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公开(公告)号：US20180164176A1
公开(公告)日：2018-06-14
申请号：US15834625
申请日：2017-12-07
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
IPC: G01L21/34
Abstract: A cold cathode ionization gauge (CCIG) includes an extended anode, a cathode surrounding the anode along a length of the anode, and a feedthrough insulator supporting the anode. The cathode forms a discharge space around the anode to enable formation of a plasma between the anode and the cathode and a resultant ion current flow into the cathode. The CCIG further includes a magnet applying a magnetic field through the discharge space to lengthen free electron paths to sustain the plasma. A shield is electrically isolated from the insulator and shields the insulator from electrons of the plasma. The shield may be mounted to the cathode and surrounds and is spaced from the anode. An electric controller applies voltage between the anode and the cathode to create ionization with plasma discharge between the anode and the cathode, the controller determining pressure based on measured ion current flow to the cathode.
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公开(公告)号：US09952113B2
公开(公告)日：2018-04-24
申请号：US15421805
申请日：2017-02-01
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker
Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.
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公开(公告)号：US09797797B2
公开(公告)日：2017-10-24
申请号：US14537593
申请日：2014-11-10
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney , Brandon J. Kelly , Alfred A. Funari , Michael N. Schott , Kristian S. Schartau
CPC classification number: G01L21/34 , G01L19/06 , H01J9/50 , H01J41/06 , Y02W30/828 , Y10T29/49007
Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
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公开(公告)号：US09588004B2
公开(公告)日：2017-03-07
申请号：US14536102
申请日：2014-11-07
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Scott C. Heinbuch
IPC: G01L21/34 , G01L21/32 , G01L21/30 , H05B31/26 , H01J37/04 , H01J41/02 , H01J41/06 , H01J41/00 , H01J37/08 , H01J27/00 , H01J27/02
CPC classification number: G01L21/34 , G01L21/30 , G01L21/32 , H01J27/00 , H01J27/02 , H01J37/04 , H01J37/08 , H01J41/00 , H01J41/02 , H01J41/06
Abstract: A Long Lifetime Cold Cathode Ionization Vacuum Gauge Design with an extended anode electrode having an axially directed tip, a cathode electrode, and a baffle structure. The axially directed tip of the anode electrode can have a rounded exterior with a diameter at least 10% greater than the diameter of the anode electrode.
Abstract translation: 长寿命冷阴极电离真空计设计具有带有轴向引导尖端的延伸阳极电极，阴极电极和挡板结构。 阳极电极的轴向定向的尖端可以具有圆形的外部，其直径比阳极电极的直径大至少10％。
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公开(公告)号：US20150108993A1
公开(公告)日：2015-04-23
申请号：US14582750
申请日：2014-12-24
Applicant: MKS Instruments, Inc.
Inventor： Larry K. Carmichael , Jesse A. Weber , John H. Henry , Michael N. Schott , Gerardo A. Brucker
IPC: G01L21/30
Abstract: An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.
Abstract translation: 测量压力的电离计具有发射电子的电子源和限定电离空间的阳极。 该量规还包括收集电极以收集由电子和气体之间的冲击形成的离子，并且基于收集的离子来测量压力。 电子源在取决于压力的多个排放水平和除压力之外的第二参数的发射电流之间动态变化。 电离计还可以根据存储在非易失性存储器中并由用户选择的参数来改变量规组件的各种操作参数。
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Patent Agency Ranking
公开(公告)号：US20250085180A1
公开(公告)日：2025-03-13
申请号：US18954093
申请日：2024-11-20
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.
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公开(公告)号：US20230366763A1
公开(公告)日：2023-11-16
申请号：US18303222
申请日：2023-04-19
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
CPC classification number: G01L9/025 , G01L9/0002 , G01L21/14 , G01L9/00 , G01L21/10
Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.
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公开(公告)号：US10969290B2
公开(公告)日：2021-04-06
申请号：US15834625
申请日：2017-12-07
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
Abstract: A cold cathode ionization gauge (CCIG) includes an extended anode, a cathode surrounding the anode along a length of the anode, and a feedthrough insulator supporting the anode. The cathode forms a discharge space around the anode to enable formation of a plasma between the anode and the cathode and a resultant ion current flow into the cathode. The CCIG further includes a magnet applying a magnetic field through the discharge space to lengthen free electron paths to sustain the plasma. A shield is electrically isolated from the insulator and shields the insulator from electrons of the plasma. The shield may be mounted to the cathode and surrounds and is spaced from the anode. An electric controller applies voltage between the anode and the cathode to create ionization with plasma discharge between the anode and the cathode, the controller determining pressure based on measured ion current flow to the cathode.
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公开(公告)号：US10948456B1
公开(公告)日：2021-03-16
申请号：US16698178
申请日：2019-11-27
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney , Clinton L. Percy
IPC: H01J49/00 , G01N27/622 , H01J37/317
Abstract: A gas analyzer system uses an ionization source, which can be a hot cathode ionization source. A magnet assembly is positioned to define a magnetic field, which permits separation of ion components based on their mass to charge ratio. An ion beam deflector is used, such as a pair of deflector plates, which can scan ion components across a detector. The ion beam deflector defines a deflection electric field across the magnetic field and across a direction of travel of the ions emitted from the ionization source.
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公开(公告)号：US20190271607A1
公开(公告)日：2019-09-05
申请号：US16415313
申请日：2019-05-17
Applicant: MKS Instruments, Inc.
Inventor： Brandon J. Kelly , Clinton L. Percy , Scott C. Heinbuch , Gerardo A. Brucker , Timothy C. Swinney , Timothy R. Piwonka-Corle
Abstract: A gauge having a housing formed of a polymer material and one or more electrical feedthrough pins disposed in the housing. The electrical feedthrough pins can be oriented substantially perpendicular to each other and have complex shapes.
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