公开(公告)号：US20180188171A1

公开(公告)日：2018-07-05

申请号：US15396902

申请日：2017-01-03

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Ali Afzali-Ardakani ,  Abram L. Falk ,  Damon B. Farmer ,  Shu-Jen Han ,  George S. Tulevski

IPC: G01N21/552

CPC classification number: G01N21/554

Abstract: A chemical sensor, methods of forming the same, and methods of performing chemical detection include a carbon nanotube test surface. A detector is configured to receive a signal from the carbon nanotube test surface responsive to illumination on the nanotube test surface. A matching module is configured to determine whether a chemical is present at the carbon nanotube test surface based on a comparison between the signal and a spectral profile of the chemical.

公开(公告)号：US20180117624A1

公开(公告)日：2018-05-03

申请号：US15340180

申请日：2016-11-01

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Shu-Jen Han ,  Bharat Kumar ,  George S. Tulevski

IPC: B05D1/00 ,  A61B5/00 ,  A61B5/145 ,  B05D7/00 ,  B05D3/04

CPC classification number: B05D1/005 ,  A61B5/0004 ,  A61B5/14503 ,  A61B5/14532 ,  A61B5/14542 ,  A61B5/14546 ,  B05D3/0413 ,  B05D7/5483 ,  G01N1/00

Abstract: A method of protecting an in-vivo sensor includes forming a sensing surface on a surface of the in-vivo sensor, the sensing surface including a functionalized monolayer that will bind to an analyte of interest; and coating the sensing surface of the sensor with a bioabsorbable polymeric coating including a bioabsorbable polymer; wherein the bioabsorbable polymeric coating is configured to protect the in-vivo sensor until needed for implantation.

公开(公告)号：US20180034629A1

公开(公告)日：2018-02-01

申请号：US15219422

申请日：2016-07-26

Applicant: International Business Machines Corporation

Inventor： Pau-Chen Cheng ,  Shu-Jen Han ,  Jianshi Tang

IPC: H04L9/08 ,  G06F21/72 ,  G06F7/58

CPC classification number: H04L9/0869 ,  G06F7/588 ,  G06F21/72 ,  G09C1/00 ,  H04L9/0662 ,  H04L2209/12

Abstract: A random value generator is provided that comprises a carbon nanotube structure that generates a random output current in response to a voltage input. The random value generator includes a random value output circuit coupled to the carbon nanotube structure that receives the random output current from the carbon nanotube structure and generates a random output value based on the received random output current from the carbon nanotube structure.

公开(公告)号：US20180019420A1

公开(公告)日：2018-01-18

申请号：US15210491

申请日：2016-07-14

Applicant: International Business Machines Corporation

Inventor： Damon B. Farmer ,  Shu-Jen Han ,  Jianshi Tang

IPC: H01L51/10 ,  H01L51/05 ,  H01L51/00

Abstract: A method for manufacturing a semiconductor device includes forming a first dielectric layer on a substrate, forming a carbon nanotube (CNT) layer on the first dielectric layer, forming a second dielectric layer on the carbon nanotube (CNT) layer, patterning a plurality of trenches in the second dielectric layer exposing corresponding portions of the carbon nanotube (CNT) layer, forming a plurality of contacts respectively in the plurality of trenches on the exposed portions of the carbon nanotube (CNT) layer, performing a thermal annealing process to create end-bonds between the plurality of the contacts and the carbon nanotube (CNT) layer, and depositing a passivation layer on the plurality of the contacts and the second dielectric layer.

公开(公告)号：US09835584B2

公开(公告)日：2017-12-05

申请号：US14744574

申请日：2015-06-19

Applicant: International Business Machines Corporation

Inventor： Shu-Jen Han ,  Keith A. Jenkins

IPC: G01N27/00 ,  G01N27/414 ,  G01N33/00

CPC classification number: G01N27/4141 ,  G01N27/4146 ,  G01N33/0075

Abstract: A method of assembling a remote sensor system to detect a gas or chemical and a remote sensor system are described. The method includes fabricating a sensor, the sensor outputting a sensor signal that changes upon contact of the sensor with the gas or chemical and the sensor having an input port for a clock signal, coupling a capacitor to the sensor, the capacitor output voltage resulting from the sensor signal output by the sensor, and coupling a mixer to the capacitor and a low frequency oscillator, the mixer configured to mix the capacitor output voltage with the low frequency oscillator output to generate an output signal. The method also includes coupling an antenna to the mixer, the antenna configured to transmit the output signal indicating detection of the gas or chemical.

公开(公告)号：US09800414B2

公开(公告)日：2017-10-24

申请号：US14744241

申请日：2015-06-19

Applicant: International Business Machines Corporation

Inventor： Shu-Jen Han

IPC: H04L9/00 ,  H04L9/32 ,  H01L27/28 ,  H01L51/00 ,  H01L51/05 ,  G06K7/10 ,  H04L9/08 ,  H04W12/10 ,  H04W12/06 ,  G06K19/07 ,  G09C1/00 ,  H04W12/04 ,  H04W12/02

CPC classification number: H04L9/321 ,  G06F21/44 ,  G06F21/602 ,  G06K7/10297 ,  G06K19/0723 ,  G09C1/00 ,  H01L21/8258 ,  H01L23/576 ,  H01L27/0688 ,  H01L27/283 ,  H01L51/0048 ,  H01L51/0558 ,  H04L9/0866 ,  H04L9/32 ,  H04L2209/805 ,  H04W12/02 ,  H04W12/04 ,  H04W12/06 ,  H04W12/10

Abstract: Embodiments relate to the authentication of a semiconductor. An identification circuit disposed within a package of an integrated circuit, and the identification circuit includes carbon-nanotube transistors configured to generate an encryption key.

公开(公告)号：US20170294586A1

公开(公告)日：2017-10-12

申请号：US15092894

申请日：2016-04-07

Applicant: International Business Machines Corporation

Inventor： Martin M. Frank ,  Shu-Jen Han ,  George S. Tulevski

IPC: H01L51/00 ,  H01L51/10

CPC classification number: H01L51/0049 ,  H01L51/0048 ,  H01L51/0575 ,  H01L51/102 ,  H01L2251/301 ,  H01L2251/303

Abstract: A method of making a carbon nanotube structure includes depositing a first oxide layer on a substrate and a second oxide layer on the first oxide layer; etching a trench through the second oxide layer; removing end portions of the first oxide layer and portions of the substrate beneath the end portions to form cavities in the substrate; depositing a metal in the cavities to form first body metal pads; disposing a carbon nanotube on the first body metal pads and the first oxide layer such that ends of the carbon nanotube contact each of the first body metal layers; depositing a metal to form second body metal pads on the first body metal pads at the ends of the carbon nanotube; and etching to release the carbon nanotube, first body metal pads, and second body metal pads from the substrate, first oxide layer, and second oxide layer.

公开(公告)号：US09786852B2

公开(公告)日：2017-10-10

申请号：US14956560

申请日：2015-12-02

Applicant: International Business Machines Corporation

Inventor： Aaron D. Franklin ,  Shu-Jen Han ,  Satyavolu S. Papa Rao ,  Joshua T. Smith

IPC: H01L21/00 ,  H01L21/84 ,  H01L51/05 ,  H01L51/00

CPC classification number: H01L51/0554 ,  H01L51/0023 ,  H01L51/0048 ,  H01L51/0545 ,  H01L51/055 ,  H01L51/0558

Abstract: Embodiments of the invention include a method of fabrication of a semiconductor structure. The method of fabrication includes: Forming a trench in a first dielectric material down to a first conductive material of a bottom gate. A sidewall of the trench contacts a top surface of the first conductive material. Depositing a second conductive material on the sidewall of the trench, which forms an electrical connection with the first conductive material. Depositing a second dielectric material in the trench, and on the second conductive material. Depositing a gate dielectric material on the second conductive material and the dielectric materials. Forming a channel material on the gate dielectric material. Depositing another conductive material on the channel material and portions of the gate dielectric material to form a source terminal and a drain terminal.

公开(公告)号：US09738987B2

公开(公告)日：2017-08-22

申请号：US14666876

申请日：2015-03-24

Applicant: International Business Machines Corporation

Inventor： Lian Guo ,  Shu-Jen Han ,  Xuesong Li

IPC: C25F7/00 ,  C25F5/00 ,  C25D17/00 ,  B32B38/10 ,  C25F3/02 ,  C01B31/04

CPC classification number: C25F7/00 ,  B32B38/10 ,  C01B32/184 ,  C01B32/186 ,  C01B32/20 ,  C01B32/21 ,  C25D17/007 ,  C25F3/02 ,  C25F5/00

Abstract: An electroplating etching apparatus includes a power to output current, and a container configured to contain an electrolyte. A cathode is coupled to the container and configured to fluidly communicate with the electrolyte. An anode is electrically connected to the output, and includes a graphene layer. A metal substrate layer is formed on the graphene layer, and is etched from the graphene layer in response to the current flowing through the anode.

公开(公告)号：US20170219519A1

公开(公告)日：2017-08-03

申请号：US15014350

申请日：2016-02-03

Applicant: International Business Machines Corporation

Inventor： Chia-Yu Chen ,  Shu-Jen Han

IPC: G01N27/414

CPC classification number: G01R27/02 ,  G01N27/02 ,  G01N27/4148 ,  G01N33/0031

Abstract: Frequency division multiplexing-based techniques for FET-based sensor arrays are provided. In one aspect, a sensor device includes: an array of FET-based sensors, wherein the sensors are grouped into multiple channels, and wherein each of the sensors includes an insulator on a substrate, a local gate embedded in the insulator, a channel material over the local embedded gate, and source and drain electrodes in contact with opposite ends of the channel material, and wherein a surface of the channel material is functionalized to react with at least one target molecule. The sensors in a given channel can be modulated (via the local gate) to enable the signal read out from the channel to be divided in the frequency domain based on the different frequencies used to modulate the sensors.