-
公开(公告)号：US07075092B2
公开(公告)日：2006-07-11
申请号：US10823968
申请日：2004-04-13
IPC分类号： H01J37/26 , H01J37/285
摘要： One embodiment of the present invention is an electron microscope that includes: (a) a main vacuum chamber housing a stage therein and connected to a vacuum pump; (b) a load lock for loading a specimen into said main vacuum chamber; (c) a minicolumn non-translatably positioned inside said main chamber; and (d) a vacuum pump situated inside the main vacuum chamber and external to and connected to the minicolumn.
摘要翻译： 本发明的一个实施例是一种电子显微镜，其包括：（a）主真空室，其容纳在其中并连接到真空泵的台; （b）用于将样本装载到所述主真空室中的装载锁; （c）不可平移地定位在所述主室内的小柱; 和（d）位于主真空室内的真空泵，在真空室外部并连接到小柱。
-
公开(公告)号：US06936817B2
公开(公告)日：2005-08-30
申请号：US10297864
申请日：2001-01-29
申请人： Hans-Peter Feuerbaum
发明人： Hans-Peter Feuerbaum
IPC分类号： H01J37/18 , H01J37/256 , H01J37/28 , H01J27/00 , H01J37/244 , H01J37/317
CPC分类号： H01J37/256 , H01J37/18 , H01J37/28 , H01J2237/2449
摘要： The invention provides a miniaturized optical column for a charged particle beam apparatus for examining a specimen (14). The column is constituted by, among other things, a charged particle source (2) for providing a beam of charged particles (10); a lens system for guiding the beam of charged particles (10) from the source (2) onto the specimen (14); and a housing (40) which, during operation, is set on beam boost potential.
摘要翻译： 本发明提供了一种用于检查样本（14）的带电粒子束装置的小型化光学柱。 除了别的以外，该柱由用于提供带电粒子束（10）的带电粒子源（2）构成; 用于将来自所述源（2）的带电粒子束（10）引导到所述样本（14）上的透镜系统; 以及在操作期间被设置为光束增强电位的壳体（40）。
-
23.发明授权Device for corpuscular-optical examination and/or processing of material samples 失效用于物质样品的光学检查和/或处理的装置
公开(公告)号：US5329125A
公开(公告)日：1994-07-12
申请号：US974267
申请日：1992-11-10
申请人： Hans-Peter Feuerbaum
发明人： Hans-Peter Feuerbaum
CPC分类号： H01J37/28 , H01J37/20 , H01J2237/0245
摘要： The invention relates to a device for corpuscular-optical examination and/or processing of material samples in which the column and the table system are rotatable relative to one another about a first axis of rotation which encloses a specific angle of inclination with a perpendicular to the object plane, the column being arranged in such a way that its optical axis forms the same angle of inclination with the first axis of rotation. A device of this type is distinguished over known constructions by a substantially simpler construction.
摘要翻译： 本发明涉及一种用于物质样品的红外光学检查和/或处理的装置，其中柱和台系统可绕第一旋转轴线相对于彼此旋转，该第一旋转轴线围绕垂直于 物镜平面以这样的方式排列，使得其光轴与第一旋转轴线形成相同的倾斜角。 这种类型的装置通过基本上更简单的结构在已知的结构上进行区分。
-
公开(公告)号：US4812651A
公开(公告)日：1989-03-14
申请号：US120133
申请日：1987-11-13
IPC分类号： H01L21/66 , G01N23/225 , G01R31/302 , H01J37/14 , H01J37/141 , H01J37/244 , H01J37/26 , H01J37/28
CPC分类号： H01J37/14 , H01J37/05 , H01J37/244 , H01J37/268 , H01J2237/057 , H01J2237/2448 , H01J2237/2449 , H01J2237/24507 , H01J2237/24585
摘要： A spectrometer objective includes a generally asymmetrical objective lens having a short focal length, a deflection system disposed within the objective lens symmetrically relative to an optical axis, and an electrostatic retarding field spectrometer including an electrode arrangement for accelerating the secondary electrons generated on the specimen. The electrode arrangement of the retarding field spectrometer includes an electrode pair for establishing a spherically symmetrical retarding field. The electrode arrangement for extracting and accelerating the secondary particles includes a grid electrode disposed in a region of the lower pole piece of the objective lens and of a planar electrode disposed in the particle beam path immediately above the specimen, wherein the planar electrode is charged with a potential lying between the potential of the specimen and the potential of the grid electrode.
摘要翻译： 光谱仪物镜包括具有短焦距的通常不对称的物镜，相对于光轴对称地设置在物镜内的偏转系统，以及包括用于加速在样本上产生的二次电子的电极装置的静电延迟场光谱仪。 延迟场光谱仪的电极布置包括用于建立球形对称延迟场的电极对。 用于提取和加速二次粒子的电极装置包括设置在物镜的下极片的区域中的栅电极和设置在样品正上方的粒子束路径中的平面电极，其中平面电极被充电 位于样品的电位和栅电极的电位之间的电位。
-
公开(公告)号：US4713543A
公开(公告)日：1987-12-15
申请号：US751020
申请日：1985-07-02
IPC分类号： H01J37/141 , H01J37/04 , H01J37/10 , H01J37/28
摘要： There is disclosed a scanning particle microscope in which the adverse influence of the Boersch effect is reduced. This is achieved by providing an elastrostatic retardation element in the particle optics unit to decelerate the particle from a first energy, at which the particles are generated, to a second energy which is less than half of the first energy.
摘要翻译： 公开了一种扫描粒子显微镜，其中Boersch效应的不利影响降低。 这是通过在粒子光学单元中提供弹性静力学延迟元件来实现的，以使颗粒从产生颗粒的第一能量减速到小于第一能量的一半的第二能量。
-
26.发明授权
公开(公告)号：US4686466A
公开(公告)日：1987-08-11
申请号：US705983
申请日：1985-02-27
IPC分类号： H01J37/28 , G01R31/305 , G01T1/28 , H01J37/26 , G01R31/00
CPC分类号： G01R31/305 , H01J37/266
摘要： A method for setting voltage resolution in particle beam measuring devices wherein band width of a measured signal processing is modified. In order to set a desired voltage resolution simply, reliably, and with high precision, a signal noise of the measured signal is measured. This signal noise is compared to a desired value for the measured signal resolution, and the band width of the measured signal processing is modified such that the signal noise of the measured signal is less than or equal to the desired value for the measured signal resolution.
摘要翻译： 一种用于设置测量信号处理的带宽被修改的粒子束测量装置中的电压分辨率的方法。 为了简单，可靠地且高精度地设置所需的电压分辨率，测量测量信号的信号噪声。 将该信号噪声与测量信号分辨率的期望值进行比较，并且修改测量信号处理的带宽，使得测量信号的信号噪声小于或等于测量信号分辨率的期望值。
-
27.发明授权Method for representing logical status changes of a plurality of adjacent circuit nodes in an integrated circuit in a logic image employing a pulsed electron probe 失效用于表示使用脉冲电子探针的逻辑图像中的集成电路中的多个相邻电路节点的逻辑状态变化的方法
公开(公告)号：US4471302A
公开(公告)日：1984-09-11
申请号：US341106
申请日：1982-01-20
IPC分类号： G01R19/155 , G01Q10/06 , G01Q30/02 , G01Q30/04 , G01R19/145 , G01R31/28 , G01R31/302 , G01R31/305 , G01R31/00 , G01N23/00 , G06F11/32
CPC分类号： B82Y15/00 , G01R31/305
摘要： A method for representing logic changes of state occurring at a plurality of adjacent circuit nodes in an integrated circuit in the form of a logic image employs a pulsed electron probe which always scans a same path in the x-direction on the integrated circuit and the phase of the electron pulses comprising the pulsed electron probe is continuously shifted for each new scanning operation. The integrated circuit can be imaged up to the edge of a recording or field of view limit and it is only at this limit that the y-deflection of the pulsed electron probe is fixed. Very small spacings, such as those occurring between adjacent integrated circuit tracks, can thus be reliably imaged on the picture screen of the scanning electron microscope.
摘要翻译： 以逻辑图像的形式表示在集成电路中的多个相邻电路节点处发生的状态的逻辑变化的方法采用脉冲式电子探针，该脉冲电子探针总是沿着集成电路和相位上的x方向扫描相同的路径 包含脉冲电子探针的电子脉冲在每次新的扫描操作中连续移动。 集成电路可以成像到记录或视场限制的边缘，并且只有在这个限制下，脉冲电子探针的y偏转是固定的。 因此，可以在扫描电子显微镜的图像屏幕上可靠地成像诸如在相邻的集成电路轨道之间发生的那些非常小的间隔。
-
28.发明授权
公开(公告)号：US4460866A
公开(公告)日：1984-07-17
申请号：US284827
申请日：1981-07-20
IPC分类号： G01R27/02 , G01Q30/02 , G01R27/00 , G01R31/305
CPC分类号： G01R27/00 , G01R31/305
摘要： A method for measuring a resistance and a capacitance of an electronic component utilizes electron beam measuring technology to impress a current I.sub.A by means of a pulsed electron beam on the component. A potential curve U(t) which arises during the pulse on the electronic component as a result of the impressed current is utilized together with the known current to determine the resistance R and the capacitance C by means of an appropriate selection of two measuring points U(t.sub.1) and U(t.sub.2) on the potential curve.BACKGROUND OF THE INVENTIONThe invention relates to a method for measuring resistances and capacitances of eletronic components.Up to now, the measurement of resistances and capacitances of electronic components was carried out with a mechanical probe. The smallest measurable capacitance according to this method amounted to 1 pF. The loading effects associated with such probes affects accurate measurement.
摘要翻译： 用于测量电子部件的电阻和电容的方法利用电子束测量技术，通过脉冲电子束对部件上的电流IA进行印制。 在电子元件上由于外加电流产生的脉冲期间产生的电位曲线U（t）与已知电流一起被利用，以通过适当选择两个测量点U来确定电阻R和电容C （t1）和U（t2）。
-
29.发明授权Arrangement for stroboscopic potential measurements with an electron beam testing device 失效用电子束测试装置进行频闪电位测量的布置
公开(公告)号：US4413181A
公开(公告)日：1983-11-01
申请号：US287134
申请日：1981-07-27
申请人： Hans-Peter Feuerbaum
发明人： Hans-Peter Feuerbaum
IPC分类号： G01R19/155 , G01R31/302 , H01J37/04 , G01N23/00
CPC分类号： H01J37/045
摘要： An electron beam testing device system for stroboscopic potential measurements of a test subject utilizes a scanning electron microscope having a beam suppression or blanking system. The blanking system deflects the electron beam across an aperture during each edge of a blanking pulse connected to control the blanking system so that two electron pulses are generated for each blanking pulse. A detector produces a signal responsive to a secondary electron beam resulting from impact of each of the electron pulses on the test subject. A signal processing unit with an associated gate circuit all preferably incorporated in a boxcar integrator processes only one of the two electron pulses associated with each blanking pulse. A phase control preferably within the boxcar integrator is connected to control the gate circuit and a blanking pulse generator for producing the blanking pulse.
摘要翻译： 用于测试对象的频闪电位测量的电子束测试装置系统利用具有光束抑制或消隐系统的扫描电子显微镜。 消隐系统在连接的消隐脉冲的每个边缘期间偏转电子束穿过孔径，以控制消隐系统，使得为每个消隐脉冲产生两个电子脉冲。 检测器产生响应于每个电子脉冲对测试对象产生的二次电子束的信号。 具有全部优选地并入盒式积分器中的相关门电路的信号处理单元仅处理与每个消隐脉冲相关联的两个电子脉冲中的一个。 连接箱式积分器内的相位控制，以控制门电路和用于产生消隐脉冲的消隐脉冲发生器。
-
公开(公告)号：US07638777B2
公开(公告)日：2009-12-29
申请号：US10564752
申请日：2004-05-17
IPC分类号： H01J1/50
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/3177 , H01J2237/047 , H01J2237/0635
摘要： The present invention provides a charged particle beam device. The device comprises an emitter array for emitting a plurality of charged particle beams. The plurality of charged particle beams are imaged with a lens. An electrode unit is provided for accelerating the plurality of charged particle beams. The potential differences between a first potential of the emitter array, a second potential of the electrode unit, and a third potential of a specimen, are controlled by a first control unit and a second control unit. Thereby, the second potential is capable of accelerating the plurality of charged particle beams with respect to the first potential, and the third potential is capable of decelerating the plurality of charged particle beams with respect to the second potential.
摘要翻译： 本发明提供一种带电粒子束装置。 该装置包括用于发射多个带电粒子束的发射极阵列。 多个带电粒子束用透镜成像。 提供电极单元用于加速多个带电粒子束。 第一控制单元和第二控制单元控制发射极阵列的第一电位与电极单元的第二电位和第三电位之间的电位差。 因此，第二电位能够相对于第一电位加速多个带电粒子束，并且第三电位能够使多个带电粒子束相对于第二电位减速。
-
-
-
-
-
-
-
-
-
搜索结果
41 条记录 (耗时 0.033 秒)
