公开(公告)号：US20150200350A1

公开(公告)日：2015-07-16

申请号：US14152899

申请日：2014-01-10

申请人： Arman Hajati ,  Ut Tran ,  Darren Imai ,  Martin Schoeppler

发明人： Arman Hajati ,  Ut Tran ,  Darren Imai ,  Martin Schoeppler

IPC分类号： H01L41/053 ,  H01L41/25 ,  H01L41/33 ,  H01L41/047 ,  B06B1/06

CPC分类号： B06B1/0622 ,  B06B1/0688 ,  H01L41/098 ,  H01L41/313 ,  H01L41/331 ,  Y10T29/42

摘要： Techniques and mechanisms to provide mechanical support for a micromachined piezoelectric transducer array. In an embodiment, a transducer array includes transducer elements each comprising a respective membrane portion and a respective supporting structure disposed on or around a periphery of that membrane portion. The transducer elements are initially formed on a sacrificial wafer, wherein supporting structures of the transducer elements facilitate subsequent removal of the sacrificial wafer and/or subsequent handling of the transducer elements. In another embodiment, a polymer layer is disposed on the transducer elements to provide for flexible support during such subsequent handling.

摘要翻译： 为微加工压电换能器阵列提供机械支撑的技术和机制。 在一个实施例中，换能器阵列包括换能器元件，每个换能器元件包括设置在该膜部分的周边上或周围的相应的膜部分和相应的支撑结构。 换能器元件最初形成在牺牲晶片上，其中换能器元件的支撑结构有助于随后去除牺牲晶片和/或随后处理换能器元件。 在另一个实施方案中，聚合物层设置在换能器元件上以在随后的处理期间提供柔性支撑。

公开(公告)号：US08488272B1

公开(公告)日：2013-07-16

申请号：US13433587

申请日：2012-03-29

申请人： Ut Tran ,  Zhigang Bai ,  Kevin K. Lin

发明人： Ut Tran ,  Zhigang Bai ,  Kevin K. Lin

IPC分类号： G11B5/127

CPC分类号： G11B5/315 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A magnetic recording transducer includes a main pole including a nose portion, the nose portion terminating at an air-bearing surface (ABS). The magnetic recording transducer further includes at least one coil having a coil front distal from the ABS, and at least one side shield, the at least one side shield extending from at the ABS to not further than the coil front.

摘要翻译： 磁记录传感器包括一个主极，其包括一个鼻部，鼻部终止在空气轴承表面（ABS）处。 磁记录传感器还包括至少一个线圈，其具有远离ABS的线圈前端，以及至少一个侧屏蔽，所述至少一个侧屏蔽件从ABS延伸到不超过线圈前端。

公开(公告)号：US08077434B1

公开(公告)日：2011-12-13

申请号：US11942113

申请日：2007-11-19

申请人： Yong Shen ,  Lei Larry Zhang ,  Yingjian Chen ,  Ut Tran

发明人： Yong Shen ,  Lei Larry Zhang ,  Yingjian Chen ,  Ut Tran

IPC分类号： G11B5/147

CPC分类号： G11B5/1278 ,  G11B5/3116

摘要： A method and system for providing a magnetic transducer having an air-bearing surface (ABS) are described. The magnetic transducer includes a base layer, a perpendicular magnetic recording (PMR) pole on the base layer, an additional pole, a write shield, a write gap between the PMR pole and a portion of the write shield, and coil(s) that energize at least the additional pole. The base layer includes a first portion proximate to the ABS and a second portion recessed from the ABS. The first portion is nonmagnetic, while the second portion is magnetic. The PMR pole has a first front portion proximate to the ABS. The additional pole has a second front portion recessed from the ABS. At least a portion of the additional pole resides between the PMR pole and write shield. At least a portion of the write gap resides on the front portion of the PMR pole.

摘要翻译： 描述了一种用于提供具有空气轴承表面（ABS）的磁换能器的方法和系统。 磁换能器包括基层，基层上的垂直磁记录（PMR）极，附加极，写屏蔽，PMR极与写屏蔽的一部分之间的写间隙，以及线圈， 至少激励附加极点。 基层包括靠近ABS的第一部分和从ABS凹陷的第二部分。 第一部分是非磁性的，而第二部分是磁性的。 PMR杆具有靠近ABS的第一前部。 附加的杆具有从ABS凹入的第二前部。 附加极点的至少一部分位于PMR极和写保护罩之间。 写入间隙的至少一部分位于PMR极的前部。

公开(公告)号：US20090226135A1

公开(公告)日：2009-09-10

申请号：US12454059

申请日：2009-05-12

申请人： Ut Tran ,  Hamid Eslampour

发明人： Ut Tran ,  Hamid Eslampour

IPC分类号： G02B6/42

CPC分类号： G02B6/4232 ,  G02B6/422 ,  G02B6/4227 ,  G02B6/423 ,  H01S5/0224 ,  H01S5/02268 ,  H01S5/02272

摘要： Optical components may be precisely positioned in three dimensions with respect to one another. A bonder which has the ability to precisely position the components in two dimensions can be utilized. The components may be equipped with contacts at different heights so that as the components come together in a third dimension, their relative positions can be sensed. This information may be fed back to the bonder to control the precise alignment in the third dimension.

摘要翻译： 光学部件可以相对于彼此精确地定位在三维空间中。 可以利用具有将二次元件精确定位的能力的接合器。 组件可以配备有不同高度的触点，使得当组件在第三维度中组合时，可以感测它们的相对位置。 该信息可以反馈到接合器以控制第三维度中的精确对准。

公开(公告)号：US10586912B2

公开(公告)日：2020-03-10

申请号：US15353695

申请日：2016-11-16

申请人： Dimitre Latev ,  Arman Hajati ,  Darren Todd Imai ,  Ut Tran

发明人： Dimitre Latev ,  Arman Hajati ,  Darren Todd Imai ,  Ut Tran

IPC分类号： H01L41/04 ,  H01L41/29 ,  B32B37/14 ,  B06B1/06 ,  H01L41/047 ,  H01L41/09 ,  B32B37/12 ,  B32B37/18

摘要： A plurality of transducer elements are formed. For each of the plurality of transducer elements, an electrode of the transducer element is formed on a first side of a support layer. A piezoelectric element of the transducer element is formed on the first side of the support layer. An interconnect of the transducer element is formed in the support layer. The support layer is thinned to expose a second side of the support layer. The interconnects of the plurality of transducer elements extend between the first side and the second side of the support layer. The second side of the support layer is bonded to a flexible layer with an adhesive material. Conductive fillers are disposed in the adhesive material. The interconnects of the plurality of transducer elements are each electrically coupled via the conductive fillers to the corresponding interconnect extending through the flexible layer.

公开(公告)号：US09604255B2

公开(公告)日：2017-03-28

申请号：US14152899

申请日：2014-01-10

申请人： Arman Hajati ,  Ut Tran ,  Darren Todd Imai ,  Martin Schoeppler

发明人： Arman Hajati ,  Ut Tran ,  Darren Todd Imai ,  Martin Schoeppler

IPC分类号： H01L41/33 ,  B06B1/06 ,  H01L41/09 ,  H01L41/313 ,  H01L41/331

CPC分类号： B06B1/0622 ,  B06B1/0688 ,  H01L41/098 ,  H01L41/313 ,  H01L41/331 ,  Y10T29/42

摘要： Techniques and mechanisms to provide mechanical support for a micromachined piezoelectric transducer array. In an embodiment, a transducer array includes transducer elements each comprising a respective membrane portion and a respective supporting structure disposed on or around a periphery of that membrane portion. The transducer elements are initially formed on a sacrificial wafer, wherein supporting structures of the transducer elements facilitate subsequent removal of the sacrificial wafer and/or subsequent handling of the transducer elements. In another embodiment, a polymer layer is disposed on the transducer elements to provide for flexible support during such subsequent handling.

公开(公告)号：US20150158052A1

公开(公告)日：2015-06-11

申请号：US14103672

申请日：2013-12-11

申请人： Dimitre Latev ,  Arman Hajati ,  Darren Todd Imai ,  Ut Tran

发明人： Dimitre Latev ,  Arman Hajati ,  Darren Todd Imai ,  Ut Tran

IPC分类号： B06B1/02 ,  B06B1/06 ,  H01L41/04 ,  B32B37/24

CPC分类号： H01L41/042 ,  B06B1/0622 ,  B32B37/12 ,  B32B37/185 ,  B32B2457/00 ,  H01L41/0475 ,  H01L41/098 ,  H01L41/29 ,  Y10T156/10

摘要： Techniques and structures for providing flexibility of a micromachined transducer array. In an embodiment, a transducer array includes a plurality of transducer elements each comprising a piezoelectric element and one or more electrodes disposed in or on a support layer. The support layer is bonded to a flexible layer including a polymer material, wherein flexibility of the transducer array results in part from a total thickness of a flexible layer. In another embodiment, flexibility of the transducer array results in part from one or more flexural structures formed therein.

摘要翻译： 提供微机械传感器阵列的灵活性的技术和结构。 在一个实施例中，换能器阵列包括多个换能器元件，每个换能器元件包括压电元件和设置在支撑层中或支撑层上的一个或多个电极。 支撑层结合到包括聚合物材料的柔性层，其中换能器阵列的灵活性部分地来自柔性层的总厚度。 在另一个实施例中，换能器阵列的灵活性部分地由其中形成的一个或多个弯曲结构导致。

公开(公告)号：US08277669B1

公开(公告)日：2012-10-02

申请号：US12643954

申请日：2009-12-21

申请人： Tsung Yuan Chen ,  Yimin Guo ,  Jinqiu Zhang ,  Ut Tran

发明人： Tsung Yuan Chen ,  Yimin Guo ,  Jinqiu Zhang ,  Ut Tran

IPC分类号： B44C1/22

CPC分类号： G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49046

摘要： A method and system for providing a pole of magnetic transducer having an air-bearing surface (ABS) are described. Leading shield and planarization stop layers are provided. Portions of the planarization stop and shield layers distal from the ABS location are removed, providing a depression forming a bevel. The bevel has an angle greater than zero and less than ninety degrees. An intermediate layer having a top surface substantially perpendicular to the ABS location is provided. Part of the intermediate layer is removed, forming a trench having a bottom corresponding to the leading shield and a location and profile corresponding to the pole. A nonmagnetic layer is provided at least partially in the trench. The pole with a leading edge bevel corresponding to the bevel is provided in the trench. A capping layer covering the pole is provided, at least part of the intermediate layer removed, and a wrap-around shield provided.

摘要翻译： 描述了一种用于提供具有空气轴承表面（ABS）的磁换能器极的方法和系统。 提供了领先的屏蔽和平坦化停止层。 除去远离ABS位置的平坦化停止和屏蔽层的部分，提供形成斜面的凹陷。 斜面角度大于零，小于九十度。 提供具有基本上垂直于ABS位置的顶表面的中间层。 中间层的一部分被去除，形成具有对应于前屏蔽的底部的沟槽和对应于极的位置和轮廓。 至少部分地在沟槽中提供非磁性层。 在沟槽中设置有与斜面相对应的前缘斜面的极。 提供覆盖极的覆盖层，去除中间层的至少一部分和设置的环绕护罩。

公开(公告)号：US07359608B2

公开(公告)日：2008-04-15

申请号：US11586790

申请日：2006-10-26

申请人： Ut Tran ,  David A. G. Deacon ,  Shing Man Lee

发明人： Ut Tran ,  David A. G. Deacon ,  Shing Man Lee

IPC分类号： G02B6/10

CPC分类号： G02B6/136 ,  G02B6/1221 ,  G02B2006/12097 ,  G02B2006/12176

摘要： A well may be formed for access to an optical waveguide core by a process that results in an L-shaped well. The L-shaped well may then be filled with a polymer. By controlling the size of each portion of well, the occurrence of bubbles within the well and cuts to the core may be reduced.

摘要翻译： 可以形成用于通过导致L形阱的工艺来访问光波导芯的阱。 然后可以用聚合物填充L形孔。 通过控制井的每个部分的尺寸，可以减少井内气泡的发生以及对芯的切割。

公开(公告)号：US20060285106A1

公开(公告)日：2006-12-21

申请号：US11497954

申请日：2006-08-01

申请人： Achintya Bhowmik ,  Nagesh Vodrahalli ,  Gennady Farber ,  Hai-Feng Liu ,  Hamid Eslampour ,  Ut Tran ,  William Wong ,  Ruolin Li ,  Jesper Jayaswal

发明人： Achintya Bhowmik ,  Nagesh Vodrahalli ,  Gennady Farber ,  Hai-Feng Liu ,  Hamid Eslampour ,  Ut Tran ,  William Wong ,  Ruolin Li ,  Jesper Jayaswal

IPC分类号： G01N21/00

CPC分类号： H01S5/141 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01S5/02248 ,  H01S5/0268 ,  H01S5/0683 ,  H01S5/4062 ,  H01S5/4087 ,  H01L2924/00014

摘要： Embodiments of an optical detection apparatus are disclosed which may include one or more of a waveguide, a trench formed in the waveguide, a reflective surface, and a photodetector. The waveguide may be formed in a semiconductor substrate to propagate an optical signal received at a first end of the waveguide. The trench may also be formed in the waveguide having a first sidewall and a second sidewall, the first and second sidewalls forming first and second angles with the waveguide's propagation direction. The second sidewall may include a reflective surface formed thereon. The photodetector may be configured to receive an optical signal propagated in the waveguide, through the first sidewall and reflected from the reflective surface on the second sidewall.

摘要翻译： 公开了一种光学检测装置的实施例，其可以包括波导，在波导中形成的沟槽，反射表面和光电检测器中的一个或多个。 波导可以形成在半导体衬底中，以传播在波导的第一端处接收的光信号。 沟槽也可以形成在具有第一侧壁和第二侧壁的波导中，第一和第二侧壁与波导的传播方向形成第一和第二角度。 第二侧壁可以包括形成在其上的反射表面。 光电检测器可以被配置为接收在波导中传播的光信号，通过第一侧壁并从第二侧壁上的反射表面反射。