摘要:
In an X-ray tomographic imaging system and method, an object to be inspected is irradiated with X-rays from an X-ray source to obtain an X-ray transmission image of the object. The X-ray transmission image is converted by an X-ray fluorescence image intensifier into a detection image. The intensity of the detection image is also intensified by the X-ray fluorescence image intensifier. A photo-electric converter converts the intensified detection image from the X-ray fluorescence image intensifier into an electrical signal. The object to be inspected is held by an object holder rotatably at a position in proximity to the X-ray source and movably in a direction of the axis of rotation of the object and a direction perpendicular to the rotation axis. The electrical signal from the photo-electric converter is processed to a cross-sectional image.
摘要:
An end member (3A) for a spiral separation membrane element includes: an inner annular portion (31); an outer annular portion (32) surrounding the inner annular portion (31) at a distance from the inner annular portion (31); a plurality of connecting portions (33) connecting the inner annular portion (31) and the outer annular portion (32); and a shield plate (34) disposed between at least one pair of the connecting portions (33) and forming an opening (41) between the shield plate (34) and the outer annular portion (32). According to this configuration, a radially outwardly spreading flow is formed by the shield plate (34), and therefore suspended solids in a feed liquid can be effectively directed to the peripheral region.
摘要:
Provided is a separation membrane element used under a high-temperature environment, in which the stress acting on a portion for fixing between a fluid collecting tube and a separation membrane is reduced and a deformation caused by receiving a long time thermal history can be prevented, and also provided is a fluid collecting tube used for the separation membrane element. The separation membrane element has a fluid collecting tube (10), a separation membrane, and fixing portions (4) provided at at least two places and fixing between the fluid collecting tube (10) and the separation membrane. The separation membrane element has at least one elastic portion in the fluid collecting tube (10) between the fixing portions (4).
摘要:
A separation membrane module (1A) includes: a tubular pressure container (7); a plurality of separation membrane elements (2) inserted in the pressure container (7) and each having a first end member (3) and a second end member (4); and a sealing member (5A) mounted on one of or both the first end member (3) and the second end member (4) that are adjacent to each other. In a normal condition, the sealing member (5A) is located radially inward of a maximum diameter portion of the first end member (3) and/or the second end member (4) on which the sealing member (5A) is mounted. The sealing member (5A) is deformed due to contact between the adjacent separation membrane elements (2) or due to supply of a pressurized liquid into the pressure container (7), and comes into close contact with an inner circumferential face (7a) of the pressure container (7).
摘要:
Provided are a pressure vessel for a membrane element in which the membrane element can be easily mounted, a membrane filtration apparatus equipped with the pressure vessel for a membrane element, and a method for manufacturing a membrane filtration apparatus. A rail (protrusion) 60 is formed on the inner circumferential surface of the pressure vessel 40 in such a manner that a ridge line 61 extends along the insertion direction of the membrane element. Consequently, the membrane element 10 can be inserted into the pressure vessel 40 so as to be in a sliding contact onto the ridge line 61 of the rail 60 formed on the inner circumferential surface of the pressure vessel 40. Therefore, the frictional resistance can be reduced as compared with conventional ways, so that the membrane element 10 can be easily mounted onto the pressure vessel 40.
摘要:
A process management system in accordance with the present invention includes inspection apparatuses for inspecting defects on a wafer, the inspection apparatuses being connected through a communication network, inspection information and image information obtained from these inspection apparatuses being collected to construct a data base and an image file, therein definition of defects is given by combinations of elements which characterize the defect based on the inspection information and the image information obtained from the inspection apparatuses. By giving definition of the defect, characteristics of the defect can be subdivided and known. Therefore, the cause of a defect can be studied.
摘要:
Inspection apparatuses of an inspection apparatus group are connected to a network and transfer inspected result to a data collection system. The same wafer selected from a specific process is inspected by the different inspection apparatuses and the inspected data are collected and analyzed to calculate a correlation degree among the inspection apparatuses. On the other hand, the course of occurrence of failures in the same process can be analyzed to thereby calculate an average occurrence frequency of failures. An optimum inspection apparatus and inspection frequency are successively obtained on the basis of calculated results of an inter-apparatus correlation degree calculation process and a failure occurrence frequency calculation process, so that a feeding method of wafers to the inspection apparatus group is indicated through an inspection apparatus group management system. In the manufacturing of electronic components, complicated conditions such as the optimum inspection apparatus to be applied, the inspection frequency and the like can be set easily and the expected total loss value can be minimized to improve the economical efficiency of inspection remarkably.
摘要:
A method and apparatus for inspecting a solder joint by an X-ray fluoroscopic image in which an X-ray is irradiated on an object to be inspected located by a specimen stage and having a lead of an electronic part soldered to a substrate to detect an X-ray fluoroscopic image signal, a position of a lead in a tip direction is obtained by a distribution of projection with said X-ray fluoroscopic image signal projected in a lead row direction, a position of a lead in a row direction is obtained by a distribution of projection with said X-ray fluoroscopic image projected in a lead tip direction to extract a position of a solder joint as an object to be inspected, and said X-ray fluoroscopic image is evaluated every solder joint in accordance with the postion information to effect a defect detection.
摘要:
An apparatus for inspecting an appearance of soldered portions connected between the pads formed on a printed circuit board and leads of an electronic body part. A slit light beam is directed to portions to be inspected and scanned thereon with a light fluorescent image generated from the substrate portion of the printed circuit board and a dark fluorescent image generated from the leads, pads and soldered portions being detected with an image signal being generated in accordance therewith. The image signal is binarized and different functions are extracted from the binarized signal which functions are utilized in connection with other functions and previously obtained data to determine whether an abnormal portion is present or not in a predetermined position on the circuit board.
摘要:
An apparatus for testing printed wiring patterns for use in combination with an apparatus including a plurality of dedicated pattern generators for generating arcuate wiring patterns. In contrast to the conventional LSI pattern inspection effected with design data being inputted, the apparatus can inspect the pattern including curved portions peculiar to the printed wiring pattern. Although the conventional LSI inspection technique involves an impracticably increased amount of design data, the invention allows the test or inspection to be performed at a high speed with an improved reliability and can be applied to the inspection of any pattern including arcuate patterns. By inputting graphic data in conformance with the order for generating patterns, pattern generation can be accomplished not only through ordinary raster scan but also by other various scanning methods.