Transfer mask blank, transfer mask, and transfer method using the transfer mask
    21.
    发明授权
    Transfer mask blank, transfer mask, and transfer method using the transfer mask 失效
    传输掩模空白,传输掩码和传输方法使用传输掩码

    公开(公告)号:US07582393B2

    公开(公告)日:2009-09-01

    申请号:US10535165

    申请日:2003-12-01

    IPC分类号: G03F1/00

    摘要: It is an object of the present invention to effectively manufacture a charged-particle beam lithography mask, an X-ray lithography mask, or an extreme ultraviolet beam lithography mask by using, for example, an existing writer such as an electron beam writer for photomasks, while achieving improvement in processing accuracy of a mask pattern. A lithography mask (1) comprises a substrate (2) which has a lower surface provided substantially at the center thereof with an opening (3) and a self-supporting membrane (m) having a pattern region (4) substantially at the center of an upper surface of the substrate (2) corresponding to the opening (3). The self-supporting membrane (m) is provided with through-holes (h) of a mask pattern in it or an absorber or scatterer of a mask pattern on it, and the pattern region (4) and a peripheral region around the pattern region (5) are in one plane.

    摘要翻译: 本发明的目的是通过使用例如诸如用于光掩模的电子束写入器的现有写入器来有效地制造带电粒子束光刻掩模,X射线光刻掩模或极紫外光束光刻掩模 同时实现掩模图案的处理精度的提高。 光刻掩模(1)包括基底(2),基底(2)具有基本上在其中心处设置有开口(3)的下表面和具有基本上位于中心的图案区域(4)的自支撑膜(m) 所述基板(2)的与所述开口(3)对应的上表面。 自支撑膜(m)在其上设置有掩模图案的通孔(h)或其上的掩模图案的吸收体或散射体,图案区域(4)和图案区域周围的周边区域 (5)在一个平面上。

    FOCUS SERVO APPRATUS
    22.
    发明申请
    FOCUS SERVO APPRATUS 有权
    聚焦伺服器

    公开(公告)号:US20080037381A1

    公开(公告)日:2008-02-14

    申请号:US11832575

    申请日:2007-08-01

    IPC分类号: G11B7/00

    CPC分类号: G11B7/08511 G11B7/0945

    摘要: A focus servo apparatus for an optical disc apparatus including an objective lens to converge laser beam on an information recording surface of an optical disc, and an actuator to move the objective lens in a focusing direction crossing the information recording surface, the focus servo apparatus comprising: a retaining unit configured to retain control data for driving the actuator; and a setting unit configured to set the control data retained by the retaining unit as initial data for driving the actuator, in the case of driving the actuator, to detect a position of the objective lens where the laser beam is focused on the information recording surface, as a target position when performing focus servo.

    摘要翻译: 一种用于光盘装置的聚焦伺服装置,包括物镜将激光束会聚在光盘的信息记录表面上的光盘装置和用于沿与信息记录表面相交的聚焦方向移动物镜的致动器,该聚焦伺服装置包括 :保持单元,被配置为保持用于驱动致动器的控制数据; 以及设置单元,被配置为将由保持单元保持的控制数据设置为用于驱动致动器的初始数据,在驱动致动器的情况下,检测激光束聚焦在信息记录表面上的物镜的位置 作为执行聚焦伺服时的目标位置。

    Combined AD/DA Converting Apparatus
    23.
    发明申请
    Combined AD/DA Converting Apparatus 有权
    组合式AD / DA转换装置

    公开(公告)号:US20070296622A1

    公开(公告)日:2007-12-27

    申请号:US11766687

    申请日:2007-06-21

    IPC分类号: H03M1/12

    摘要: A combined AD/DA converting apparatus carrying out AD conversion of an analog input signal to output a converted digital signal or carrying out DA conversion of a digital input signal to output a converted analog signal based on a conversion selection signal for selecting AD conversion or DA conversion comprises an input signal selection circuit configured to select one analog signal out of a plurality of analog input signals to be output based on an input selection signal; an input sample hold circuit configured to sample and hold the analog input signal output from the input signal selection circuit; a DA converter configured to convert a digital signal into an analog signal to be output; a comparator circuit configured to output a comparison signal that indicates a size relation between the analog input signal output from the input sample hold circuit and the analog signal output from the DA converter; a sequential comparison register configured to define sequentially each place of a digital signal stored in the register based on the comparison signal output from the comparison circuit; a selection circuit configured to receive the digital signal stored in the sequential comparison register, the digital input signal, and the conversion selection signal, the selection circuit being configured to output the digital signal stored in the sequential comparison register to the DA converter when the conversion selection signal indicates AD conversion, and to output the digital input signal to the DA converter when the conversion selection signal indicates DA conversion; and a controlling unit configured to output the input selection signal when the conversion selection signal indicates DA conversion.

    摘要翻译: 一种组合的AD / DA转换装置,其基于用于选择AD转换或DA的转换选择信号,对模拟输入信号进行AD转换以输出转换的数字信号或执行数字输入信号的DA转换以输出转换的模拟信号 转换器包括:输入信号选择电路,被配置为基于输入选择信号从要输出的多个模拟输入信号中选择一个模拟信号; 输入采样保持电路,被配置为对从输入信号选择电路输出的模拟输入信号进行采样和保持; DA转换器,被配置为将数字信号转换为要输出的模拟信号; 比较器电路,被配置为输出指示从输入采样保持电路输出的模拟输入信号与从DA转换器输出的模拟信号之间的尺寸关系的比较信号; 顺序比较寄存器,其被配置为基于从比较电路输出的比较信号顺序地定义存储在寄存器中的数字信号的每个位置; 选择电路,被配置为接收存储在顺序比较寄存器中的数字信号,数字输入信号和转换选择信号,所述选择电路被配置为当转换时将所述顺序比较寄存器中存储的数字信号输出到DA转换器 选择信号指示AD转换,并且当转换选择信号指示DA转换时,将数字输入信号输出到DA转换器; 以及控制单元,被配置为当所述转换选择信号指示DA转换时输出所述输入选择信号。

    Logic simulation apparatus for performing logic simulation in high speed
    26.
    发明授权
    Logic simulation apparatus for performing logic simulation in high speed 有权
    用于高速执行逻辑仿真的逻辑仿真装置

    公开(公告)号:US06978429B2

    公开(公告)日:2005-12-20

    申请号:US10700670

    申请日:2003-11-05

    IPC分类号: G06F17/50

    CPC分类号: G06F17/5022

    摘要: A logic simulation apparatus is provided with a circuit dividing unit (6) that selects and defines logic cones each of which carries out a logic operation in synchronization with one clock domain as target portions to be speeded up from logic cones extracted by a logic cone extracting unit (5), and that defines logic cones each of which carries out a logic operation based on a plurality of clock domains as nontarget portions not to be speeded up, and a logic compressing unit (7) that compresses the logic of each of the target portions, and performs a logic simulation on each of the target portions whose logic is compressed and also on performs a logic simulation on each of the nontarget portions.

    摘要翻译: 逻辑模拟装置具有电路划分单元(6),该电路划分单元(6)选择并定义逻辑锥,每个逻辑锥与一个时钟域同步地执行逻辑运算,作为从由逻辑锥提取提取的逻辑锥加速的目标部分 单元(5),并且其定义逻辑锥,每个逻辑锥基于多个时钟域执行逻辑运算,作为不加速的非目标部分;以及逻辑压缩单元(7),其压缩每个 目标部分,并对其逻辑被压缩的每个目标部分执行逻辑模拟,并且还对每个非目标部分执行逻辑模拟。

    Carrier for holding an object to be polished
    28.
    发明申请
    Carrier for holding an object to be polished 审中-公开
    用于保持要抛光的物体的载体

    公开(公告)号:US20050202758A1

    公开(公告)日:2005-09-15

    申请号:US11074481

    申请日:2005-03-08

    CPC分类号: B24B41/067

    摘要: To provide a diamond-like carbon coated carrier for holding an object to be polished used for double-sided polishing, and a manufacturing method therefor. A carrier for holding an object to be polished according to the present invention has a substrate whose entire surface is coated with diamond-like carbon. A method of the present invention includes coating the entire carrier surface with diamond-like carbon using a surface coating apparatus using plasma CVD.

    摘要翻译: 提供用于保持用于双面抛光的被抛光物体的类金刚石碳涂层载体及其制造方法。 根据本发明的用于保持待抛光物体的载体具有整个表面涂有类金刚石碳的基底。 本发明的方法包括使用等离子体CVD将表面涂覆装置涂覆整个载体表面的金刚石状碳。