公开(公告)号：US20180061835A1

公开(公告)日：2018-03-01

申请号：US15664161

申请日：2017-07-31

Applicant: Micron Technology, Inc.

Inventor： Gloria Yang ,  Suraj J. Mathew ,  Raghunath Singanamalla ,  Vinay Nair ,  Scott J. Derner ,  Michael Amiel Shore ,  Brent Keeth ,  Fatma Arzum Simsek-Ege ,  Diem Thy N. Tran

IPC: H01L27/108 ,  H01L27/06 ,  H01L29/423 ,  H01L49/02 ,  H01L29/78

CPC classification number: H01L27/108 ,  G11C11/403 ,  H01L23/528 ,  H01L27/0688 ,  H01L28/90 ,  H01L29/0847 ,  H01L29/1037 ,  H01L29/42376 ,  H01L29/7827

Abstract: Some embodiments include a memory cell having first and second transistors, and a capacitor vertically displaced relative to the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes. Some embodiments include a memory cell having first and second transistors vertically displaced relative to one another, and a capacitor between the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes.

公开(公告)号：US11094697B2

公开(公告)日：2021-08-17

申请号：US16183468

申请日：2018-11-07

Applicant: Micron Technology, Inc.

Inventor： Gloria Yang ,  Suraj J. Mathew ,  Raghunath Singanamalla ,  Vinay Nair ,  Scott J. Derner ,  Michael Amiel Shore ,  Brent Keeth ,  Fatma Arzum Simsek-Ege ,  Diem Thy N. Tran

IPC: H01L27/108 ,  G11C11/403 ,  H01L49/02 ,  H01L29/423 ,  H01L29/78 ,  H01L23/528 ,  H01L27/06 ,  H01L29/08 ,  H01L29/10

Abstract: Some embodiments include a memory cell having first and second transistors, and a capacitor vertically displaced relative to the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes. Some embodiments include a memory cell having first and second transistors vertically displaced relative to one another, and a capacitor between the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes.

公开(公告)号：US11011523B2

公开(公告)日：2021-05-18

申请号：US16258933

申请日：2019-01-28

Applicant: Micron Technology, Inc.

Inventor： Devesh Dadhich Shreeram ,  Diem Thy N. Tran ,  Sanjeev Sapra

IPC: H01L27/108 ,  H01L27/105

Abstract: Methods, apparatuses, and systems related to forming a capacitor column using a sacrificial material are described. An example method includes patterning a surface of a semiconductor substrate having: a first silicate material over the substrate, a first nitride material over the first silicate material, a sacrificial material over the first nitride material, a second silicate material over the sacrificial material, and a second nitride material over the second silicate material. The method further includes forming a column of capacitor material in an opening through the first silicate material, the first nitride material, the sacrificial material, the second silicate material, and the second nitride material. The method further includes removing the sacrificial material.

公开(公告)号：US20210050364A1

公开(公告)日：2021-02-18

申请号：US16542645

申请日：2019-08-16

Applicant: Micron Technology, Inc.

Inventor： Nicholas R. Tapias ,  Andrew Li ,  Adam W. Saxler ,  Kunal Shrotri ,  Erik R. Byers ,  Matthew J. King ,  Diem Thy N. Tran ,  Wei Yeeng Ng ,  Anish A. Khandekar

IPC: H01L27/11582 ,  H01L27/11556 ,  H01L21/02 ,  H01L21/285

Abstract: Some embodiments include a structure having an opening extending into an integrated configuration. A first material is within the opening, and is configured to create an undulating topography relative to a sidewall of the opening. The undulating topography has a surface roughness characterized by a mean roughness parameter Rmean which is the mean peak-to-valley distance along the undulating topography. The Rmean is at least about 4 nm. A second material is within the opening and along at least a portion of the undulating topography. The first and second materials are compositionally different from one another. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.

公开(公告)号：US10854611B2

公开(公告)日：2020-12-01

申请号：US16412750

申请日：2019-05-15

Applicant: Micron Technology, Inc.

Inventor： Suraj J. Mathew ,  Kris K. Brown ,  Raghunath Singanamalla ,  Vinay Nair ,  Fawad Ahmed ,  Fatma Arzum Simsek-Ege ,  Diem Thy N. Tran

IPC: H01L27/108 ,  H01L29/78 ,  H01L29/94 ,  H01L27/02 ,  H01L27/06 ,  H01L49/02 ,  H01L29/10 ,  H01L23/528 ,  H01L29/08

Abstract: Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.

公开(公告)号：US10553703B2

公开(公告)日：2020-02-04

申请号：US15900537

申请日：2018-02-20

Applicant: Micron Technology, Inc.

Inventor： Fatma Arzum Simsek-Ege ,  Diem Thy N. Tran

IPC: H01L21/8239 ,  H01L29/66 ,  H01L21/8234 ,  H01L21/02 ,  H01L27/1159 ,  H01L27/11597 ,  H01L27/11568 ,  H01L27/11582 ,  H01L27/108

Abstract: A method used in forming an array of elevationally-extending transistors comprises forming spaced lower conductive lines over a substrate. A gate insulator is formed in openings that are individually directly above individual of the lower conductive lines. The openings are formed into laterally-spaced lines comprising sacrificial material and are spaced longitudinally there-along. Channel material is formed in the individual openings laterally adjacent the gate insulator and is electrically coupled to the individual lower conductive line there-below. The sacrificial material is replaced with conductive-gate material. Other methods are disclosed including arrays of elevationally-extending transistors independent of method of manufacture.

公开(公告)号：US10319724B2

公开(公告)日：2019-06-11

申请号：US16033377

申请日：2018-07-12

Applicant: Micron Technology, Inc.

Inventor： Suraj J. Mathew ,  Kris K. Brown ,  Raghunath Singanamalla ,  Vinay Nair ,  Fawad Ahmed ,  Fatma Arzum Simsek-Ege ,  Diem Thy N. Tran

IPC: H01L27/108 ,  H01L29/78 ,  H01L27/02 ,  H01L27/06 ,  H01L49/02 ,  H01L29/10 ,  H01L29/94 ,  H01L23/528 ,  H01L29/08

Abstract: Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.

公开(公告)号：US20190172517A1

公开(公告)日：2019-06-06

申请号：US16267087

申请日：2019-02-04

Applicant: Micron Technology, Inc.

Inventor： Sanh D. Tang ,  Kuo-Chen Wang ,  Martin C. Roberts ,  Diem Thy N. Tran ,  Hideki Gomi ,  Fredrick D. Fishburn ,  Srinivas Pulugurtha ,  Michel Koopmans ,  Eiji Hasunuma

IPC: G11C11/402 ,  G11C5/06 ,  H01L27/108

Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.

公开(公告)号：US20180337258A1

公开(公告)日：2018-11-22

申请号：US15900537

申请日：2018-02-20

Applicant: Micron Technology, Inc.

Inventor： Fatma Arzum Simsek-Ege ,  Diem Thy N. Tran

IPC: H01L29/66 ,  H01L21/8234 ,  H01L21/02

CPC classification number: H01L29/66666 ,  H01L21/02323 ,  H01L21/823487 ,  H01L27/10873 ,  H01L27/11568 ,  H01L27/11582 ,  H01L27/1159 ,  H01L27/11597 ,  H01L29/66545

Abstract: A method used in forming an array of elevationally-extending transistors comprises forming spaced lower conductive lines over a substrate. A gate insulator is formed in openings that are individually directly above individual of the lower conductive lines. The openings are formed into laterally-spaced lines comprising sacrificial material and are spaced longitudinally there-along. Channel material is formed in the individual openings laterally adjacent the gate insulator and is electrically coupled to the individual lower conductive line there-below. The sacrificial material is replaced with conductive-gate material. Other methods are disclosed including arrays of elevationally-extending transistors independent of method of manufacture.