Method of forming fine patterns of a semiconductor device

    公开(公告)号:US10361078B2

    公开(公告)日:2019-07-23

    申请号:US15661418

    申请日:2017-07-27

    Abstract: A method of forming fine patterns includes forming an upper mask layer on a substrate, forming preliminary mask patterns on the upper mask layer, and forming upper mask patterns by etching the upper mask layer using the preliminary mask patterns as etch masks. Forming the upper mask patterns includes etching the upper mask layer by performing an etching process using an ion beam. The upper mask patterns include a first upper mask pattern formed under each of the preliminary mask patterns, and a second upper mask pattern formed between the preliminary mask patterns in a plan view and spaced apart from the first upper mask pattern.

    Method of forming patterns and method of manufacturing a semiconductor device using the same

    公开(公告)号:US09905754B1

    公开(公告)日:2018-02-27

    申请号:US15630046

    申请日:2017-06-22

    CPC classification number: H01L43/12 H01L27/222

    Abstract: In a method of forming a pattern of a semiconductor device, a first mask layer and an anti-reflective coating layer may be sequentially formed on a substrate. A photoresist layer may be formed on the anti-reflective coating layer. The photoresist layer may be exposed and developed to form a first preliminary photoresist pattern. A first ion beam etching process may be performed on the first preliminary photoresist pattern to form a second preliminary photoresist pattern. A second ion beam etching process may be performed on the second preliminary photoresist pattern to form a photoresist pattern. A second incident angle of an ion beam in the second ion beam etching process may be greater than a first incident angle of an ion beam in the first ion beam etching process. The anti-reflective coating layer and the first mask layer may be etched using the photoresist pattern as an etching mask to form a mask structure.

    Apparatus and method for controlling a video
    20.
    发明授权
    Apparatus and method for controlling a video 有权
    用于控制视频的装置和方法

    公开(公告)号:US09407895B2

    公开(公告)日:2016-08-02

    申请号:US14011085

    申请日:2013-08-27

    CPC classification number: H04N9/87 H04N5/765 H04N5/783 H04N21/41407 H04N21/632

    Abstract: A system for controlling a video is provided. The system includes a terminal which transmits a flush command to an external device to delete buffered data in a buffer of the external device when a search command for moving to a location of specific data of a video is generated while data of the video is streamed to the external device and which then transmits to the external device the specific data located in relation to the search command, and an external device which deletes the buffered data in the buffer when the flush command is received from the terminal while a video streamed from the terminal is reproduced and which buffers the specific data of the video received from the terminal in the buffer to be output.

    Abstract translation: 提供了一种用于控制视频的系统。 该系统包括一个终端,当用于移动到视频的特定数据的位置的搜索命令生成视频的数据,同时将视频的数据流传输到外部设备的缓冲器中时,向外部设备发送刷新命令以删除外部设备的缓冲器中的缓冲数据, 外部设备,然后向外部设备发送与搜索命令相关的特定数据;以及外部设备,当从终端接收到视频流时,从终端接收到刷新命令时,删除缓冲器中的缓冲数据 被再现并且缓冲从缓冲器中的终端接收的视频的特定数据以被输出。

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