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公开(公告)号：US20160351370A1
公开(公告)日：2016-12-01
申请号：US15166274
申请日：2016-05-27
申请人： Sigray, Inc.
CPC分类号： H01J35/08 , G21K1/06 , H01J2235/081 , H01J2235/086 , H01J2235/1204
摘要： A compact source for high brightness x-ray generation is disclosed. The higher brightness is achieved through electron beam bombardment of multiple regions aligned with each other to achieve a linear accumulation of x-rays. This may be achieved through the use of x-ray targets that comprise microstructures of x-ray generating materials fabricated in close thermal contact with a substrate with high thermal conductivity. This allows heat to be more efficiently drawn out of the x-ray generating material, and allows bombardment of the x-ray generating material with higher electron density and/or higher energy electrons, leading to greater x-ray brightness. The orientation of the microstructures allows the use of a take-off angle at or near 0°, allowing the accumulation of x-rays from several microstructures to be aligned and be used to form a beam in the shape of an annular cone.
摘要翻译： 公开了用于高亮度x射线产生的紧凑源。 通过彼此对准的多个区域的电子束轰击实现较高的亮度，以实现x射线的线性积累。 这可以通过使用包括与具有高导热性的基板紧密热接触制造的x射线产生材料的微结构的x射线靶来实现。 这使得能够更有效地从X射线产生材料中引出热量，并且允许以较高电子密度和/或更高能量的电子轰击x射线产生材料，导致更大的x射线亮度。 微结构的方向允许使用在0°或接近0°的起飞角度，允许来自几个微结构的X射线的积聚被对准并且用于形成环形锥形的束。
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公开(公告)号：US20160320320A1
公开(公告)日：2016-11-03
申请号：US15173711
申请日：2016-06-05
申请人： Sigray, Inc.
发明人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz
IPC分类号： G01N23/20
CPC分类号： G01N23/20075 , A61B6/4007 , A61B6/4291 , A61B6/484 , A61B6/508 , G01N23/201 , G01N23/223 , G21K1/02 , G21K2207/005 , H01J35/08 , H01J2235/086 , H01J2235/1291
摘要： This invention discloses a method and apparatus for x-ray techniques using structured x-ray illumination for examining material properties of an object. In particular, an object with one or more regions of interest (ROIs) having a particular shape, size, and pattern may be illuminated with an x-ray beam whose cross sectional beam profile corresponds to the shape, size and pattern of the ROIs, so that the x-rays of the beam primarily interact only with the ROIs. This allows a greater x-ray flux to be used, enhancing the signal from the ROI itself, while reducing unwanted signals from regions not in the ROI, improving signal-to-noise ratios and/or measurement throughputThis may be used with a number of x-ray measurement techniques, including x-ray fluorescence (XRF), x-ray diffraction (XRD), small angle x-ray scattering (SAXS), x-ray absorption fine-structure spectroscopy (XAFS), x-ray near edge absorption spectroscopy, and x-ray emission spectroscopy.
摘要翻译： 这可以与许多x射线测量技术一起使用，包括x射线荧光（XRF），x射线衍射（XRD），小角度X射线散射（SAXS），x射线吸收精细结构光谱学 XAFS），x射线近边缘吸收光谱和X射线发射光谱。
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公开(公告)号：US20160066870A1
公开(公告)日：2016-03-10
申请号：US14943445
申请日：2015-11-17
申请人： Sigray, Inc.
IPC分类号： A61B6/00
CPC分类号： A61B6/484 , A61B6/032 , A61B6/035 , A61B6/4007 , A61B6/4035 , A61B6/4291 , A61B6/502 , A61B6/508 , G21K2207/005 , H01J35/08 , H01J35/12
摘要： An x-ray interferometric imaging system in which the x-ray source comprises a target having a plurality of structured coherent sub-sources of x-rays embedded in a thermally conducting substrate. The structures may be microstructures with lateral dimensions measured on the order of microns, and in some embodiments, the structures are arranged in a regular array.The system additionally comprises a beam-splitting grating G1 that establishes a Talbot interference pattern, which may be a π or π/2 phase-shifting grating, an x-ray detector to convert two-dimensional x-ray intensities into electronic signals, and in some embodiments, also comprises an additional analyzer grating G2 that may be placed in front of the detector to form additional interference fringes. Systems may also include a means to translate and/or rotate the relative positions of the x-ray source and the object under investigation relative to the beam splitting grating and/or the analyzer grating for tomography applications.
摘要翻译： 一种X射线干涉成像系统，其中x射线源包括具有嵌入在导热衬底中的多个X射线结构化相干子源的靶。 该结构可以是具有在微米数量级上测量的横向尺寸的微结构，并且在一些实施例中，结构以正规阵列排列。 该系统还包括分束光栅G1，其形成Talbot干涉图案，其可以是“ 或＆pgr / / 2移相光栅，X射线检测器将二维x射线强度转换为电子信号，并且在一些实施例中还包括可以放置在检测器前面的附加分析器光栅G2 形成额外的干涉条纹。 系统还可以包括相对于用于层析成像应用的分束光栅和/或分析器光栅来平移和/或旋转x射线源和被研究对象的相对位置的装置。
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公开(公告)号：US20150357069A1
公开(公告)日：2015-12-10
申请号：US14636994
申请日：2015-03-03
申请人： Sigray, Inc.
发明人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz
IPC分类号： G21K1/06 , G21K1/02 , G01N23/207
CPC分类号： G01N23/2076 , G01N23/085 , G21K2201/061 , G21K2201/062 , G21K2201/064 , H01J35/08 , H01J35/14 , H01J2235/081 , H01J2235/086
摘要： This disclosure presents systems for x-ray absorption fine structure (XAFS) measurements that have x-ray flux and flux density several orders of magnitude greater than existing compact systems. These are useful for laboratory or field applications of x-ray absorption near-edge spectroscopy (XANES) or extended x-ray fine absorption structure (EXFAS) spectroscopy.The higher brightness is achieved by using designs for x-ray targets that comprise a number of aligned microstructures of x-ray generating materials fabricated in close thermal contact with a substrate having high thermal conductivity. This allows for bombardment with higher electron density and/or higher energy electrons, leading to greater x-ray brightness and high flux.The high brightness x-ray source is then coupled to an x-ray reflecting optical system to collimate the x-rays, and a monochromator, which selects the exposure energy. Absorption spectra of samples using the high flux monochromatic x-rays can be made using standard detection techniques.
摘要翻译： 本公开提供了x射线吸收精细结构（XAFS）测量的系统，其具有比现有紧凑系统大几个数量级的x射线通量和通量密度。 这些对于x射线吸收近边缘光谱（XANES）或扩展X射线精细吸收结构（EXFAS）光谱的实验室或现场应用是有用的。 通过使用X射线靶的设计来实现更高的亮度，所述X射线靶包括与具有高导热性的基底紧密热接触制造的x射线产生材料的多个对准微结构。 这允许用更高电子密度和/或更高能量的电子进行轰击，导致更大的x射线亮度和高通量。 然后将高亮度x射线源耦合到X射线反射光学系统以准直x射线，以及选择曝光能量的单色仪。 使用高通量单色x射线的样品的吸收光谱可以使用标准检测技术进行。
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公开(公告)号：US20150247811A1
公开(公告)日：2015-09-03
申请号：US14634834
申请日：2015-03-01
申请人： Sigray, Inc.
发明人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz
IPC分类号： G01N23/223 , G01B15/02
CPC分类号： G01N23/223 , G01B15/02 , G01N23/085 , G01N23/2076 , G21K1/06 , G21K2201/061 , G21K2201/064 , H01J35/08 , H01J35/14 , H01J2235/081 , H01J2235/086
摘要： This disclosure presents systems for total reflection x-ray fluorescence measurements that have x-ray flux and x-ray flux density several orders of magnitude greater than existing x-ray technologies. These may therefore useful for applications such as trace element detection and/or for total-reflection fluorescence analysis.The higher brightness is achieved in part by using designs for x-ray targets that comprise a number of microstructures of one or more selected x-ray generating materials fabricated in close thermal contact with a substrate having high thermal conductivity. This allows for bombardment of the targets with higher electron density or higher energy electrons, which leads to greater x-ray brightness and therefore greater x-ray flux.The high brightness/high flux source may then be coupled to an x-ray reflecting optical system, which can focus the high flux x-rays to a spots that can be as small as one micron, leading to high flux density.
摘要翻译： 本公开提供了具有x射线通量和x射线通量密度比现有x射线技术大几个数量级的全反射x射线荧光测量的系统。 因此，这些可用于诸如微量元素检测和/或全反射荧光分析的应用。 较高的亮度部分地通过使用x射线靶的设计来实现，所述X射线靶包括与具有高导热性的衬底紧密热接触制造的一个或多个选定的x射线产生材料的多个微结构。 这允许用更高电子密度或更高能量电子轰击靶，这导致更大的x射线亮度和因此更大的x射线通量。 然后，高亮度/高通量源可以耦合到x射线反射光学系统，其可将高通量x射线聚焦到可以小至1微米的点，导致高通量密度。
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26.发明公开公开(公告)号：US20230293128A1
公开(公告)日：2023-09-21
申请号：US18176760
申请日：2023-03-01
申请人： Sigray, Inc.
发明人： Wenbing Yun , David John Vine , Sylvia Jia Yun Lewis , Sheraz Gul , Janos Kirz
IPC分类号： A61B6/00
CPC分类号： A61B6/4266 , A61B6/4241
摘要： An x-ray computed laminography imaging system includes a transmission x-ray source configured to generate x-rays, at least some of the x-rays propagate along an x-ray propagation axis through a region of interest of an object. The system further includes a stage assembly configured to rotate the object about a rotation axis extending through the region of interest. The system further includes at least one x-ray detector configured to intercept at least some of the x-rays propagating along the x-ray propagation axis. The at least one x-ray detector includes a scintillator, at least one optical lens, and two-dimensional pixelated imaging circuitry. The scintillator has a thickness that is substantially parallel to the x-ray propagation axis and the at least one optical lens is configured to receive visible light from the scintillator and to focus the visible light into a two-dimensional image. The at least one optical lens has a depth of focus, and the thickness of the scintillator is in a range of 1 to 20 times the depth of focus.
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公开(公告)号：US11686692B2
公开(公告)日：2023-06-27
申请号：US17540608
申请日：2021-12-02
申请人： Sigray, Inc.
发明人： David Vine , Wenbing Yun , Janos Kirz , Sheraz Gul , Sylvia Jia Yun Lewis , Richard Ian Spink
IPC分类号： G01N23/046 , G01N23/083
CPC分类号： G01N23/046 , G01N23/083 , G01N2223/204 , G01N2223/309
摘要： A three-dimensional x-ray imaging system includes at least one detector and an x-ray source including an x-ray transmissive vacuum window. The x-ray source is configured to produce diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending through a region of interest of an object to the at least one detector. The diverging x-rays have propagation paths within an angular divergence angle greater than 1 degree centered on the x-ray propagation axis. The system further includes at least one sample motion stage configured to rotate the object about a rotation axis. The system further includes a sample mount configured to hold the object and comprises a first portion in the propagation paths of at least some of the diverging x-rays and having an x-ray transmission greater than 30% for x-rays having energies greater than 50% of a maximum x-ray energy of an x-ray spectrum of the diverging x-rays.
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公开(公告)号：US20220082515A1
公开(公告)日：2022-03-17
申请号：US17476355
申请日：2021-09-15
申请人： Sigray, Inc.
IPC分类号： G01N23/223 , G01N23/083 , G01N23/2273
摘要： A system and method for analyzing a three-dimensional structure of a sample includes generating a first x-ray beam having a first energy bandwidth less than 20 eV at full-width-at-half maximum and a first mean x-ray energy that is in a range of 1 eV to 1 keV higher than an absorption edge energy of a first atomic element of interest, and that is collimated to have a collimation angular range less than 7 mrad in at least one direction perpendicular to a propagation direction of the first x-ray beam; irradiating the sample with the first x-ray beam at a plurality of incidence angles relative to a substantially flat surface of the sample, the incidence angles of the plurality of incidence angles in a range of 3 mrad to 400 mrad; and simultaneously detecting a reflected portion of the first x-ray beam from the sample and detecting x-ray fluorescence x-rays and/or photoelectrons from the sample.
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公开(公告)号：US20210356412A1
公开(公告)日：2021-11-18
申请号：US17320852
申请日：2021-05-14
申请人： Sigray, Inc.
IPC分类号： G01N23/223 , G01N23/085
摘要： An apparatus includes a crystal analyzer positioned relative to an x-ray source on a Rowland circle in a tangential plane and having a Rowland circle radius (R). The crystal analyzer includes crystal planes curved along at least one direction within at least the tangential plane with a radius of curvature substantially equal to twice the Rowland circle radius (2R). The crystal planes are configured to receive x-rays from the x-ray source and to disperse the received x-rays according to Bragg's law. The apparatus further includes a spatially resolving detector configured to receive at least a portion of the dispersed x-rays. The spatially resolving detector includes a plurality of x-ray detection elements having a tunable first x-ray energy and/or a tunable second x-ray energy. The plurality of x-ray detection elements are configured to measure received dispersed x-rays having x-ray energies below the first x-ray energy while suppressing measurements of the received dispersed x-rays above the first x-ray energy and/or to measure the received dispersed x-rays having x-ray energies above the second x-ray energy while suppressing measurements of the received dispersed x-rays below the second x-ray energy. The first and second x-ray energies are tunable in a range of 1.5 keV to 30 keV.
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公开(公告)号：US10991538B2
公开(公告)日：2021-04-27
申请号：US16866953
申请日：2020-05-05
申请人： Sigray, Inc.
摘要： An x-ray target, x-ray source, and x-ray system are provided. The x-ray target includes a thermally conductive substrate comprising a surface and at least one structure on or embedded in at least a portion of the surface. The at least one structure includes a thermally conductive first material in thermal communication with the substrate. The first material has a length along a first direction parallel to the portion of the surface in a range greater than 1 millimeter and a width along a second direction parallel to the portion of the surface and perpendicular to the first direction. The width is in a range of 0.2 millimeter to 3 millimeters. The at least one structure further includes at least one layer over the first material. The at least one layer includes at least one second material different from the first material. The at least one layer has a thickness in a range of 2 microns to 50 microns. The at least one second material is configured to generate x-rays upon irradiation by electrons.
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