Method of making radiation-sensitive sol-gel materials
    21.
    发明授权
    Method of making radiation-sensitive sol-gel materials 有权
    制造辐射敏感溶胶凝胶材料的方法

    公开(公告)号:US08808969B2

    公开(公告)日:2014-08-19

    申请号:US13443533

    申请日:2012-04-10

    Abstract: Radiation-sensitive sol-gel compositions are provided, along with methods of forming microelectronic structures and the structures thus formed. The compositions comprise a sol-gel compound and a base generator dispersed or dissolved in a solvent system. The sol-gel compound comprises recurring monomeric units comprising silicon with crosslinkable moieties bonded to the silicon. Upon exposure to radiation, the base generator generates a strong base, which crosslinks the sol-gel compound in the compositions to yield a crosslinked layer that is insoluble in developers or solvents. The unexposed portions of the layer can be removed to yield a patterned sol-gel layer. The invention can be used to form patterns from sol-gel materials comprising features having feature sizes of less than about 1 μm.

    Abstract translation: 提供了辐射敏感的溶胶 - 凝胶组合物,以及形成微电子结构和如此形成的结构的方法。 组合物包含分散或溶解在溶剂体系中的溶胶 - 凝胶化合物和碱产生剂。 溶胶 - 凝胶化合物包括具有与硅结合的可交联部分的包含硅的重复单体单元。 暴露于辐射后,基底发生器产生强碱,其使组合物中的溶胶 - 凝胶化合物交联,得到不溶于显影剂或溶剂的交联层。 可以除去该层的未曝光部分以产生图案化的溶胶 - 凝胶层。 本发明可用于形成包含特征尺寸小于约1μm的特征的溶胶 - 凝胶材料的图案。

    Method and apparatus for solar collector with integral stagnation temperature control
    25.
    发明申请
    Method and apparatus for solar collector with integral stagnation temperature control 有权
    具有整体停滞温度控制的太阳能集热器的方法和装置

    公开(公告)号:US20070272233A1

    公开(公告)日:2007-11-29

    申请号:US11511493

    申请日:2006-08-29

    CPC classification number: F24S10/50 F24S40/53 F24S50/40 Y02E10/44

    Abstract: This invention relates to a method and apparatus for a solar collector having intergral control of the maximum temperature that it can reach, thereby avoiding excessive stagnation temperatures in the collector. In one embodiment, a solar collector comprises a top portion comprising glazing, a bottom portion; an absorber disposed between said top portion and said bottom portion for absorbing solar energy received through said glazing, said absorber in a spaced relationship above said bottom portion such that a channel is defined between a lower surface of said absorber and an upper surface of said bottom portion; an inlet and an outlet associated with and at substantially opposite ends of said channel between said absorber and said bottom portion, for ventilating said channel; and a damper for opening said outlet at a temperature equal to or above a first selected temperature and for closing said outlet at a temperature equal to or below a second selected temperature; wherein said first and second selected temperatures are below a stagnation temperature of the solar collector.

    Abstract translation: 本发明涉及一种用于太阳能集热器的方法和装置,其具有可达到的最高温度的整体控制,从而避免了集电器中的过度停滞温度。 在一个实施例中,太阳能收集器包括顶部,其包括玻璃窗,底部; 吸收器,设置在所述顶部和所述底部之间,用于吸收通过所述窗玻璃收到的太阳能,所述吸收体在所述底部部分之上以间隔开的关系形成,使得通道限定在所述吸收体的下表面和所述底部的上表面之间 一部分; 与所述吸收器和所述底部之间的所述通道相关联的入口和出口,用于使所述通道通风; 以及用于在等于或高于第一选定温度的温度下打开所述出口并在等于或低于第二选定温度的温度下关闭所述出口的阻尼器; 其中所述第一和第二选定温度低于所述太阳能收集器的停滞温度。

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