公开(公告)号：US5987984A

公开(公告)日：1999-11-23

申请号：US38776

申请日：1998-03-11

申请人： Johannes Artzner ,  Wolfram Bauer

发明人： Johannes Artzner ,  Wolfram Bauer

IPC分类号： G01C19/5691 ,  G01C25/00 ,  G01D3/00 ,  G01D3/028 ,  G01D18/00 ,  G01P9/04

CPC分类号： G01C19/5691 ,  G01C25/005 ,  G01D18/00

摘要： A device which determines a motion parameter with a sensor having a plurality of sensor elements coupled to one another, in which the motion parameter corresponds to a rotational speed. The device includes a starter loop for putting the sensor in a state of excitation via a starter signal via at least one of the sensor elements and for generating a sensor quantity, with the sensor quantity being a measure of a response of the sensor to the starter signal, and the starter signal having a substantially constant amplitude. A detector loop coupled to at least one of the sensor elements is also provided in the device for providing a measurement signal correlating with the motion parameter. The device further includes an analysis unit for providing an output voltage representing the motion parameter as a function of the measurement signal, a correction unit for keeping a substantially constant correlation between the output voltage and the motion parameter and for generating a correction signal as a function of the sensor quantity, and a multiplier providing the correction signal to the analysis unit.

摘要翻译： 一种用传感器确定运动参数的装置，所述传感器具有彼此耦合的多个传感器元件，其中所述运动参数对应于转速。 该装置包括起动器回路，用于经由至少一个传感器元件经由起动器信号将传感器置于激励状态，并且用于产生传感器量，传感器量是传感器对起动器的响应的量度 信号和启动信号具有基本恒定的振幅。 耦合到至少一个传感器元件的检测器环路也设置在该装置中，用于提供与运动参数相关的测量信号。 该装置还包括分析单元，用于提供表示作为测量信号的函数的运动参数的输出电压;校正单元，用于在输出电压和运动参数之间保持基本上恒定的相关性，并用于产生作为函数的校正信号 以及向分析单元提供校正信号的乘法器。

公开(公告)号：US20110066396A1

公开(公告)日：2011-03-17

申请号：US12803910

申请日：2010-07-09

申请人： Patrick Goerlich ,  Riad Stefo ,  Wolfram Bauer ,  Rainer Willig ,  Burkhard Kuhlmann ,  Mathias Reimann ,  Ermin Esch ,  Michael Baus ,  Gregor Wetekam ,  Michael Veith ,  Emma Abel ,  Wolfgang Fuerst

发明人： Patrick Goerlich ,  Riad Stefo ,  Wolfram Bauer ,  Rainer Willig ,  Burkhard Kuhlmann ,  Mathias Reimann ,  Ermin Esch ,  Michael Baus ,  Gregor Wetekam ,  Michael Veith ,  Emma Abel ,  Wolfgang Fuerst

IPC分类号： G06F19/00 ,  G01R31/28

CPC分类号： G01D18/00 ,  G01D3/08 ,  G01R31/2834 ,  G01R31/318511 ,  G06F11/27 ,  Y10T29/49004

摘要： A sensor device includes: a sensor module mounted on a conductor board; a sensitive element which is sensitive to a variable; a self-test control unit implementing a self-test program, the self-test control unit applying a self-test variable to the sensitive element, taking the self-test program into account; a detection unit detecting a characteristic of the sensitive element which is altered as a result of the applied self-test variable and providing an actual self-test response, taking the altered characteristic into account; and a comparator unit provided on or in the sensor module, the comparator unit comparing the actual self-test response to at least one specified setpoint self-test response and providing comparative information.

摘要翻译： 传感器装置包括：安装在导体板上的传感器模块; 对变量敏感的敏感元素; 实施自检程序的自检控制单元，将自检变量应用于敏感元件的自检控制单元，考虑自检程序; 检测单元，其检测作为所应用的自检变量的结果而改变的敏感元件的特性，并提供实际的自检响应，考虑改变的特性; 以及设置在传感器模块上或传感器模块中的比较器单元，比较器单元将实际自检响应与至少一个指定的设定点自检响应进行比较并提供比较信息。

公开(公告)号：US07825840B2

公开(公告)日：2010-11-02

申请号：US11883093

申请日：2005-12-13

申请人： Rainer Willig ,  Burkhard Kuhlmann ,  Udo-Martin Gomez ,  Wolfram Bauer ,  Reinhard Neul ,  Christoph Lang ,  Michael Veith

发明人： Rainer Willig ,  Burkhard Kuhlmann ,  Udo-Martin Gomez ,  Wolfram Bauer ,  Reinhard Neul ,  Christoph Lang ,  Michael Veith

IPC分类号： H03M3/00

CPC分类号： H03M3/404 ,  H03M3/424 ,  H03M3/464

摘要： A delta sigma modulator includes an oscillatory system having a natural frequency and an electronics and a control loop which acts upon the electronics from the oscillatory system and again upon the oscillatory system from the electronics. The control loop provides that a gain in the control loop demonstrates a peaking in a frequency range around the natural frequency of the oscillatory system.

摘要翻译： ΔΣ调制器包括具有固有频率的振荡系统以及电子装置和控制回路，其从振荡系统作用于电子装置，并且再次来自电子装置的振荡系统。 控制回路提供控制回路中的增益表现在围绕振荡系统的固有频率的频率范围内的峰值。

公开(公告)号：US20100181944A1

公开(公告)日：2010-07-22

申请号：US12452562

申请日：2008-06-16

申请人： Wolfram Bauer ,  Johannes Classen

发明人： Wolfram Bauer ,  Johannes Classen

IPC分类号： H01L41/04 ,  H02N1/00

CPC分类号： B81B3/0094 ,  B81B2201/0242 ,  B81B2203/0136 ,  H03H9/02275 ,  H03H2009/02496

摘要： A micromechanical component includes a first electrode and a second electrode, the first electrode being moveable relative to the second electrode in a main direction of movement, and the first electrode and/or the second electrode being configured such that a movement of the first electrode parallel to the main direction of movement results in a modification of the average distance in a region of overlap of the projection of the first electrode with the projection of the second electrode, both perpendicular to the main direction of movement and in a main plane of extension.

摘要翻译： 微机械部件包括第一电极和第二电极，第一电极可以在主移动方向上相对于第二电极移动，并且第一电极和/或第二电极被配置为使得第一电极的运动平行 主运动方向导致第一电极的突起与第二电极的突出部重叠的区域中的平均距离的修改，两者垂直于主移动方向和主延伸平面。

公开(公告)号：US07134337B2

公开(公告)日：2006-11-14

申请号：US11328755

申请日：2006-01-09

申请人： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

发明人： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC分类号： G01P9/04

CPC分类号： G01C19/5747

摘要： An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

公开(公告)号：US20060191338A1

公开(公告)日：2006-08-31

申请号：US11317819

申请日：2005-12-22

申请人： Rainer Willig ,  Buckhard Kuhlmann ,  Udo-Martin Gomez ,  Wolfram Bauer ,  Johannes Classen ,  Christoph Lang ,  Michael Veith

发明人： Rainer Willig ,  Buckhard Kuhlmann ,  Udo-Martin Gomez ,  Wolfram Bauer ,  Johannes Classen ,  Christoph Lang ,  Michael Veith

IPC分类号： G01P15/08 ,  G01P3/44

CPC分类号： G01C19/5755 ,  G01C19/5726

摘要： A micromechanical rotation rate sensor has a seismic mass and driving devices which cause a driving vibration of the seismic mass in a first direction x. The rotation rate sensor has measuring devices which measure a deflection of the seismic mass in a second direction y, and generate a deflection signal. The deflection includes a measurement deflection caused by a Coriolis force and an interference deflection, the interference deflection being phase-shifted with respect to the measurement deflection by 90°. Compensation devices are provided at the seismic mass to reduce the interference deflection. Regulation devices are provided, to which the deflection signal is supplied as an input variable, which demodulate an interference deflection signal from the deflection signal, and which generate a compensation signal from the interference deflection signal, which is supplied to the compensation devices.

公开(公告)号：US06752017B2

公开(公告)日：2004-06-22

申请号：US10258339

申请日：2003-03-19

申请人： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

发明人： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC分类号： G01P1514

CPC分类号： G01C19/5747

摘要： A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.

摘要翻译： 一种偏转速率传感器，包括在衬底表面上并排布置的第一和第二科里奥利元件。 诱导科里奥利元件平行于第一轴振荡。 由于科里奥利力，科里奥利元件在垂直于第一轴线的第二轴线上偏转。 第一和第二科里奥利元件通过被配置为在第一轴线和第二轴线中屈服的弹簧联接。 因此，对于同相和反相振荡，两轴的振荡频率不同。

公开(公告)号：US5889193A

公开(公告)日：1999-03-30

申请号：US875151

申请日：1997-06-27

申请人： Georg Pfaff ,  Rainer Erhardt ,  Johannes Artzner ,  Wolfram Bauer

发明人： Georg Pfaff ,  Rainer Erhardt ,  Johannes Artzner ,  Wolfram Bauer

IPC分类号： G01C19/5691 ,  G01C25/00 ,  G01P21/00

CPC分类号： G01C19/5691 ,  G01C25/005

摘要： A rotation rate sensor is described that operates on the principle of a resonant vibration gyrometer and is excited by an amplitude-regulated oscillator loop. This sensor is used for instance to ascertain the yaw speed of a vehicle. The effect of Coriolis acceleration is evaluated, which is a measure for the current yaw speed. To monitor the operability of the sensor and the associated electronics, an integrated self-test function is used, which as a so-called BITE function introduces a defined interference variable after actuation of a test input. This defined interference variable leads to an estimatable output voltage, whose occurrence is evaluated for error detection.

摘要翻译： PCT No.PCT / DE95 / 01796 Sec。 371日期：1997年6月27日 102（e）日期1997年6月27日PCT提交1995年12月15日PCT公布。 出版物WO96 / 21138 日期1996年7月11日描述了一种以共振振动陀螺仪为原理的旋转速率传感器，并被振幅调节振荡器激励。 例如，该传感器用于确定车辆的偏航速度。 评估科里奥利加速度的影响，这是目前的横摆速度的量度。 为了监测传感器和相关电子设备的可操作性，使用集成的自检功能，其作为所谓的BITE功能在激活测试输入之后引入定义的干扰变量。 该定义的干扰变量导致可估计的输出电压，其出现被评估用于错误检测。