METHOD FOR FORMING TANTALUM NITRIDE FILM AND FILM-FORMING APPARATUS FOR FORMING THE SAME
    21.
    发明申请
    METHOD FOR FORMING TANTALUM NITRIDE FILM AND FILM-FORMING APPARATUS FOR FORMING THE SAME 审中-公开
    形成氮化钛膜和成膜装置的方法

    公开(公告)号:US20110318505A1

    公开(公告)日:2011-12-29

    申请号:US13130997

    申请日:2009-12-07

    摘要: A method for forming a tantalum nitride film, which comprises supplying a gaseous nitrogen atom-containing compound, as a reactant gas and supplying gaseous t-amylimido-tris-(dimethylamide)tantalum, as a gaseous raw material, to the surface of the substrate S to thus form a tantalum nitride film on the surface of the substrate S; and a film-forming apparatus, which comprises a reactant gas supply line L4; a container 13 for liquefy a raw material; an evaporator 11 for gasify the liquefied raw material; a liquid mass flow controller 12 for controlling the amount of the liquid raw material to be supplied; and a gaseous raw material supply line L1. These method and apparatus would permit the stable supply of the gaseous raw material at all times and the improvement of the throughput of the substrate to be processed and as a result, the method and the apparatus permit the improvement of the productivity of the tantalum nitride film.

    摘要翻译: 一种形成氮化钽膜的方法,其包括供给含氮气的化合物作为反应气体,并将作为气态原料的气态叔戊基酰胺 - 三(二甲基酰胺)钽供给至基材表面 从而在衬底S的表面上形成氮化钽膜; 以及成膜装置,其包括反应气体供给管线L4; 用于液化原料的容器13; 用于气化液化原料的蒸发器11; 液体质量流量控制器12,用于控制待供应的液体原料的量; 和气态原料供给管线L1。 这些方法和装置将一直允许气态原料的稳定供应以及待处理的基材的通过量的提高,结果,该方法和装置允许提高氮化钽膜的生产率 。

    THERAPEUTIC AGENT FOR HEPATITIS C
    22.
    发明申请
    THERAPEUTIC AGENT FOR HEPATITIS C 审中-公开
    乙型肝炎治疗药物C

    公开(公告)号:US20110200554A1

    公开(公告)日:2011-08-18

    申请号:US13124584

    申请日:2009-10-16

    摘要: A novel therapeutic agent for hepatitis C having a high therapeutic effect against hepatitis C is disclosed. The therapeutic agent for hepatitis C contains as an effective ingredient hydroxyurea. The therapeutic agent for hepatitis C optionally further contains interferon α. By the present invention, a novel therapeutic agent for hepatitis C having a high therapeutic effect against hepatitis C was provided. A synergistic therapeutic effect against hepatitis C is obtained by using interferon α in combination. Therefore, in cases where a patient is infected with the genotype of hepatitis C virus for which therapy by interferon α is effective, the therapeutic effect is further promoted by using interferon α in combination.

    摘要翻译: 公开了一种对丙型肝炎具有高治疗效果的新型丙型肝炎治疗剂。 丙型肝炎治疗剂含有羟基脲的有效成分。 丙型肝炎治疗剂任选地还含有干扰素α。 通过本发明,提供了一种对丙型肝炎具有高治疗效果的新型丙型肝炎治疗剂。 通过组合使用干扰素α获得对丙型肝炎的协同治疗效果。 因此,在患者感染了通过干扰素α治疗的丙型肝炎病毒基因型有效的情况下,通过组合使用干扰素α进一步促进了治疗效果。

    Selective W-CVD method and method for forming multi-layered Cu electrical interconnection
    23.
    发明授权
    Selective W-CVD method and method for forming multi-layered Cu electrical interconnection 有权
    选择性W-CVD方法和形成多层Cu电互连的方法

    公开(公告)号:US07790590B2

    公开(公告)日:2010-09-07

    申请号:US11886428

    申请日:2006-03-13

    IPC分类号: H01L21/20 H01L21/44

    摘要: A substrate provided thereon with an electrical insulating film which carries holes or the like filled with a Cu-containing electrical interconnection film is subjected to a pre-treatment in which the surface of the electrical insulating film and that of the Cu-containing electrical interconnection film are treated at a temperature of not more than 300° C. using, in a predetermined state, a gas of a compound containing an atom selected from the group consisting of N, H and Si atoms within the chemical formula thereof, before selectively forming a W-capping film on the electrical interconnection film. After the completion of the pre-treatment, a W-capping film is selectively formed on the electrical interconnection film and then an upper Cu electrical interconnection is further formed.

    摘要翻译: 在其上设置有带有填充有含Cu电互连膜的孔等的电绝缘膜的基板经受预处理,其中电绝缘膜的表面和含Cu电互连膜的表面 在不超过300℃的温度下,在预定状态下,在选择性地形成其中之前,含有选自由N,H和Si原子组成的组的化合物的化合物的气体 电气互连膜上的W覆盖膜。 在预处理完成之后,在电互连膜上选择性地形成W覆盖膜,然后进一步形成上部Cu电互连。

    PURGE GAS ASSEMBLY
    24.
    发明申请
    PURGE GAS ASSEMBLY 有权
    燃气总成

    公开(公告)号:US20100139556A1

    公开(公告)日:2010-06-10

    申请号:US12597589

    申请日:2008-04-23

    IPC分类号: B05C11/00

    摘要: In a purge gas assembly provided: in an outer circumference portion of a substrate stage, with a shoulder portion offset downward below a substrate mounting surface on an upper end of the substrate stage; a purge ring enclosing a stepped circumferential surface between the substrate mounting surface and the shoulder portion; and an annular gas ejection passage for ejecting the purge gas, the gas ejecting passage being defined between the stepped circumferential surface and an inner circumferential surface of the purge ring, an arrangement is made such that the purge gas can be ejected uniformly from the gas ejection passage over the entire circumference thereof and that the deposition of a film on an upper surface of the purge ring can also be restricted, and further that the construction is simplified. The purge ring has formed therein an annular groove which recesses from a lower surface thereof upward.

    摘要翻译: 在吹扫气体组件中,其设置在衬底台的外周部分中,其肩部部分向下偏置在衬底台的上端上的衬底安装表面下方; 净化环,其包围所述基板安装表面和所述肩部之间的阶梯状周向表面; 以及用于喷射净化气体的环形气体喷射通道,气体喷射通道限定在台阶周向表面和净化环的内圆周表面之间,使排气能够均匀地从气体喷射 通过其整个圆周,并且还可以限制在清洗环的上表面上的膜的沉积,并且进一步简化了结构。 清洗环中形成有从其下表面向上凹进的环形槽。

    SiC semiconductor device having bottom layer and method for manufacturing the same
    25.
    发明申请
    SiC semiconductor device having bottom layer and method for manufacturing the same 有权
    具有底层的SiC半导体器件及其制造方法

    公开(公告)号:US20090166730A1

    公开(公告)日:2009-07-02

    申请号:US12318183

    申请日:2008-12-23

    IPC分类号: H01L29/78 H01L21/336

    摘要: A SiC semiconductor device includes: a substrate; a drift layer on the substrate; a trench on the drift layer; a base region in the drift layer sandwiching the trench; a channel between the base region and the trench; a source region in the base region sandwiching the trench via the channel; a gate electrode in the trench via a gate insulation film; a source electrode coupled with the source region; a drain electrode on the substrate opposite to the drift layer; and a bottom layer under the trench. An edge portion of the bottom layer under a corner of a bottom of the trench is deeper than a center portion of the bottom layer under a center portion of the bottom of the trench.

    摘要翻译: SiC半导体器件包括:衬底; 衬底上的漂移层; 漂移层上的沟槽; 夹在沟槽中的漂移层中的基底区域; 基极区域和沟槽之间的沟道; 所述基极区域中的源极区域经由所述沟道夹持所述沟槽; 通过栅极绝缘膜在沟槽中的栅电极; 与源极区域耦合的源电极; 衬底上的与漂移层相反的漏电极; 和沟槽下方的底层。 在沟槽的底部的角部下方的底层的边缘部分比沟槽底部的中心部分下方的底层的中心部分更深。

    Method for forming tungsten nitride film
    26.
    发明授权
    Method for forming tungsten nitride film 有权
    形成氮化钨膜的方法

    公开(公告)号:US07338900B2

    公开(公告)日:2008-03-04

    申请号:US11140362

    申请日:2005-05-31

    IPC分类号: H01L21/44 H01L21/31

    摘要: A method for forming a tungsten nitride film including a first material gas supply step of supplying a first material gas composed of a tungsten compound gas, a reduction step of supplying a reducing gas, a second material gas supply step of supplying a second material gas composed of a tungsten compound gas, and a nitridation step of supplying a nitriding gas. Since a step of depositing tungsten on a substrate 5, and a step of forming tungsten nitride are performed separately, by varying the flow rate of each gas, the pressure when each gas is supplied, and the supply time, or the number of times each step is performed and the order in which the steps are performed, the quantity of tungsten deposited and the quantity of tungsten nitride formed can be controlled easily.

    摘要翻译: 一种形成氮化钨膜的方法,包括:供给由钨化合物气体构成的第一原料气体的第一原料气体供给工序,供给还原气体的还原工序;第二原料气体供给工序, 的钨化合物气体,以及氮化步骤,供给氮化气体。 由于在基板5上沉积钨的步骤和形成氮化钨的步骤是通过改变每种气体的流量,每个气体的供给时的压力,供给时间或每个气体的次数, 执行步骤,并且可以容易地控制步骤的顺序,钨沉积的量和形成的氮化钨的量。

    Transfer fixing device, image bearing and conveying body, and image forming apparatus with plural gloss processing
    28.
    发明授权
    Transfer fixing device, image bearing and conveying body, and image forming apparatus with plural gloss processing 失效
    转印固定装置,图像承载和输送体以及具有多次光泽处理的成像装置

    公开(公告)号:US06526250B1

    公开(公告)日:2003-02-25

    申请号:US09650672

    申请日:2000-08-30

    IPC分类号: G03G1516

    摘要: In this invention, even if a thick resin coated recording medium having large heat capacity is used, a high quality image with an excellent gloss feeling is obtained. A transfer fixing device is provided with a press conveying mechanism which includes at least one pair of pressing bodies for nipping and conveying an image bearing and conveying body and a recording medium, and contact-conveys the recording medium on the image bearing and conveying body in a region exceeding a nip region of the pair of pressing bodies, and a heat supply adjusting mechanism which includes a heating source for heating the recording medium contact-conveyed on the image bearing and conveying body by the press conveying mechanism from both obverse and reverse sides to melt an unfixed image and a thermoplastic resin layer, and makes adjustment to cause heat supplied to an image bearing surface side of the recording medium to be more than heat supplied to a non-image bearing surface side of the recording medium. Besides, transferring and fixing is performed by a heating and pressing mechanism after a preheating mechanism. Further, the image bearing and conveying body having plural different gloss surfaces is provided. Moreover, an image forming apparatus using these is also provided.

    摘要翻译: 在本发明中,即使使用具有大热容的厚树脂涂布的记录介质,也可获得具有优良光泽感的高品质图像。 传送固定​​装置设置有压力传送机构,其包括至少一对用于夹持和传送图像承载和传送体和记录介质的按压体,并将记录介质接触传送到图像承载和传送体上 超过所述一对按压体的压区的区域,以及供热调节机构,该供热调整机构包括:加热源,用于通过压力传送机构从正面和反面加热在图像承载体和输送体上接触输送的记录介质 熔化未固定的图像和热塑性树脂层,并进行调节,使得供给到记录介质的图像承载面侧的热量比提供给记录介质的非图像承载面侧的热量多。 此外,在预热机构之后,通过加热和加压机构进行转印和定影。 此外,提供具有多个不同光泽表面的图像承载和输送体。 此外,还提供了使用这些的图像形成装置。

    Image processing apparatus
    29.
    发明授权
    Image processing apparatus 失效
    图像处理装置

    公开(公告)号:US6014457A

    公开(公告)日:2000-01-11

    申请号:US958300

    申请日:1997-10-27

    摘要: An image processing apparatus for converting input color image signals to image recording signals to be sent to an image forming apparatus. The image processing apparatus comprises: a first color converting unit for converting the input color image signals to three-variable color signals independent of devices; a second color converting unit for converting the three-variable color signals to the image recording signals; and a parameter determining unit for determining parameters of the first color converting unit. The parameter determining unit determines the parameters so as to make characteristic colors in the input color image signals coincide with predetermined colors and to maintain linearities of color reproduction characteristics of an output image from the image forming apparatus.

    摘要翻译: 一种图像处理装置,用于将输入彩色图像信号转换成图像记录信号,以发送到图像形成装置。 该图像处理装置包括:第一颜色转换单元,用于将输入彩色图像信号转换为独立于设备的三变色信号; 第二颜色转换单元,用于将三变色信号转换成图像记录信号; 以及参数确定单元,用于确定第一颜色转换单元的参数。 参数确定单元确定参数,以使输入彩色图像信号中的特征颜色与预定颜色一致,并且保持来自图像形成装置的输出图像的色彩再现特性的线性。

    Hydraulic control apparatus for power transmitting system including
belt-and-pulley type continuously variable transmission and torque
converter equipped with lock-up clutch
    30.
    发明授权
    Hydraulic control apparatus for power transmitting system including belt-and-pulley type continuously variable transmission and torque converter equipped with lock-up clutch 失效
    用于动力传动系统的液压控制装置,包括皮带式无级变速器和配有锁止离合器的变矩器

    公开(公告)号:US5211083A

    公开(公告)日:1993-05-18

    申请号:US809164

    申请日:1991-12-18

    摘要: A hydraulic control apparatus for controlling a vehicle power transmitting system including a belt-and-pulley type continuously variable transmission and a torque converter provided with a lock-up clutch. The transmission includes a pair of hydraulic actuators one of which receives a belt tensioning pressure for controlling a tension of a transmission belt. The hydraulic control apparatus includes a lock-up clutch control valve which is selectively placed in an engaging and a releasing position for engaging and releasing the lock-up clutch, respectively, a slip control valve for controlling an amount of slipping of the lock-up clutch until the clutch is fully engaged, a pressure control device for raising the belt tensioning pressure so as to increase the tension of the transmission belt; and a pilot-pressure generating device for applying a pilot pressure simultaneously to the slip control valve and the pressure control means, so that the belt tensioning pressure is raised while the slip control valve controls the amount of slipping of the lock-up clutch.

    摘要翻译: 一种用于控制包括皮带轮型无级变速器的车辆动力传递系统和设置有锁止离合器的变矩器的液压控制装置。 变速器包括一对液压致动器,其中一个液压致动器接收用于控制传动皮带张力的皮带张紧压力。 液压控制装置包括锁定离合器控制阀,其被选择性地放置在接合和释放位置,用于分别接合和释放锁止离合器;滑动控制阀,用于控制锁定的滑动量 离合器直到离合器完全接合,用于提升皮带张紧压力以增加传动皮带的张力的压力控制装置; 以及先导压力发生装置,用于同时向滑动控制阀和压力控制装置施加先导压力,使得当打滑控制阀控制锁止离合器的滑动量时,带张紧压力升高。