公开(公告)号：US20170097438A1

公开(公告)日：2017-04-06

申请号：US15311937

申请日：2015-05-22

Applicant: Gerd REIME

Inventor： Gerd REIME

IPC: G01V3/10 ,  G01N27/02

CPC classification number: G01V3/10 ,  G01N27/028 ,  G01N27/62 ,  G01N27/64 ,  G01R27/00 ,  G01R27/26 ,  G01R27/2611 ,  G01R27/267 ,  H01J41/00 ,  H01J41/02

Abstract: In a method for determining at least one physical parameter, a sensor unit which is activated by at least one periodic excitation (1.4) is provided, wherein the sensor unit has at least one detection region in which changes of the parameter in the surroundings of the sensor unit lead to output signal (1.7) from the sensor unit. The sensor unit is wired such that if there are no changes of the parameter in the detection region the output signal (1.7) is a zero signal or virtually a zero signal at the output of the sensor unit, whereas if there are changes of the parameter in the detection region the output signal (1.7) is a signal that is not zero and has a specific amplitude and phase. In a closed control loop, the non-zero signal in the receive path is adjusted to zero using a control signal to achieve an adjusted state even in the presence of changes of the parameter in the detection region. The control signal is evaluated in order to determine the physical parameter. The output signal (1.7) from the sensor unit is reduced substantially to the fundamental wave of the excitation (1.4) and the output signal (1.7) is controlled to zero in the entire phase space by means of at least one pulse width modulation. A temperature-stable, fully digital measuring system is provided as a result of the fact that the at least one pulse width modulation itself generates a correction signal with a variable pulse width and possibly a variable phase which is then added to the output signal (1.7) from the sensor unit and the output signal is thereby controlled to zero in the entire phase space, wherein the pulse width of the correction signal and/or the phase of the correction signal is/are determined by the deviations of the output signal (1.7) from zero.

公开(公告)号：US09588004B2

公开(公告)日：2017-03-07

申请号：US14536102

申请日：2014-11-07

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker ,  Scott C. Heinbuch

IPC: G01L21/34 ,  G01L21/32 ,  G01L21/30 ,  H05B31/26 ,  H01J37/04 ,  H01J41/02 ,  H01J41/06 ,  H01J41/00 ,  H01J37/08 ,  H01J27/00 ,  H01J27/02

CPC classification number: G01L21/34 ,  G01L21/30 ,  G01L21/32 ,  H01J27/00 ,  H01J27/02 ,  H01J37/04 ,  H01J37/08 ,  H01J41/00 ,  H01J41/02 ,  H01J41/06

Abstract: A Long Lifetime Cold Cathode Ionization Vacuum Gauge Design with an extended anode electrode having an axially directed tip, a cathode electrode, and a baffle structure. The axially directed tip of the anode electrode can have a rounded exterior with a diameter at least 10% greater than the diameter of the anode electrode.

Abstract translation: 长寿命冷阴极电离真空计设计具有带有轴向引导尖端的延伸阳极电极，阴极电极和挡板结构。 阳极电极的轴向定向的尖端可以具有圆形的外部，其直径比阳极电极的直径大至少10％。

公开(公告)号：US3614440A

公开(公告)日：1971-10-19

申请号：US3614440D

申请日：1968-06-24

Applicant: KAMAN SCIENCES CORP ,  ELISABETH HELEN CARR

Inventor： CARR BARNEY J

IPC: F03H1/00 ,  H01J27/02 ,  H01J27/06 ,  H01J41/00 ,  H01J41/06 ,  H01J41/18 ,  H05H3/06 ,  G21G3/04

CPC classification number: F03H1/00 ,  H01J27/02 ,  H01J27/06 ,  H01J41/00 ,  H01J41/06 ,  H01J41/18 ,  H05H3/06

Abstract: Apparatus for ionizing gases at very low pressures comprising inner and outer electrodes wherein the inner electrode is substantially circular in cross section and the outer electrode surrounding the inner electrode may be other than a figure of revolution or may be eccentrically positioned with respect to the inner electrode which inner electrode is less in length than two times the length of the surrounding outer electrode and is spaced therefrom a distance which is greater than the diameter of the inner electrode for a distance of not less than two-thirds the length of the surrounding outer electrode.