公开(公告)号：US10651067B2

公开(公告)日：2020-05-12

申请号：US15880387

申请日：2018-01-25

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. Moura ,  Robert T. Caveney ,  Bing Yin ,  Nathan Spiker ,  Vincent W. Tsang

IPC: H01L21/677 ,  H01L21/68 ,  B25J9/00 ,  B25J11/00 ,  B25J9/10 ,  H01L21/67 ,  B25J9/12 ,  B25J9/16 ,  G05B19/418

Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.

公开(公告)号：US20200062501A1

公开(公告)日：2020-02-27

申请号：US16579628

申请日：2019-09-23

Applicant: Brooks Automation, Inc. ,  Chart Inc.

Inventor： Robert T. Caveney ,  Frank Hunt ,  Lingchen Sun ,  Julian D. Warhurst ,  Bruce S. Zandi ,  Jeffrey S. Brooks

IPC: B65G1/04 ,  F25D25/02 ,  F25D3/10 ,  F25D25/04 ,  A01N1/02

Abstract: A configurable cryogenic storage device has a freezer and a rack carrier positioned inside of the freezer. The freezer includes a bearing and a drive shaft though the freezer, the drive shaft being coupled to the rack carrier inside the freezer and adapted to be coupled to a motor assembly. The rack carrier rests on the bearing in a manual rotation configuration and hangs from the drive shaft when the motor is connected. Coupling the drive shaft to the motor assembly lifts the rack carrier and decouples the bearing and enables automated rotation of the rack carrier by the motor. The rack carrier includes rack-mounting features holding a plurality of sample storage racks. The sample storage racks hang from the rack carrier and the rack-mounting features precisely position the end of each sample storage rack.

公开(公告)号：US20190371641A1

公开(公告)日：2019-12-05

申请号：US16539819

申请日：2019-08-13

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. MOURA ,  Aaron GAWLIK ,  Reza SAEIDPOURAZAR

IPC: H01L21/677 ,  H01L21/687 ,  H01L21/68 ,  H01L21/67

Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.

公开(公告)号：US20190304823A1

公开(公告)日：2019-10-03

申请号：US16444225

申请日：2019-06-18

Applicant: BROOKS AUTOMATION, INC.

Inventor： Robert T. CAVENEY ,  Jayaraman KRISHNASAMY ,  Ulysses GILCHRIST ,  Mitchell DREW ,  Jairo T. MOURA

IPC: H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

公开(公告)号：US10418261B2

公开(公告)日：2019-09-17

申请号：US15137722

申请日：2016-04-25

Applicant: Brooks Automation, Inc.

Inventor： Alexander G. Krupyshev ,  John Underwood

IPC: H01L21/677 ,  H01L21/67

Abstract: A workpiece handling module including a first housing member and a second housing member pivotally movable relative to the first member forming a housing having an access side and a second side opposite the access side and side walls, a first portion of the side walls is carried by the first member and a second portion of the side walls is carried by the second member, and at least one of the first and second housing members includes at least one sealable opening for allowing ingress and egress of workpieces to and from an interior chamber formed by the first and second housing members in a closed configuration, and the second portion of the side walls adjacent the access side and carried by the second member is greater than the first portion of the side walls adjacent the access side and carried by the first member.

公开(公告)号：US10406679B2

公开(公告)日：2019-09-10

申请号：US15012425

申请日：2016-02-01

Applicant: BROOKS AUTOMATION, INC.

Inventor： Robert T. Caveney ,  David Martin ,  Ulysses Gilchrist

IPC: B25J9/04 ,  H01L21/677

Abstract: A substrate transport apparatus comprising a drive section, a controller, an upper arm, forearm and substrate holder. A proximate end of the upper arm being rotatably mounted to the drive section at a shoulder joint. A proximate end of the forearm being rotatably mounted to a distal end of the upper arm at an elbow joint. The substrate holder being rotatably mounted to a distal end of the forearm at a wrist joint. The upper arm and the forearm being unequal in length from joint center to joint center. The substrate transport arm is adapted to transport substrate to and from at least two substrate holding areas with the drive section of the transport apparatus remaining in a fixed position relative to the holding areas. Each of the upper arm, forearm and substrate holder being independently rotatable with respect to each other.

公开(公告)号：US10335945B2

公开(公告)日：2019-07-02

申请号：US14305715

申请日：2014-06-16

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander G. Krupyshev ,  Krysztof A. Majczak ,  Martin Hosek ,  Jay Krishnasamy

IPC: B25J9/04 ,  B25J9/10 ,  B25J9/12 ,  H01L21/677 ,  H01L21/687 ,  B25J11/00

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

公开(公告)号：US10325795B2

公开(公告)日：2019-06-18

申请号：US15849002

申请日：2017-12-20

Applicant: BROOKS AUTOMATION, INC.

Inventor： Robert T. Caveney ,  Jayaraman Krishnasamy ,  Ulysses Gilchrist ,  Mitchell Drew ,  Jairo T. Moura

IPC: H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

公开(公告)号：US10288052B2

公开(公告)日：2019-05-14

申请号：US15143125

申请日：2016-04-29

Applicant: Brooks Automation, Inc.

Inventor： Paul E. Dresens ,  Gary S. Ash ,  Allen J. Bartlett ,  Bruce R. Andeen ,  Y. Roberto Than ,  Joseph Chopy, Jr.

IPC: B01D8/00 ,  F17D1/04 ,  F17D3/01 ,  F17D3/18 ,  F25B9/00 ,  F25B9/14 ,  F25J1/00 ,  F04B37/08 ,  F24F11/30 ,  F25B45/00 ,  F24F110/50

Abstract: A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.

公开(公告)号：US20190096726A1

公开(公告)日：2019-03-28

申请号：US16201899

申请日：2018-11-27

Applicant: Brooks Automation, Inc.

Inventor： Antonio F. Pietrantonio ,  Anthony Chesna ,  Hakan Elmali ,  Ulysses Gilchrist

IPC: H01L21/677 ,  H01L21/687 ,  B25J18/00 ,  B25J9/04

Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.