Enhanced photon detection device with biased deep trench isolation
    12.
    发明授权
    Enhanced photon detection device with biased deep trench isolation 有权
    具有偏置深沟槽隔离的增强型光子检测器件

    公开(公告)号:US09160949B2

    公开(公告)日:2015-10-13

    申请号:US13854446

    申请日:2013-04-01

    Abstract: A photon detection device includes a photodiode having a planar junction disposed in a first region of semiconductor material. A deep trench isolation (DTI) structure is disposed in the semiconductor material. The DTI structure isolates the first region of the semiconductor material on one side of the DTI structure from a second region of the semiconductor material on an other side of the DTI structure. The DTI structure includes a dielectric layer lining an inside surface of the DTI structure and doped semiconductor material disposed over the dielectric layer inside the DTI structure. The doped semiconductor material disposed inside the DTI structure is coupled to a bias voltage to isolate the photodiode in the first region of the semiconductor material from the second region of the semiconductor material.

    Abstract translation: 光子检测装置包括具有布置在半导体材料的第一区域中的平面结的光电二极管。 深沟槽隔离(DTI)结构设置在半导体材料中。 DTI结构将DTI结构的一侧上的半导体材料的第一区域与DTI结构的另一侧上的半导体材料的第二区域隔离。 DTI结构包括在DTI结构的内表面内衬的电介质层和设置在DTI结构内的电介质层上的掺杂半导体材料。 设置在DTI结构内的掺杂半导体材料耦合到偏置电压,以将半导体材料的第一区域中的光电二极管与半导体材料的第二区域隔离。

    ENHANCED PHOTON DETECTION DEVICE WITH BIASED DEEP TRENCH ISOLATION
    13.
    发明申请
    ENHANCED PHOTON DETECTION DEVICE WITH BIASED DEEP TRENCH ISOLATION 有权
    增强光子检测装置与偏心深度分离隔离

    公开(公告)号:US20140291481A1

    公开(公告)日:2014-10-02

    申请号:US13854446

    申请日:2013-04-01

    Abstract: A photon detection device includes a photodiode having a planar junction disposed in a first region of semiconductor material. A deep trench isolation (DTI) structure is disposed in the semiconductor material. The DTI structure isolates the first region of the semiconductor material on one side of the DTI structure from a second region of the semiconductor material on an other side of the DTI structure. The DTI structure includes a dielectric layer lining an inside surface of the DTI structure and doped semiconductor material disposed over the dielectric layer inside the DTI structure. The doped semiconductor material disposed inside the DTI structure is coupled to a bias voltage to isolate the photodiode in the first region of the semiconductor material from the second region of the semiconductor material.

    Abstract translation: 光子检测装置包括具有布置在半导体材料的第一区域中的平面结的光电二极管。 深沟槽隔离(DTI)结构设置在半导体材料中。 DTI结构将DTI结构的一侧上的半导体材料的第一区域与DTI结构的另一侧上的半导体材料的第二区域隔离。 DTI结构包括在DTI结构的内表面内衬的电介质层和设置在DTI结构内的电介质层上的掺杂半导体材料。 设置在DTI结构内的掺杂半导体材料耦合到偏置电压,以将半导体材料的第一区域中的光电二极管与半导体材料的第二区域隔离。

    Color-Sensitive Image Sensor With Embedded Microfluidics And Associated Methods
    16.
    发明申请
    Color-Sensitive Image Sensor With Embedded Microfluidics And Associated Methods 审中-公开
    具有嵌入式微流控和相关方法的彩色感光图像传感器

    公开(公告)号:US20160116409A1

    公开(公告)日:2016-04-28

    申请号:US14526161

    申请日:2014-10-28

    Abstract: A color-sensitive image sensor with embedded microfluidics includes a silicon substrate having (a) at least one recess partly defining at least one embedded microfluidic channel and (b) a plurality of photosensitive regions for generating position-sensitive electrical signals in response to light from the at least one recess, wherein at least two of the photosensitive regions are respectively located at at least two mutually different depth ranges, relative to the at least one recess, to provide color information. A wafer-level manufacturing method produces a plurality of such color-sensitive image sensors. A method for generating a color image of a fluidic sample includes performing imaging, onto a plurality of photosensitive regions of a silicon substrate, of a fluidic sample deposited in a microfluidic channel embedded in the silicon substrate, and generating color information based upon penetration depth of light into the silicon substrate.

    Abstract translation: 具有嵌入式微流体的色敏图像传感器包括硅衬底,其具有(a)部分地限定至少一个嵌入式微流体通道的至少一个凹部和(b)多个感光区域,用于响应于来自 所述至少一个凹部,其中至少两个所述感光区域相对于所述至少一个凹部分别位于至少两个彼此不同的深度范围内,以提供颜色信息。 晶片级制造方法产生多个这样的色敏图像传感器。 一种用于产生流体样品的彩色图像的方法包括:在硅衬底的多个光敏区域上进行沉积在嵌入在硅衬底中的微流体通道中的流体样品的成像,并且基于穿透深度 光入硅衬底。

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