摘要:
A hard carbon thin film formed on a substrate has a graded structure in which a ratio of sp2 to sp3 carbon-carbon bonding in the thin film decreases in its thickness direction from a thin film/substrate interface toward a surface of the thin film. A method of forming the thin film involves varying the film-forming ion species over time to produce the composition gradient or structural gradient in the thickness direction of the thin film.
摘要:
A surface acoustic wave device is disclosed which includes a piezoelectric substrate upon which a surface wave propagation film, which is comprised of a diamond-like carbon or aluminum nitride film, is provided.
摘要:
A member is disclosed which includes a hard carbon film provided through an interlayer or directly on a main body such as a vane. A mixed layer is formed within the main body or interlayer adjacent to an outer surface of the main body or interlayer. The mixed layer contains carbon and a constituent element of either the main body or the interlayer. The mixed layer has a carbon content gradient in its thickness direction so that a carbon content in a thickness portion thereof closer to an outer surface of the mixed layer is higher than in a thickness portion thereof remoter from the outer surface of the mixed layer.
摘要:
A sliding member having a sliding surface for sliding contact with a cooperative member is disclosed. A protective film is deposited not only on the sliding surface but also a surface region immediately adjacent the sliding surface such that a ratio d1/d2 is controlled to be 1 or greater, where d1 is a thickness of the protective film on the sliding surface and d2 is a thickness of the protective film on the surface region immediately adjacent the sliding surface. Alternatively, the protective film is deposited at least on the sliding surface such that the protective film is varied in thickness to define an irregular top surface.
摘要:
A member is disclosed which includes a hard carbon film provided through an interlayer or directly on a main body such as a vane. A mixed layer is formed within the main body or interlayer adjacent to an outer surface of the main body or interlayer. The mixed layer contains carbon and a constituent element of either the main body or the interlayer. The mixed layer has a carbon content gradient in its thickness direction so that a carbon content in a thickness portion thereof closer to an outer surface of the mixed layer is higher than in a thickness portion thereof remoter from the outer surface of the mixed layer.
摘要:
A hard carbon thin film formed on a substrate has a graded structure in which a ratio of sp.sup.2 to sp.sup.3 carbon-carbon bonding in the thin film decreases in its thickness direction from a thin film/substrate interface toward a surface of the thin film.
摘要:
A thin film magnetic head includes a magnetoresistive element portion movable over and relative to a magnetic recording medium for reading information stored therein, upper and lower shielding layers disposed with the magnetoresistive element portion therebetween for magnetically shielding the magnetoresistive element portion, and upper and lower gap insulative layers respectively interposed between the upper shielding layer and the magnetoresistive element portion and between the lower shielding layer and the magnetoresistive element portion. Each of the upper and lower gap insulative layers includes a hydrogen-incorporated film. The upper gap insulative layer has an increased hydrogen content and a reduced internal stress relative to the lower gap insulative layer.
摘要:
An electrode for a lithium battery having a thin film composed of active material capable of lithium storage and release, e.g., a microcrystalline or amorphous silicon thin film, provided on a current collector, the electrode being characterized in that the current collector has a surface roughness Ra of 0.01 μm or greater.
摘要:
An electrode for lithium batteries, in which a thin film of active material capable of storage and release of lithium, such as a microcrystalline or amorphous silicon thin film, is provided, through an interlayer, on a current collector, the electrode being characterized in that the interlayer comprises a material alloyable with the thin film of active material.
摘要:
An apparatus, for forming an electrode for a lithium secondary cell capable of readily forming an active material layer constituted by at least two elements and controlling the composition of the active material layer, comprises a first sputtering source for sputtering a first material forming the active material layer onto the surface of the collector and a second sputtering source for sputtering a second material forming the active material layer onto the surface of the collector. Plasma regions of the first and second sputtering sources are arranged to overlap each other. The active material layer constituted by at least two elements is readily formed with excellent reproducibility, and its composition can be readily controlled by independently controlling power applied to the first sputtering source and the second sputtering source.