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    Semiconductor factory automation system and method for transporting semiconductor wafers
    21.
    发明授权
    Semiconductor factory automation system and method for transporting semiconductor wafers 失效
    半导体工厂自动化系统和半导体晶圆传输方法

    公开(公告)号：US06516238B1

    公开(公告)日：2003-02-04

    申请号：US09576418

    申请日：2000-05-22

    申请人： Jin-Sun Kim ,  Moon-Gi Kim ,  Chang-Kee Hong ,  Tae-Ho Lee ,  Won-Soo Cho ,  Yung-Hwan Chae ,  Woo-Kyu Lee ,  Jong-Mo Ahn ,  Kwang-Ho Lee

    发明人： Jin-Sun Kim ,  Moon-Gi Kim ,  Chang-Kee Hong ,  Tae-Ho Lee ,  Won-Soo Cho ,  Yung-Hwan Chae ,  Woo-Kyu Lee ,  Jong-Mo Ahn ,  Kwang-Ho Lee

    IPC分类号： G06F1900

    CPC分类号： G05B19/41895 ,  G05B2219/31002 ,  G05B2219/31013 ,  G05B2219/31086 ,  G05B2219/32277 ,  Y02P90/18 ,  Y02P90/285 ,  Y02P90/60

    摘要： A method for transporting semiconductor wafers in semiconductor factory automation system, includes the steps of: a) processing a lot of semiconductor wafers to be contained in a semiconductor wafer cassette in a process equipment; b) sending a cassette transportation request from the process equipment to a cell management server when the process equipment has processed the lot of semiconductor wafers; c) generating a transportation instruction in response to the cassette transportation request; and d) if the semiconductor wafer cassette is transported from the process equipment to a stocker by an automatic guide vehicle (AGV), simultaneously activating the AGV and the stocker by simultaneously sending the transportation instruction to the AGV and the stocker. The method in accordance with the present invention can reduce a time taken to transport the semiconductor wafers.

    摘要翻译： 一种在半导体工厂自动化系统中传送半导体晶片的方法，包括以下步骤：a）处理要包含在处理设备中的半导体晶片盒中的许多半导体晶片; b）当处理设备处理了许多半导体晶片时，将处理设备的盒式磁带运送请求发送到单元管理服务器; c）响应于盒运输请求产生运输指令; 以及d）如果通过自动导向车辆（AGV）将半导体晶片盒从处理设备运送到储盘器，则同时通过向AGV和储料器发送运输指令来激活AGV和储料器。 根据本发明的方法可以减少运输半导体晶片所花费的时间。

    GUIDE THIMBLE PLUG FOR NUCLEAR FUEL ASSEMBLY
    26.
    发明申请
    GUIDE THIMBLE PLUG FOR NUCLEAR FUEL ASSEMBLY 有权
    指导用于核燃料组件的流量计

    公开(公告)号：US20110182396A1

    公开(公告)日：2011-07-28

    申请号：US12749470

    申请日：2010-03-29

    申请人： NAM GYU PARK ,  Gi-Jun Gwon ,  Kyeong Lak Jeon ,  Jung Min Suh ,  Jin Seok Lee ,  Kyong Bo Eom ,  Joon Kyoo Park ,  Jin Sun Kim ,  Dong Geun Ha ,  Kyoung Joo Kim

    发明人： NAM GYU PARK ,  Gi-Jun Gwon ,  Kyeong Lak Jeon ,  Jung Min Suh ,  Jin Seok Lee ,  Kyong Bo Eom ,  Joon Kyoo Park ,  Jin Sun Kim ,  Dong Geun Ha ,  Kyoung Joo Kim

    IPC分类号： G21C3/32

    CPC分类号： G21C3/32 ,  G21C3/3305 ,  Y02E30/40

    摘要： A guide thimble plug for a nuclear fuel assembly is provided, in which an internal threaded hole is formed through a main body so that the main body is coupled to a bottom nozzle by a screw coupling. An upper insert part is formed in the upper end of the main body. The upper insert part is inserted into a shock absorption tube. A thermal deformation prevention part is formed on the main body below the upper insert part and is recessed inward from the outer surface of the main body such that, when the main body is coupled to the guide thimble, a gap is defined between the thermal deformation prevention part and the guide thimble. The guide thimble and the shock absorption tube can be reliably fastened to the bottom nozzle, and thermal deformation of the guide thimble can be minimized.

    摘要翻译： 提供了一种用于核燃料组件的导向套筒塞，其中内螺纹孔通过主体形成，使得主体通过螺纹联接件联接到底部喷嘴。 上部插入部分形成在主体的上端。 将上部插入部分插入减震管中。 一个热变形防止部分形成在主体下面的上插入部分上，并且从主体的外表面向内凹入，使得当主体联接到导向套管时，在热变形 预防部分和导向套管。 引导套管和减震管可以可靠地固定到底部喷嘴，并且导引套管的热变形可以最小化。