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公开(公告)号：US20210347634A1
公开(公告)日：2021-11-11
申请号：US17240782
申请日：2021-04-26
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Marco FERRERA , Carlo Luigi PRELINI
Abstract: The MEMS actuator is formed by a body, which surrounds a cavity and by a deformable structure, which is suspended on the cavity and is formed by a movable portion and by a plurality of deformable elements. The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator further comprises at least one plurality of actuation structures, which are supported by the deformable elements and are configured to cause a translation of the movable portion greater than the deformation of each deformable element. The actuation structures each have a respective first piezoelectric region.
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12.发明申请公开(公告)号：US20190023014A1
公开(公告)日：2019-01-24
申请号：US16030630
申请日：2018-07-09
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico GIUSTI , Mauro CATTANEO , Carlo Luigi PRELINI
CPC classification number: B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1642 , B41J2002/1437
Abstract: The microfluidic device has a plurality of ejector elements. Each ejector element includes a first region, accommodating a first fluid flow channel and an actuator chamber; a second region, accommodating a fluid containment chamber; and a third region, accommodating a second fluid flow channel. The fluid containment chamber is fluidically coupled to the first and to the second fluid flow channels. The second region is formed from a membrane layer, from a membrane definition layer, mechanically coupled to the membrane layer and having a membrane definition opening, and a fluid chamber defining body, mechanically coupled to the membrane definition layer and having a chamber defining opening, with a width greater than the width of the membrane definition opening. The width of the membrane is thus defined by the width of the chamber defining opening.
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公开(公告)号：US20170373120A1
公开(公告)日：2017-12-28
申请号：US15374304
申请日：2016-12-09
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Paola ZULIANI , Gianluigi CONFALONIERI , Annalisa GILARDINI , Carlo Luigi PRELINI
CPC classification number: H01L27/2463 , H01L27/2436 , H01L45/06 , H01L45/1233 , H01L45/126 , H01L45/1293 , H01L45/144 , H01L45/16 , H01L45/1683
Abstract: A phase-change memory cell, comprising: a substrate housing a transistor, for selection of the memory cell, that includes a first conduction electrode; a first electrical-insulation layer on the selection transistor; a first conductive through via through the electrical-insulation layer electrically coupled to the first conduction electrode; a heater element including a first portion in electrical contact with the first conductive through via and a second portion that extends in electrical continuity with, and orthogonal to, the first portion; a first protection element extending on the first and second portions of the heater element; a second protection element extending in direct lateral contact with the first portion of the heater element and with the first protection element; and a phase-change region extending over the heater element in electrical and thermal contact therewith.
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公开(公告)号：US20240019688A1
公开(公告)日：2024-01-18
申请号：US18220554
申请日：2023-07-11
Applicant: STMicroelectronics S.r.l.
Inventor： Massimiliano MERLI , Roberto CARMINATI , Nicolo' BONI , Sonia COSTANTINI , Carlo Luigi PRELINI
CPC classification number: G02B26/0858 , B81B3/007 , B81C1/00658 , B81B2201/042
Abstract: Disclosed herein is a micro-electro-mechanical mirror device having a fixed structure defining an external frame delimiting a cavity, a tiltable structure extending into the cavity, a reflecting surface carried by the tiltable structure and having a main extension in a horizontal plane, and an actuation structure coupled between the tiltable structure and the fixed structure. The actuation structure is formed by a first pair of actuation arms causing rotation of the tiltable structure around a first axis parallel to the horizontal plane. The actuation arms are elastically coupled to the tiltable structure through elastic coupling elements and are each formed by a bearing structure and a piezoelectric structure. The bearing structure of each actuation arm is formed by a soft region of a first material and the elastic coupling elements are formed by a bearing layer of a second material, the second material having greater stiffness than the first material.
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Patent Agency Ranking
15.发明公开公开(公告)号：US20230324674A1
公开(公告)日：2023-10-12
申请号：US18131085
申请日：2023-04-05
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI , Carlo Luigi PRELINI , Tarek AFIFI AFIFI
CPC classification number: G02B26/0858 , B81B3/007 , B81C1/00658 , B81B2201/042
Abstract: A microelectromechanical mirror device has, in a die of semiconductor material: a fixed structure defining a cavity; a tiltable structure carrying a reflecting region, elastically suspended above the cavity and having a main extension in a horizontal plane; at least one first pair of driving arms, carrying respective piezoelectric structures which can be biased to generate a driving force that causes rotation of the tiltable structure about a rotation axis parallel to a first horizontal axis of the horizontal plane; elastic suspension elements, which elastically couple the tiltable structure to the fixed structure at the rotation axis and are rigid to movements out of the horizontal plane and compliant to torsion about the rotation axis. In particular, the driving arms of the first pair are magnetically coupled to the tiltable structure to cause its rotation about the rotation axis by magnetic interaction, following biasing of the respective piezoelectric structures.
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公开(公告)号：US20230129720A1
公开(公告)日：2023-04-27
申请号：US17966344
申请日：2022-10-14
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Fabio QUAGLIA , Carlo Luigi PRELINI
Abstract: PMUT acoustic transducer formed in a body of semiconductor material having a face and accommodating a plurality of first buried cavities, having an annular shape, arranged concentrically with each other and extending at a distance from the face of the body. The first buried cavities delimit from below a plurality of first membranes formed by the body so that each first membrane extends between a respective first buried cavity of the plurality of first buried cavities and the face of the body. A plurality of piezoelectric elements extend on the face of the body, each piezoelectric element extending above a respective first membrane of the plurality of first membranes. The first membranes have different widths, variable between a minimum value and a maximum value.
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公开(公告)号：US20210351338A1
公开(公告)日：2021-11-11
申请号：US17137220
申请日：2020-12-29
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Carlo Luigi PRELINI , Marco FERRERA , Carla Maria LAZZARI , Luca SEGHIZZI , Nicolo' BONI , Roberto CARMINATI , Fabio QUAGLIA
Abstract: The MEMS actuator is formed by a substrate, which surrounds a cavity; by a deformable structure suspended on the cavity; by an actuation structure formed by a first piezoelectric region of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure formed by a second piezoelectric region of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.
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18.发明申请公开(公告)号：US20190161338A1
公开(公告)日：2019-05-30
申请号：US16197810
申请日：2018-11-21
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico GIUSTI , Carlo Luigi PRELINI
IPC: B81B3/00
CPC classification number: B81B3/0037 , B81B2201/0257 , B81B2201/032 , B81B2203/0127 , H01L41/0933 , H01L41/0953 , H04R17/00 , H04R2201/003 , H04R2217/00
Abstract: A micro-electro-mechanical actuator device includes a fixed structure and a mobile structure. The mobile structure includes a first deformable band, a second deformable band, and a third deformable band, both of which extend on opposite sides of the first deformable band, each of which carries a piezoelectric actuator. In a working condition, in which the second and third piezoelectrics are biased, the second and third deformable bands are subjected to a negative bending, while the first deformable band is subjected to a positive bending. There are thus generated two translations that add together, causing a displacement of the first deformable band greater than the one that may be obtained by a single membrane of an equal base area.
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19.发明申请公开(公告)号：US20180281402A1
公开(公告)日：2018-10-04
申请号：US15884186
申请日：2018-01-30
Applicant: STMICROELECTRONICS S.R.L. , STMICROELECTRONICS, INC.
Inventor： Domenico GIUSTI , Marco FERRERA , Carlo Luigi PRELINI , Simon DODD
Abstract: Ejection device for fluid, comprising a solid body including: first semiconductor body including a chamber for containing the fluid, an ejection nozzle in fluid connection with the chamber, and an actuator operatively connected to the chamber to generate, in use, one or more pressure waves in the fluid such as to cause ejection of the fluid from the ejection nozzle; and a second semiconductor body including a channel for feeding the fluid to the chamber, coupled to the first semiconductor body, in such a way that the channel is in fluid connection with the chamber. The second semiconductor body integrates a damping cavity over which extends a damping membrane, the damping cavity and the damping membrane extending laterally to the channel for feeding the fluid.
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