摘要:
According to one embodiment, there is provided a graphite nano-carbon fiber provided by using an apparatus having a reactor capable of keeping a reducing atmosphere inside thereof, a metal substrate arranged as a catalyst in the reactor, a heater heating the metal substrate, a pyrolysis gas source supplying pyrolysis gas obtained by thermally decomposing a wood material in a reducing atmosphere to the reactor, a scraper scraping carbon fibers produced on the metal substrate, a recovery container recovering the scraped carbon fibers, and an exhaust pump discharging exhaust gas from the reactor. The carbon fibers are linear carbon fibers with a diameter of 25 to 250 nm formed with layers of graphenes stacked in a longitudinal direction.
摘要:
A disclosed film deposition apparatus includes a process chamber inside which a reduced pressure space is maintained; a gas supplying portion that supplies a film deposition gas to the process chamber; a substrate holding portion that is made of a material including carbon as a primary constituent and holds a substrate in the process chamber; a coil that is arranged outside the process chamber and inductively heats the substrate holding portion; and a thermal insulation member that covers the substrate holding portion and is arranged to be separated from the process chamber, wherein the reduced pressure space is separated into a film deposition gas supplying space to which the film deposition gas is supplied and a thermal insulation space defined between the substrate holding portion and the process chamber, and wherein a cooling medium is supplied to the thermal insulation space.
摘要:
An aluminum nitride-based ceramic sintered body is provided, which is manufactured by sintering an aluminum nitride powder comprising aluminum nitride as a main component, carbon in an amount of 0.1 wt % or more to 1.0 wt % or less, and containing oxygen in an amount that is not greater than 0.7 wt %, wherein carbon and oxygen are dissolved in grains of the aluminum nitride powder. The a-axis length of the lattice constant of the aluminum nitride is in a range of 3.1120 Å or more to 3.1200 Å or less, and the a c-axis length of the lattice constant is in a range of 4.9810 Å or more to 4.9900 Å or less. The volume resistivity of the aluminum nitride-based ceramic sintered body at 500° C. is 109 Ω·cm or more.
摘要:
An aluminum nitride sintered body containing carbon fibers is provided. This aluminum nitride sintered body is obtained by mixing carbon fibers and aluminum nitride together to form mixed powder, molding the mixed powder to form a compact, and heating and sintering the compact in any of a vacuum atmosphere, an inert atmosphere and a reductive atmosphere. By using electric conductivity and shapes with high aspect ratios of the carbon fibers, continuous electrically conductive paths are formed with a small content of the carbon fibers. In this way, a value of resistance of the aluminum nitride sintered body is reduced.
摘要:
A data processing system able to raise the access efficiency to a memory when a plurality of processor access to the memory will be provided. An arbitration program executed by one input/output processing device determines a priority order for the access requests to the RAIDs so as to give the access permission with the highest priority to the access request linked with the reproduction port. The arbitration program notifies the result of the determination to the arbitrated programs executed by the other input/output processing devices.
摘要:
An aluminum nitride ceramic is provided, containing boron atoms in an amount of not lower than 1.0 weight percent and carbon atoms in an amount of not lower than 0.3 weight percent and having a volume resistivity at room temperature of not higher than 1×1012 Ω·cm. The aluminum ceramic comprises aluminum nitride and an intergranular phase mainly consisting of boron nitride constituting a conductive path. Such a ceramic may be obtained by holding a mixture containing at least aluminum nitride and boron carbide at a holding temperature in a range of 1400° C. to 1800° C. and then sintering the mixture at a maximum temperature that is higher than the holding temperature.
摘要:
A vacuum cleaner includes an optical dust sensor for detecting a quantity of dust which sensor is provided at a predetermined position of a suction path for sucking air by a suction force of the vacuum cleaner, whereby an output signal is supplied to a display device so that a display corresponding to the quantity of the sucked dust, which signal is output from the optical dust sensor and is varied in a stageless manner corresponding to the quantity of the dust.
摘要:
An antenna, a dielectric window, a plasma processing apparatus and a plasma processing method are capable of improving uniformity of a substrate surface processing amount in the surface of the substrate. The antenna includes the dielectric window 16; and a slot plate 20, provided on one side of the dielectric window 16, having a plurality of slots 133. The dielectric window 16 has a flat surface 146 surrounded by a ring-shaped first recess; and a plurality of second recesses 153 formed on the flat surface 146 so as to surround a center of the flat surface 146. Here, the flat surface 146 is formed on the other side of the dielectric window 16. When viewed from a thickness direction of the slot plate, a center of each second recess 153 is located within each slot 133 of the slot plate.
摘要:
In a dielectric window 41 for a plasma processing apparatus, a first dielectric window recess 47 is formed on an outer region of a surface of the dielectric window 41 in a diametrical direction of the dielectric window 41 at a side where plasma is generated, and the first dielectric window recess 47 is extended in a ring shape and has a tapered shape inwardly in a thickness direction of the dielectric window 41. A multiple number of second dielectric window recesses 53a to 53g are formed between the center of the dielectric window 41 and the first dielectric window recess 47, and each of the second dielectric window recesses 53a to 53g is recessed inwardly in the thickness direction of the dielectric window 41 from the surface of the dielectric window 41.
摘要:
An object of the present invention is to provide a lithium secondary battery cathode which can more improve characteristics of the battery. The cathode of the present invention includes a first layer composed of a plate-like cathode active material and a second layer containing particles of the cathode active material and a binder, the second layer being joined to the first layer in a stacked state.