摘要:
An insulation film is formed on a semiconductor substrate by vaporizing a silicon-containing hydrocarbon compound to provide a source gas, introducing a reaction gas composed of the source gas and an additive gas such as an inert gas and oxidizing gas to a reaction space of a plasma CVD apparatus. The silicon-containing hydrocarbon compound includes a cyclosiloxan compound or a linear siloxan compound, as a basal structure, with reactive groups for form oligomers using the basal structure. The residence time of the reaction gas in the reaction space is lengthened by reducing the total flow of the reaction gas in such a way as to form a siloxan polymer film with a low dielectric constant.
摘要:
An insulation film is formed on a semiconductor substrate by vaporizing a silicon-containing hydrocarbon compound to provide a source gas, introducing a reaction gas composed of the source gas and an additive gas such as an inert gas and oxidizing gas to a reaction space of a plasma CVD apparatus. The residence time of the reaction gas in the reaction space is lengthened by reducing the total flow of the reaction gas in such a way as to form a siloxan polymer film with a low dielectric constant.
摘要:
It is an object of this invention to provide a light scanning device capable of suppressing scanning line bending to a low level, which is caused by the arrangement error of a single-element lens serving as an imaging optical element, and an image forming apparatus using the device. In order to achieve the object, according to this invention, an imaging optical system is formed from a single-element lens, and the sectional shapes of the incident and exit surfaces in the main scanning direction are non-arcuated, and the power in the sub scanning direction substantially concentrates on the exit surface. The non-arcuated shape (curvature) of the exit surface in the main scanning direction is so determined as to make the magnification in the sub scanning direction uniform.
摘要:
A scanning optical apparatus includes a first optical element for converting a state of light beam emitted from a light source into another state, a second optical element for converting the light beam from the first optical element into a line image elongated in a main scanning direction, a deflecting element for deflecting and scanning the light beam from the second optical element, and a scanning optical element for forming an image of the light beam deflected by the deflecting element on a surface to be scanned with a spot-like shape. A deflecting surface of the deflecting element and the surface to be scanned are nearly conjugate in a sub scanning cross section. The position where the wave aberration in the sub scanning cross section of the light beam on an optical axis in the deflected light beam becomes least is located on the side of the deflecting element with respect to the surface to be scanned.
摘要:
According to a pressure sensitive sensor and a method of treating a terminal of a pressure sensitive sensor of the invention, a covering portion is formed by a thermoplastic resin material for hot melt molding or a photo-curing resin material cured by absorbing light energy. That is, molding pressure in molding is lower than molding pressure in molding by a general injection molding method. Therefore, a possibility of effecting adverse influence on respective connecting portions of an electrode line, a resistor, a conductive piece and a lead wire by the molding pressure is extremely low and disconnection caused by operating the molding pressure on the connecting portions can reliably be prevented.
摘要:
An actuator for an oscillator which is capable of minimizing the fluctuation of the detection error of the oscillation condition of an electrostatic driven oscillator and shortening rise time of the oscillation amplitude of the electrostatic driven oscillator during starting. An actuator oscillates a drive frame and a detecting frame in the X-direction by outputting the drive signal to an electrode and detects the displacement of the drive frame in the X-direction as the displacement signal. The actuator generates a direct-current voltage component of the drive signal controlled to be increased or decreased based on the detected displacement signal and an alternating voltage component of the drive signal having a constant amplitude to maintain the constancy of the oscillation amplitude of the drive frame based on the detected displacement signal. During starting, the actuator generates an alternating voltage component of the drive signal having a larger amplitude compared to at normal operation condition.
摘要:
A scanning optical device has a light source, a deflector for deflecting light emitted from the light source, and an optical system for guiding the light emitted from the light source onto a surface to be scanned. The scanning optical device incorporates a mechanism for displacing a refraction section or/and a diffraction section of the optical system. A color image forming apparatus incorporates the scanning optical devices and image carrying members corresponding thereto.
摘要:
Indented grooves having a concavo-convex bottom respectively are formed on abutting surfaces of a case body and a case cover. The indented grooves constitute a sealant filling space when case body is engaged with case cover. Sealant filled in the space can have enough contacting area within a limited space with respect to the inner wall surfaces of the indented grooves, perfectly preventing water inflow from outside and obtaining pressure-resistance as well. A wall portion formed to extend in the axial direction prevents inflow of overflowing sealant from the sealant filling space into case body. Thus, without enlarging an overall size of the case, a water-proofing structure with good sealing property can be obtained.
摘要:
A method of fabricating a semiconductor laser includes forming a mask having a stripe opening in a direction on a {100} surface of a first conductivity type substrate, and growing a double-heterojunction structure including a first conductivity type cladding layer, an active layer, and a second conductivity type cladding layer on the {100} surface using the mask, thereby producing a stripe-shaped ridge in which the active layer and the first conductivity type lower cladding layer are covered with the second conductivity type upper cladding layer. The stripe-shaped ridge has an ordinary mesa-shaped cross-section in a direction perpendicular to the stripe direction and a symmetrical hexagonal cross-section in the stripe direction. In this method, since the conventional selective etching for forming the ridge is dispensed with, the processing precision of the ridge is improved. Further, the second conductivity type cladding layer and the active layer grown on the side surfaces of the first conductivity type cladding layer are very thin and have low dopant incorporating efficiencies, so that portions of the first conductivity type cladding layer grown at the side surfaces of the ridge have high resistivity, and reactive current is blocked by these high-resistance portions.
摘要:
In an optical scanning apparatus, there are arranged a light source, a first optical system for converting a light beam emitted from the light source to a convergent light beam, a deflector for deflecting the convergent light beam from the first optical system, and a second optical system for image-forming the convergent light beam deflected by the deflector as a spot on a surface to be scanned. The symmetrical axis of the second optical system with respect to a main-scanning direction is disposed so as to have an inclination relative to a normal to the scanned surface in a main-scan cross section. As a result, aberrations of the optical scanning apparatus, especially degradation of f.theta. characteristics due to backward and forward movement of a mirror surface caused by the rotation of the polygon mirror, which occur in an optical scanning system wherein a convergent, light beam is caused to enter the polygon mirror, are reduced.