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公开(公告)号:US20080277005A1
公开(公告)日:2008-11-13
申请号:US11685654
申请日:2007-03-13
申请人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake , Markus M. Enzelberger , Mark L. Adams , Carl L. Hansen
发明人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake , Markus M. Enzelberger , Mark L. Adams , Carl L. Hansen
IPC分类号: F15C3/00
CPC分类号: B05D3/04 , B01J2219/00355 , B01J2219/00378 , B01J2219/00396 , B01J2219/00398 , B01J2219/00439 , B01J2219/005 , B01J2219/00527 , B01J2219/00605 , B01J2219/00612 , B01J2219/00621 , B01J2219/00659 , B01J2219/00707 , B01J2219/00722 , B01J2219/00725 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L7/54 , B01L9/527 , B01L2200/025 , B01L2200/027 , B01L2200/0605 , B01L2200/10 , B01L2300/0681 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2300/14 , B01L2300/18 , B01L2400/046 , B01L2400/0481 , B01L2400/06 , B01L2400/0655 , B01L2400/0688 , B32B2037/1081 , B65B31/00 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , C12Q1/6832 , C12Q1/6874 , C30B29/54 , F04B43/043 , F15C1/06 , F15C3/00 , F15C5/00 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0084 , F16K2099/0094 , Y10T137/0324 , Y10T137/0379 , Y10T137/0424 , Y10T137/206 , Y10T137/2082 , Y10T137/2164 , Y10T137/2169 , Y10T137/2174 , Y10T137/2202 , Y10T137/2224 , Y10T137/3084 , Y10T137/7837 , Y10T137/86027 , Y10T156/10 , Y10T428/24479 , Y10T428/24612 , C12Q2535/125
摘要: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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公开(公告)号:US20080236669A1
公开(公告)日:2008-10-02
申请号:US11932171
申请日:2007-10-31
申请人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake , Markus M. Enzelberger , Mark L. Adams , Carl L. Hansen
发明人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake , Markus M. Enzelberger , Mark L. Adams , Carl L. Hansen
CPC分类号: B05D3/04 , B01J2219/00355 , B01J2219/00378 , B01J2219/00396 , B01J2219/00398 , B01J2219/00439 , B01J2219/005 , B01J2219/00527 , B01J2219/00605 , B01J2219/00612 , B01J2219/00621 , B01J2219/00659 , B01J2219/00707 , B01J2219/00722 , B01J2219/00725 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L7/54 , B01L9/527 , B01L2200/025 , B01L2200/027 , B01L2200/0605 , B01L2200/10 , B01L2300/0681 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2300/14 , B01L2300/18 , B01L2400/046 , B01L2400/0481 , B01L2400/06 , B01L2400/0655 , B01L2400/0688 , B32B2037/1081 , B65B31/00 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , C12Q1/6832 , C12Q1/6874 , C30B29/54 , F04B43/043 , F15C1/06 , F15C3/00 , F15C5/00 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0084 , F16K2099/0094 , Y10T137/0324 , Y10T137/0379 , Y10T137/0424 , Y10T137/206 , Y10T137/2082 , Y10T137/2164 , Y10T137/2169 , Y10T137/2174 , Y10T137/2202 , Y10T137/2224 , Y10T137/3084 , Y10T137/7837 , Y10T137/86027 , Y10T156/10 , Y10T428/24479 , Y10T428/24612 , C12Q2535/125
摘要: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
摘要翻译: 一种制造弹性体结构的方法,包括:在第一微加工模具的顶部上形成第一弹性体层,所述第一微加工模具具有形成沿所述第一弹性体层的底表面延伸的第一凹槽的第一凸起突起; 在第二微加工模具的顶部上形成第二弹性体层,所述第二微加工模具具有第二凸起突起,所述第二凸起突起形成沿所述第二弹性体层的底表面延伸的第二凹槽; 将第二弹性体层的底表面粘合到第一弹性体层的顶表面上,使得控制通道在第一和第二弹性体层之间的第二凹部中形成; 以及将第一弹性体层定位在平面基底的顶部上,使得流动通道在第一弹性体层和平面基底之间的第一凹部中形成。
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公开(公告)号:US20080220216A1
公开(公告)日:2008-09-11
申请号:US11932395
申请日:2007-10-31
申请人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake , Markus M. Enzelberger , Mark L. Adams , Carl L. Hansen
发明人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake , Markus M. Enzelberger , Mark L. Adams , Carl L. Hansen
CPC分类号: B05D3/04 , B01J2219/00355 , B01J2219/00378 , B01J2219/00396 , B01J2219/00398 , B01J2219/00439 , B01J2219/005 , B01J2219/00527 , B01J2219/00605 , B01J2219/00612 , B01J2219/00621 , B01J2219/00659 , B01J2219/00707 , B01J2219/00722 , B01J2219/00725 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L7/54 , B01L9/527 , B01L2200/025 , B01L2200/027 , B01L2200/0605 , B01L2200/10 , B01L2300/0681 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2300/14 , B01L2300/18 , B01L2400/046 , B01L2400/0481 , B01L2400/06 , B01L2400/0655 , B01L2400/0688 , B32B2037/1081 , B65B31/00 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , C12Q1/6832 , C12Q1/6874 , C30B29/54 , F04B43/043 , F15C1/06 , F15C3/00 , F15C5/00 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0084 , F16K2099/0094 , Y10T137/0324 , Y10T137/0379 , Y10T137/0424 , Y10T137/206 , Y10T137/2082 , Y10T137/2164 , Y10T137/2169 , Y10T137/2174 , Y10T137/2202 , Y10T137/2224 , Y10T137/3084 , Y10T137/7837 , Y10T137/86027 , Y10T156/10 , Y10T428/24479 , Y10T428/24612 , C12Q2535/125
摘要: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
摘要翻译: 一种制造弹性体结构的方法,包括:在第一微加工模具的顶部上形成第一弹性体层,所述第一微加工模具具有形成沿所述第一弹性体层的底表面延伸的第一凹槽的第一凸起突起; 在第二微加工模具的顶部上形成第二弹性体层,所述第二微加工模具具有第二凸起突起,所述第二凸起突起形成沿所述第二弹性体层的底表面延伸的第二凹槽; 将第二弹性体层的底表面粘合到第一弹性体层的顶表面上,使得控制通道在第一和第二弹性体层之间的第二凹部中形成; 以及将第一弹性体层定位在平面基底的顶部上,使得流动通道在第一弹性体层和平面基底之间的第一凹部中形成。
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公开(公告)号:US20080210321A1
公开(公告)日:2008-09-04
申请号:US11934212
申请日:2007-11-02
申请人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
发明人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
IPC分类号: F15C1/06
CPC分类号: F15C1/06 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L2300/0861 , B01L2300/0887 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , C12Q1/6874 , F04B43/043 , F16K1/20 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0048 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/2224 , Y10T137/87981 , C12Q2535/125
摘要: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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公开(公告)号:US06408878B1
公开(公告)日:2002-06-25
申请号:US09796666
申请日:2001-02-28
申请人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
发明人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
IPC分类号: F16K1120
摘要: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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公开(公告)号:US08550119B2
公开(公告)日:2013-10-08
申请号:US11932552
申请日:2007-10-31
申请人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake , Markus Enzelberger , Mark L. Adams , Carl L. Hansen
发明人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake , Markus Enzelberger , Mark L. Adams , Carl L. Hansen
IPC分类号: F15C3/00 , F16K31/126
CPC分类号: F15C3/00 , B01J2219/00355 , B01J2219/00378 , B01J2219/00396 , B01J2219/00398 , B01J2219/00439 , B01J2219/005 , B01J2219/00527 , B01J2219/00605 , B01J2219/00659 , B01J2219/00707 , B01J2219/00722 , B01J2219/00725 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L7/54 , B01L9/527 , B01L2200/025 , B01L2200/027 , B01L2200/0605 , B01L2200/10 , B01L2300/0681 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2300/14 , B01L2300/18 , B01L2400/0481 , B01L2400/0655 , B01L2400/0688 , B32B2037/1081 , F04B19/006 , F04B43/043 , F16K99/0001 , F16K99/0026 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0084 , Y10T137/2202 , Y10T137/2224 , Y10T137/87885
摘要: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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公开(公告)号:US20120328834A1
公开(公告)日:2012-12-27
申请号:US13360261
申请日:2012-01-27
申请人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
发明人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
IPC分类号: B32B3/00
CPC分类号: B29C51/00 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , B33Y80/00 , B81B5/00 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , B81C2201/034 , C12Q1/6874 , F04B43/043 , F15C1/06 , F15C5/00 , F16K11/20 , F16K13/00 , F16K31/126 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0048 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/0491 , Y10T137/0497 , Y10T137/2224 , Y10T137/87249 , Y10T156/10 , Y10T428/24479 , Y10T428/24744 , C12Q2535/125
摘要: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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公开(公告)号:US08002933B2
公开(公告)日:2011-08-23
申请号:US11934235
申请日:2007-11-02
申请人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
发明人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
IPC分类号: F15C1/06
CPC分类号: F15C1/06 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L2300/0861 , B01L2300/0887 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , C12Q1/6874 , F04B43/043 , F16K1/20 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0048 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/2224 , Y10T137/87981 , C12Q2535/125
摘要: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
摘要翻译: 一种制造弹性体结构的方法,包括:在第一微加工模具的顶部上形成第一弹性体层,所述第一微加工模具具有形成沿所述第一弹性体层的底表面延伸的第一凹槽的第一凸起突起; 在第二微加工模具的顶部上形成第二弹性体层,所述第二微加工模具具有第二凸起突起,所述第二凸起突起形成沿所述第二弹性体层的底表面延伸的第二凹槽; 将第二弹性体层的底表面粘合到第一弹性体层的顶表面上,使得控制通道在第一和第二弹性体层之间的第二凹部中形成; 以及将第一弹性体层定位在平面基底的顶部上,使得流动通道在第一弹性体层和平面基底之间的第一凹部中形成。
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公开(公告)号:US20090151422A1
公开(公告)日:2009-06-18
申请号:US11932263
申请日:2007-10-31
申请人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake , Markus M. Enzelberger , Mark L. Adams , Carl L. Hansen
发明人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake , Markus M. Enzelberger , Mark L. Adams , Carl L. Hansen
CPC分类号: B05D3/04 , B01J2219/00355 , B01J2219/00378 , B01J2219/00396 , B01J2219/00398 , B01J2219/00439 , B01J2219/005 , B01J2219/00527 , B01J2219/00605 , B01J2219/00612 , B01J2219/00621 , B01J2219/00659 , B01J2219/00707 , B01J2219/00722 , B01J2219/00725 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L7/54 , B01L9/527 , B01L2200/025 , B01L2200/027 , B01L2200/0605 , B01L2200/10 , B01L2300/0681 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2300/14 , B01L2300/18 , B01L2400/046 , B01L2400/0481 , B01L2400/06 , B01L2400/0655 , B01L2400/0688 , B32B2037/1081 , B65B31/00 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , C12Q1/6832 , C12Q1/6874 , C30B29/54 , F04B43/043 , F15C1/06 , F15C3/00 , F15C5/00 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0084 , F16K2099/0094 , Y10T137/0324 , Y10T137/0379 , Y10T137/0424 , Y10T137/206 , Y10T137/2082 , Y10T137/2164 , Y10T137/2169 , Y10T137/2174 , Y10T137/2202 , Y10T137/2224 , Y10T137/3084 , Y10T137/7837 , Y10T137/86027 , Y10T156/10 , Y10T428/24479 , Y10T428/24612 , C12Q2535/125
摘要: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
摘要翻译: 一种制造弹性体结构的方法,包括:在第一微加工模具的顶部上形成第一弹性体层,所述第一微加工模具具有形成沿所述第一弹性体层的底表面延伸的第一凹槽的第一凸起突起; 在第二微加工模具的顶部上形成第二弹性体层,所述第二微加工模具具有第二凸起突起,所述第二凸起突起形成沿所述第二弹性体层的底表面延伸的第二凹槽; 将第二弹性体层的底表面粘合到第一弹性体层的顶表面上,使得控制通道在第一和第二弹性体层之间的第二凹部中形成; 以及将第一弹性体层定位在平面基底的顶部上,使得流动通道在第一弹性体层和平面基底之间的第一凹部中形成。
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公开(公告)号:US07494555B2
公开(公告)日:2009-02-24
申请号:US10945737
申请日:2004-09-20
申请人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
发明人: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
IPC分类号: B32B37/00
CPC分类号: B29C51/00 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , B33Y80/00 , B81B5/00 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , B81C2201/034 , C12Q1/6874 , F04B43/043 , F15C1/06 , F15C5/00 , F16K11/20 , F16K13/00 , F16K31/126 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0048 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/0491 , Y10T137/0497 , Y10T137/2224 , Y10T137/87249 , Y10T156/10 , Y10T428/24479 , Y10T428/24744 , C12Q2535/125
摘要: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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