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    PLASMA ETCHING PROCESS
    23.
    发明申请
    PLASMA ETCHING PROCESS 有权
    等离子体蚀刻过程

    公开(公告)号：US20150228495A1

    公开(公告)日：2015-08-13

    申请号：US14610490

    申请日：2015-01-30

    申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT ,  CNRS CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

    发明人： Olivier JOUBERT ,  Gilles CUNGE ,  Emilie DESPIAU-PUJO ,  Erwine PARGON ,  Nicolas POSSEME

    IPC分类号： H01L21/3065 ,  H01L21/67

    CPC分类号： H01L21/3065 ,  H01L21/31116 ,  H01L21/67069

    摘要： A method and system are provided for etching a layer to be etched in a plasma etching reactor, including: forming a reactive layer by injection of at least one reactive gas to form a reactive gas plasma, which forms, together with the layer to be etched, a reactive layer which goes into the layer to be etched during etching of said layer to be etched, wherein the reactive layer reaches a steady state thickness upon completion of a determined duration of said injection; said injection being interrupted before said determined duration has elapsed so that, upon completion of the forming of the reactive layer, the thickness of the reactive layer is smaller than said steady state thickness; and removing the reactive layer by injection of at least one inert gas to form an inert gas plasma, which makes it possible to remove only the reactive layer.

    摘要翻译： 提供了一种用于在等离子体蚀刻反应器中蚀刻待蚀刻层的方法和系统，包括：通过注入至少一种反应性气体形成反应层以形成反应性气体等离子体，其与待蚀刻的层一起形成 ，在蚀刻所述蚀刻层期间进入待蚀刻层中的反应层，其中当所述注入的确定持续时间完成时，所述反应层达到稳定状态厚度; 所述注入在经过所述确定的持续时间之前中断，使得在反应层的形成完成时，反应层的厚度小于所述稳态厚度; 并且通过注入至少一种惰性气体来除去反应层以形成惰性气体等离子体，这使得仅可除去反应层。

    Method of Cooperative Emission, Signal, Source Entity, Relay Entity, Method of Reception, Destination Entity, System and Computer Program Corresponding Thereto
    24.
    发明申请
    Method of Cooperative Emission, Signal, Source Entity, Relay Entity, Method of Reception, Destination Entity, System and Computer Program Corresponding Thereto 审中-公开
    信号，源实体，中继实体，接收方法，目的实体，系统和计算机程序的方法

    公开(公告)号：US20150222332A1

    公开(公告)日：2015-08-06

    申请号：US14425555

    申请日：2013-09-03

    申请人： CNRS - Centre National De La Recherche Scientifique ,  INSA - Institut National De Sciences Appliquees

    发明人： Jean-Francois Helard ,  Maryline Helard ,  Mathieu Crussiere ,  Roua Youssef

    IPC分类号： H04B7/02 ,  H04L25/03 ,  H04L1/00 ,  H04L27/34

    CPC分类号： H04B7/024 ,  H04L1/0041 ,  H04L1/005 ,  H04L25/03286 ,  H04L27/3444 ,  H04L27/3488 ,  H04L2001/0097

    摘要： A method is provided for transmitting an information sequence from a source entity to a recipient entity, via at least one relay entity. The method includes: transmitting, by said source entity, modulated symbols representative of said information sequence, obtained after modulation of said information sequence, on a first channel, called ‘source’ modulated symbols; and transmitting, by said at least one relay entity, modulated symbols representative of said information sequence, obtained after modulation of an estimation of said information sequence on a second channel, called ‘relay’ modulated symbols, said first and second channels being orthogonal between each other. The source entity and the at least one relay entity simultaneously send at least one of said ‘source’ modulated symbols and at least one of said ‘relay’ modulated symbols.

    摘要翻译： 提供了一种用于经由至少一个中继实体将信息序列从源实体发送到接收者实体的方法。 所述方法包括：在被称为“源”调制符号的第一信道上由所述源实体发送代表所述信息序列调制后的所述信息序列的调制符号; 并且由所述至少一个中继实体发送表示所述信息序列的调制符号，所述符号在调制了称为“中继”调制符号的第二信道上的所述信息序列的估计之后获得，所述第一和第二信道在每个 其他。 源实体和至少一个中继实体同时发送所述“源”调制符号和至少一个所述“中继”调制符号中的至少一个。