CATHODE SPUTTER DEPOSITION OF A Cu(In,Ga)X2 THIN FILM
    21.
    发明申请
    CATHODE SPUTTER DEPOSITION OF A Cu(In,Ga)X2 THIN FILM 审中-公开
    Cu(In,Ga)X2薄膜的阴极溅射沉积

    公开(公告)号:US20130015057A1

    公开(公告)日:2013-01-17

    申请号:US13513328

    申请日:2010-11-29

    IPC分类号: C23C14/34 C23C14/14

    摘要: A method and device for the deposition of a film made of a semiconductive material having the formula Cu(In, Ga)X2, where X is S or Se, involves cathode sputter deposition of Cu, In, and Ga onto at least one surface of a substrate and simultaneous deposition of X in vapor phase onto the surface in a cathode chamber. A vapor form of X or its precursor is moved in a first laminar gas flow parallel to and in contact with the surface, and is simultaneously moved in a second laminar gas flow for inert gas parallel to the first laminar gas flow and located between the first laminar gas flow and a sputtering target(s), to confine the first laminar gas flow to the area around the substrate.

    摘要翻译: 用于沉积由具有式Cu(In,Ga)X2的半导体材料制成的膜的方法和装置,其中X是S或Se,包括将Cu,In和Ga阴极溅射沉积到至少一个表面上 衬底,并将X在汽相中同时沉积到阴极室中的表面上。 X或其前体的蒸汽形式在与该表面平行并与其接触的第一层流气流中移动,同时在与第一层流气流平行的位于第一层流气流之间的惰性气体的第二层流气流中移动, 层流气流和溅射靶,以将第一层流气体限制在衬底周围的区域。

    Fuel cell comprising a plurality of individual cells connected in series by current collectors
    22.
    发明申请
    Fuel cell comprising a plurality of individual cells connected in series by current collectors 有权
    燃料电池包括由集电器串联连接的多个单独电池

    公开(公告)号:US20090123803A1

    公开(公告)日:2009-05-14

    申请号:US12289685

    申请日:2008-10-31

    IPC分类号: H01M8/10 B05D5/12 H01M8/02

    摘要: Adjacent individual cells of a fuel cell are connected in series by intermediate connecting parts. Each connecting part is formed by a branch made from an electrically conducting material and extending the first current collector of a cell perpendicularly and connected to the second current collector of the adjacent cell. Each first current collector is moreover formed by an electrically insulating porous matrix incorporating said electrically conducting material, and the first current collectors of two adjacent cells are separated by an area of electrically insulating porous material, said electrically insulating porous material being identical to that forming the porous matrix of said first current collectors. Series connection between the individual cells of such a fuel cell is thereby easy and quick to implement.

    摘要翻译: 燃料电池的相邻单个电池通过中间连接部分串联连接。 每个连接部分由由导电材料制成的分支形成,并且垂直地延伸单元的第一集电器并连接到相邻单元的第二集电器。 此外,每个第一集电器由结合有所述导电材料的电绝缘多孔基体形成,并且两个相邻电池的第一集电器被电绝缘多孔材料的区域隔开,所述电绝缘多孔材料与形成 所述第一集电器的多孔矩阵。 这样的燃料电池的各个电池之间的串联连接由此容易且快速地实现。

    Micro fuel cell with an electrolytic membrane reinforced by an anchoring element and method for production of a micro fuel cell
    23.
    发明申请
    Micro fuel cell with an electrolytic membrane reinforced by an anchoring element and method for production of a micro fuel cell 有权
    具有通过锚定元件增强的电解质膜的微型燃料电池和用于生产微型燃料电池的方法

    公开(公告)号:US20070054171A1

    公开(公告)日:2007-03-08

    申请号:US11509645

    申请日:2006-08-25

    摘要: A micro fuel cell comprises at least a substrate provided with front and rear faces. The front face of the substrate supports a successive stacking of a first electrode, a substantially flat electrolytic membrane and a second electrode. The electrolytic membrane comprises at least one anchoring element salient substantially perpendicularly to a main plane of said membrane. The anchoring element is arranged in a complementary part of an anchoring recess formed in the substrate. The substrate can also comprise a plurality of microchannels, substantially perpendicular to the main plane of the membrane. The anchoring recess can then be formed by one of the microchannels whereas the other microchannels enable supply of the first electrode with reactive fluid. Such a micro fuel cell is able to operate when a pressure difference exists between the two sides of the stacking.

    摘要翻译: 微型燃料电池至少包括设置有正面和背面的基板。 基板的前表面支持第一电极,基本平坦的电解膜和第二电极的连续层叠。 电解膜包括至少一个基本上垂直于所述膜的主平面凸出的锚定元件。 锚固元件布置在形成在基底中的锚定凹部的互补部分中。 衬底还可以包括基本上垂直于膜的主平面的多个微通道。 锚定凹槽然后可以由微通道中的一个形成,而另一个微通道使第一电极能够供应反应流体。 当堆叠的两侧之间存在压力差时,这种微型燃料电池能够运行。

    FLUID DELIVERY DEVICE INCLUDING A THERMOELECTRIC MODULE
    26.
    发明申请
    FLUID DELIVERY DEVICE INCLUDING A THERMOELECTRIC MODULE 失效
    包含热电模块的流体输送装置

    公开(公告)号:US20130074954A1

    公开(公告)日:2013-03-28

    申请号:US13702843

    申请日:2011-07-04

    IPC分类号: F16K31/02

    摘要: The fluid distribution device includes a first cavity at a first pressure and a second cavity at a second pressure lower than the first pressure. A partition separates the first cavity from the second cavity and a restricting valve is arranged between the first and second cavities. The partition includes a thermoelectric module having a hot side in thermal contact with the first cavity and a cold side in thermal contact with the second cavity.

    摘要翻译: 流体分配装置包括在第一压力下的第一空腔和低于第一压力的第二压力的第二空腔。 隔板将第一空腔与第二空腔隔开,并且限制阀设置在第一和第二空腔之间。 隔板包括具有与第一空腔热接触的热侧的热电模块和与第二空腔热接触的冷侧。

    Control of localized air gap formation in an interconnect stack
    27.
    发明授权
    Control of localized air gap formation in an interconnect stack 失效
    控制互连叠层中的局部气隙形成

    公开(公告)号:US08097949B2

    公开(公告)日:2012-01-17

    申请号:US12295568

    申请日:2007-03-21

    摘要: The present invention relates to a method for fabricating an interconnect stack of an integrated-circuit device. Air gaps are fabricated in the interconnect stack on one or more interconnect levels. The method comprises forming local etch vias (216, 218) between a lower etch-barrier layer (236) and an upper etch-barrier layer (211) on top of an upper-intermediate interconnect level (224). Lateral inhomogeneities of the dielectric constant on the upper-intermediate interconnect level are removed in comparison with prior-art devices. For in the finished interconnect stack local variations in the dielectric permittivity can only occur at the (former) etch vias, which are either visible by the presence of air cavities or hardly visible due to a later filling with the dielectric material of the next interlevel dielectric layer. The integrated-circuit device of the invention completely avoids a penetration of copper from the metal interconnect line sections into the adjacent interlevel or intermetal dielectric layers.

    摘要翻译: 本发明涉及一种用于制造集成电路器件的互连叠层的方法。 在一个或多个互连层上的互连堆叠中制造气隙。 该方法包括在下部蚀刻阻挡层(236)和位于上部中间互连层(224)顶部的上部蚀刻阻挡层(211)之间形成局部蚀刻通孔(216,218)。 与现有技术的装置相比,去除上中间互连层上的介电常数的横向不均匀性。 对于在完成的互连堆叠中,介电常数的局部变化只能发生在(前一个)蚀刻通孔处,这是通过存在空气腔可见或几乎看不见的,因为稍后用下一个层间电介质材料填充 层。 本发明的集成电路器件完全避免了铜从金属互连线部分穿入相邻的层间或金属间电介质层。

    Method for producing a nanostructure based on interconnected nanowires, nanostructure and use as thermoelectric converter
    28.
    发明授权
    Method for producing a nanostructure based on interconnected nanowires, nanostructure and use as thermoelectric converter 有权
    基于互连的纳米线,纳米结构和用作热电转换器的纳米结构的制造方法

    公开(公告)号:US07868243B2

    公开(公告)日:2011-01-11

    申请号:US11826293

    申请日:2007-07-13

    IPC分类号: H01L35/00 H01L21/44

    摘要: Method for producing a nanostructure based on interconnected nanowires, nanostructure and use as thermoelectric converter The nanostructure comprises two arrays of nanowires made from respectively n-doped and p-doped semi-conducting material. The nanowires of the first array, for example of n type, are formed for example by VLS growth. A droplet of electrically conducting material that acted as catalyst during the growth step remains on the tip of each nanowire of the first array at the end of growth. A nanowire of the second array is then formed around each nanowire of the first array by covering a layer of electrically insulating material formed around each nanowire of the first array, and the associated droplet, with a layer of p-type semi-conducting material. A droplet thus automatically connects a nanowire of the first array with a single coaxial nanowire of the second array. This type of nanostructure can be used in particular to form a thermoelectric converter.

    摘要翻译: 用于制备基于互连纳米线,纳米结构并用作热电转换器的纳米结构的方法纳米结构包括由分别掺杂n型掺杂和p掺杂半导体材料制成的两个纳米线阵列。 第一阵列的纳米线,例如n型,例如通过VLS生长形成。 在生长步骤中用作催化剂的导电材料液滴在生长结束时保留在第一阵列的每个纳米线的尖端上。 然后通过用一层p型半导体材料覆盖形成在第一阵列的每个纳米线周围的电绝缘材料层和相关联的液滴,形成在第一阵列的每个纳米线周围的第二阵列的纳米线。 因此,液滴自动地将第一阵列的纳米线与第二阵列的单个同轴纳米线连接。 这种类型的纳米结构可以特别用于形成热电转换器。

    Lithium storage battery comprising a current-electrode collector assembly with expansion cavities and method for producing same
    29.
    发明申请
    Lithium storage battery comprising a current-electrode collector assembly with expansion cavities and method for producing same 审中-公开
    锂蓄电池,其包括具有膨胀腔的电流 - 电极收集器组件及其制造方法

    公开(公告)号:US20080153000A1

    公开(公告)日:2008-06-26

    申请号:US11987783

    申请日:2007-12-04

    IPC分类号: H01M4/38 H01M6/00

    摘要: A lithium storage battery comprises a stack formed by a current collector comprising recessed zones, an electrode and a plurality of expansion cavities for the material forming the electrode. Each expansion cavity comprises at least one wall formed by a part of the electrode. Preferably the electrode is an electrode formed by at least one material able to insert and de-insert Li+ ions, the volume of which material increases when Li+ ions are inserted. The empty volume of the expansion cavities can thus be at least partially filled by a part of the material forming the electrode when Li+ cations are inserted in the material. The expansion cavities are formed in the recessed zones of the current collector.

    摘要翻译: 锂蓄电池包括由集电器形成的叠层,包括凹陷区域,电极和用于形成电极的材料的多个膨胀腔。 每个膨胀腔包括由电极的一部分形成的至少一个壁。 优选地,电极是由至少一种能够插入和取代插入Li + +离子的材料形成的电极,当插入Li + +离子时,该材料的体积增加。 因此当将Li + +阳离子插入材料时,膨胀腔的空体积可以至少部分地被形成电极的材料的一部分填充。 膨胀腔形成在集电体的凹陷区域中。