘要: Disclosed is an actuator device which includes a vibration plate and a piezoelectric element. The vibration plate includes an elastic film which is made of silicon oxide (SiO2) and which is formed on a substrate while the piezoelectric element is formed on the vibration plate and including a lower electrode, a piezoelectric layer and an upper electrode. The vibration plate has such a stress as to give a tensile stress between 300 MPa and 500 MPa, inclusive, to the piezoelectric element that is in a state of being displaced.

    摘要翻译: 公开了一种致动器装置,其包括振动板和压电元件。 振动板包括由氧化硅(SiO 2)构成的弹性膜,并且形成在基板上,同时压电元件形成在振动板上并且包括下电极,压电层 和上电极。 该振动板具有这样的应力,即对处于移动状态的压电元件产生在300MPa至500MPa之间的拉伸应力。

    Dielectric film and piezoelectric element
    14.
    发明授权
    Dielectric film and piezoelectric element 有权
    电介质膜和压电元件

    公开(公告)号:US07819508B2

    公开(公告)日:2010-10-26

    申请号:US11392757

    申请日:2006-03-30

    IPC分类号: B41J2/45 H01L41/08 C04B35/00

    摘要: A method for producing a dielectric film, comprising: a coating step of coating a colloidal solution containing an organometallic compound containing a metal constituting a dielectric film containing at least a lead component to form a dielectric precursor film; a drying step of drying the dielectric precursor film; a degreasing step of degreasing the dielectric precursor film; and a sintering step of sintering the dielectric precursor film to form a dielectric film, and wherein the drying step includes a first drying step of heating the dielectric precursor film to a temperature lower than the boiling point of a solvent, which is a main solvent of the material, and holding the dielectric precursor film at the temperature for a certain period of time to dry the dielectric precursor film, and a second drying step of drying the dielectric precursor film at a temperature in the range of 140° C. to 170° C., the degreasing step is performed at a degreasing temperature of 350° C. to 450° C. and at a heating-up rate of 15 [° C./sec] or higher, and the sintering step is performed at a heating-up rate of 100 [° C./sec] to 150 [° C./sec].

    摘要翻译: 一种电介质膜的制造方法,其特征在于,包括:涂布包含含有构成含有至少含有铅成分的电介质膜的金属的有机金属化合物的胶体溶液以形成电介质前体膜的涂布步骤; 干燥所述电介质前体膜的干燥步骤; 脱脂步骤,使所述电介质前体膜脱脂; 以及烧结所述电介质前体膜以形成电介质膜的烧结步骤,其中所述干燥步骤包括将所述电介质前体膜加热到低于作为主要溶剂的溶剂的沸点的温度的第一干燥步骤 并将电介质前体膜在该温度下保持一定时间以干燥电介质前体膜;以及第二干燥步骤,在140℃至170℃的温度下干燥该电介质前体膜 在脱脂温度为350℃〜450℃,升温速度为15℃/秒以上的条件下进行脱脂工序,烧结工序在加热 升速率为100 [℃/秒]至150℃/秒。

    Actuator device, liquid-jet head and liquid-jet apparatus
    15.
    发明授权
    Actuator device, liquid-jet head and liquid-jet apparatus 有权
    执行器装置,喷液头和液体喷射装置

    公开(公告)号:US07740345B2

    公开(公告)日:2010-06-22

    申请号:US11730644

    申请日:2007-04-03

    IPC分类号: B41J2/045

    摘要: Disclosed is an actuator device which includes a vibration plate and a piezoelectric element. The vibration plate includes an elastic film which is made of silicon oxide (SiO2) and which is formed on a substrate while the piezoelectric element is formed on the vibration plate and including a lower electrode, a piezoelectric layer and an upper electrode. The vibration plate has such a stress as to give a tensile stress between 300 MPa and 500 MPa, inclusive, to the piezoelectric element that is in a state of being displaced.

    摘要翻译: 公开了一种致动器装置,其包括振动板和压电元件。 振动板包括由氧化硅(SiO 2)制成的弹性膜,并且形成在基板上,同时压电元件形成在振动板上并且包括下电极,压电层和上电极。 该振动板具有这样的应力,即对处于移动状态的压电元件产生在300MPa至500MPa之间的拉伸应力。

    Piezoelectric element, actuator device, liquid-jet head and liquid-jet apparatus
    16.
    发明授权
    Piezoelectric element, actuator device, liquid-jet head and liquid-jet apparatus 有权
    压电元件,致动器装置,喷液头和液体喷射装置

    公开(公告)号:US07651199B2

    公开(公告)日:2010-01-26

    申请号:US11390222

    申请日:2006-03-28

    IPC分类号: B41J2/045 H01L41/00 H02N2/00

    摘要: Provided are a piezoelectric element, an actuator device, a liquid-jet head and a liquid-jet apparatus which exhibit excellent displacement characteristics; and the piezoelectric element is configured of a lower electrode, a piezoelectric layer and an upper electrode, in which piezoelectric element the proportion of the (100) planes present in the face surface of the piezoelectric layer to the (100), (110) and (111) planes present therein is not less than 70%, and in which piezoelectric element the proportion of the (100), (110) and (210) planes present in the vertical surface orthogonal to the face surface of the piezoelectric layer to the (100), (110), (210), (111) and (211) planes present therein is not less than 80%.

    摘要翻译: 提供具有优异的位移特性的压电元件,致动器装置,液体喷射头和液体喷射装置; 并且压电元件由下电极,压电层和上电极构成,其中压电元件在压电层的表面中存在的(100)面的比例与(100),(110)和 其中存在的(111)面不小于70%,并且在压电元件中,垂直于压电层的表面的垂直表面中存在的(100),(110)和(210)面的比例与 (100),(110),(210),(111)和(211)面不少于80%。

    Liquid ejecting head, liquid ejecting apparatus, and actuator
    19.
    发明授权
    Liquid ejecting head, liquid ejecting apparatus, and actuator 有权
    液体喷头,液体喷射装置和致动器

    公开(公告)号:US08459767B2

    公开(公告)日:2013-06-11

    申请号:US12757519

    申请日:2010-04-09

    申请人: Koji Sumi

    发明人: Koji Sumi

    IPC分类号: B41J29/38

    摘要: A liquid ejecting head includes a flow path forming substrate in which pressure generation chambers are formed. The pressure generation chambers communicate with nozzles that eject liquid droplets. Piezoelectric elements are positioned on the flow path forming substrate to generate pressure changes in the pressure generation chambers. Each piezoelectric element includes a piezoelectric body layer, a first electrode on one side of the piezoelectric body layer, and a second electrode on the opposite side of the piezoelectric body layer. The piezoelectric element is driven in a condition that the relationship between minimum voltage Vmin, and maximum voltage Vmax, which are applied to the piezoelectric element, and peak voltage Vo satisfies the expression, Vmin

    摘要翻译: 液体喷射头包括形成有压力产生室的流路形成基板。 压力产生室与喷射液滴的喷嘴连通。 压电元件位于流路形成基板上,以产生压力产生室中的压力变化。 每个压电元件包括​​压电体层,压电体层一侧的第一电极和与压电体层相对的第二电极。 压电元件在施加到压电元件的最小电压Vmin和最大电压Vmax之间的关系以及峰值电压Vo满足Vmin