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    Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component
    11.
    发明申请
    Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component 有权
    包括两个半导体元件的部件，其间形成有至少两个具有不同内部压力的气密密封的腔体，以及用于制造这种部件的方法

    公开(公告)号：US20150353346A1

    公开(公告)日：2015-12-10

    申请号：US14731032

    申请日：2015-06-04

    申请人： Robert Bosch GmbH

    发明人： Friedjof HEUCK ,  Lars Tebje ,  Heiko Stahl ,  Jullian Gonska ,  Reinhard Neul

    IPC分类号： B81B7/00 ,  B81C1/00

    CPC分类号： B81B7/0038 ,  B81B7/02 ,  B81B2203/0315 ,  B81C1/00285 ,  B81C2203/0145 ,  H01L21/50 ,  H01L23/02 ,  H01L23/10 ,  H01L2224/48463

    摘要： For the targeted influencing of the internal pressure within a cavity between two elements of a component, a getter material or an outgassing material is situated in an additional cavity between the two elements. After the two elements are bonded to one another, the additional cavity is still to be joined via a connecting opening to the cavity. The getter material or the outgassing material is then activated so that gasses are bound in the additional cavity and in the connected cavity, or an outgassing takes place. Only when the sought internal pressure has established itself in the connected cavity is the connecting opening to the additional cavity closed. In this way, the getter material or the outgassing material is only used for establishing a defined internal pressure, but no longer has any influence on the internal pressure within the cavity during ongoing operation of the component.

    摘要翻译： 为了有针对性地影响组件的两个元件之间的腔内的内部压力，吸气剂材料或除气材料位于两个元件之间的附加空腔中。 在两个元件彼此接合之后，附加空腔仍然通过连接开口连接到空腔。 吸气剂材料或除气材料然后被激活，使得气体结合在附加空腔中和在连接的空腔中，或者发生脱气。 只有当所寻求的内部压力已经建立在连接的空腔中时，才是关闭附加空腔的连接开口。 以这种方式，吸气剂材料或除气材料仅用于建立限定的内部压力，但是在组件的正在运行期间不再对空腔内部的内部压力产生任何影响。

    ROTATION-RATE SENSOR, METHOD FOR PRODUCING A ROTATION-RATE SENSOR
    15.
    发明申请
    ROTATION-RATE SENSOR, METHOD FOR PRODUCING A ROTATION-RATE SENSOR 审中-公开

    公开(公告)号：US20200378761A1

    公开(公告)日：2020-12-03

    申请号：US16636798

    申请日：2018-07-30

    申请人： Robert Bosch GmbH

    发明人： Jan-Timo Liewald ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Odd-Axel Pruetz ,  Peter Degenfeld-Schonburg ,  Reinhard Neul

    IPC分类号： G01C19/5705 ,  G01C19/5747

    摘要： A rotation-rate sensor having a substrate, the substrate having a main-extension-plane, and the rotation-rate sensor includes at least one first and one second mass-element which are oscillate-able, and a first main-extension-direction of the substrate points from the first mass-element to the second mass-element, and a coupling-structure is situated in the first main-extension-direction between the first and second mass-element, in which a first coupling-region of the coupling-structure is situated in a first function-layer, and a first mass-region of the first mass-element is situated in the first function-layer and a second mass-region of the first mass-element is situated in a second function-layer, the first function-layer being situated in an extension-direction perpendicular to the main-extension-plane between the substrate and the second function-layer, a second main-extension-direction being situated perpendicular to the first main-extension-direction, and the first coupling-region having a greater extension in the first main-extension-direction than in the second main-extension-direction.

    Vibration-resistant rotation rate sensor
    16.
    发明授权
    Vibration-resistant rotation rate sensor 有权

    公开(公告)号：US09863770B2

    公开(公告)日：2018-01-09

    申请号：US14536918

    申请日：2014-11-10

    申请人： Robert Bosch GmbH

    发明人： Reinhard Neul

    IPC分类号： G01C19/56 ,  G01C19/5726 ,  G01C19/574

    CPC分类号： G01C19/5726 ,  G01C19/574

    摘要： A rotation rate sensor includes a substrate having a main extension plane and multiple seismic masses, in which for each seismic mass the following applies: the seismic mass is drivable at a drive oscillation, which occurs along a drive direction situated parallel to the main extension plane, the seismic mass is deflectable along two different deflection directions, each direction being perpendicular to the drive direction, the rotation rate sensor being configured to generate detection signals as a function of detected deflections of the seismic masses, one detection signal of the detection signals being associated with each deflection direction of the seismic masses, the rotation rate sensor being configured so that a linear, rotational and centrifugal acceleration of the rotation rate sensor are compensated with respect to at least one rotation axis of the rotation rate sensor through compensation in each case of two corresponding detection signals of the detection signals.

    Yaw-rate sensor
    17.
    发明授权
    Yaw-rate sensor 有权
    偏光率传感器

    公开(公告)号：US09593948B2

    公开(公告)日：2017-03-14

    申请号：US14334407

    申请日：2014-07-17

    申请人： ROBERT BOSCH GMBH

    发明人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

    IPC分类号： G01C19/56 ,  G01C19/574 ,  F16F1/02 ,  G01P3/44 ,  G01C19/5747

    CPC分类号： G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

    摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

    摘要翻译： 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

    Rotation-rate sensor, method for producing a rotation-rate sensor
    19.
    发明授权
    Rotation-rate sensor, method for producing a rotation-rate sensor 有权

    公开(公告)号：US11466985B2

    公开(公告)日：2022-10-11

    申请号：US16636798

    申请日：2018-07-30

    申请人： Robert Bosch GmbH

    发明人： Jan-Timo Liewald ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Odd-Axel Pruetz ,  Peter Degenfeld-Schonburg ,  Reinhard Neul

    IPC分类号： G01C19/5705 ,  G01C19/5747 ,  G01C19/5783 ,  G01C19/5733

    摘要： A rotation-rate sensor having a substrate, the substrate having a main-extension-plane, and the rotation-rate sensor includes at least one first and one second mass-element which are oscillate-able, and a first main-extension-direction of the substrate points from the first mass-element to the second mass-element, and a coupling-structure is situated in the first main-extension-direction between the first and second mass-element, in which a first coupling-region of the coupling-structure is situated in a first function-layer, and a first mass-region of the first mass-element is situated in the first function-layer and a second mass-region of the first mass-element is situated in a second function-layer, the first function-layer being situated in an extension-direction perpendicular to the main-extension-plane between the substrate and the second function-layer, a second main-extension-direction being situated perpendicular to the first main-extension-direction, and the first coupling-region having a greater extension in the first main-extension-direction than in the second main-extension-direction.