Method Of Forming Split-Gate Flash Memory Cell With Spacer Defined Floating Gate And Discretely Formed Polysilicon Gates

    公开(公告)号:US20210005724A1

    公开(公告)日:2021-01-07

    申请号:US16796412

    申请日:2020-02-20

    Abstract: A method of forming a memory device that includes forming a first polysilicon layer using a first polysilicon deposition over a semiconductor substrate, forming an insulation spacer on the first polysilicon layer, and removing some of the first polysilicon layer to leave a first polysilicon block under the insulation spacer. A source region is formed in the substrate adjacent a first side surface of the first polysilicon block. A second polysilicon layer is formed using a second polysilicon deposition. The second polysilicon layer is partially removed to leave a second polysilicon block over the substrate and adjacent to a second side surface of the first polysilicon block. A third polysilicon layer is formed using a third polysilicon deposition. The third polysilicon layer is partially removed to leave a third polysilicon block over the source region. A drain region is formed in the substrate adjacent to the second polysilicon block.

    SYSTEM AND METHOD FOR MINIMIZING FLOATING GATE TO FLOATING GATE COUPLING EFFECTS DURING PROGRAMMING IN FLASH MEMORY

    公开(公告)号:US20200176060A1

    公开(公告)日:2020-06-04

    申请号:US16783286

    申请日:2020-02-06

    Abstract: An improved programming technique for non-volatile memory cell arrays, in which memory cells to be programmed with higher programming values are programmed first, and memory cells to be programmed with lower programming values are programmed second. The technique reduces or eliminates the number of previously programmed cells from being adversely incrementally programmed by an adjacent cell being programmed to higher program levels, and reduces the magnitude of adverse incremental programming for most of the memory cells, which is caused by floating gate to floating gate coupling. The memory device includes an array of non-volatile memory cells and a controller configured to identify programming values associated with incoming data, and perform a programming operation in which the incoming data is programmed into at least some of the non-volatile memory cells in a timing order of descending value of the programming values.

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