公开(公告)号：US10756700B2

公开(公告)日：2020-08-25

申请号：US15638809

申请日：2017-06-30

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Sung Han ,  Jae Chang Lee ,  Won Han ,  Tae Yoon Kim ,  Jong Woon Kim ,  Tae Kyung Lee ,  Moon Chul Lee ,  Tae Hun Lee ,  Sung Min Cho ,  In Young Kang

IPC: H01L41/09 ,  H03H9/10 ,  H03H9/02 ,  H03H9/54 ,  H03H9/17

Abstract: A bulk acoustic wave resonator device includes: a substrate; a lower electrode disposed on the substrate; a piezoelectric layer disposed over a portion of the lower electrode; an upper electrode disposed on the piezoelectric layer; and a shape control layer covering an edge of a cavity disposed between the substrate and the lower electrode, wherein tensile stress is applied to the shape control layer during formation of the shape control layer.

公开(公告)号：US10355195B2

公开(公告)日：2019-07-16

申请号：US15381397

申请日：2016-12-16

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Dae Ho Kim ,  Dae Hun Jeong ,  Won Han ,  Sang Uk Son

IPC: H01L41/053 ,  H01L41/047 ,  H01L41/27 ,  H01L41/297 ,  H03H9/17

Abstract: An acoustic resonator includes: a substrate; a resonance part including a lower electrode, a piezoelectric layer, and an upper electrode sequentially stacked on the substrate, and a frame formed on the upper electrode along an edge of the upper electrode; and a trench part formed in at least one side of the resonance part and making a thickness of the resonance part asymmetrical.

公开(公告)号：US09879998B2

公开(公告)日：2018-01-30

申请号：US15010770

申请日：2016-01-29

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Jong Woon Kim ,  Won Han ,  Tae Yoon Kim

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: An angular velocity sensor includes a mass body; a first frame provided outside of the mass body; a first flexible part connecting the mass body and the first frame to each other; a second flexible part connecting the mass body and the first frame to each other; a second frame provided outside of the first frame; a third flexible part connecting the first frame and the second frame to each other; and a fourth flexible part connecting the first frame and the second frame to each other, wherein the mass body is fixed to the first frame by the second flexible part so as to be rotation-displaceable and translation-displaceable, and the first frame is connected to the second frame by the fourth flexible part so as to be rotation-displaceable.

公开(公告)号：US09846036B2

公开(公告)日：2017-12-19

申请号：US14940651

申请日：2015-11-13

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Jong Woon Kim ,  Won Han ,  Jong Hyeong Song

IPC: G01P15/08 ,  G01C19/5733 ,  B81B3/00 ,  G01P15/097

CPC classification number: G01C19/5733 ,  B81B3/0051 ,  B81B3/0062 ,  G01P15/097 ,  G01P2015/0822 ,  G01P2015/084

Abstract: There is provided an angular velocity sensor including first and second mass bodies provided within a first frame, a first flexible connector system connecting the first and second mass bodies and the first frame and that includes at least one sensor to detect displacements of the first and second mass bodies, a second flexible connector system connecting the first frame to a second frame provided separate from the first frame and that includes a driver to drive movement of the first frame relative to the second frame, so angular velocities can be measured based on the first and second mass bodies being enabled to rotate in a first axis direction and translated in a second axis direction, and based on the first frame being flexibly connected to the second frame so that a rotation displacement of the first frame is made in a third axis direction.

公开(公告)号：US20130257610A1

公开(公告)日：2013-10-03

申请号：US13853518

申请日：2013-03-29

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Kyung No Lee ,  Jong Woo Han ,  Jong Hyeong Song ,  Won Han ,  Hae Seung Hyun

IPC: B60C23/04

CPC classification number: B60C23/04 ,  B60C23/0455 ,  B60C23/0462 ,  B60C23/0474

Abstract: Disclosed are an apparatus for monitoring tire conditions and a method thereof. The apparatus for monitoring tire conditions includes a plurality of transmitters transmitting condition report signals that do not include a measured internal condition, when the plurality of transmitters measure an internal condition of tires to determine that a change in the internal condition of the tires is in a predetermined range; and a receiver determining the internal condition of the tires previously transmitted by the corresponding transmitters as a current internal condition, when the receiver receives the condition report signals that do not include the internal condition transmitted from the transmitters.

Abstract translation: 公开了一种用于监测轮胎状况的装置及其方法。 用于监视轮胎状况的装置包括多个发射器，当多个发射器测量轮胎的内部状态以确定轮胎的内部状态的变化是否处于一个状态时，发射状态报告信号不包括测量的内部状况 预定范围; 以及当接收机接收到不包括从发射机发送的内部条件的条件报告信号时，接收机确定由相应发射机先前传输的轮胎的内部状况作为当前内部条件。

公开(公告)号：US12057822B2

公开(公告)日：2024-08-06

申请号：US17307055

申请日：2021-05-04

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Sang Uk Son ,  Sung Wook Kim ,  Won Han ,  Jong Woon Kim ,  Jeong Hoon Ryou ,  Sang Heon Han

IPC: H03H9/17 ,  H03H9/02 ,  H03H9/13

CPC classification number: H03H9/173 ,  H03H9/02015 ,  H03H9/02157 ,  H03H9/131 ,  H03H9/132

Abstract: A bulk acoustic resonator includes a first electrode disposed on an upper side of a substrate, a piezoelectric layer disposed on an upper surface of the first electrode, and a second electrode disposed on an upper surface of the piezoelectric layer, wherein an upper surface of at least one of the first electrode and the second electrode has a recess region, wherein a depth of the recess region is D, a width of the recess region is W, and a resonance frequency is F, and ln is a natural logarithm, and wherein [{ln(D*W)}/(−0.59*F)] is [[ln{0.008 (μm)2}]/{−0.59*(3.5 GHz)}] or more and [[ln{0.022 (μm)2}]/{−0.59*(3.5 GHz)}] or less.

公开(公告)号：US11558027B2

公开(公告)日：2023-01-17

申请号：US16362743

申请日：2019-03-25

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Dae Hun Jeong ,  Sung Wook Kim ,  Sang Uk Son ,  Sang Heon Han ,  Won Han

IPC: H01L41/00 ,  H02N2/00 ,  H03H9/02 ,  H03H9/17 ,  H03H9/13

Abstract: A bulk-acoustic wave resonator includes: a substrate; a membrane layer forming a cavity with the substrate; a lower electrode disposed on the membrane layer; an insertion layer disposed to cover at least a portion of the lower electrode; a piezoelectric layer disposed on the lower electrode to cover the insertion layer; and an upper electrode at least partially disposed on the piezoelectric layer, wherein the upper electrode includes a reflection groove disposed on the insertion layer.

公开(公告)号：US11558025B2

公开(公告)日：2023-01-17

申请号：US17074978

申请日：2020-10-20

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Jeong Hoon Ryou ,  Sang Uk Son ,  Sung Wook Kim ,  Won Han ,  Dae Hun Jeong ,  Sang Heon Han

IPC: H03H9/02 ,  H03H9/13 ,  H03H9/17

Abstract: A bulk-acoustic wave resonator includes: a first electrode; a piezoelectric layer at least partially disposed on an upper portion of the first electrode; and a second electrode disposed to cover at least a portion of the piezoelectric layer. The second electrode includes a frame disposed at an edge of an active region of the bulk-acoustic wave resonator, and the first electrode, the piezoelectric layer and the second electrode are disposed to overlap one another at the edge of the active region. The frame includes a wall disposed at the edge of the active region and a trench formed on an internal side of the wall. An internal boundary line of the trench has a concave-convex shape in a plane parallel to an upper surface of the frame.

公开(公告)号：US11057017B2

公开(公告)日：2021-07-06

申请号：US15996921

申请日：2018-06-04

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Tae Yoon Kim ,  Won Han ,  Chang Hyun Lim

IPC: H03H9/17 ,  H03H3/02 ,  H03H9/05 ,  H03H9/02

Abstract: A bulk-acoustic wave resonator includes a substrate; a lower electrode formed on the substrate, and at least a portion of the lower electrode is formed on a cavity; a piezoelectric layer formed on the lower electrode; an upper electrode formed on the piezoelectric layer; a membrane layer formed below the lower electrode and forming the cavity together with the substrate; and a protruding portion formed on the membrane layer and further formed in the cavity in a direction that extends away from the membrane layer.

公开(公告)号：US10396751B2

公开(公告)日：2019-08-27

申请号：US15384385

申请日：2016-12-20

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Won Han ,  Tae Hun Lee ,  Dae Hun Jeong ,  Moon Chul Lee ,  Sang Uk Son

IPC: H03H9/02 ,  H03H9/17 ,  H03H9/54

Abstract: An acoustic wave filter device includes a lower electrode disposed between a substrate and a piezoelectric layer, an upper electrode disposed on the piezoelectric layer, and an insulating layer disposed on the upper electrode. The insulating layer exposes portions of the upper electrode.