公开(公告)号：US5955659A

公开(公告)日：1999-09-21

申请号：US5919

申请日：1998-01-13

Applicant: Raj K. Gupta ,  Stephen D. Senturia

Inventor： Raj K. Gupta ,  Stephen D. Senturia

IPC: G01F1/28 ,  G01F1/38 ,  G01F1/50 ,  G01L21/02 ,  G01N11/00 ,  G01N27/00 ,  H01L29/84

CPC classification number: G01L9/0073 ,  G01F1/28 ,  G01F1/383 ,  G01F1/50 ,  G01L21/02 ,  G01N11/00

Abstract: A fluid property sensor includes a substrate having a first electrode thereon, and a flexible member adjacent the substrate and the first electrode wherein the flexible member includes a second electrode. A signal generator generates a predetermined electrical signal across the first and second electrodes so that an electrostatic force is generated between the first and second electrodes and so that said flexible member deflects a predetermined distance. A measuring circuit measures an interval of time between the generation of the predetermined electrical signal and the deflection of the flexible member to the predetermined distance and determines a property of a fluid adjacent the flexible member based on the interval of time. For example, the sensor can be used to determine a viscosity of the fluid. Alternately, the fluid can be a compressible gas, and the sensor can be used to determine a pressure of the gas. Related methods are also discussed.

Abstract translation: 流体特性传感器包括其上具有第一电极的基板和邻近基板的柔性部件和第一电极，其中柔性部件包括第二电极。 信号发生器跨越第一和第二电极产生预定的电信号，使得在第一和第二电极之间产生静电力，并且使得所述柔性构件偏转预定距离。 测量电路测量产生预定电信号和柔性构件的偏转到预定距离之间的时间间隔，并且基于时间间隔确定与柔性构件相邻的流体的性质。 例如，传感器可用于确定流体的粘度。 或者，流体可以是可压缩气体，并且传感器可以用于确定气体的压力。 还讨论了相关方法。

公开(公告)号：US5905571A

公开(公告)日：1999-05-18

申请号：US522202

申请日：1995-08-30

Applicant: Michael A. Butler ,  Antonio J. Ricco ,  Michael B. Sinclair ,  Stephen D. Senturia

Inventor： Michael A. Butler ,  Antonio J. Ricco ,  Michael B. Sinclair ,  Stephen D. Senturia

IPC: G01J3/18 ,  G01J3/457 ,  G02B26/08 ,  G06E3/00 ,  G01J3/28

CPC classification number: G06E3/005 ,  G01J3/18 ,  G01J3/457 ,  G02B26/0808

Abstract: Optical apparatus for forming correlation spectrometers and optical processors. The optical apparatus comprises one or more diffractive optical elements formed on a substrate for receiving light from a source and processing the incident light. The optical apparatus includes an addressing element for alternately addressing each diffractive optical element thereof to produce for one unit of time a first correlation with the incident light, and to produce for a different unit of time a second correlation with the incident light that is different from the first correlation. In preferred embodiments of the invention, the optical apparatus is in the form of a correlation spectrometer; and in other embodiments, the apparatus is in the form of an optical processor. In some embodiments, the optical apparatus comprises a plurality of diffractive optical elements on a common substrate for forming first and second gratings that alternately intercept the incident light for different units of time. In other embodiments, the optical apparatus includes an electrically-programmable diffraction grating that may be alternately switched between a plurality of grating states thereof for processing the incident light. The optical apparatus may be formed, at least in part, by a micromachining process.

Abstract translation: 用于形成相关光谱仪和光学处理器的光学装置。 光学装置包括形成在基板上的一个或多个衍射光学元件，用于接收来自光源的光并处理入射光。 光学装置包括用于交替地寻址其每个衍射光学元件的寻址元件，以产生与入射光的第一相关的一个单位时间，并且产生与不同于入射光的入射光的第二相关性。 第一相关。 在本发明的优选实施例中，光学装置是相关光谱仪的形式; 并且在其他实施例中，该装置是光学处理器的形式。 在一些实施例中，光学装置包括在公共基板上的多个衍射光学元件，用于形成用于不同单位时间交替地截取入射光的第一和第二光栅。 在其他实施例中，光学装置包括电可编程衍射光栅，其可以在其多个光栅状态之间交替地切换以处理入射光。 光学装置可以至少部分地通过微加工工艺形成。

公开(公告)号：US5378330A

公开(公告)日：1995-01-03

申请号：US59466

申请日：1993-05-07

Applicant: Hong Li ,  Stephen D. Senturia ,  David Volfson

Inventor： Hong Li ,  Stephen D. Senturia ,  David Volfson

IPC: C25F3/16 ,  C25F3/24

CPC classification number: C25F3/16 ,  C25F3/24

Abstract: A method for polishing a substrate having at least one micro-sized structure. The method includes identifying a first region of the substrate on which a micro-sized structure is to be located. The first region is the region in which polishing is desired. A second region of the substrate, in which polishing is not desired, is also identified. An adhesion promoter is optionally applied to the substrate. The second region of the substrate is coated with a selected coating material that does not degrade substantially when exposed to a selected electrolyte. Material is removed from the first region, exposing a micro-sized structure. The coating material may be removed by the same machining process that forms the micro-sized structure. The substrate is submerged in the selected electrolyte so that the first region is exposed to the electrolyte. The first region of the substrate is electropolished. The coating is then optionally removed.

Abstract translation: 一种用于抛光具有至少一个微尺寸结构的衬底的方法。 该方法包括识别在其上定位有微尺寸结构的基底的第一区域。 第一区域是需要抛光的区域。 还鉴定了不需要抛光的衬底的第二区域。 任选地将粘合促进剂施加到基底上。 衬底的第二区域涂覆有当暴露于所选择的电解质时不会显着降解的选择的涂层材料。 从第一区域去除材料，暴露微尺寸结构。 可以通过形成微尺寸结构的相同的加工工艺去除涂层材料。 将衬底浸没在所选择的电解质中，使得第一区域暴露于电解质。 电解抛光底物的第一区域。 然后可选地除去涂层。

公开(公告)号：US5043043A

公开(公告)日：1991-08-27

申请号：US542435

申请日：1990-06-22

Applicant: Roger T. Howe ,  Jeffrey H. Lang ,  Martin F. Schlecht ,  Martin A. Schmidt ,  Stephen D. Senturia ,  Mehran Mehregany ,  Lee S. Tavrow

Inventor： Roger T. Howe ,  Jeffrey H. Lang ,  Martin F. Schlecht ,  Martin A. Schmidt ,  Stephen D. Senturia ,  Mehran Mehregany ,  Lee S. Tavrow

IPC: H02N1/00

CPC classification number: H02N1/004

Abstract: An electrostatic micromotor employs a side drive design. The stator operates in a plane above a substract and a moveable member lies and moves in the plane of the stator. An electrostatic field of operational strength is generated and sustained without breakdown in the plane between the stator and edges of the moveable member. Three fabrication processes enable formation of a moveable member in the plane of operation of the stator and spaced apart from the stator by a micron amount. One fabrication process deposits and patterns a structural layer to form the stator and moveable member over a sacrificial layer. A second fabrication process etches channels in a first structural layer to outline a stator, moveable member, and if desired, a bearing. A substrate is connected to the side of the structural layer through which the channels are etched and the opposite side is ground down to the ends of the channels to form salient stator, rotor and, if desired, bearing structures. The third fabrication process grows a sacrificial layer by local oxidation in an etched cavity of the substrate. A structural layer is then deposited and patterned over the substrate and sacrificial layer to form the stator and moveable member in a common plane. A harmonic side drive micromotor is also provided by the fabrication processes.

Abstract translation: 静电微电机采用侧驱设计。 定子在一个减法器上方的平面中工作，并且可移动构件位于定子的平面内并移动。 产生并维持操作强度的静电场，而不会在定子和可移动构件的边缘之间的平面内发生故障。 三个制造工艺使得能够在定子的操作平面中形成可移动构件并且与定子隔开微米量。 一个制造工艺沉积和图案化结构层，以在牺牲层上形成定子和可移动构件。 第二制造工艺蚀刻第一结构层中的通道以勾勒定子，可移动构件，并且如果需要，轮廓轴承。 衬底连接到结构层的侧面，通道通过该侧被蚀刻并且相对侧被研磨到通道的端部，以形成凸出的定子，转子以及如果需要的话承载结构。 第三制造工艺通过在衬底的蚀刻腔中的局部氧化来生长牺牲层。 然后在衬底和牺牲层上沉积和图案化结构层，以在公共平面中形成定子和可移动构件。 还通过制造工艺提供了谐波侧驱动微电机。

公开(公告)号：US4997521A

公开(公告)日：1991-03-05

申请号：US342952

申请日：1989-04-25

Applicant: Roger T. Howe ,  Jeffrey H. Lang ,  Martin F. Schlecht ,  Martin A. Schmidt ,  Stephen D. Senturia

Inventor： Roger T. Howe ,  Jeffrey H. Lang ,  Martin F. Schlecht ,  Martin A. Schmidt ,  Stephen D. Senturia

IPC: H02N1/00

CPC classification number: H02N1/004

Abstract: An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An electric field of about 100 Mv/m and higher is supported across the micron wide gap without breakdown and enables high energy torque densities to be produced between the stator and the moving element. One electrostatic drive scheme involves a series of stator electrodes attached to the stator and a series of electrodes attached to the moving element charged in sequence to attract each other in a direction of movement and to oppose each other in a direction normal to movement. A bearing is aligned with the moving element within the stator during the layering of a sacrificial layer over an edge of the moving element structural layer. The bearing and stator laterally stabilize the moving element. Vertical stability is through aerodynamic shaping of the moving element, electronic circuits, or bushings. Applications of the microactuator include a linearly sliding shutter, an optical modulator, a gyroscope and an air pump.

Abstract translation: 静电驱动微致动器在单片工艺中被微加工。 牺牲层被放置在移动元件和定子结构层之间。 牺牲层的移除在定子内留​​下自由站立的移动元件和微米宽的气隙。 大约100Mv / m以上的电场被支撑在微米宽的间隙上而不会发生故障，并且能够在定子和移动元件之间产生高能量的转矩密度。 一个静电驱动方案涉及一系列连接到定子的定子电极和一系列连接到移动元件上的电极，该电极按顺序充电以在运动方向上彼此吸引并且在垂直于运动的方向上彼此相对。 在牺牲层在移动元件结构层的边缘上层叠期间，轴承与定子内的移动元件对齐。 轴承和定子横向稳定移动元件。 垂直稳定性是通过移动元件，电子电路或衬套的空气动力学成形。 微致动器的应用包括线性滑动快门，光学调制器，陀螺仪和空气泵。

公开(公告)号：US4980034A

公开(公告)日：1990-12-25

申请号：US333179

申请日：1989-04-04

Applicant: David Volfson ,  Stephen D. Senturia

Inventor： David Volfson ,  Stephen D. Senturia

IPC: H01L21/60 ,  H01L23/538 ,  H05K3/00 ,  H05K3/06 ,  H05K3/10 ,  H05K3/20 ,  H05K3/38 ,  H05K3/42 ,  H05K3/46

CPC classification number: H05K3/4682 ,  H01L23/5383 ,  H01L23/5384 ,  H01L23/5387 ,  H05K3/423 ,  H01L2221/68345 ,  H01L2224/1147 ,  H01L2924/01019 ,  H01L2924/3011 ,  H05K2201/0154 ,  H05K2201/0355 ,  H05K2201/0394 ,  H05K2201/096 ,  H05K2203/016 ,  H05K2203/0733 ,  H05K2203/095 ,  H05K3/002 ,  H05K3/0023 ,  H05K3/0041 ,  H05K3/062 ,  H05K3/108 ,  H05K3/205 ,  H05K3/388 ,  H05K3/467

Abstract: A multi-layer interconnect structure of alternating dielectric (e.g., polyimide) and metal (e.g., copper) is built on a substrate supporting a continuous layer of metal. This metal layer is used as an electrode for plating vias through all the dielectric layers. Once the desired number of layers are formed, the substrate is removed and the continuous metal layer is patterned. Solid metal vias having nearly vertical side walls can be stacked vertically, producing good electrical and thermal transfer paths and permitting small, closely-spaced conductors. Further, by mixing geometrical shapes of conductors, a variety of useful structures can be achieved, such as controlled impedance transmission lines and multiconductor TAB tape with interconnects on tape of different dimensions than TAB fingers.

Abstract translation: 在支撑连续金属层的基板上建立交替电介质（例如聚酰亚胺）和金属（例如铜）的多层互连结构。 该金属层用作通过所有介电层电镀通孔的电极。 一旦形成了期望数量的层，就去除衬底并且连续的金属层被图案化。 具有几乎垂直侧壁的固体金属通孔可以垂直堆叠，产生良好的电和热传递路径并允许小的，紧密间隔的导体。 此外，通过混合导体的几何形状，可以实现各种有用的结构，例如受控阻抗传输线和具有与TAB指不同的尺寸的带上的互连的多导体TAB带。

公开(公告)号：US4352059A

公开(公告)日：1982-09-28

申请号：US159221

申请日：1980-06-13

Applicant: Nam P. Suh ,  Stephen D. Senturia ,  Byung H. Kim

Inventor： Nam P. Suh ,  Stephen D. Senturia ,  Byung H. Kim

IPC: G01N27/22 ,  G01R27/26

CPC classification number: G01N27/223 ,  G01R27/2647

Abstract: A method for determining the moisture content of dielectric materials is described wherein a sample of the material is placed between two electrodes and an electric field is applied. An alternating frequency in the range of radio waves and lower is applied to the electrodes and the dielectric loss properties of the material are determined. The dielectric loss properties are then used to determine moisture content. In an alternate embodiment, a step voltage is applied to the electrodes and the direct current is monitored. The decrease in value of direct current during a time interval following the application of the step voltage is used to determine the moisture content.

Abstract translation: 描述了用于确定介电材料的水分含量的方法，其中将材料的样品放置在两个电极之间并施加电场。 将电波范围内的交变频率施加到电极，确定材料的介电损耗特性。 然后使用介电损耗特性来测定水分含量。 在替代实施例中，对电极施加阶梯电压，并监视直流电流。 使用施加阶梯电压之后的时间间隔内的直流电流值的降低来确定含水量。

公开(公告)号：US07505641B1

公开(公告)日：2009-03-17

申请号：US11505636

申请日：2006-08-17

Applicant: Stephen D. Senturia ,  Malcolm C. Smith ,  Michael A. Butler ,  David R. Day

Inventor： Stephen D. Senturia ,  Malcolm C. Smith ,  Michael A. Butler ,  David R. Day

IPC: G02B6/00 ,  C12M1/34

CPC classification number: G02B6/124 ,  G01N21/774 ,  G02B2006/12107 ,  G02B2006/12138

Abstract: A waveguide-based sensor is disclosed that uses one or more grating patterns of a bioreceptor on a surface of the waveguide to provide a wavelength-specific sensor response without the requirement of labeling the target molecule or the bioreceptor. Furthermore, there is provided a biosensor that, at least to a first order, is insensitive to non-specific binding.

Abstract translation: 公开了一种基于波导的传感器，其使用波导表面上的生物受体的一个或多个光栅图案来提供波长特异性传感器响应，而不需要标记靶分子或生物受体。 此外，提供了一种生物传感器，其至少对于第一级对非特异性结合不敏感。

公开(公告)号：US06724125B2

公开(公告)日：2004-04-20

申请号：US10090380

申请日：2002-03-04

Applicant: Elmer S. Hung ,  Erik R. Deutsch ,  Stephen D. Senturia

Inventor： Elmer S. Hung ,  Erik R. Deutsch ,  Stephen D. Senturia

IPC: H03H970

CPC classification number: G02B6/3516 ,  G02B6/2931 ,  G02B6/29383 ,  G02B6/3524 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3588 ,  G02B6/3594 ,  G02B6/3598 ,  G02B6/4246 ,  G02B26/0808 ,  H02N1/006 ,  H04J14/0201 ,  H04J14/0204 ,  H04J14/0205 ,  H04J14/0213

Abstract: A method of redirecting light using an actuatable two-layer diffraction grating structure, the method having applications in wavelength-division multiplexed systems. An optical add/drop modulator (OADM) including an actuatable diffraction grating, for use with a wavelength-division multiplexed signal. An OADM having an optical source located off the main pathway to direct a optical carrier to be added onto the actuatable diffraction grating such that the carrier is diffracted into the main pathway. A detector to measure signal strength for use with an optical processor, the optical processor having an actuatable structure having gaps between the actuated portion of the structure. The detector detecting the portions of light diffracted by the gaps.

Abstract translation: 一种使用可致动的双层衍射光栅结构重定向光的方法，该方法在波分复用系统中具有应用。 一种包括可致动的衍射光栅的光分插调制器（OADM），用于波分复用信号。 OADM具有位于主路径之外的光源，以引导要添加到可致动的衍射光栅上的光载体，使得载体被衍射到主路径中。 一种用于测量与光学处理器一起使用的信号强度的检测器，所述光学处理器具有在所述结构的致动部分之间具有间隙的可致动结构。 检测器检测由间隙衍射的光的部分。

公开(公告)号：US06664706B1

公开(公告)日：2003-12-16

申请号：US10015732

申请日：2001-12-10

Applicant: Elmer S. Hung ,  Erik R. Deutsch ,  Stephen D. Senturia

Inventor： Elmer S. Hung ,  Erik R. Deutsch ,  Stephen D. Senturia

IPC: H02N100

CPC classification number: B81B3/0037 ,  B81B2201/038 ,  B81B2203/053 ,  H02N1/006

Abstract: The invention provides an electrostatically-controllable diffraction grating including a plurality of electrically isolated and stationary electrodes disposed on a substrate. At least one row of a plurality of interconnected actuation elements is provided, with each actuation element suspended, by a corresponding mechanically constrained support region, over the substrate by a vertical actuation gap and including a conducting actuation region connected to the corresponding support region and disposed in a selected correspondence with at least one substrate electrode. A mirror element is provided, for at least one actuation element in at least one row of actuation elements, including an optically reflecting upper surface, and being vertically suspended over a corresponding actuation element by a mechanically constrained mirror support region that is connected to the corresponding actuation element and that defines a vertical mirror gap. A mirror deflection region connected to the mirror support region and is free to be deflected through the mirror gap. The mirror gap is less than the actuation gap of a corresponding actuation element and is selected to produce controlled and stable displacement of the actuation region of a corresponding actuation element through a displacement range to a specified point in the actuation gap when an actuation voltage is applied between an actuation region and a corresponding stationary electrode. This enables diffraction of a beam of light incident on the grating as the light beam is reflected from the upper surfaces of the mirror elements.

Abstract translation: 本发明提供了一种静电可控衍射光栅，其包括设置在基板上的多个电隔离和固定电极。 提供多个互连致动元件的至少一排，其中每个致动元件由对应的机械约束的支撑区域通过垂直致动间隙悬挂在衬底上，并且包括连接到对应的支撑区域的导电致动区域并且被布置 与至少一个衬底电极选择对应。 为至少一行致动元件中的至少一个致动元件设置一个镜元件，其包括光反射上表面，并且通过机械约束的反射镜支撑区域垂直悬挂在相应的致动元件上，该区域连接到相应的 致动元件并限定垂直反射镜间隙。 连接到镜支撑区域的镜面偏转区域，并且可自由地偏转穿过反射镜间隙。 反射镜间隙小于相应的致动元件的致动间隙，并且被选择为当施加致动电压时，相应的致动元件的致动区域通过位移范围到致动间隙中的指定点的受控且稳定的位移 在致动区域和相应的固定电极之间。 当光束从镜元件的上表面反射时，这使得入射在光栅上的光束的衍射成为可能。