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    Method for fabricating a microelectromechanical bearing
    21.
    发明授权
    Method for fabricating a microelectromechanical bearing 有权
    微机电轴承的制造方法

    公开(公告)号：US06555201B1

    公开(公告)日：2003-04-29

    申请号：US09570628

    申请日：2000-05-15

    Applicant: Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

    Inventor： Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

    IPC: B32B310

    CPC classification number: G02B26/0841 ,  B81B3/0051 ,  B81B2201/042 ,  B81B2203/058 ,  G02B26/101 ,  Y10S359/90 ,  Y10T428/24273 ,  Y10T428/24322 ,  Y10T428/24355 ,  Y10T428/24479

    Abstract: An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90° angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.

    Abstract translation: 机电装置包括其中具有第一孔的第一框架，悬挂在第一框架中的第二框架，其中第二框架在其中具有第二孔，以及悬挂在第二孔中的板。 第一对梁相对于第一框架沿着第一轴线支撑第二框架，使得第二框架围绕第一轴线旋转。 第二对梁相对于第二框架沿着第二轴支撑板，使得板相对于框架围绕第二轴线旋转。 第一和第二轴优选地以90°的角度相交。 第一致动器提供用于使第二框架围绕第一轴线相对于第一框架旋转的机械力。 第二致动器提供用于相对于第二框架围绕第二轴线旋转板的机械力。 因此，板可以相对于第一轴线和第二轴线独立地旋转。 还公开了相关方法。

    Microelectromechanical devices including rotating plates and related methods
    22.
    发明授权
    Microelectromechanical devices including rotating plates and related methods 有权
    带激光的反射式MEMs执行器

    公开(公告)号：US06256134B1

    公开(公告)日：2001-07-03

    申请号：US09628054

    申请日：2000-07-28

    Applicant: Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

    Inventor： Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

    IPC: G02B2608

    CPC classification number: G02B26/0841 ,  B81B3/0051 ,  B81B2201/042 ,  B81B2203/058 ,  G02B26/101 ,  Y10S359/90 ,  Y10T428/24273 ,  Y10T428/24322 ,  Y10T428/24355 ,  Y10T428/24479

    Abstract: An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90° angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.

    Abstract translation: 机电装置包括其中具有第一孔的第一框架，悬挂在第一框架中的第二框架，其中第二框架在其中具有第二孔，以及悬挂在第二孔中的板。 第一对梁相对于第一框架沿着第一轴线支撑第二框架，使得第二框架围绕第一轴线旋转。 第二对梁相对于第二框架沿着第二轴支撑板，使得板相对于框架围绕第二轴线旋转。 第一和第二轴优选地以90°的角度相交。 第一致动器提供用于使第二框架围绕第一轴线相对于第一框架旋转的机械力。 第二致动器提供用于相对于第二框架围绕第二轴线旋转板的机械力。 因此，板可以相对于第一轴线和第二轴线独立地旋转。 还公开了相关方法。

    Multi-dimensional scalable displacement enabled microelectromechanical actuator structures and arrays
    23.
    发明授权
    Multi-dimensional scalable displacement enabled microelectromechanical actuator structures and arrays 有权
    多维可扩展位移使微机电致动器结构和阵列

    公开(公告)号：US06218762B1

    公开(公告)日：2001-04-17

    申请号：US09303996

    申请日：1999-05-03

    Applicant: Edward A. Hill ,  Vijayakumar R. Dhuler

    Inventor： Edward A. Hill ,  Vijayakumar R. Dhuler

    IPC: H01H6100

    CPC classification number: H01H1/0036 ,  H01H61/063 ,  H01H2001/0068 ,  H01H2061/006

    Abstract: Microelectromechanical system (MEMS) structures and arrays that provide movement in one, two, and/or three dimensions in response to selective thermal actuation. Significant amounts of scalable displacement are provided. In one embodiment, pairs of thermal arched beams are operably interconnected and thermally actuated to create structures and arrays capable of moving in a plane parallel to the underlying substrate in one and/or two dimensions. One embodiment provides an arched beam operably connected to a crossbeam such that the medial portion arches and alters its separation from the crossbeam when thermally actuated. In another embodiment, at least one thermal arched beam is arched in a nonparallel direction with respect to the plane defined by the underlying substrate. In response to thermal actuation, the medial portion of the arched beam is arched to a greater degree than the end portions of the thermal arched beam, thereby altering the separation of the medial portion from the underlying substrate. One embodiment combines first and second thermal arched beams having medial portions arched in opposed nonparallel directions with respect to the plane defined by the underlying substrate by even greater amounts. In response to thermal actuation, the medial portions thereof arch in opposite nonparallel directions with respect to the underlying substrate, thereby altering the separation of the medial portions from the underlying substrate. Hybrid thermally actuated structures are provided that combine arrays capable of moving in-plane and out of plane, such that motion in all three dimensions may be achieved in response to selective thermal actuation.

    Abstract translation: 微机电系统（MEMS）结构和阵列，其响应于选择性热致动而提供一维，二维和/或三维运动。 提供了大量的可伸缩位移。 在一个实施例中，成对的热拱形梁可操作地互连和热致动以产生能够在一个和/或两个维度上平行于下面的基底的平面中移动的结构和阵列。 一个实施例提供了可操作地连接到横梁的弓形梁，使得当热致动时，内侧部分拱起并改变其与横梁的分离。 在另一个实施例中，至少一个热拱形梁相对于由下面的基底限定的平面以不平行的方式成拱形。 响应于热致动，拱形梁的中间部分比热弯曲梁的端部更大程度地弯曲，从而改变中间部分与下面的基底的分离。 一个实施例组合了第一和第二热拱形梁，其具有相对于由下面的基底限定的平面以相对的非平行方向拱起的中间部分甚至更大的量。 响应于热致动，其中间部分相对于下面的基底以相对的不平行方向拱起，从而改变中间部分与下面的基底的分离。 提供了混合热致动结构，其组合能够在平面内和平面内移动的阵列，使得可以响应于选择性热致动而实现所有三维的运动。

    Microelectromechanical beam for allowing a plate to rotate in relation to a frame in a microelectromechanical device
    24.
    发明授权
    Microelectromechanical beam for allowing a plate to rotate in relation to a frame in a microelectromechanical device 失效
    微机电梁，用于允许板相对于微机电装置中的框架旋转

    公开(公告)号：US6087747A

    公开(公告)日：2000-07-11

    申请号：US285206

    申请日：1999-04-01

    Applicant: Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

    Inventor： Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

    IPC: G02B26/10 ,  B32B3/10 ,  B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  H02N1/00

    CPC classification number: G02B26/0841 ,  B81B3/0051 ,  G02B26/101 ,  B81B2201/042 ,  B81B2203/058 ,  Y10S359/90 ,  Y10T428/24273 ,  Y10T428/24322 ,  Y10T428/24355 ,  Y10T428/24479

    Abstract: An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90.degree. angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.

    Abstract translation: 机电装置包括其中具有第一孔的第一框架，悬挂在第一框架中的第二框架，其中第二框架在其中具有第二孔，以及悬挂在第二孔中的板。 第一对梁相对于第一框架沿着第一轴线支撑第二框架，使得第二框架围绕第一轴线旋转。 第二对梁相对于第二框架沿着第二轴支撑板，使得板相对于框架绕第二轴线旋转。 第一和第二轴优选地以90°角相交。 第一致动器提供用于使第二框架围绕第一轴线相对于第一框架旋转的机械力。 第二致动器提供用于相对于第二框架围绕第二轴线旋转板的机械力。 因此，板可以相对于第一轴线和第二轴线独立地旋转。 还公开了相关方法。

    Microelectromechanical positioning apparatus
    26.
    发明授权
    Microelectromechanical positioning apparatus 失效
    微机电定位装置

    公开(公告)号：US5962949A

    公开(公告)日：1999-10-05

    申请号：US965277

    申请日：1997-11-06

    Applicant: Vijayakumar R. Dhuler ,  Robert L. Wood

    Inventor： Vijayakumar R. Dhuler ,  Robert L. Wood

    IPC: G01B21/00 ,  B25J7/00 ,  B81B3/00 ,  B81B7/02 ,  F03G7/06 ,  G01B7/004 ,  G01B7/34 ,  G01N27/00 ,  G02B6/38 ,  G02B6/42 ,  H01H1/00 ,  H01H9/14 ,  H01H61/00 ,  H01H37/32 ,  H01L37/00

    CPC classification number: F03G7/06 ,  B81B3/0024 ,  B81B2201/032 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  G02B6/3803 ,  G02B6/4226 ,  H01H1/0036 ,  H01H2001/0042 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H61/00 ,  H01H9/14

    Abstract: A microelectromechanical (MEMS) positioning apparatus is provided that can precisely microposition an object in each of the X, Y and Z directions. The MEMS positioning apparatus includes a reference surface, a support disposed in a fixed position to the reference surface, and a stage defining an XY plane that is suspended adjacent to the support and over at least a portion of the reference surface. The MEMS positioning apparatus also includes at least one and, more typically, several actuators for precisely positioning the stage and, in turn, objects carried by the stage. For example, the MEMS positioning apparatus can include first and second MEMS actuators for moving the stage in the XY plane upon actuation. In addition, the MEMS positioning apparatus can include a Z actuator, such as a thermal bimorph structure, for moving the stage in the Z direction. As such, the MEMS positioning apparatus can precisely position the stage as well as any objects carried by the stage in each of the X, Y and Z directions. As a result of the construction of the MEMS positioning apparatus, the MEMS positioning apparatus can also be fabricated in an affordable, reliable and reproducible manner without compromising the precision alignment provided by the MEMS positioning apparatus.

    Abstract translation: 提供了一种微机电（MEMS）定位装置，其能够精确地将对象在X，Y和Z方向中的每一个定位。 MEMS定位设备包括参考表面，设置在参考表面的固定位置的支撑件以及限定垂直于支撑件悬挂并在参考表面的至少一部分上方的XY平面的平台。 MEMS定位装置还包括至少一个并且更典型的几个致动器，用于精确地定位平台，并且依次由舞台承载的物体。 例如，MEMS定位装置可以包括用于在致动时在XY平面中移动台的第一和第二MEMS致动器。 此外，MEMS定位装置可以包括用于在Z方向上移动台的Z致动器，例如热双压电晶片结构。 因此，MEMS定位装置可以精确地定位舞台以及在X，Y和Z方向中的每一个中由舞台承载的任何物体。 作为MEMS定位装置的结构的结果，MEMS定位装置也可以以可承受的，可靠的和可再生的方式制造，而不会损害由MEMS定位装置提供的精确对准。

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