System and Method for Measuring Thermal Degradation of Composites
    11.
    发明申请
    System and Method for Measuring Thermal Degradation of Composites 有权
    用于测量复合材料热降解的系统和方法

    公开(公告)号:US20170074782A1

    公开(公告)日:2017-03-16

    申请号:US14855892

    申请日:2015-09-16

    Abstract: A system for measuring thermal degradation of composites, may include a housing having an interior with an opening shaped to expose a test area of the composite to be tested to the interior; a light-emitting diode that emits primarily ultraviolet radiation, the diode mounted on the housing to direct the ultraviolet radiation into the interior and through the opening; an image sensor mounted on the housing and open to the interior to receive radiation emitted from the test area passing through the opening into the interior; and an image processor connected to receive a signal from the image sensor, the image processor determining a presence or absence of thermal degradation of the test area in response to the signal.

    Abstract translation: 用于测量复合材料的热降解的系统可以包括具有内部的壳体,该内部具有成形为将要测试的复合材料的测试区域暴露于内部的开口; 主要发射紫外线的发光二极管,安装在壳体上的二极管将紫外线辐射引导到内部并穿过开口; 安装在壳体上并且向内部开口的图像传感器,用于接收从穿过开口进入内部的测试区域发射的辐射; 以及连接成从图像传感器接收信号的图像处理器,所述图像处理器响应于所述信号确定所述测试区域的热劣化的存在与否。

    METHOD AND SYSTEM FOR IMAGING A TARGET
    12.
    发明申请
    METHOD AND SYSTEM FOR IMAGING A TARGET 有权
    用于成像目标的方法和系统

    公开(公告)号:US20160054221A1

    公开(公告)日:2016-02-25

    申请号:US14463004

    申请日:2014-08-19

    Abstract: A system for characterizing a bi-directional reflectance distribution function scattered light pattern of a portion of a sample is disclosed. The system can comprise a hemispherical member comprising an reflective inner surface; an entrance port operable to receive electromagnetic radiation from an electromagnetic radiation source; a first reflective optical element operable to receive at least a portion of the electromagnetic radiation and to direct the at least the portion of the electromagnetic radiation onto the portion of the sample to be characterized; a wide-angle lens operable receive the electromagnetic radiation that was specularly reflected and diffusely scattered from the portion of the sample onto the inner surface of the hemispherical member; and an imaging device operable to record intensity information imaged by the wide-angle lens to characterize the bi-directional reflectance distribution function scattered light pattern of the portion of the sample.

    Abstract translation: 公开了一种用于表征样品的一部分的双向反射分布函数散射光图案的系统。 该系统可以包括半球形构件,其包括反射内表面; 入口端口,其可操作以从电磁辐射源接收电磁辐射; 第一反射光学元件,其可操作以接收所述电磁辐射的至少一部分并且将所述电磁辐射的至少一部分引导到要表征的所述样品的所述部分上; 广角镜可操作地接收从样品部分镜面反射和漫射散射到半球形构件的内表面上的电磁辐射; 以及成像装置,其可操作以记录由广角镜头成像的强度信息,以表征样品部分的双向反射分布函数散射光图案。

    OPTICAL CHARACTERISTIC MEASURING APPARATUS
    14.
    发明申请
    OPTICAL CHARACTERISTIC MEASURING APPARATUS 有权
    光学特性测量装置

    公开(公告)号:US20140002825A1

    公开(公告)日:2014-01-02

    申请号:US14003201

    申请日:2012-03-08

    Abstract: In an apparatus for measuring an optical characteristic of a sample, one object of the present invention is to provide an apparatus capable of measuring hemispherical total reflectance, hemispherical total transmittance, and light distribution, and to achieve a reduction in measurement time and an improvement in precision of the quantitative analysis of hemispherical total reflectance (transmittance). In a double ellipsoidal optical system which is an optical system in which one focal points of two ellipsoidal mirrors are positioned as a common focal point, and three focal points are aligned in a straight line, the double ellipsoidal optical system is composed of a partial ellipsoidal mirror 2, such as a quarter ellipsoidal mirror, and a belt-shape ellipsoidal mirror 1. By disposing, on a position of a focal point of the partial ellipsoidal mirror, a hemispherical detection optical system having a hemispherical lens or a rotational parabolic mirror, light scattered by an object, reflected by the partial ellipsoidal mirror, and focused on the point is photographed by for example a CCD camera 6 via a hemispherical lens and a taper fiber 5 so as to measure an optical characteristic of the object.

    Abstract translation: 在用于测量样品的光学特性的装置中,本发明的一个目的是提供一种能够测量半球形全反射率,半球形全透射率和光分布的装置,并且实现测量时间的减少和改进 精确定量分析了半球全反射率(透射率)。 在双椭圆光学系统中,两个椭圆面镜的一个焦点被定位为公共焦点并且三个焦点以直线对准的光学系统,双椭圆体光学系统由部分椭圆体 镜子2,例如四分之一椭圆镜和带状椭圆面镜1.通过在半椭球镜的焦点的位置上设置半球形检测光学系统,该半球形检测光学系统具有半球形透镜或旋转抛物面镜, 通过半球形透镜和锥形光纤5,通过例如CCD照相机6拍摄被物体散射的物体,被部分椭球镜反射并聚焦在该点上的光,以测量物体的光学特性。

    Spectroscopic ellipsometers
    15.
    发明授权
    Spectroscopic ellipsometers 有权
    光谱椭圆仪

    公开(公告)号:US07999949B2

    公开(公告)日:2011-08-16

    申请号:US11739679

    申请日:2007-04-24

    Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. A method is disclosed for extracting information of a device-under-test for an ellipsometer, comprising the steps: providing a plurality of incoming polarized beams using a plurality of polarizers, where each of the beams being polarized at a designated polarizing angle; using a parabolic reflector to focus said plurality of incoming polarized beams on a spot on a DUT; using a parabolic reflector to collect a plurality of beams reflected from said DUT; and analyzing said collected beams using a plurality of analyzers, wherein each of the analyzers having a designated polarizing angle with respect to its respective polarizer.

    Abstract translation: 本发明公开了一种光学测量和/或检查装置,其在一个应用中可用于半导体器件的检查。 公开了一种用于提取椭偏仪的未测试装置的信息的方法,包括以下步骤:使用多个偏振器提供多个入射偏振光束,其中每个光束以指定的偏振角极化; 使用抛物面反射器将所述多个入射偏振光束聚焦在DUT上的点上; 使用抛物面反射器收集从所述DUT反射的多个光束; 以及使用多个分析器分析所述收集的束,其中每个分析器相对于其各自的偏振器具有指定的偏振角。

    ABSORPTION SPECTROSCOPY APPARATUS AND METHOD
    16.
    发明申请
    ABSORPTION SPECTROSCOPY APPARATUS AND METHOD 有权
    吸收光谱仪和方法

    公开(公告)号:US20080252892A1

    公开(公告)日:2008-10-16

    申请号:US12101557

    申请日:2008-04-11

    Abstract: An absorption spectroscopy apparatus including an elliptical mirror centered on the midpoint between a source/detector and a mirror. The cavity between the elliptical mirror and the source/bolometer and mirror defines an interior volume of a sample cell. Electromagnetic radiation from the source/detector travels along a multi-segment path starting from the source/bolometer toward the elliptical mirror, reflecting off of the elliptical mirror and traveling toward the mirror, reflecting off of the mirror and traveling back toward the elliptical mirror and finally reflecting off the elliptical mirror for a second time and returning toward the source/bolometer. The multiple reflections combined with the focusing effects of the elliptical mirrored surface result in an efficient sampling device. Among other aspects and advantages, the apparatus of the present disclosure is able to use incoherent, non-collimated light sources while maintaining high optical throughput efficiencies.

    Abstract translation: 一种吸收光谱仪,包括以源/检测器和反射镜之间的中点为中心的椭圆镜。 椭圆镜和源/测辐射热计和反射镜之间的空腔限定了样品池的内部体积。 来自/检测器的电磁辐射沿着从光源/测辐射热计朝着椭圆镜开始的多段路径行进,从椭圆镜反射离开并朝向反射镜行进,反射离开反射镜并朝向椭圆镜返回, 终于从椭圆镜反射了第二次,并返回到源头/测辐射热计。 多重反射与椭圆形镜面的聚焦效应相结合形成了一种高效的采样装置。 除了其它方面和优点之外,本公开的装置能够使用非相干的非准直光源,同时保持高的光通量效率。

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