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公开(公告)号:US07385436B2
公开(公告)日:2008-06-10
申请号:US11714844
申请日:2007-03-07
申请人: Kiyoo Itoh , Ryuta Tsuchiya , Takayuki Kawahara
发明人: Kiyoo Itoh , Ryuta Tsuchiya , Takayuki Kawahara
IPC分类号: H03K3/01
CPC分类号: H01L21/84 , H01L27/1203 , H01L29/66772 , H01L29/78648 , H03K19/0027 , H03K19/00384 , H03K19/018585
摘要: A CMOS circuit in low-voltage implementation, low power-consumption implementation, high-speed implementation, or small-size implementation. In a circuit which uses a FD-SOI MOST where a back gate is controlled by a well, voltage amplitude at the well is made larger than input-voltage amplitude at the gate. Alternatively, the circuit is modified into a circuit which uses a MOST that changes dynamically into an enhancement mode and a depletion mode.
摘要翻译: CMOS电路在低电压实现,低功耗实现,高速实现或小尺寸实现。 在使用背阱由阱控制的FD-SOI MOST的电路中,阱处的电压振幅大于栅极处的输入电压幅度。 或者,电路被修改为使用将动态变化为增强模式和耗尽模式的MOST的电路。
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公开(公告)号:US20070284582A1
公开(公告)日:2007-12-13
申请号:US11746230
申请日:2007-05-09
IPC分类号: H01L29/76
CPC分类号: H01L27/1203 , H01L21/823807 , H01L21/823878 , H01L21/84 , H01L29/045 , H01L29/7846 , H01L29/785
摘要: A semiconductor device and manufacturing method of the same is provided in which the driving current of a PMOSFET is increased, through a scheme formed easily using an existing silicon process. A PMOSFET is formed with a channel in a direction on a (100) silicon substrate. A compressive stress is applied in a direction perpendicular to the channel by an STI.
摘要翻译: 提供了一种半导体器件及其制造方法,其中通过使用现有的硅工艺容易地形成的方案,PMOSFET的驱动电流增加。 在(100)硅衬底上形成具有沿<100>方向的沟道的PMOSFET。 通过STI在垂直于通道的方向上施加压应力。
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公开(公告)号:US20060081836A1
公开(公告)日:2006-04-20
申请号:US11249681
申请日:2005-10-14
IPC分类号: H01L31/109
CPC分类号: H01L21/823425 , H01L21/823412 , H01L21/823807 , H01L21/823814 , H01L29/1054 , H01L29/41758 , H01L29/4238 , H01L29/66659 , H01L29/7835
摘要: In a field effect semiconductor device for high frequency power amplification, it is difficult to achieve size reduction and increased efficiency simultaneously while ensuring voltage withstanding. A further improvement in efficiency is attained by using a strained Si channel for LDMOS at an output stage for high frequency power amplification. Further, the efficiency is improved as much as possible while decreasing a leak current, by optimizing the film thickness of the strained Si layer having a channel region, inactivation of defects and a field plate structure.
摘要翻译: 在用于高频功率放大的场效半导体器件中,难以在确保耐压的同时实现尺寸减小和提高效率。 通过在高频功率放大的输出级使用用于LDMOS的应变Si通道来实现效率的进一步提高。 此外,通过优化具有通道区域的应变Si层的膜厚度,缺陷的失活和场板结构,尽可能地提高效率同时减小漏电流。
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公开(公告)号:US20120318337A1
公开(公告)日:2012-12-20
申请号:US13521487
申请日:2012-02-17
IPC分类号: H01L31/076
CPC分类号: H01L31/075 , H01L31/022441 , H01L31/0504 , H01L31/0508 , H01L31/0512 , H01L31/1804 , Y02E10/547 , Y02E10/548 , Y02P70/521
摘要: In a conventional solar cell, it has been difficult to ensure a sufficient light absorption and simultaneously to prevent current loss due to the reduction of the moving distance of electrons and holes. As a means for solving this difficulty, a plurality of a p-i-n junctions are stacked through an insulating film and are connected in parallel with each other using through-electrodes. In this case, the through-electrodes and the p-i-n junctions are connected through the p-layer or the n-layer, thereby moving electrons and holes in opposite directions and generating output current. In addition, the i-layer is made thicker than the p-layer and the n-layer in each of the p-i-n junctions, thereby ensuring a sufficient light absorption and simultaneously preventing current loss.
摘要翻译: 在常规太阳能电池中,难以确保足够的光吸收并且同时防止由于电子和空穴的移动距离的减小导致的电流损耗。 作为解决这个困难的手段,通过绝缘膜层叠多个p-i-n结,并且使用贯通电极彼此并联连接。 在这种情况下,贯通电极和p-i-n结通过p层或n层连接,从而沿相反方向移动电子和空穴并产生输出电流。 此外,i层比p-i-n结中的每一个中的p层和n层厚,从而确保足够的光吸收并同时防止电流损耗。
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公开(公告)号:US08183635B2
公开(公告)日:2012-05-22
申请号:US12756451
申请日:2010-04-08
申请人: Nobuyuki Sugii , Ryuta Tsuchiya , Shinichiro Kimura , Takashi Ishigaki , Yusuke Morita , Hiroyuki Yoshimoto
发明人: Nobuyuki Sugii , Ryuta Tsuchiya , Shinichiro Kimura , Takashi Ishigaki , Yusuke Morita , Hiroyuki Yoshimoto
IPC分类号: H01L21/00
CPC分类号: H01L27/1203 , H01L21/76283
摘要: A technique to be applied to a semiconductor device for achieving low power consumption by improving a shape at a boundary portion of a shallow trench and an SOI layer of an SOI substrate. A position (SOI edge) at which a main surface of a silicon substrate and a line extended along a side surface of an SOI layer are crossed is recessed away from a shallow-trench isolation more than a position (STI edge) at which a line extended along a sidewall of a shallow trench and a line extended along the main surface of the silicon substrate are crossed, and a corner of the silicon substrate at the STI edge has a curved surface.
摘要翻译: 通过改善在SOI衬底的浅沟槽和SOI层的边界部分的形状来实现低功耗的半导体器件的技术。 硅衬底的主表面和沿着SOI层的侧表面延伸的线交叉的位置(SOI边缘)比浅沟槽隔离更远离位于(STI边缘)的位置(STI边缘),在该位置处 沿着浅沟槽的侧壁延伸并且沿着硅衬底的主表面延伸的线交叉,并且在STI边缘处的硅衬底的拐角具有弯曲表面。
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公开(公告)号:US20100258871A1
公开(公告)日:2010-10-14
申请号:US12759559
申请日:2010-04-13
IPC分类号: H01L29/78 , H01L21/336
CPC分类号: H01L29/785 , H01L29/66795
摘要: Characteristics of a semiconductor device having a FINFET are improved. The FINFET has: a channel layer arranged in an arch shape on a semiconductor substrate and formed of monocrystalline silicon; a front gate electrode formed on a part of an outside of the channel layer through a front gate insulating film; and a back gate electrode formed so as to be buried inside the channel layer through a back gate insulating film. The back gate electrode arranged inside the arch shape is arranged so as to pass through the front gate electrode.
摘要翻译: 具有FINFET的半导体器件的特性得到改善。 FINFET具有:在半导体衬底上以拱形形式布置并由单晶硅形成的沟道层; 前栅电极,其通过前栅极绝缘膜形成在沟道层的外部的一部分上; 以及形成为通过背栅绝缘膜埋设在沟道层内的背栅电极。 布置在拱形内侧的背栅极布置成穿过前栅电极。
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公开(公告)号:US20080017904A1
公开(公告)日:2008-01-24
申请号:US11773990
申请日:2007-07-06
申请人: Satoru AKIYAMA , Ryuta Tsuchiya , Tomonori Sekiguchi , Riichiro Takemura , Masayuki Nakamura , Yasushi Yamazaki , Shigeru Shiratake
发明人: Satoru AKIYAMA , Ryuta Tsuchiya , Tomonori Sekiguchi , Riichiro Takemura , Masayuki Nakamura , Yasushi Yamazaki , Shigeru Shiratake
IPC分类号: H01L27/108 , H01L21/8242
CPC分类号: H01L27/10894 , G11C7/18 , G11C11/404 , G11C11/4097 , H01L27/10876 , H01L27/10891 , H01L29/66621 , H01L2924/0002 , H01L2924/00
摘要: A DRAM capable of realizing reduced power consumption, high-speed operation, and high reliability is provided. A gate electrode configuring a memory cell transistor of the DRAM is composed of an n-type polysilicon film and a W (tungsten) film stacked thereon. A part of the polysilicon film is embedded in a trench formed in a silicon substrate in order to elongate the effective channel length of the memory cell transistor. The other part of the polysilicon film is located above the trench, and an upper surface thereof is located above a surface of the silicon substrate (p-type well). Therefore, distances between the W film and a source and drain (n-type semiconductor regions) are ensured.
摘要翻译: 提供了能够实现降低功耗,高速运行和高可靠性的DRAM。 构成DRAM的存储单元晶体管的栅电极由n型多晶硅膜和堆叠在其上的W(钨)膜构成。 为了延长存储单元晶体管的有效沟道长度,多晶硅膜的一部分嵌入在硅衬底中形成的沟槽中。 多晶硅膜的另一部分位于沟槽上方,其上表面位于硅衬底的表面上方(p型阱)。 因此,确保W膜与源极和漏极(n型半导体区域)之间的距离。
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公开(公告)号:US20070152736A1
公开(公告)日:2007-07-05
申请号:US11714844
申请日:2007-03-07
申请人: Kiyoo Itoh , Ryuta Tsuchiya , Takayuki Kawahara
发明人: Kiyoo Itoh , Ryuta Tsuchiya , Takayuki Kawahara
IPC分类号: H03K3/01
CPC分类号: H01L21/84 , H01L27/1203 , H01L29/66772 , H01L29/78648 , H03K19/0027 , H03K19/00384 , H03K19/018585
摘要: A CMOS circuit in low-voltage implementation, low power-consumption implementation, high-speed implementation, or small-size implementation. In a circuit which uses a FD-SOI MOST where a back gate is controlled by a well, voltage amplitude at the well is made larger than input-voltage amplitude at the gate. Alternatively, the circuit is modified into a circuit which uses a MOST that changes dynamically into an enhancement mode and a depletion mode.
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公开(公告)号:US20070008027A1
公开(公告)日:2007-01-11
申请号:US11362172
申请日:2006-02-27
申请人: Kiyoo Itoh , Ryuta Tsuchiya , Takayuki Kawahara
发明人: Kiyoo Itoh , Ryuta Tsuchiya , Takayuki Kawahara
IPC分类号: H03K3/01
CPC分类号: H01L21/84 , H01L27/1203 , H01L29/66772 , H01L29/78648 , H03K19/0027 , H03K19/00384 , H03K19/018585
摘要: A CMOS circuit in low-voltage implementation, low power-consumption implementation, high-speed implementation, or small-size implementation. In a circuit which uses a FD-SOI MOST where a back gate is controlled by a well, voltage amplitude at the well is made larger than input-voltage amplitude at the gate. Alternatively, the circuit is modified into a circuit which uses a MOST that changes dynamically into an enhancement mode and a depletion mode.
摘要翻译: CMOS电路在低电压实现,低功耗实现,高速实现或小尺寸实现。 在使用背阱由阱控制的FD-SOI MOST的电路中,阱处的电压振幅大于栅极处的输入电压幅度。 或者,电路被修改为使用将动态变化为增强模式和耗尽模式的MOST的电路。
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公开(公告)号:US20060001111A1
公开(公告)日:2006-01-05
申请号:US11155674
申请日:2005-06-20
申请人: Ryuta Tsuchiya , Shinichi Sato , Masatada Horiuchi
发明人: Ryuta Tsuchiya , Shinichi Sato , Masatada Horiuchi
IPC分类号: H01L29/76 , H01L21/8238
CPC分类号: H01L29/78696 , H01L21/28185 , H01L21/84 , H01L27/1203 , H01L29/458 , H01L29/4908 , H01L29/4925 , H01L29/4933 , H01L29/513 , H01L29/517 , H01L29/518 , H01L29/665 , H01L29/6656 , H01L29/66772
摘要: In a full depletion MISFET, there is a limit to control on a threshold voltage Vth by an impurity concentration in principle when a monocrystalline SOI layer becomes thin on the order of a few tens of nm. It was thus difficult to simultaneously realize predetermined Vth of both n and p types in a complementary MISFET. A gate insulating film for the MISFET is formed as a laminated layer of a metal oxide and an oxynitride. A gate electrode is formed using a polycrystalline Si semiconductor film of the same conductivity type as a source-drain. Predetermined Vth for enhancement are simultaneously achieved by a shift of a flatband voltage produced between the gate insulating film and the gate electrode made of the semiconductor film. Since a variation in Vth due to a statistical fluctuation in the number of impurities with respect to one MISFET can be reduced as compared with the case in which each Vth is controlled by the impurity concentration, Vth and a power supply voltage can both be set low.
摘要翻译: 在完全耗尽的MISFET中,当单晶SOI层变薄到数十nm左右时,在原理上控制阈值电压Vth的限制是有限的。 因此难以在互补的MISFET中同时实现n和p类型的预定Vth。 形成用于MISFET的栅极绝缘膜作为金属氧化物和氧氮化物的叠层。 使用与源极 - 漏极相同的导电类型的多晶硅半导体膜形成栅电极。 用于增强的预定Vth同时通过栅极绝缘膜和由半导体膜制成的栅电极之间产生的平带电压的偏移来实现。 由于相对于一个MISFET而言由于杂质数统计上的波动导致的Vth的变化,与各种Vth被杂质浓度控制的情况相比,可以降低Vth和电源电压两者 。
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