Dilute chemical supply device
    13.
    发明授权

    公开(公告)号:US12030024B2

    公开(公告)日:2024-07-09

    申请号:US17637668

    申请日:2020-09-15

    Inventor: Hideaki Iino

    Abstract: The dilute chemical solution supply device (1) comprises: a dilute chemical solution preparation unit (2) that prepares a dilute chemical solution (W1); a reservoir (3) for the prepared dilute chemical solution; a dilute chemical solution adjustment/supply mechanism (4) that supplies, as washing water (W2), the dilute chemical solution (W1) stored in the reservoir (3) to a plurality of single-wafer type washers (5A, 5B, and 5C); and a return mechanism that is connected to each of the single-wafer type washers (5A, 5B, and 5C) and refluxes excess water from the single-wafer type washers to the reservoir (3). According to such a dilute chemical solution supply device, it is possible to accurately adjust the concentration of the solute of the dilute chemical solution and suppress the discharge of excess water, and the dilute chemical solution supply device is thus suitable for washing of wafers, etc.

    DETERMINATION OF A PROPERTY OF A FIBER SUSPENSION

    公开(公告)号:US20240003086A1

    公开(公告)日:2024-01-04

    申请号:US18253117

    申请日:2021-11-19

    Abstract: A method for determining a property of a fiber suspension comprises obtaining a sample and diluting the sample by a first dilution, thereby providing a diluted sample, while retaining essentially all of the sample, and mixing the diluted sample, thereby providing a mixed, diluted sample. By removing part of the mixed, diluted sample and retaining an amount of the mixed, diluted sample, further diluting the mixed, diluted sample by adding dilution water to the retained amount of the mixed, diluted sample, thereby providing a further diluted sample, while retaining essentially all of the mixed, diluted sample, mixing the further diluted sample, thereby providing a mixed, further diluted sample, and repeating these steps until the concentration is suitable for measuring the property of the further diluted sample, this property can be measured with high accuracy. A device for determining a property to be determined of a suspension is also provided.

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