-
公开(公告)号：US20090275203A1
公开(公告)日：2009-11-05
申请号：US12435835
申请日：2009-05-05
Applicant: Deming Tang
Inventor： Deming Tang
IPC: H01L21/302 , H01L21/31
CPC classification number: B81C1/0015
Abstract: A method for processing a thin film micro device on a substrate includes: 1) depositing a carbon film on the substrate as a sacrificial layer; 2) photolithographically defining a first predetermined pattern in the carbon film; 3) etching an unwanted portion of the carbon film outside the first predetermined pattern; 4) depositing a structural film including a single or multiple layers of solid state materials; 5) photolithographically defining a second predetermined pattern in the structural film; 6) etching the discarded portion of the structural film outside the second predetermined pattern; 7) selectively removing the remaining portion of the sacrificial carbon film by using a selective etch process gas in a reactor chamber, so that the overlapped portion of the remaining structural element with the first predetermined pattern is suspended above an underneath cavity above the substrate.
Abstract translation: 一种在衬底上处理薄膜微器件的方法包括：1）在衬底上沉积碳膜作为牺牲层; 2）光刻地限定碳膜中的第一预定图案; 3）在第一预定图案之外蚀刻碳膜的不想要的部分; 4）沉积包括单层或多层固态材料的结构膜; 5）光刻地限定结构膜中的第二预定图案; 6）在第二预定图案之外蚀刻结构膜的废弃部分; 7）通过在反应器室中使用选择性蚀刻工艺气体来选择性地去除牺牲碳膜的剩余部分，使得具有第一预定图案的剩余结构元件的重叠部分悬浮在衬底上方的下方空腔的上方。
-
22.发明授权
公开(公告)号：US5833814A
公开(公告)日：1998-11-10
申请号：US883930
申请日：1997-06-27
Applicant: Edward Deming Tang , Walter H. Whitlock , Edward Frederick Ezell
Inventor： Edward Deming Tang , Walter H. Whitlock , Edward Frederick Ezell
CPC classification number: C01B7/035 , C01B31/28 , C01B35/061 , C01B7/03
Abstract: An apparatus and method for purifying boron trichloride by removal of phosgene. In accordance with the invention, phosgene is photolytically decomposed into carbon monoxide and chlorine and liquid vapor phase in equilibrium with one another and in solution with the boron trichloride. This equilibrium is disturbed preferably by sparging a vapor stream that rises through the boron trichloride and is composed of the substance, such as nitrogen, to disturb the equilibrium and thereby cause the carbon monoxide and chlorine to be carried out of solution and collect in the overhead space. The decomposition product of chlorine and carbon monoxide can then be removed from the vapor space so that the carbon monoxide and chlorine does not recombine and contaminate the boron trichloride with phosgene.
Abstract translation: 通过去除光气来净化三氯化硼的装置和方法。 根据本发明，光气被光解地分解为一氧化碳，氯气和液相，彼此平衡并与三氯化硼溶液。 这种平衡优选地通过喷射通过三氯化硼上升并且由诸如氮的物质组成的蒸气流来扰乱平衡，以扰乱平衡，从而使一氧化碳和氯从溶液中进行并收集在塔顶 空间。 然后可以从蒸气空间中除去氯和一氧化碳的分解产物，使得一氧化碳和氯不会与碳酰氯重新组合并污染三氯化硼。
-
23.发明授权公开(公告)号：US08854712B2
公开(公告)日：2014-10-07
申请号：US14112165
申请日：2011-12-29
Applicant: Jianhong Mao , Deming Tang
Inventor： Jianhong Mao , Deming Tang
CPC classification number: G02B26/02 , G02B26/04 , G02B26/0841 , G09G3/34 , G09G3/3433 , H01L29/66742 , H04M1/00
Abstract: A display device provided with an MEMS light valve, comprising: a substrate, a fixed optical grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed optical grating, the MEMS light valve comprises a first light valve and a second light valve; the opening and closing of the fixed optical grating is controlled via controlling the movement of the first light valve and the second light valve, and the moving directions of the first light valve and the second light valve are opposite. Also disclosed is a method for forming a display device provided with an MEMS light valve. Thus the sensitivity of the MEMS light valve is improved.
Abstract translation: 一种设置有MEMS光阀的显示装置，包括：基板，位于基板上的固定光栅，用于控制固定光栅的打开和关闭的MEMS光阀，MEMS光阀包括第一光阀和 第二个光阀; 通过控制第一光阀和第二光阀的移动来控制固定光栅的打开和关闭，并且第一光阀和第二光阀的移动方向相反。 还公开了一种形成具有MEMS光阀的显示装置的方法。 因此，提高了MEMS光阀的灵敏度。
-
24.发明申请公开(公告)号：US20140111842A1
公开(公告)日：2014-04-24
申请号：US14112211
申请日：2011-12-28
Applicant: Jianhong Mao , Deming Tang
Inventor： Jianhong Mao , Deming Tang
CPC classification number: G02B26/02 , B81B3/0021 , B81C1/00246 , G02B26/0841 , G09G3/3466 , G09G2300/0426
Abstract: A display device provided with an MEMS light valve, comprising: a substrate, a fixed grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed grating; a guide is disposed on the substrate. The MEMS light valve comprises: a movable grating, a movable electrode and fixed electrodes; the moveable grating is located in the guide and is electrically connected to the guide when contacting the guide; one end of the movable electrode is fixedly connected with the movable grating, and the other end is suspended; and the fixed electrodes and the movable electrode form a capacitor. When a potential difference forms between the fixed electrodes and the movable electrode, the movable electrode drives the movable grating to move in the guide, thereby opening and closing the fixed grating. Therefore, the MEMS light valve sensitivity can be enhanced and reliability is improved.
Abstract translation: 一种设置有MEMS光阀的显示装置，包括：基板，位于基板上的固定光栅，用于控制固定光栅的打开和关闭的MEMS光阀; 引导件设置在基板上。 MEMS光阀包括：可移动光栅，可动电极和固定电极; 可移动光栅位于引导件中，并在与引导件接触时电连接到引导件; 可动电极的一端与可动光栅固定连接，另一端悬挂; 并且固定电极和可动电极形成电容器。 当在固定电极和可动电极之间形成电位差时，可动电极驱动可动光栅在引导件中移动，从而打开和关闭固定光栅。 因此，可以提高MEMS光阀的灵敏度，提高可靠性。
-
25.发明申请公开(公告)号：US20140029077A1
公开(公告)日：2014-01-30
申请号：US14112165
申请日：2011-12-29
Applicant: Jianhong Mao , Deming Tang
Inventor： Jianhong Mao , Deming Tang
CPC classification number: G02B26/02 , G02B26/04 , G02B26/0841 , G09G3/34 , G09G3/3433 , H01L29/66742 , H04M1/00
Abstract: A display device provided with an MEMS light valve, comprising: a substrate, a fixed optical grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed optical grating, the MEMS light valve comprises a first light valve and a second light valve; the opening and closing of the fixed optical grating is controlled via controlling the movement of the first light valve and the second light valve, and the moving directions of the first light valve and the second light valve are opposite. Also disclosed is a method for forming a display device provided with an MEMS light valve. Thus the sensitivity of the MEMS light valve is improved.
Abstract translation: 一种设置有MEMS光阀的显示装置，包括：基板，位于基板上的固定光栅，用于控制固定光栅的打开和关闭的MEMS光阀，MEMS光阀包括第一光阀和 第二个光阀; 通过控制第一光阀和第二光阀的移动来控制固定光栅的打开和关闭，并且第一光阀和第二光阀的移动方向相反。 还公开了一种形成具有MEMS光阀的显示装置的方法。 因此，提高了MEMS光阀的灵敏度。
-
Patent Agency Ranking
公开(公告)号：US20130309797A1
公开(公告)日：2013-11-21
申请号：US13882337
申请日：2011-05-19
Applicant: Jianhong Mao , Deming Tang
Inventor： Jianhong Mao , Deming Tang
IPC: B81C1/00
CPC classification number: B81C1/0015 , B81B2203/0118 , B81B2207/07 , B81C1/00293 , B81C2201/0109 , B81C2201/0125 , B81C2203/0145 , G01P15/0802 , G01P2015/0828 , H03H3/0072
Abstract: A method for manufacturing a micro-electro-mechanical system (MEMS) device is provided. The method comprises: providing a semiconductor substrate, the semiconductor substrate having a metal interconnection structure (100) formed therein; forming a first sacrificial layer (201) on the surface of the semiconductor substrate, the material of the first sacrificial layer is amorphous carbon; etching the first sacrificial layer to form a first recess (301); covering and forming a first dielectric layer (401) on the surface of the first sacrificial layer; thinning the first dielectric layer by a chemical mechanical polishing (CMP) process, until exposing the first sacrificial layer; forming a micromechanical structure layer (500) on the surface of the first sacrificial layer and exposing the first sacrificial layer, wherein a part of the micromechanical structure layer is connected to the first dielectric layer. The method avoids polishing the amorphous carbon, shortens the period of production, and improves the production efficiency
Abstract translation: 提供了一种用于制造微机电系统（MEMS）装置的方法。 该方法包括：提供半导体衬底，其中形成有金属互连结构（100）的半导体衬底; 在所述半导体衬底的表面上形成第一牺牲层（201），所述第一牺牲层的材料是无定形碳; 蚀刻第一牺牲层以形成第一凹部（301）; 在第一牺牲层的表面上覆盖并形成第一介电层（401）; 通过化学机械抛光（CMP）工艺使第一介电层变薄，直到暴露出第一牺牲层; 在所述第一牺牲层的表面上形成微机械结构层（500）并暴露所述第一牺牲层，其中所述微机械结构层的一部分连接到所述第一介电层。 该方法避免抛光无定形碳，缩短生产周期，提高生产效率
-
公开(公告)号：US08507385B2
公开(公告)日：2013-08-13
申请号：US12435835
申请日：2009-05-05
Applicant: Deming Tang
Inventor： Deming Tang
IPC: H01L21/311
CPC classification number: B81C1/0015
Abstract: A method for processing a thin film micro device on a substrate includes: 1) depositing a carbon film on the substrate as a sacrificial layer; 2) photolithographically defining a first predetermined pattern in the carbon film; 3) etching an unwanted portion of the carbon film outside the first predetermined pattern; 4) depositing a structural film including a single or multiple layers of solid state materials; 5) photolithographically defining a second predetermined pattern in the structural film; 6) etching the discarded portion of the structural film outside the second predetermined pattern; 7) selectively removing the remaining portion of the sacrificial carbon film by using a selective etch process gas in a reactor chamber, so that the overlapped portion of the remaining structural element with the first predetermined pattern is suspended above an underneath cavity above the substrate.
Abstract translation: 一种在衬底上处理薄膜微器件的方法包括：1）在衬底上沉积碳膜作为牺牲层; 2）光刻地限定碳膜中的第一预定图案; 3）在第一预定图案之外蚀刻碳膜的不想要的部分; 4）沉积包括单层或多层固态材料的结构膜; 5）光刻地限定结构膜中的第二预定图案; 6）在第二预定图案之外蚀刻结构膜的废弃部分; 7）通过在反应器室中使用选择性蚀刻工艺气体来选择性地去除牺牲碳膜的剩余部分，使得具有第一预定图案的剩余结构元件的重叠部分悬浮在衬底上方的下方空腔的上方。
-
公开(公告)号：US20130139594A1
公开(公告)日：2013-06-06
申请号：US13703568
申请日：2011-01-26
Applicant: Jianhong Mao , Fengqin Han , Deming Tang
Inventor： Jianhong Mao , Fengqin Han , Deming Tang
CPC classification number: G01P15/08 , B81B3/0078 , B81B2201/0235 , B81B2201/0242 , G01C19/5733 , G01C25/00 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0854 , H01L29/84
Abstract: An inertia MEMS sensor and a manufacturing method are provided. The inertia MEMS sensor includes a main body and a weight block relatively removable. The main body includes a first main body with a first surface and a second main body vertically connecting with the first surface. A first electrode parallel to the first surface is in the first main body. A second electrode perpendicular to the first surface is in the second main body. The weight block is suspended in a space defined by the first and second main bodies. The weight block includes a third electrode parallel to the first surface, a forth electrode is perpendicular to the first surface, and a weight layer. The third electrode connects with the forth electrode to form a U-shaped groove for accommodating the weight layer, thereby increasing the weight block weight, improving precision and reducing the cost.
Abstract translation: 提供惯性MEMS传感器和制造方法。 惯性MEMS传感器包括主体和相对可拆卸的重量块。 主体包括具有第一表面的第一主体和与第一表面垂直连接的第二主体。 平行于第一表面的第一电极在第一主体中。 垂直于第一表面的第二电极在第二主体中。 重物块悬挂在由第一和第二主体限定的空间中。 重量块包括平行于第一表面的第三电极，第四电极垂直于第一表面和重量层。 第三电极与第四电极连接以形成用于容纳重量层的U形槽，从而增加重量块重量，提高精度并降低成本。
-
公开(公告)号：US20100110383A1
公开(公告)日：2010-05-06
申请号：US12613209
申请日：2009-11-05
Applicant: DEMING TANG
Inventor： DEMING TANG
CPC classification number: G03B35/26 , G02B5/3058 , G02B27/26 , G02B27/283 , H04N9/3167 , H04N13/363 , H04N13/365
Abstract: An optical projection engine device uses a symmetrical wire grid polarizing beam splitter (PBS) that splits incident illumination to a symmetrical pair of polarized light beams in two orthogonal polarization states, one by reflection and the other by transmission, for illuminating a pair of reflective modulation imagers respectively. In identical geometric configuration, the two synchronized reflective modulation imagers polarization modulate polarized light beams as received, and reflect them back towards the PBS, which through transmission and reflection respectively, combines and projects two modulated light beams through a projection lens system to form a pair of spatially overlapped illumination images of aligned pixels with the same image in two orthogonal polarization states on a projection screen. The device jointly provides improvement optical efficiency and expanded function to three dimensional stereoscopic displays.
Abstract translation: 光学投影引擎装置使用对称的线栅偏振分束器（PBS），其将入射照明分成两对正交偏振状态的对称偏振光束，一个通过反射而另一个通过透射来照射一对反射调制 成像仪分别。 在相同的几何结构中，两个同步的反射调制成像器极化地调制收到的偏振光束，并将其反射回PBS，通过透射和反射分别通过投影透镜系统组合投影两个调制光束，形成一对 在投影屏幕上的两个正交偏振状态下具有相同图像的对准像素的空间重叠照明图像。 该设备联合为三维立体显示提供光学效率和扩展功能。
-
30.发明申请公开(公告)号：US20090244488A1
公开(公告)日：2009-10-01
申请号：US12411308
申请日：2009-03-25
Applicant: DEMING TANG
Inventor： DEMING TANG
CPC classification number: G01J1/32 , G01J1/04 , G01J1/0414 , G01J1/42 , G02F1/136277 , G03B21/14 , G03B21/2066 , G03B21/2073
Abstract: An integrated opto-electronic device, a portable reflective projection system and a method for in situ monitoring and adjusting light illumination are provided. The device includes a reflective polarizing composite film (150) configured to receive a source light (210) at a desired non-normal incident angle (221), polarizes and reflects a first portion (211) of said source light (210) as polarized illumination light (16) at a reciprocal angle (222) to said desired non-normal incident angle (221); and a photovoltaic cell (180), adhered to an opposite side of said reflective polarizing composite film (150) to said source light (210), configured to receive a second portion (212) of said source light (210) that passes through said reflective polarizing composite film (150) and transform said second portion (212) to photogenerated charge. Unused illumination can be collected in order to re-store and reuse recovered energy.
Abstract translation: 提供集成光电装置，便携式反射投影系统和用于原位监测和调节光照的方法。 该装置包括被配置为以期望的非正常入射角（221）接收源光（210）的反射偏振复合膜（150），偏振并将所述源光（210）的第一部分（211）反射为偏振 照明光（16）以相对的角度（222）延伸到所述期望的非正常入射角（221）; 以及光电池（180），其粘附到所述反射型偏振复合膜（150）与所述源光（210）的相对侧，被配置为接收穿过所述源光（210）的所述源光（210）的第二部分（212） 反射偏振光复合膜（150），并将所述第二部分（212）转换成光生电荷。 可以收集未使用的照明，以便重新储存和重新利用回收的能量。
-
-
-
-
-
-
-
-
-
Search Results
31
records
(took 0.017 seconds)
