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公开(公告)号：US09175389B2
公开(公告)日：2015-11-03
申请号：US13725877
申请日：2012-12-21
Applicant: Intermolecular, Inc.
Inventor： Jeremy Cheng
CPC classification number: C23C16/45544 , C23C14/568 , C23C16/4401 , C23C16/4412 , C23C16/45525 , C23C16/45527 , C23C16/45529 , C23C16/52 , C23C16/54 , H01L21/67017 , Y10T137/0318 , Y10T137/85938
Abstract: Systems and apparatus are described that facilitate the evaluation and characterization of ALD processes as a function of process parameters such as temperature, gas flow rate, and pressure. In some embodiments, systems and apparatus are described that allow the ALD process to be characterized at different pressures in a combinatorial manner.
Abstract translation: 描述了根据诸如温度，气体流速和压力的过程参数的函数促进ALD过程的评估和表征的系统和装置。 在一些实施例中，描述允许以组合方式在不同压力下表征ALD过程的系统和装置。
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公开(公告)号：US20140272455A1
公开(公告)日：2014-09-18
申请号：US13797504
申请日：2013-03-12
Applicant: INTERMOLECULAR INC.
Inventor： Guowen Ding , Brent Boyce , Jeremy Cheng , Muhammad Imran , Jingyu Lao , Minh Huu Le , Daniel Schweigert , Zhi-Wen Wen Sun , Yu Wang , Yongli Xu , Guizhen Zhang
CPC classification number: C23C14/083 , C03C17/3615 , C03C17/3618 , C03C17/3644 , C03C17/366 , C23C14/0036 , C23C14/08 , C23C14/185 , C23C14/3464 , G02B5/0875 , G02B5/208 , Y10T428/12611
Abstract: A method for making low emissivity panels, including control the composition of a barrier layer formed on a thin conductive silver layer. The barrier structure can include a ternary alloy of titanium, nickel and niobium, which showed improvements in overall performance than those from binary barrier results. The percentage of titanium can be between 5 and 15 wt %. The percentage of nickel can be between 30 and 50 wt %. The percentage of niobium can be between 40 and 60 wt %.
Abstract translation: 一种制造低发射率面板的方法，包括控制形成在薄导电银层上的阻挡层的组成。 阻挡结构可以包括钛，镍和铌的三元合金，其显示出比来自二元屏障结果的整体性能的改善。 钛的百分比可以在5和15重量％之间。 镍的百分比可以在30-50重量％之间。 铌的百分比可以在40至60重量％之间。
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23.发明申请Method to generate high LSG low-emissivity coating with same color after heat treatment 有权在热处理后生成相同颜色的高LSG低辐射涂层的方法公开(公告)号：US20140272354A1
公开(公告)日：2014-09-18
申请号：US13804766
申请日：2013-03-14
Applicant: INTERMOLECULAR INC.
Inventor： Guowen Ding , Jeremy Cheng , Tong Ju , Minh Huu Le , Phil Lingle , Daniel Schweigert , Zhi-Wen Wen Sun , Guizhen Zhang
CPC classification number: C03C17/366 , C03C17/36 , C03C17/3639 , C03C17/3644 , C03C17/3652 , Y10T428/24975 , Y10T428/265
Abstract: Low emissivity panels can include a separation layer of Zn2SnOx between multiple infrared reflective stacks. The low emissivity panels can also include NiNbTiOx as barrier layer. The low emissivity panels have high light to solar gain, color neutral, together with similar observable color before and after a heat treatment process.
Abstract translation: 低辐射面板可以包括多个红外反射叠层之间的Zn2SnOx分离层。 低辐射面板还可以包括NiNbTiOx作为阻挡层。 低辐射面板在热处理过程之前和之后具有高的太阳光增益，颜色中性，以及类似的可观察的颜色。
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公开(公告)号：US20140268317A1
公开(公告)日：2014-09-18
申请号：US13799100
申请日：2013-03-13
Applicant: INTERMOLECULAR INC.
Inventor： Guowen Ding , Jeremy Cheng , Minh Huu Le , Daniel Schweigert , Zhi-Wen Wen Sun , Guizhen Zhang
CPC classification number: G02B5/208 , C03C17/36 , C03C17/3644 , C03C17/366 , G02B5/281
Abstract: Embodiments provided herein describe low-e panels and methods for forming low-e panels. A transparent substrate is provided. A reflective layer is formed above the transparent substrate. An over-coating layer is formed above the reflective layer. The over-coating layer includes first, second, and third sub-layers. The second sub-layer is between the first and third sub-layers, and the first and third sub-layers include the same material
Abstract translation: 本文提供的实施例描述了用于形成低e板的低e板和方法。 提供透明基板。 在透明基板的上方形成反射层。 在反射层上方形成覆盖层。 覆盖层包括第一，第二和第三子层。 第二子层位于第一和第三子层之间，第一和第三子层包括相同的材料
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公开(公告)号：US09416049B2
公开(公告)日：2016-08-16
申请号：US14312104
申请日：2014-06-23
Applicant: Intermolecular Inc.
Inventor： Tong Ju , Jeremy Cheng , Guowen Ding , Minh Huu Le , Daniel Schweigert , Guizhen Zhang
CPC classification number: C03C17/3417 , C03C17/36 , C03C17/3618 , C03C17/3644 , C03C17/366 , C03C2217/211 , C03C2217/214 , C03C2217/216 , C03C2217/218 , C03C2217/29 , C03C2217/732 , C03C2217/74 , C03C2218/15 , C23C14/081 , C23C14/086 , C23C14/185 , C23C14/3464
Abstract: Embodiments provided herein describe low-e panels and methods for forming low-e panels. A transparent substrate is provided. A reflective layer is formed above the transparent substrate. A dielectric layer is formed between the transparent substrate and the reflective layer. The dielectric layer includes niobium, tin, and aluminum.
Abstract translation: 本文提供的实施例描述了用于形成低e板的低e板和方法。 提供透明基板。 在透明基板的上方形成反射层。 在透明基板和反射层之间形成介电层。 电介质层包括铌，锡和铝。
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Patent Agency Ranking
公开(公告)号：US09296650B1
公开(公告)日：2016-03-29
申请号：US14512644
申请日：2014-10-13
Applicant: Intermolecular Inc.
Inventor： Guizhen Zhang , Jeremy Cheng , Guowen Ding , Tong Ju , Minh Huu Le , Daniel Schweigert
CPC classification number: C03C17/3411 , C03C17/36 , C03C17/3613 , C03C17/3618 , C03C17/3639 , C03C17/3644 , C03C17/366 , C23C14/0036 , C23C14/083 , C23C14/086 , C23C14/185 , C23C14/3464 , G02B1/10 , G02B5/208 , G02B5/282
Abstract: Embodiments provided herein describe low-e panels and methods for forming low-e panels. A transparent substrate is provided. A reflective layer is formed above the transparent substrate. A metal oxide layer is formed between the transparent substrate and the reflective layer. A base layer is formed between transparent substrate and the metal oxide layer. The base layer has a first refractive index. A dielectric layer is formed between the base layer and the metal oxide layer. The dielectric layer has a second refractive index.
Abstract translation: 本文提供的实施例描述了用于形成低e板的低e板和方法。 提供透明基板。 在透明基板的上方形成反射层。 在透明基板和反射层之间形成金属氧化物层。 在透明基板和金属氧化物层之间形成基层。 基层具有第一折射率。 在基底层和金属氧化物层之间形成介电层。 电介质层具有第二折射率。
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公开(公告)号：US09279910B2
公开(公告)日：2016-03-08
申请号：US13801465
申请日：2013-03-13
Applicant: Intermolecular Inc.
Inventor： Guowen Ding , Jeremy Cheng , Tong Ju , Minh Huu Le , Daniel Schweigert , Guizhen Zhang
CPC classification number: G02B1/10 , C03C17/3615 , C03C17/3618 , C03C17/3626 , C03C17/3639 , C03C17/3644 , C03C17/3652 , C03C17/366 , C03C17/3681 , C03C2217/256 , G02B5/282 , G02B5/285 , Y10T428/24975 , Y10T428/265
Abstract: Low emissivity panels can include a protection layer of silicon nitride on a layer of ZnO on a layer of Zn2SnOx. The low emissivity panels can also include NiNbTiOx as a barrier layer. The low emissivity panels have high light to solar gain, color neutral, together with similar observable color and light transmission before and after a heat treatment process.
Abstract translation: 低发射率面板可以包括在Zn2SnOx层上的ZnO层上的氮化硅保护层。 低辐射面板还可以包括NiNbTiOx作为阻挡层。 低辐射面板在热处理过程之前和之后具有高的太阳光增益，颜色中性以及类似的可观察到的颜色和光透射。
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28.发明申请公开(公告)号：US20150337432A1
公开(公告)日：2015-11-26
申请号：US14816697
申请日：2015-08-03
Applicant: Intermolecular Inc.
Inventor： Guizhen Zhang , Jeremy Cheng , Guowen Ding , Minh Huu Le , Daniel Schweigert , Yu Wang
CPC classification number: C23C14/22 , C03C17/36 , C03C17/3605 , C03C17/3618 , C03C17/3644 , C03C17/3652 , C03C17/366 , C03C17/3681 , C23C14/0036 , C23C14/042 , C23C14/14 , C23C14/34 , G02B1/12 , G02B1/14 , Y10T428/12542 , Y10T428/12549 , Y10T428/12611 , Y10T428/12778 , Y10T428/31678
Abstract: Provided is High Productivity Combinatorial (HPC) testing methodology of semiconductor substrates, each including multiple site isolated regions. The site isolated regions are used for testing different compositions and/or structures of barrier layers disposed over silver reflectors. The tested barrier layers may include all or at least two of nickel, chromium, titanium, and aluminum. In some embodiments, the barrier layers include oxygen. This combination allows using relative thin barrier layers (e.g., 5-30 Angstroms thick) that have high transparency yet provide sufficient protection to the silver reflector. The amount of nickel in a barrier layer may be 5-10% by weight, chromium—25-30%, titanium and aluminum—30%-35% each. The barrier layer may be co-sputtered in a reactive or inert-environment using one or more targets that include all four metals. An article may include multiple silver reflectors, each having its own barrier layer.
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公开(公告)号：US20150191815A1
公开(公告)日：2015-07-09
申请号：US14661958
申请日：2015-03-18
Applicant: Intermolecular Inc.
Inventor： Guowen Ding , Brent Boyce , Jeremy Cheng , Muhammad Imran , Jingyu Lao , Minh Huu Le , Daniel Schweigert , Zhi-Wen Wen Sun , Yu Wang , Yongli Xu , Guizhen Zhang
IPC: C23C14/08
CPC classification number: C23C14/08 , C03C17/36 , C03C17/3618 , C03C17/3644 , C03C17/366 , C03C17/3681 , C23C14/0036 , C23C14/083 , C23C14/185 , C23C14/3464 , G02B5/0875 , G02B5/208 , Y10T428/12611
Abstract: A method for making low emissivity panels, including control the composition of a barrier layer formed on a thin conductive silver layer. The barrier structure can include a ternary alloy of nickel, titanium, and niobium, which showed improvements in overall performance than those from binary barrier results. The percentage of nickel can be between 5 and 15 wt %. The percentage of titanium can be between 30 and 50 wt %. The percentage of niobium can be between 40 and 60 wt %.
Abstract translation: 一种制造低发射率面板的方法，包括控制形成在薄导电银层上的阻挡层的组成。 阻挡结构可以包括镍，钛和铌的三元合金，其显示出比来自二元屏障结果的整体性能的改善。 镍的百分比可以在5和15重量％之间。 钛的百分比可以在30-50重量％之间。 铌的百分比可以在40至60重量％之间。
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30.发明申请Barrier Layers for Silver Reflective Coatings and HPC Workflows for Rapid Screening of Materials for Such Barrier Layers 有权银色反射涂层屏障层和HPC工作流程，用于快速筛选这种阻挡层的材料公开(公告)号：US20150104569A1
公开(公告)日：2015-04-16
申请号：US14574755
申请日：2014-12-18
Applicant: Intermolecular Inc.
Inventor： Guizhen Zhang , Jeremy Cheng , Guowen Ding , Minh Huu Le , Daniel Schweigert , Yu Wang
CPC classification number: C23C14/22 , C03C17/36 , C03C17/3605 , C03C17/3618 , C03C17/3644 , C03C17/3652 , C03C17/366 , C03C17/3681 , C23C14/0036 , C23C14/042 , C23C14/14 , C23C14/34 , G02B1/12 , G02B1/14 , Y10T428/12542 , Y10T428/12549 , Y10T428/12611 , Y10T428/12778 , Y10T428/31678
Abstract: Provided is High Productivity Combinatorial (HPC) testing methodology of semiconductor substrates, each including multiple site isolated regions. The site isolated regions are used for testing different compositions and/or structures of barrier layers disposed over silver reflectors. The tested barrier layers may include all or at least two of nickel, chromium, titanium, and aluminum. In some embodiments, the barrier layers include oxygen. This combination allows using relative thin barrier layers (e.g., 5-30 Angstroms thick) that have high transparency yet provide sufficient protection to the silver reflector. The amount of nickel in a barrier layer may be 5-10% by weight, chromium—25-30%, titanium and aluminum—30%-35% each. The barrier layer may be co-sputtered in a reactive or inert-environment using one or more targets that include all four metals. An article may include multiple silver reflectors, each having its own barrier layer.
Abstract translation: 提供了半导体衬底的高生产率组合（HPC）测试方法，每个包括多个现场隔离区域。 位置隔离区域用于测试布置在银反射器上的阻挡层的不同组成和/或结构。 经测试的阻挡层可以包括镍，铬，钛和铝中的全部或至少两种。 在一些实施例中，阻挡层包括氧。 该组合允许使用具有高透明度的相对薄的阻挡层（例如5-30埃厚），同时为银反射器提供足够的保护。 阻挡层中的镍的量可以是5-10重量％，铬25-30％，钛和铝30％-35％。 阻挡层可以在反应性或惰性环境中使用包括所有四种金属的一种或多种目标共溅射。 物品可以包括多个银反射器，每个具有其自己的阻挡层。
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