公开(公告)号：US07829468B2

公开(公告)日：2010-11-09

申请号：US11447946

申请日：2006-06-07

申请人： Douglas Keil ,  Eric Hudson ,  Chris Kimball ,  Andreas Fischer

发明人： Douglas Keil ,  Eric Hudson ,  Chris Kimball ,  Andreas Fischer

IPC分类号： H01L21/302 ,  H01L21/461

CPC分类号： C23C16/52 ,  C23C16/509 ,  H01J37/32935 ,  H01J37/3299

摘要： A method of fault detection for use in a plasma processing chamber is provided. The method comprises monitoring plasma parameters within a plasma chamber with a single planar ion flux (PIF) probe, analyzing the resulting information, measuring the plasma parameters as a function of time and analyzing the resulting data. The data can be observed, characterized, compared with reference data, digitized, processed, or analyzed to reveal a specific fault. The PIF probe is preferably positioned at a grounded surface within the reactor. Chamber faults that can be detected include a build-up of process by-products in the process chamber, a helium leak, a match re-tuning event, a poor stabilization rate, and a loss of plasma confinement.

摘要翻译： 提供了一种用于等离子体处理室的故障检测方法。 该方法包括使用单个平面离子通量（PIF）探针监测等离子体室内的等离子体参数，分析所得信息，测量作为时间的函数的等离子体参数并分析所得数据。 数据可以观察，表征，与参考数据进行比较，数字化，处理或分析，以显示特定故障。 PIF探针优选地位于反应器内的接地表面上。 可以检测到的室内故障包括处理室中的过程副产物的积聚，氦泄漏，匹配重新调谐事件，差的稳定化速率和等离子体约束的损失。

公开(公告)号：US20100213193A1

公开(公告)日：2010-08-26

申请号：US12601455

申请日：2008-05-21

申请人： Jurgen Helmlinger ,  Andreas Fischer

发明人： Jurgen Helmlinger ,  Andreas Fischer

IPC分类号： B65D51/00 ,  B32B15/08 ,  B32B5/00 ,  B32B7/12 ,  B32B3/00

CPC分类号： B32B15/08 ,  Y10T428/24612 ,  Y10T428/24851 ,  Y10T428/269 ,  Y10T428/2817 ,  Y10T428/31678 ,  Y10T428/31681 ,  Y10T428/31692

摘要： The invention relates to a composite for packaging material with a symmetrical structure that consists of plastic/aluminum/plastic. The invention also relates to a container covering with a symmetrical composite structure that consists of polyester/aluminum/polyester, whereby polyethylene terephthalate (PET) is advantageously used as polyester.

摘要翻译： 本发明涉及一种具有由塑料/铝/塑料构成的对称结构的包装材料的复合材料。 本发明还涉及由聚酯/铝/聚酯组成的对称复合结构的容器，由此聚对苯二甲酸乙二醇酯（PET）有利地用作聚酯。

公开(公告)号：US20100151755A1

公开(公告)日：2010-06-17

申请号：US12594474

申请日：2008-04-11

申请人： Hans-Joachim Bruning ,  Andreas Fischer ,  Jan Adolph Dam Backer ,  Mark James Bonner ,  Ian McMillan Ward

发明人： Hans-Joachim Bruning ,  Andreas Fischer ,  Jan Adolph Dam Backer ,  Mark James Bonner ,  Ian McMillan Ward

IPC分类号： B32B5/02 ,  B29C47/00 ,  B32B37/12 ,  D03D15/00 ,  C08F10/00

CPC分类号： F41H5/02 ,  B29C55/06 ,  B29C55/065 ,  B29K2023/065 ,  B32B5/024 ,  B32B5/028 ,  B32B5/12 ,  D01D5/084 ,  D01F6/04 ,  F41H5/0485 ,  Y10T156/10 ,  Y10T442/10 ,  Y10T442/3041

摘要： The invention relates to a method for the production of high-strength ribbons having a high modulus of elasticity made of a highly molecular polyolefin, wherein the polyolefins, particularly polypropylene and polyethylene, are extruded through a slotted nozzle, are then subjected to a temperature of 85° to 135° C. for a duration of at least one second, the films are then cut into individual ribbons, if necessary, and stretched at temperatures between 90° and 165° C. in one or more steps, are rolled up or further processed directly into textiles or technical flexible sheet materials. The ribbons can be laminated into multi-layer flexible sheet materials by using adhesives or adhesion promoters, the flexible sheet materials being particularly suitable as protection from ballistic projectiles. In this case particularly in the form of plate-shaped or flexible compound bodies.

摘要翻译： 本发明涉及一种用于生产由高分子量聚烯烃制成的具有高弹性模量的高强度带的方法，其中聚烯烃特别是聚丙烯和聚乙烯通过开槽喷嘴挤出，然后经受 85°至135℃，持续至少一秒钟，然后将膜切成单个带，如果需要，并在一个或多个步骤中在90°至165℃的温度下拉伸，卷起或 进一步直接加工成纺织品或技术性柔性片材。 带可以通过使用粘合剂或粘合促进剂层压成多层柔性片材，柔性片材特别适用于防止弹道射弹。 在这种情况下，特别是板状或柔性复合体的形式。

公开(公告)号：US20100096361A1

公开(公告)日：2010-04-22

申请号：US11427326

申请日：2006-06-28

申请人： Andreas Fischer ,  David Pirkle

发明人： Andreas Fischer ,  David Pirkle

IPC分类号： C23F1/00 ,  G01L23/00

CPC分类号： H01L21/67069 ,  H01J37/304 ,  H01J37/32935 ,  H01L21/67253

摘要： Universal plasma unconfinement detection systems configured to detect the plasma unconfinement condition in the plasma processing chamber and methods therefor. The detection systems and methods are designed to reliably and accurately detect the existence of the plasma unconfinement condition in a process-independent and recipe-independent manner.

摘要翻译： 配置成检测等离子体处理室中的等离子体无约束条件的通用等离子体无约束检测系统及其方法。 检测系统和方法被设计成可以以独立于过程和独立于方法的方式可靠且准确地检测等离子体无约束条件的存在。

公开(公告)号：US20100076085A1

公开(公告)日：2010-03-25

申请号：US12627190

申请日：2009-11-30

申请人： Michael Gruss ,  Andreas Fischer ,  Markus Kegel ,  Wolfgang Hell ,  Markus Von Raumer ,  Joerg Berghausen ,  Susan Margaret Paul

发明人： Michael Gruss ,  Andreas Fischer ,  Markus Kegel ,  Wolfgang Hell ,  Markus Von Raumer ,  Joerg Berghausen ,  Susan Margaret Paul

IPC分类号： A61K31/135 ,  C07C211/01 ,  A61P25/00

CPC分类号： C07C215/66 ,  C07B2200/13 ,  C07C213/10 ,  C07C215/64 ,  C07C2601/14

摘要： A crystalline salt of 3-[2-(dimethylamino)methyl(cyclohex-1-yl)]phenol and hydrogen chloride, preferably in a 1:1 composition, including various crystalline forms of this salt, processes for preparing the various crystalline forms of this salt, pharmaceutical compositions containing the various crystalline forms of this salt, and the use of this salt as a pharmacologically active agent in a pharmaceutical composition to treat or inhibit pain or other disorders or disease states.

摘要翻译： 3- [2-（二甲基氨基）甲基（环己-1-基）]苯酚和氯化氢的结晶盐，优选以1:1的组成，包括该盐的各种结晶形式，制备各种结晶形式的 该盐，含有该盐的各种结晶形式的药物组合物，以及该盐作为药物活性剂在药物组合物中用于治疗或抑制疼痛或其它疾病或疾病状态。

公开(公告)号：US20090233899A1

公开(公告)日：2009-09-17

申请号：US12257009

申请日：2008-10-23

申请人： Andreas Fischer

发明人： Andreas Fischer

IPC分类号： A61K31/546 ,  C07D501/00

CPC分类号： C07D501/00

摘要： A novel crystalline modification of cefuroximaxetil (ε-modification), pharmaceutical compositions containing this modification, and their use.

摘要翻译： 头孢呋辛酯（ε-修饰）的新型结晶改性，含有此修饰的药物组合物及其用途。

公开(公告)号：US20080020574A1

公开(公告)日：2008-01-24

申请号：US11487999

申请日：2006-07-18

申请人： Alexei Marakhtanov ,  Rajinder Dhindsa ,  Eric Hudson ,  Andreas Fischer

发明人： Alexei Marakhtanov ,  Rajinder Dhindsa ,  Eric Hudson ,  Andreas Fischer

IPC分类号： C23F1/00 ,  H01L21/302 ,  C23C16/00

CPC分类号： H01J37/321 ,  H01J37/32091 ,  H01J2237/03

摘要： A device for inductively confining capacitively coupled RF plasma formed in a plasma processing apparatus. The apparatus includes an upper electrode and a lower electrode that is adapted to support a substrate and to generate the plasma between the substrate and the upper electrode. The device includes a dielectric support ring that concentrically surrounds the upper electrode and a plurality of coil units mounted on the dielectric support ring. Each coil unit includes a ferromagnetic core positioned along a radial direction of the dielectric support ring and at least one coil wound around each ferromagnetic core. The coil units generate, upon receiving RF power from an RF power source, electric and magnetic fields that reduce the number of charged particles of the plasma diffusing away from the plasma.

摘要翻译： 用于感应地限制在等离子体处理装置中形成的电容耦合RF等离子体等离子体的装置。 该装置包括上电极和下电极，其适于支撑衬底并在衬底和上电极之间产生等离子体。 该装置包括同心地围绕上电极的电介质支撑环和安装在电介质支撑环上的多个线圈单元。 每个线圈单元包括沿着电介质支撑环的径向定位的铁磁芯和缠绕在每个铁磁芯周围的至少一个线圈。 线圈单元在从RF电源接收到RF功率时产生电场和磁场，其减少等离子体的带电粒子的数量远离等离子体扩散。

公开(公告)号：US20070284246A1

公开(公告)日：2007-12-13

申请号：US11447946

申请日：2006-06-07

申请人： Douglas Keil ,  Eric Hudson ,  Chris Kimball ,  Andreas Fischer

发明人： Douglas Keil ,  Eric Hudson ,  Chris Kimball ,  Andreas Fischer

IPC分类号： C23C14/00

CPC分类号： C23C16/52 ,  C23C16/509 ,  H01J37/32935 ,  H01J37/3299

摘要： A method of fault detection for use in a plasma processing chamber is provided. The method comprises monitoring plasma parameters within a plasma chamber and analyzing the resulting information. Such analysis enables detection of failures and the diagnosis of failure modes in a plasma processing reactor during the course of wafer processing. The method comprises measuring the plasma parameters as a function of time and analyzing the resulting data. The data can be observed, characterized, compared with reference data, digitized, processed, or analyzed in any way to reveal a specific fault. Monitoring can be done with a detector such as a probe, which is preferably maintained within the plasma chamber substantively coplanar with a surface within the chamber, and directly measures net ion flux and other plasma parameters. The detector is preferably positioned at a grounded surface within the reactor such as a grounded showerhead electrode, and can be of a planar ion flux probe (PIF) type or a non-capacitive type. Chamber faults that can be detected include a build-up of process by-products in the process chamber, a helium leak, a match re-tuning event, a poor stabilization rate, and a loss of plasma confinement. If the detector is a probe, the probe can be embedded in a part of a plasma processing chamber and can comprises one or more gas feed-through holes.

摘要翻译： 提供了一种用于等离子体处理室的故障检测方法。 该方法包括监测等离子体室内的等离子体参数并分析所得到的信息。 这样的分析使得能够在晶片处理过程中检测等离子体处理反应器中的故障和故障模式的诊断。 该方法包括测量作为时间的函数的等离子体参数并分析所得到的数据。 数据可以观察，表征，与参考数据进行比较，数字化，处理或分析，以显示特定故障。 可以用诸如探针的检测器进行监测，该探针优选地保持在与腔室内的表面基本上共面的等离子体室内，并且直接测量净离子通量和其它等离子体参数。 检测器优选地位于反应器内的接地表面，例如接地喷头电极，并且可以是平面离子通量探针（PIF）型或非电容型。 可以检测到的室内故障包括处理室中的过程副产物的积聚，氦泄漏，匹配重新调谐事件，差的稳定化速率和等离子体约束的损失。 如果检测器是探针，则探针可以嵌入在等离子体处理室的一部分中，并且可以包括一个或多个气体馈通孔。

公开(公告)号：US07244336B2

公开(公告)日：2007-07-17

申请号：US10736666

申请日：2003-12-17

申请人： Andreas Fischer ,  Peter Loewenhardt

发明人： Andreas Fischer ,  Peter Loewenhardt

IPC分类号： C23F1/00

CPC分类号： H01L21/68735 ,  H01J37/32642 ,  H01L21/67069

摘要： A temperature-controlled hot edge ring assembly adapted to surround a substrate support in a plasma reaction chamber. The assembly includes a conductive lower ring, a ceramic intermediate ring, and an upper ring. The intermediate ring overlies the lower ring and is adapted to be attached via the lower ring to an RF electrode. The upper ring overlies the intermediate ring, and has an upper surface exposed to an interior of a plasma reaction chamber.

摘要翻译： 适于围绕等离子体反应室中的衬底支撑件的温度控制的热边缘环组件。 组件包括导电下环，陶瓷中间环和上环。 中间环覆盖在下环上并且适于经由下环连接到RF电极。 上环覆盖中间环，并且具有暴露于等离子体反应室内部的上表面。

公开(公告)号：US07193173B2

公开(公告)日：2007-03-20

申请号：US10883583

申请日：2004-06-30

申请人： Mark Wiepking ,  Bradford J. Lyndaker ,  Andras Kuthi ,  Andreas Fischer

发明人： Mark Wiepking ,  Bradford J. Lyndaker ,  Andras Kuthi ,  Andreas Fischer

IPC分类号： B23K10/00

CPC分类号： H01J37/32009 ,  H01J37/32082 ,  H01J37/32706

摘要： A method in a plasma processing system for processing a semiconductor substrate is disclosed. The plasma processing system includes a plasma processing chamber and an electrostatic chuck coupled to a bias compensation circuit. The method includes igniting a plasma in a plasma ignition step. Plasma ignition step is performed while a first bias compensation voltage provided by the bias compensation circuit to the chuck is substantially zero and while a first chamber pressure within the plasma processing chamber is below about 90 mTorr. The method further includes processing the substrate in a substrate-processing step after the plasma is ignited. The substrate-processing step employs a second bias compensation voltage provided by the bias compensation circuit that is higher than the first bias compensation voltage and a second chamber pressure substantially equal to the first chamber pressure.

摘要翻译： 公开了一种用于处理半导体衬底的等离子体处理系统中的方法。 等离子体处理系统包括等离子体处理室和耦合到偏置补偿电路的静电卡盘。 该方法包括在等离子体点火步骤中点燃等离子体。 当偏置补偿电路向卡盘提供的第一偏置补偿电压基本上为零并且等离子体处理室内的第一室压力低于约90mTorr时，执行等离子体点火步骤。 该方法还包括在等离子体点燃之后的衬底处理步骤中处理衬底。 基板处理步骤采用由偏置补偿电路提供的第二偏置补偿电压，该偏置补偿电压高于第一偏置补偿电压，第二室压力基本上等于第一室压力。