公开(公告)号：US20130032904A1

公开(公告)日：2013-02-07

申请号：US13197981

申请日：2011-08-04

Applicant: Ando Feyh ,  Johannes Classen

Inventor： Ando Feyh ,  Johannes Classen

IPC: H01L29/84 ,  H01L21/00

CPC classification number: B81B3/0086 ,  B81B3/0008 ,  B81C2201/0169 ,  B81C2201/017 ,  B81C2201/0176

Abstract: In one embodiment, a method of forming a MEMS device includes providing a substrate, forming a sacrificial layer above the substrate layer, forming a silicon based working portion on the sacrificial layer, releasing the silicon based working portion from the sacrificial layer such that the working portion includes at least one exposed outer surface, forming a first layer of silicide forming metal on the at least one exposed outer surface of the silicon based working portion, and forming a first silicide layer with the first layer of silicide forming metal.

Abstract translation: 在一个实施例中，形成MEMS器件的方法包括提供衬底，在衬底层上形成牺牲层，在牺牲层上形成硅基工作部分，从牺牲层释放硅基工作部分，使得工作 部分包括至少一个暴露的外表面，在硅基工作部分的至少一个暴露的外表面上形成第一层硅化物形成金属，以及形成具有第一层硅化物形成金属的第一硅化物层。

公开(公告)号：US08333113B2

公开(公告)日：2012-12-18

申请号：US12505116

申请日：2009-07-17

Applicant: Johannes Classen ,  Lars Tebje

Inventor： Johannes Classen ,  Lars Tebje

IPC: G01P15/125

CPC classification number: G01P15/18 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0831

Abstract: An acceleration sensor includes a substrate and a first mass element, which is connected to the substrate in such a way that the first mass element is rotatable about an axis, the first mass element being connected to a second mass element in such a way that the second mass element is movable along a first direction parallel to the axis, and the first mass element being connected to a third mass element in such a way that the third mass element is movable along a second direction perpendicular to the axis.

Abstract translation: 加速度传感器包括基板和第一质量元件，第一质量元件以与第一质量元件绕轴线旋转的方式连接到基板，第一质量元件以第二质量元件连接到第二质量元件， 第二质量元件可以沿着平行于轴线的第一方向移动，并且第一质量元件以与第三质量元件垂直的轴线可移动的方式连接到第三质量元件。

公开(公告)号：US20100326188A1

公开(公告)日：2010-12-30

申请号：US12747846

申请日：2008-11-10

Applicant: Johannes Classen ,  Sebastian Gracki

Inventor： Johannes Classen ,  Sebastian Gracki

IPC: G01C19/56

CPC classification number: G01C19/5755

Abstract: A rate-of-rotation sensor having a substrate and a first Coriolis element are provided, an excitation arrangement being provided for the excitation of vibrations of the first Coriolis element in a first direction, a first detection arrangement being provided for detecting a first deflection of the first Coriolis element in a third direction running generally perpendicular to the first direction; characterized by the first Coriolis element being developed as balancing rocker.

Abstract translation: 提供具有基板和第一科里奥利元件的转速传感器，提供激励装置，用于在第一方向上激发第一科里奥利元件的振动，第一检测装置被提供用于检测第一偏转 第三方向上的第一科里奥利元件大致垂直于第一方向运行; 其特征在于第一科里奥利元件被开发为平衡摇杆。

公开(公告)号：US20100122576A1

公开(公告)日：2010-05-20

申请号：US12587487

申请日：2009-10-06

Applicant: Johannes Classen ,  Torsten Ohms ,  Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Johannes Classen ,  Torsten Ohms ,  Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01C19/56

CPC classification number: G01C19/5755 ,  G01C19/574 ,  G01C19/5747 ,  G01C19/5762

Abstract: A rotation rate sensor includes: a mounting device; a first drive frame having a drive, which is designed to set the first drive frame into a first oscillatory motion along an axis of oscillation relative to the mounting device; a first stator electrode; a first actuator electrode coupled to the first drive frame in such a way that in a rotary motion of the rotation rate sensor due to a Coriolis force, the first actuator electrode being displaceable in a first deflection direction relative to the first stator electrode; and an evaluation device configured to determine a voltage applied between the first stator electrode and the first actuator electrode, and to specify information regarding the rotary motion of the rotation rate sensor while taking the determined voltage value into account.

Abstract translation: 旋转速率传感器包括：安装装置; 具有驱动器的第一驱动框架，其被设计成将第一驱动框架相对于安装装置沿着振荡轴线设置为第一振荡运动; 第一定子电极; 第一致动器电极，其以这样的方式联接到第一驱动框架，使得在旋转速度传感器由于科里奥利力的旋转运动中，第一致动器电极可相对于第一定子电极在第一偏转方向上移位; 以及评估装置，被配置为确定施加在第一定子电极和第一致动器电极之间的电压，并且在考虑所确定的电压值的同时指定关于旋转速率传感器的旋转运动的信息。

公开(公告)号：US20100043549A1

公开(公告)日：2010-02-25

申请号：US12543649

申请日：2009-08-19

Applicant: Johannes Classen ,  Arnd Kaelberer ,  Lars Tebje

Inventor： Johannes Classen ,  Arnd Kaelberer ,  Lars Tebje

IPC: G01P15/10

CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P2015/0831

Abstract: An acceleration sensor includes a substrate, a rocker mass, a z spring connected to the rocker mass, which allows the rocker mass to rotate about an axis, and at least one additional spring system connected to the substrate and the rocker mass. The additional spring system allows the rocker mass to deflect in an x or y direction oriented parallel or perpendicular to the axis. The z spring or the additional spring system allows the rocker mass to deflect in a y or x direction oriented parallel or perpendicular to the axis.

Abstract translation: 一个加速度传感器包括一个基板，一个摇臂质量体，一个连接在摇臂上的z弹簧，它允许摇臂质量绕一个轴线旋转，另外一个弹簧系统连接到基片和摇臂块上。 额外的弹簧系统允许摇杆质量在平行于或垂直于轴线定向的x或y方向上偏转。 z弹簧或附加弹簧系统允许摇杆质量在平行或垂直于轴线定向的y或x方向上偏转。

公开(公告)号：US20100024554A1

公开(公告)日：2010-02-04

申请号：US12505116

申请日：2009-07-17

Applicant: Johannes Classen ,  Lars Tebje

Inventor： Johannes Classen ,  Lars Tebje

IPC: G01P15/125

CPC classification number: G01P15/18 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0831

Abstract: An acceleration sensor includes a substrate and a first mass element, which is connected to the substrate in such a way that the first mass element is rotatable about an axis, the first mass element being connected to a second mass element in such a way that the second mass element is movable along a first direction parallel to the axis, and the first mass element being connected to a third mass element in such a way that the third mass element is movable along a second direction perpendicular to the axis.

Abstract translation: 加速度传感器包括基板和第一质量元件，第一质量元件以与第一质量元件绕轴线旋转的方式连接到基板，第一质量元件以第二质量元件连接到第二质量元件， 第二质量元件可以沿着平行于轴线的第一方向移动，并且第一质量元件以与第三质量元件垂直的轴线可移动的方式连接到第三质量元件。

公开(公告)号：US20100024553A1

公开(公告)日：2010-02-04

申请号：US12304603

申请日：2007-10-15

Applicant: Johannes Classen ,  Lars Tebje

Inventor： Johannes Classen ,  Lars Tebje

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0831

Abstract: A micromechanical z-sensor includes a sensitivity, a torsion spring, and a seismic additional mass, the torsion spring having a spring width, and the seismic additional mass including webs having a web width. The web width is selected smaller than the spring width.

Abstract translation: 微机械z传感器包括灵敏度，扭转弹簧和地震附加质量，扭簧具有弹簧宽度，并且地震附加质量包括具有腹板宽度的腹板。 卷材宽度选择为小于弹簧宽度。

公开(公告)号：US20100000321A1

公开(公告)日：2010-01-07

申请号：US12303443

申请日：2007-06-06

Applicant: Reinhard Neul ,  Johannes Classen ,  Axel Franke ,  Marco Quander ,  Udo-Martin Gomez ,  Kersten Kehr

Inventor： Reinhard Neul ,  Johannes Classen ,  Axel Franke ,  Marco Quander ,  Udo-Martin Gomez ,  Kersten Kehr

IPC: G01C19/56

CPC classification number: G01C19/5762 ,  G01C19/5747

Abstract: A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.

Abstract translation: 偏航率传感器包括驱动质量元件，该驱动质量元件位于衬底的表面上方并且可被驱动装置驱动，沿着沿表面延伸的第一轴线振动，具有检测质量元件，该检测质量元件可在 科里奥利力沿着垂直于表面的第二轴线，并且具有检测装置，通过该检测装置可以检测检测质量元件沿着第二轴线的偏转。 由于垂直于表面的第二轴的布置，横摆角速度传感器可以与适合于检测围绕其它方向的旋转轴线的旋转的附加横摆速率传感器一体地集成到一个芯片中。

公开(公告)号：US07523663B2

公开(公告)日：2009-04-28

申请号：US11317819

申请日：2005-12-22

Applicant: Rainer Willig ,  Buckhard Kuhlmann ,  Udo-Martin Gomez ,  Wolfram Bauer ,  Johannes Classen ,  Christoph Lang ,  Michael Veith

Inventor： Rainer Willig ,  Buckhard Kuhlmann ,  Udo-Martin Gomez ,  Wolfram Bauer ,  Johannes Classen ,  Christoph Lang ,  Michael Veith

IPC: G01P15/08

CPC classification number: G01C19/5755 ,  G01C19/5726

Abstract: A micromechanical rotation rate sensor has a seismic mass and driving devices which cause a driving vibration of the seismic mass in a first direction x. The rotation rate sensor has measuring devices which measure a deflection of the seismic mass in a second direction y, and generate a deflection signal. The deflection includes a measurement deflection caused by a Coriolis force and an interference deflection, the interference deflection being phase-shifted with respect to the measurement deflection by 90°. Compensation devices are provided at the seismic mass to reduce the interference deflection. Regulation devices are provided, to which the deflection signal is supplied as an input variable, which demodulate an interference deflection signal from the deflection signal, and which generate a compensation signal from the interference deflection signal, which is supplied to the compensation devices.

Abstract translation: 微机械转速传感器具有地震质量和驱动装置，其引起地震块在第一方向x上的驱动振动。 旋转速率传感器具有测量在第二方向y上的地震质量的偏转的测量装置，并产生偏转信号。 偏转包括由科里奥利力和干涉偏转引起的测量偏转，干涉偏转相对于测量偏转相移90°。 在地震质量体上提供补偿装置以减少干涉偏转。 提供了偏转信号作为输入变量提供的调节装置，其解调来自偏转信号的干涉偏转信号，并从干涉偏转信号产生补偿信号，该补偿信号被提供给补偿装置。

公开(公告)号：US09212048B2

公开(公告)日：2015-12-15

申请号：US13890363

申请日：2013-05-09

Applicant: Johannes Classen ,  Heribert Weber ,  Mirko Hattass ,  Daniel Christoph Meisel

Inventor： Johannes Classen ,  Heribert Weber ,  Mirko Hattass ,  Daniel Christoph Meisel

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81B3/0075 ,  B81B2207/07 ,  B81B2207/096 ,  B81C1/00238 ,  B81C1/00674 ,  B81C2203/0109 ,  H01L2224/16225 ,  H01L2924/19105

Abstract: A hybridly integrated component includes an ASIC element having a processed front side, a first MEMS element having a micromechanical structure extending over the entire thickness of the first MEMS substrate, and a first cap wafer mounted over the micromechanical structure of the first MEMS element. At least one structural element of the micromechanical structure of the first MEMS element is deflectable, and the first MEMS element is mounted on the processed front side of the ASIC element such that a gap exists between the micromechanical structure and the ASIC element. A second MEMS element is mounted on the rear side of the ASIC element. The micromechanical structure of the second MEMS element extends over the entire thickness of the second MEMS substrate and includes at least one deflectable structural element.

Abstract translation: 混合集成部件包括具有经处理的前侧的ASIC元件，具有在第一MEMS基板的整个厚度上延伸的微机械结构的第一MEMS元件和安装在第一MEMS元件的微机械结构上的第一盖晶片。 第一MEMS元件的微机械结构的至少一个结构元件是可偏转的，并且第一MEMS元件安装在ASIC元件的经处理的正面上，使得在微机械结构和ASIC元件之间存在间隙。 第二个MEMS元件安装在ASIC元件的后侧。 第二MEMS元件的微机械结构在第二MEMS基板的整个厚度上延伸，并且包括至少一个可偏转的结构元件。