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    High speed laser scanning inspection system
    11.
    发明授权
    High speed laser scanning inspection system 有权
    高速激光扫描检测系统

    公开(公告)号：US07365836B2

    公开(公告)日：2008-04-29

    申请号：US11317156

    申请日：2005-12-22

    Applicant: Daniel Some

    Inventor： Daniel Some

    IPC: G01N21/00

    CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

    Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

    Abstract translation: 光学检查系统通过打破时间或空间相干性，通过使用相干激光束照射大于衍射受限点的基板的面积来快速评估基板。 来自锁模激光源的皮秒或飞秒脉冲被分割成时间上和/或频率分散的多个空间上分离的子束，然后聚焦到衬底上的多个点上。 可以重叠高达约60-70％的相邻斑点在不同的时间或不同的频率被照亮，并且不产生相互干扰的相干效应。 在系统的不同实施例中，明场和暗场检测方案以各种组合使用。

    Optical technique for detecting buried defects in opaque films
    15.
    发明申请
    Optical technique for detecting buried defects in opaque films 有权
    用于检测不透明膜中的埋藏缺陷的光学技术

    公开(公告)号：US20030206292A1

    公开(公告)日：2003-11-06

    申请号：US10423354

    申请日：2003-04-25

    Applicant: Applied Materials Israel Ltd

    Inventor： Daniel Some

    IPC: G01N021/00

    CPC classification number: G01N21/956 ,  G01N21/171 ,  G01N21/636 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

    Abstract: A local area of a sample is focally heated to produce a transient physical deformation. The surface of the structure is optically monitored while the heated area cools to a baseline temperature by illuminating the heated region with one or more probe beams from time to time and detecting returning light. In some embodiments heat dissipation within the structure is correlated with change in optical reflectivity over time. In other embodiments, surface deformation of the structure is correlated with changes in light scattering from the surface. Following application of a pump pulse and no more than 3 probe pulses, a time varying returning light signal is compared with a corresponding returning light signal from a reference. An anomaly in the sample is indicated by a deviation between the two signals. First-degree exponential decay curves may be constructed from the signals, and their decay constants compared.

    Abstract translation: 样品的局部区域被加热以产生瞬态物理变形。 通过光学监测结构的表面，同时通过用不同时间的一个或多个探测光束照射加热区域并检测返回光来将加热区域冷却至基线温度。 在一些实施例中，结构内的散热与随时间的光学反射率的变化相关。 在其他实施例中，结构的表面变形与来自表面的光散射的变化相关。 在施加泵浦脉冲和不超过3个探针脉冲之后，将时变返回光信号与来自参考的相应返回光信号进行比较。 样本中的异常由两个信号之间的偏差表示。 可以根据信号构造一阶指数衰减曲线，并比较其衰减常数。

    Fluorescence detection device
    18.
    发明授权
    Fluorescence detection device 有权
    荧光检测装置

    公开(公告)号：US09523641B2

    公开(公告)日：2016-12-20

    申请号：US14405491

    申请日：2013-06-11

    Applicant: Sharp Kabushiki Kaisha

    Inventor： Ryohhei Kawamuki

    IPC: G01N21/64 ,  G01N27/44 ,  G01N27/447

    CPC classification number: G01N21/6456 ,  G01N21/6486 ,  G01N27/44721 ,  G01N27/44778 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/101 ,  G01N2201/104

    Abstract: A scanning module (9) is disposed over a first plate (32). A first motor (39) of moving the scanning module (9) in a second scanning direction and a second motor (49) of moving the scanning module (9) in a first scanning direction are disposed under the first plate (32). In this manner, the first motor (39) and the second motor (49) being a heat source are disposed on a side opposite to a scanning module (9) side using the first plate (32) as a boundary, and thus a transferred amount of heat from the first motor (39) and the second motor (49) to the scanning module (9) decreases. As a result, accuracy of fluorescence detection is prevented from degrading due to thermal distortion of a detection optical system in the scanning module (9).

    Abstract translation: 扫描模块（9）设置在第一板（32）上。 在第一扫描方向上移动扫描模块（9）的第一马达（39）和沿第一扫描方向移动扫描模块（9）的第二马达（49）设置在第一板（32）的下方。 以这种方式，作为热源的第一马达39和第二马达49利用第一板32作为边界设置在与扫描模块9相反的一侧，由此转移 从第一马达39和第二马达49到扫描模块9的热量减少。 结果，由于扫描模块（9）中的检测光学系统的热失真，防止荧光检测的精度降低。

    SYSTEM AND METHOD FOR SURFACE INSPECTION
    19.
    发明申请
    SYSTEM AND METHOD FOR SURFACE INSPECTION 有权
    用于表面检测的系统和方法

    公开(公告)号：US20160069820A1

    公开(公告)日：2016-03-10

    申请号：US14665748

    申请日：2015-03-23

    Applicant: GENERAL ELECTRIC COMPANY

    Inventor： Manuel Kenneth Bueno ,  Robert Martin Roney, Jr.

    IPC: G01N21/954 ,  G01N21/88 ,  G01S17/89

    CPC classification number: G01N21/8851 ,  G01N21/88 ,  G01N21/954 ,  G01N2021/9544 ,  G01N2021/9546 ,  G01N2021/9548 ,  G01N2201/06113 ,  G01N2201/104 ,  G01N2201/1045 ,  G01S7/4815 ,  G01S7/4817 ,  G01S7/4818 ,  G01S17/88 ,  G01S17/89

    Abstract: A system includes a vessel floating on a body of water. The system also includes at least one conduit extending from the vessel to below the body of water. The system also includes a scanning device disposed within the at least one conduit. The scanning device includes at least one two-dimensional (2D) line scanner and a rotary encoder coupled to the at least one 2D line scanner. The scanning device is configured to generate three-dimensional (3D) image data of a surface of the at least one conduit or at least one component disposed within the at least one conduit.

    Abstract translation: 系统包括浮在水体上的船只。 该系统还包括从容器延伸到水体下方的至少一个导管。 该系统还包括设置在至少一个导管内的扫描装置。 扫描装置包括至少一个二维（2D）线扫描器和耦合到至少一个2D线扫描器的旋转编码器。 扫描装置被配置为生成至少一个管道的表面或设置在至少一个管道内的至少一个部件的表面的三维（3D）图像数据。

    SCANNING ILLUMINATING DEVICE, IMAGING DEVICE COMPRISING SAME AND METHOD OF IMPLEMENTATION
    20.
    发明申请
    SCANNING ILLUMINATING DEVICE, IMAGING DEVICE COMPRISING SAME AND METHOD OF IMPLEMENTATION 有权
    扫描照明装置，包含其的成像装置和实现方法

    公开(公告)号：US20150346120A1

    公开(公告)日：2015-12-03

    申请号：US14653001

    申请日：2013-12-18

    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

    Inventor： Rene VOGLER

    IPC: G01N23/203 ,  H04N5/33 ,  G01N21/47 ,  G21K1/02 ,  G01N21/59 ,  H04N5/32 ,  G01N23/04

    CPC classification number: G01N23/203 ,  G01N21/47 ,  G01N21/59 ,  G01N23/04 ,  G01N2201/104 ,  G01N2223/314 ,  G01N2223/3301 ,  G01N2223/335 ,  G21K1/02 ,  G21K1/043 ,  H04N5/32 ,  H04N5/33

    Abstract: A scanning illuminating device includes an emission centre from which radiation is emitted in an illuminating sector. A cylindrical ring is centred on the source and is rotatably movable about a first axis. The ring includes a plurality of slits regularly distributed about its axis of rotation and having the same angular amplitude α. A cylinder portion is centred on the source and is rotatably movable about a second axis crossing the first axis at the centre and forming a nonzero angle therewith. The cylinder portion includes a slit having an angular amplitude β. A first device control of the rotation of the ring, defining an elementary angular step αα such that an integer N1 other than 1 meets the condition α=N1.αα. A second device controls the rotation of the ring portion defining an angular step ββ such that an integer N2 other than 1 meets the condition β=N2.ββ.

    Abstract translation: 扫描照明装置包括在照明扇区中从其发射辐射的发射中心。 圆柱形环在源体上居中并且可围绕第一轴线可旋转地移动。 环包括围绕其旋转轴规则分布并且具有相同角度振幅α的多个狭缝。 圆筒部分以源为中心，并且可围绕中心与第一轴线交叉的第二轴线可旋转地移动，并与其形成非零的角度。 圆筒部分包括具有角度振幅＆amp; bgr的狭缝。 环的旋转的第一设备控制，定义基本角度步长αα使得除了1以外的整数N1满足条件α=N1.αα。 第二装置控制环形部分的旋转，该环部分限定角度步长＆bgr; 使得除1之外的整数N满足条件＆bgr; = N2。＆bgr;＆bgr;

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