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公开(公告)号：US20210362351A1
公开(公告)日：2021-11-25
申请号：US16763888
申请日：2018-11-09
发明人： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
摘要： A suction method is provided as a method of performing, by using a suction collet, suction of a Fabry-Perot interference filter including: a substrate; a laminated structure that is provided on the substrate and that includes a main surface facing a side opposite to the substrate; and a thinned portion that is located outside the laminated structure when viewed in a direction intersecting the main surface and that is recessed to a side of the substrate with respect to the main surface, the method including: a first step of arranging the suction collet so as to face the main surface; a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step; and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step.
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公开(公告)号：US20210116297A1
公开(公告)日：2021-04-22
申请号：US16488742
申请日：2018-02-26
发明人： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
摘要： A light detection device includes a package including a window, a Fabry-Perot interference filter for transmitting light incident from the window in the package, and a light detector for detecting the light transmitted by the Fabry-Perot interference filter in the package. The Fabry-Perot interference filter includes: a substrate having a first surface on the window side and a second surface on the light detector side; a first layer structure arranged on the first surface, the first layer structure having a first mirror and a second mirror, and a lens unit integrally formed on the second surface side, the lens unit for condensing the light transmitted by the first mirror and the second mirror onto the light detector.
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公开(公告)号：US20200278272A1
公开(公告)日：2020-09-03
申请号：US16765626
申请日：2018-11-09
发明人： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
摘要： An optical inspection device includes: a wafer support unit configured to support a wafer in which a plurality of Fabry-Perot interference filter portions are formed, each of the plurality of filter portions in which a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force, the wafer support unit configured to support the wafer such that a direction in which the first mirror portion and the second mirror portion face each other follows along a reference line; a light emission unit configured to emit light to be incident on each of the plurality of filter portions along the reference line; and a light detection unit configured to detect light transmitted through each of the plurality of filter portions along the reference line. The wafer support unit has a light passage region that allows light to pass along the reference line.
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公开(公告)号：US20160109291A1
公开(公告)日：2016-04-21
申请号：US14971049
申请日：2015-12-16
CPC分类号： G01J3/0205 , G01J3/4412 , G01N21/658 , Y10T29/49155
摘要： A method for making a surface enhanced Raman scattering device in accordance with one aspect of the present invention comprises a first step of forming a nanoimprint layer on a main surface of a wafer including a plurality of portions each corresponding to a substrate; a second step of transferring, by using a mold having a pattern corresponding to a fine structural part, the pattern to the nanoimprint layer after the first step, and thereby forming the formed layer including the fine structural part for each portion corresponding to the substrate; a third step of forming a conductor layer on the fine structural part after the second step; and a fourth step of cutting the wafer into each portion corresponding to the substrate after the second step.
摘要翻译： 根据本发明的一个方面的用于制造表面增强拉曼散射装置的方法包括在晶片的主表面上形成纳米压印层的第一步骤，该晶片的主表面包括各自对应于基板的多个部分; 在第一步骤之后，通过使用具有与精细结构部分相对应的图案的模具转移到纳米压印层的第二步骤，从而形成对应于基板的每个部分的包含精细结构部分的成形层; 在第二步骤之后，在精细结构部件上形成导体层的第三步骤; 以及在第二步骤之后将晶片切割成与基板相对应的每个部分的第四步骤。
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公开(公告)号：US20140041217A1
公开(公告)日：2014-02-13
申请号：US13962583
申请日：2013-08-08
IPC分类号： G01N21/65
CPC分类号： G01J3/0205 , G01J3/4412 , G01N21/658 , Y10T29/49155
摘要： A method for making a surface enhanced Raman scattering device in accordance with one aspect of the present invention comprises a first step of forming a nanoimprint layer on a main surface of a wafer including a plurality of portions each corresponding to a substrate; a second step of transferring, by using a mold having a pattern corresponding to a fine structural part, the pattern to the nanoimprint layer after the first step, and thereby forming the formed layer including the fine structural part for each portion corresponding to the substrate; a third step of forming a conductor layer on the fine structural part after the second step; and a fourth step of cutting the wafer into each portion corresponding to the substrate after the second step.
摘要翻译： 根据本发明的一个方面的用于制造表面增强拉曼散射装置的方法包括在晶片的主表面上形成纳米压印层的第一步骤，该晶片的主表面包括各自对应于基板的多个部分; 在第一步骤之后，通过使用具有与精细结构部分相对应的图案的模具转移到纳米压印层的第二步骤，从而形成对应于基板的每个部分的包含精细结构部分的成形层; 在第二步骤之后，在精细结构部件上形成导体层的第三步骤; 以及在第二步骤之后将晶片切割成与基板相对应的每个部分的第四步骤。
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公开(公告)号：US20130329225A1
公开(公告)日：2013-12-12
申请号：US13964472
申请日：2013-08-12
CPC分类号： G01J3/0205 , G01J3/02 , G01J3/0208 , G01J3/0243 , G01J3/0259 , G01J3/0262 , G01J3/04 , G01J3/18 , G01J3/2803 , G02B7/027 , H01L31/18
摘要： The present invention provides a highly reliable spectral module. When light L1 proceeding to a spectroscopic unit (4) passes through a light transmitting hole (50) in the spectral module (1) in accordance with the present invention, only the light having passed through a light entrance side unit (51) formed such as to become narrower toward a substrate (2) and entered a light exit side unit (52) formed such as to oppose a bottom face (51b) of the light entrance side unit (51) is emitted from a light exit opening (52a). Therefore, stray light M incident on a side face (51c) or bottom face (51b) of the light entrance side unit (51) is reflected to the side opposite to the light exit side unit (52) and thus is inhibited from entering the light exit side unit (52). Therefore, the reliability of the spectral module (1) can be improved.
摘要翻译： 本发明提供了一种高度可靠的光谱模块。 当进入分光单元（4）的光L1穿过根据本发明的光谱模块（1）中的透光孔（50）时，仅通过形成光入射侧单元（51）的光 朝向基板（2）变窄并且进入与光入射侧单元（51）的底面（51b）相对形成的光出射侧单元（52）从光出射开口（52a）射出， 。 因此，入射到光入射单元（51）的侧面（51c）或底面（51b）的杂散光M被反射到与光出射单元（52）相反的一侧，因此被禁止进入 光出射侧单元（52）。 因此，可以提高光谱模块（1）的可靠性。
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公开(公告)号：US20240019304A1
公开(公告)日：2024-01-18
申请号：US18373532
申请日：2023-09-27
发明人： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA , Yumi TERAMACHI
IPC分类号： G01J3/26 , G02B26/00 , G01J3/02 , G01J5/0802 , G01J5/20 , G02F1/21 , H01L31/02 , H01L31/0203 , H01L31/0232 , H01L31/0304
CPC分类号： G01J3/26 , G02B26/00 , G01J3/0213 , G01J3/0256 , G01J3/0291 , G01J5/0802 , G01J5/20 , G02F1/21 , H01L31/02005 , H01L31/0203 , H01L31/02327 , H01L31/03046 , G01J5/045
摘要： A light detection device includes: a Fabry-Perot interference filter provided with a light transmission region; a light detector configured to detect light transmitted through the light transmission region; a package having an opening and accommodating the Fabry-Perot interference filter and the light detector; and a light transmitting unit arranged on an inner surface of the package so as to close an opening, the light transmitting unit including a band pass filter configured to transmit light incident on the light transmission region. When viewed from a direction parallel to the line, an outer edge of the Fabry-Perot interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter.
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公开(公告)号：US20230118479A1
公开(公告)日：2023-04-20
申请号：US18083074
申请日：2022-12-16
发明人： Hiroki OYAMA , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI , Yumi KURAMOTO
IPC分类号： G01J3/26 , H01L21/673 , B65D85/48 , H01L21/677 , G02B26/00 , G02B26/02
摘要： A transportation method for transporting an object including a plurality of Fabry-Perot interference filters, the transportation method including a first step of accommodating the object in an accommodating container, wherein the Fabry-Perot interference filter includes a substrate, a first mirror portion and a second mirror portion provided on the substrate to face each other via a gap and in which a distance from each other is variable, and in the first step, the object is accommodated and supported in the accommodating container in a state where the plurality of Fabry-Perot interference filters is two-dimensionally arranged.
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公开(公告)号：US20220333988A1
公开(公告)日：2022-10-20
申请号：US17847881
申请日：2022-06-23
摘要： A light detection device includes a Fabry-Perot interference filter provided with a light transmitting region on a predetermined line, a light detector disposed on one side with respect to the Fabry-Perot interference filter on the line, a package having an opening positioned on the other side with respect to the Fabry-Perot interference filter on the line, a light transmitting member provided in the package such that the opening is blocked, and a temperature control element having an endothermic region thermally connected to the Fabry-Perot interference filter and the light detector. The endothermic region is positioned on one side with respect to the light detector on the line.
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公开(公告)号：US20210131870A1
公开(公告)日：2021-05-06
申请号：US17126297
申请日：2020-12-18
发明人： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
IPC分类号： G01J3/26 , B23K26/53 , B23K26/00 , B23K26/064 , B81B3/00 , B81C1/00 , G01J3/02 , G02B5/28 , G02B26/00 , B23K26/06
摘要： A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first thinned region, a first mirror layer, a sacrificial layer, and a second mirror layer are formed on a first main surface of a wafer, and the first thinned region in which at least one of the first mirror layer, the sacrificial layer, and the second mirror layer is partially thinned along each of a plurality of lines is formed; a cutting step of cutting the wafer into a plurality of substrates along each of the plurality of lines by forming a modified region within the wafer along each of the plurality of lines through irradiation of a laser light, after the forming step; and a removing step of removing a portion from the sacrificial layer through etching, between the forming step and the cutting step or after the cutting step.
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