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    SPUTTERING TARGET
    21.
    发明申请
    SPUTTERING TARGET 审中-公开
    飞溅目标

    公开(公告)号：US20100126854A1

    公开(公告)日：2010-05-27

    申请号：US12277197

    申请日：2008-11-24

    申请人： Daniel O. Clark

    发明人： Daniel O. Clark

    IPC分类号： C23C14/34 ,  C23C14/00

    CPC分类号： C23C14/3407 ,  H01J37/34 ,  H01J37/3426 ,  H01J37/3432 ,  H01J37/3435

    摘要： Embodiments of the present invention generally include a sputtering target capable of substantially reducing the amount of wasted material associated with conventional sputtering targets. In one embodiment, the sputtering target includes a fluidized bed of sputtering material that constantly maintains a planar sputtering surface throughout the sputtering process. In one embodiment, the fluidized bed of sputtering material is either periodically or constantly supplied with sputtering material to both maintain a planar sputtering surface and reduce downtime of the sputtering equipment.

    摘要翻译： 本发明的实施方案通常包括能够显着减少与常规溅射靶相关的浪费材料量的溅射靶。 在一个实施例中，溅射靶包括溅射材料的流化床，其在整个溅射过程中始终保持平面溅射表面。 在一个实施例中，溅射材料的流化床周期性地或恒定地提供溅射材料，以保持平面溅射表面并减少溅射设备的停机时间。

    SYSTEMS AND METHODS FOR TREATING FLAMMABLE EFFLUENT GASES FROM MANUFACTURING PROCESSES
    23.
    发明申请
    SYSTEMS AND METHODS FOR TREATING FLAMMABLE EFFLUENT GASES FROM MANUFACTURING PROCESSES 有权
    用于从制造过程中处理易燃气体的系统和方法

    公开(公告)号：US20090216061A1

    公开(公告)日：2009-08-27

    申请号：US12365886

    申请日：2009-02-04

    申请人： Daniel O. Clark ,  Mehran Moalem ,  Robbert M. Vermeulen ,  Phil Chandler

    发明人： Daniel O. Clark ,  Mehran Moalem ,  Robbert M. Vermeulen ,  Phil Chandler

    IPC分类号： A62D3/30 ,  B01J19/00

    CPC分类号： B01D53/005 ,  B01D53/40 ,  B01D2257/108 ,  B01D2258/0216

    摘要： A system for treating flammable effluent gas is provided. The system includes an exhaust conduit to carry the flammable effluent gas to an abatement unit, a control system coupled to the abatement unit to determine an operating parameter of the abatement unit, a bypass valve coupled to the exhaust conduit which is an operative responsive to the monitoring system, and a source of second gas to be mixed with the effluent gas diverted from the abatement unit when the bypass valve is operating in a bypass mode to provide a mixed gas having a flammability lower than the effluent gas. Methods of the invention as well as numerous other aspects are provided.

    摘要翻译： 提供了一种处理易燃废气的系统。 该系统包括用于将可燃性流出气体运送到减排单元的排气管道，耦合到减排单元以确定减排单元的操作参数的控制系统;联接到排气管道的旁通阀，该旁通阀是响应于 监测系统，以及当旁通阀以旁通模式操作时与从减排单元转移的废气混合的第二气体源，以提供具有低于废气的可燃性的混合气体。 提供了本发明的方法以及许多其它方面。

    METHODS AND APPARATUS FOR ASSEMBLING AND OPERATING ELECTRONIC DEVICE MANUFACTURING SYSTEMS
    26.
    发明申请
    METHODS AND APPARATUS FOR ASSEMBLING AND OPERATING ELECTRONIC DEVICE MANUFACTURING SYSTEMS 失效
    组装和操作电子设备制造系统的方法和装置

    公开(公告)号：US20080289167A1

    公开(公告)日：2008-11-27

    申请号：US12126922

    申请日：2008-05-25

    申请人： Phil Chandler ,  Daniel O. Clark ,  Robbert M. Vermeulen ,  Jay J. Jung ,  Roger M. Johnson ,  Youssef A. Loldj ,  James L. Smith

    发明人： Phil Chandler ,  Daniel O. Clark ,  Robbert M. Vermeulen ,  Jay J. Jung ,  Roger M. Johnson ,  Youssef A. Loldj ,  James L. Smith

    IPC分类号： B23P11/00

    CPC分类号： G05B19/4184 ,  G05B2219/31386 ,  G05B2219/45026 ,  Y02P90/04 ,  Y02P90/14 ,  Y10T29/49826 ,  Y10T29/53048

    摘要： A method for operating one or more electronic device manufacturing systems is provided, including the steps 1) performing a series of electronic device manufacturing process steps with a process tool, wherein the process tool produces effluent as a byproduct of performing the series of process steps; 2) abating the effluent with an abatement tool; 3) supplying an abatement resource to the abatement tool from a first abatement resource supply; 4) changing an abatement resource supply from the first abatement resource supply to a second abatement resource supply, wherein changing the abatement resource supply comprises: i) interrupting a flow of the abatement resource from the first abatement resource supply; and ii) beginning a flow of the abatement resource from the second abatement resource supply; and 5) continuing to perform the series of process steps with the process tool, while changing, and after changing, the abatement resource supply.

    摘要翻译： 提供了一种用于操作一个或多个电子设备制造系统的方法，包括以下步骤：1）使用工艺工具执行一系列电子设备制造工艺步骤，其中所述工艺工具产生流出物作为执行所述一系列工艺步骤的副产品; 2）用减排工具减轻废水; 3）从第一减排资源提供给减排工具的减排资源; 4）将减排资源供应从第一减排资源供应改为第二减排资源供应，其中改变减排资源供应包括：i）中断来自第一减排资源供应的减排资源的流动; 和ii）从第二减排资源供应开始减排资源的流动; 5）在改变和改变减排资源供应的同时，继续与流程工具一起执行一系列流程步骤。

    Flexible hollow fiber fluid separation module
    27.
    发明授权
    Flexible hollow fiber fluid separation module 失效
    柔性中空纤维流体分离模块

    公开(公告)号：US5202023A

    公开(公告)日：1993-04-13

    申请号：US908905

    申请日：1992-07-02

    申请人： Johnny L. Trimmer ,  George E. Mahley, III ,  Stephen A. Dunning ,  Daniel O. Clark

    发明人： Johnny L. Trimmer ,  George E. Mahley, III ,  Stephen A. Dunning ,  Daniel O. Clark

    IPC分类号： B01D53/22 ,  B01D63/02 ,  B01D63/04

    CPC分类号： B01D53/22 ,  B01D63/02 ,  B01D63/024 ,  B01D63/046 ,  B01D2313/42

    摘要： The present invention is a fluid separation module having improved permeate flow characteristics and improved space/volume requirements. Such modules comprise a hollow fiber bundle, a first and optional second tubesheet, an optional casing, a feed inlet, a permeate outlet, and a non-permeate outlet. The module is coiled, curved or bent into a useful non-linear shape which reduces the space requirements for the module essentially without diminishing the effectiveness of the fluid separation. The feed fluid is introduced to the module either in a boreside or a shellside manner. Coil, french horn, spiral or U-shaped configuration or combinations thereof are useful.

    摘要翻译： 本发明是具有改善的渗透流特性和改进的空间/体积要求的流体分离模块。 这样的模块包括中空纤维束，第一和任选的第二管板，可选的壳体，进料入口，渗透物出口和非渗透物出口。 模块被卷绕，弯曲或弯曲成有用的非线性形状，其基本上减少了模块的空间要求，而不降低流体分离的有效性。 将进料流体以钻孔或壳体方式引入模块。 线圈，法国喇叭，螺旋或U形配置或其组合是有用的。

    Elongated tubesheets for hollow fiber type battery cells and method of fabricating the same
    28.
    发明授权
    Elongated tubesheets for hollow fiber type battery cells and method of fabricating the same 失效
    中空纤维型电池的细长管板及其制造方法

    公开(公告)号：US4664990A

    公开(公告)日：1987-05-12

    申请号：US843544

    申请日：1986-03-25

    申请人： Daniel O. Clark ,  Floris Y. Tsang ,  Paul A. Damrow

    发明人： Daniel O. Clark ,  Floris Y. Tsang ,  Paul A. Damrow

    IPC分类号： C03C3/064 ,  H01M10/39

    CPC分类号： H01M10/3909 ,  C03C3/064 ,  Y10T29/49108

    摘要： Several advantages as to ease of cell fabrication, maximum cell size, fiber breakage, tubesheet tightness, resistance to tubesheet deformation in prolonged service, safety, etc., can be realized by using as the tubesheet in a hollow fiber type battery cell one which is elongated in shape, has a substantially smaller diameter than the fiber "bundle" depending from it and in which the fiber ends passing through it are closely packed.

    摘要翻译： 可以通过在中空纤维型电池单元中使用管板来实现电池制造的容易性，最大电池尺寸，纤维断裂，管板密封性，长期使用中的管板变形的耐受性，安全性等的几个优点， 细长的形状，具有与纤维“束”相比基本上更小的直径，并且其中通过它的纤维末端被紧密地包装。

    Methods and apparatus for assembling and operating electronic device manufacturing systems
    29.
    发明授权
    Methods and apparatus for assembling and operating electronic device manufacturing systems 失效
    组装和操作电子设备制造系统的方法和装置

    公开(公告)号：US08455368B2

    公开(公告)日：2013-06-04

    申请号：US12126922

    申请日：2008-05-25

    申请人： Phil Chandler ,  Daniel O. Clark ,  Robbert M. Vermeulen ,  Jay J. Jung ,  Roger M. Johnson ,  Youssef A. Loldj ,  James L. Smith

    发明人： Phil Chandler ,  Daniel O. Clark ,  Robbert M. Vermeulen ,  Jay J. Jung ,  Roger M. Johnson ,  Youssef A. Loldj ,  James L. Smith

    IPC分类号： H01L21/00

    CPC分类号： G05B19/4184 ,  G05B2219/31386 ,  G05B2219/45026 ,  Y02P90/04 ,  Y02P90/14 ,  Y10T29/49826 ,  Y10T29/53048

    摘要： A method for operating one or more electronic device manufacturing systems is provided, including the steps 1) performing a series of electronic device manufacturing process steps with a process tool, wherein the process tool produces effluent as a byproduct of performing the series of process steps; 2) abating the effluent with an abatement tool; 3) supplying an abatement resource to the abatement tool from a first abatement resource supply; 4) changing an abatement resource supply from the first abatement resource supply to a second abatement resource supply, wherein changing the abatement resource supply comprises: i) interrupting a flow of the abatement resource from the first abatement resource supply; and ii) beginning a flow of the abatement resource from the second abatement resource supply; and 5) continuing to perform the series of process steps with the process tool, while changing, and after changing, the abatement resource supply.

    摘要翻译： 提供了一种用于操作一个或多个电子设备制造系统的方法，包括以下步骤：1）使用工艺工具执行一系列电子设备制造工艺步骤，其中所述工艺工具产生流出物作为执行所述一系列工艺步骤的副产品; 2）用减排工具减轻废水; 3）从第一减排资源提供给减排工具的减排资源; 4）将减排资源供应从第一减排资源供应改为第二减排资源供应，其中改变减排资源供应包括：i）中断来自第一减排资源供应的减排资源的流动; 和ii）从第二减排资源供应开始减排资源的流动; 5）在改变和改变减排资源供应的同时，继续与流程工具一起执行一系列流程步骤。