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    BUNDLE-GUIDING OPTICAL COLLECTOR FOR COLLECTING THE EMISSION OF A RADIATION SOURCE
    11.
    发明申请
    BUNDLE-GUIDING OPTICAL COLLECTOR FOR COLLECTING THE EMISSION OF A RADIATION SOURCE 有权
    用于收集辐射源排放的组合光学收集器

    公开(公告)号：US20100231882A1

    公开(公告)日：2010-09-16

    申请号：US12726081

    申请日：2010-03-17

    Applicant: Udo Dinger ,  Christopher Weth

    Inventor： Udo Dinger ,  Christopher Weth

    IPC: G03B27/54 ,  G02B5/10 ,  G02B5/09 ,  G02B7/185

    CPC classification number: G03F7/70175 ,  G02B5/0891 ,  G02B5/09 ,  G03F7/70083 ,  G03F7/70116 ,  G03F7/702 ,  G21K2201/064

    Abstract: A bundle-guiding optical collector collects an emission of a radiation source and forms a radiation bundle from the collected emission. A reflective surface of the collector is the first bundle-forming surface downstream of the radiation source. The reflective surface is formed such that it converts the radiation source into a family of images in a downstream plane. The family of images includes a plurality of radiation source images which are offset to each other in two dimensions (x, y) in a direction perpendicular to the beam direction of the transformed radiation bundle and are arranged relative to each other in a non-rotationally symmetric manner relative to the beam direction of the transformed radiation bundle. The transformed radiation bundle in the downstream plane has a non-rotationally symmetric bundle edge contour relative to the beam direction of the transformed radiation bundle. The result is a collector in which the radiation bundle shape generated by the collector. In other words, the illumination distribution generated by the collector in a defined manner in the plane downstream of the collector has a shape which is freely selectable to the greatest possible extent.

    Abstract translation: 束引导光学收集器收集辐射源的发射并从收集的发射形成辐射束。 收集器的反射表面是辐射源下游的第一束形成表面。 反射表面形成为使得其在下游平面中将辐射源转换成一系列图像。 图像系列包括在垂直于变换辐射束的光束方向的方向上以二维（x，y）彼此偏移的多个辐射源图像，并且以非旋转方式相对于彼此布置 相对于变换辐射束的束方向的对称方式。 下游平面中的变换的辐射束相对于变换的辐射束的光束方向具有非旋转对称的束边缘轮廓。 其结果是由收集器产生的辐射束形状的收集器。 换句话说，集电体在集电体下游的平面中以规定的方式产生的照明分布具有可以最大可能地自由选择的形状。

    COLLECTOR FOR AN ILLUMINATION SYSTEM
    15.
    发明申请
    COLLECTOR FOR AN ILLUMINATION SYSTEM 有权
    收集器用于照明系统

    公开(公告)号：US20080018876A1

    公开(公告)日：2008-01-24

    申请号：US11781010

    申请日：2007-07-20

    Applicant: Ralf Stuetzle ,  Udo Dinger

    Inventor： Ralf Stuetzle ,  Udo Dinger

    IPC: G03B27/54 ,  G02B19/00

    CPC classification number: G21K1/06 ,  B82Y10/00 ,  G02B2207/123 ,  G03F7/70166

    Abstract: Collectors with mirror shells arranged inside each other, illumination systems equipped with such collectors, projection exposure apparatuses equipped with such illumination systems, methods of manufacturing microelectronic components with such projection exposure apparatuses, and related systems, components and methods are disclosed.

    Abstract translation: 公开了具有彼此布置的具有镜壳的收集器，配备有这种收集器的照明系统，配备有这种照明系统的投影曝光装置，具有这种投影曝光装置的微电子部件的制造方法以及相关系统，部件和方法。

    Method of manufacturing an optical element
    17.
    发明授权
    Method of manufacturing an optical element 有权
    制造光学元件的方法

    公开(公告)号：US07118449B1

    公开(公告)日：2006-10-10

    申请号：US10943952

    申请日：2004-09-20

    Applicant: Udo Dinger ,  Frank Eisert ,  Siegfried Stacklies ,  Martin Weiser ,  Guenther Seitz

    Inventor： Udo Dinger ,  Frank Eisert ,  Siegfried Stacklies ,  Martin Weiser ,  Guenther Seitz

    IPC: B24B49/00 ,  B24B51/00 ,  B24B1/00

    CPC classification number: B24B13/06 ,  B24B51/00

    Abstract: A method of manufacturing an optical element having an optical surface extending close to a periphery of a substrate comprises: providing a substrate having a main surface extending beyond a periphery of the optical surface and also performing a polishing of the optical surface in regions of the main surface extending beyond the optical surface. Thereafter, material of the substrate carrying a portion of the surface extending beyond the optical surface is removed.

    Abstract translation: 一种制造具有靠近基板周边延伸的光学表面的光学元件的方法包括：提供具有延伸超过光学表面的周边的主表面的基板，并且还在主体的区域中执行光学表面的抛光 表面延伸超出光学表面。 此后，去除承载延伸超过光学表面的表面的一部分的基板的材料。

    Reduction objective for extreme ultraviolet lithography
    18.
    发明授权
    Reduction objective for extreme ultraviolet lithography 有权
    极光紫外光刻的减量目标

    公开(公告)号：US06577443B2

    公开(公告)日：2003-06-10

    申请号：US09878697

    申请日：2001-06-11

    Applicant: Udo Dinger ,  Hans-Jürgen Mann

    Inventor： Udo Dinger ,  Hans-Jürgen Mann

    IPC: G02B510

    CPC classification number: G03F7/70358 ,  G02B17/0663 ,  G03F7/70233 ,  Y10S359/90

    Abstract: A reduction objective, a projection exposure apparatus with a reduction objective, and a method of use thereof are disclosed. The reduction objective has a first set of multilayer mirrors in centered arrangement with respect to a first optical axis, a second set of multilayer mirrors in centered arrangement with respect to a second optical axis, and an additional mirror disposed at grazing incidence, such that said additional mirror defines an angle between the first optical axis and said second optical axis. The reduction objective has an imaging reduction scale of approximately 4× for use in soft X-ray, i.e., EUV and UV, annular field projection applications, such as lithography

    Abstract translation: 公开了一种还原目标，具有还原目标的投影曝光装置及其使用方法。 还原物镜具有相对于第一光轴居中布置的第一组多层反射镜，相对于第二光轴居中布置的第二组多层反射镜，以及放置在入射处的附加镜，使得所述多层反射镜 另外的反射镜限定了第一光轴和所述第二光轴之间的角度。 还原目标具有用于软X射线（即EUV和UV）环形场投影应用中的大约4x的成像缩小比例，例如光刻

    Bundle-guiding optical collector for collecting the emission of a radiation source
    19.
    发明授权
    Bundle-guiding optical collector for collecting the emission of a radiation source 有权
    用于收集辐射源的发射的束引导光收发器

    公开(公告)号：US08934085B2

    公开(公告)日：2015-01-13

    申请号：US12726081

    申请日：2010-03-17

    Applicant: Udo Dinger ,  Christopher Weth

    Inventor： Udo Dinger ,  Christopher Weth

    IPC: G03B27/54 ,  G03F7/20 ,  G02B5/08 ,  G02B5/09

    CPC classification number: G03F7/70175 ,  G02B5/0891 ,  G02B5/09 ,  G03F7/70083 ,  G03F7/70116 ,  G03F7/702 ,  G21K2201/064

    Abstract: A bundle-guiding optical collector collects an emission of a radiation source and forms a radiation bundle from the collected emission. A reflective surface of the collector is the first bundle-forming surface downstream of the radiation source. The reflective surface is formed such that it converts the radiation source into a family of images in a downstream plane. The family of images includes a plurality of radiation source images which are offset to each other in two dimensions (x, y) in a direction perpendicular to the beam direction of the transformed radiation bundle and are arranged relative to each other in a non-rotationally symmetric manner relative to the beam direction of the transformed radiation bundle. The transformed radiation bundle in the downstream plane has a non-rotationally symmetric bundle edge contour relative to the beam direction of the transformed radiation bundle. The result is a collector in which the radiation bundle shape generated by the collector. In other words, the illumination distribution generated by the collector in a defined manner in the plane downstream of the collector has a shape which is freely selectable to the greatest possible extent.

    Abstract translation: 束引导光学收集器收集辐射源的发射并从收集的发射形成辐射束。 收集器的反射表面是辐射源下游的第一束形成表面。 反射表面形成为使得其在下游平面中将辐射源转换成一系列图像。 图像系列包括在垂直于变换辐射束的光束方向的方向上以二维（x，y）彼此偏移的多个辐射源图像，并且以非旋转方式相对于彼此布置 相对于变换辐射束的束方向的对称方式。 下游平面中的变换的辐射束相对于变换的辐射束的光束方向具有非旋转对称的束边缘轮廓。 其结果是由收集器产生的辐射束形状的收集器。 换句话说，集电体在集电体下游的平面中以规定的方式产生的照明分布具有可以最大可能地自由选择的形状。

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