摘要:
Development efficiency and mass production efficiency of a semiconductor chip (LSI) is improved, whereby the LSI on which an integrated circuit is formed has plural pad parts connecting the integrated circuit with an external circuit. The pad part is provided with a first junction consisting of a window formed in the protective film and the pad exposed from the window, and a second junction consisting of a window formed in the protective film and a bump deposited on the pad exposed from the window. When it is required that the LSI is to be connected with an external circuit by wire bonding, the first junction is connected with the external circuit using a wire. When it is required to connect the LSI with an external circuit by the TAB method or the COG method, the second junction is directly connected to the external circuit.
摘要:
To form a film by ionized sputtering with good bottom coverage for holes with a high aspect ratio, and to simplify the structure inside and out of the sputter chamber, a target 2 is provided inside a sputter chamber 1 equipped with an exhaust system 11 and is sputtered by a sputtering power source 3. The released sputter particles are made to arrive at a substrate 50 to form a film. The sputtering power source 3 sends electric power of at least 5 W/cm2 to a target 2, and the sputter particles are ionized in a plasma formed by this electric power alone. A cylindrical shield 6 may be provided between the target 2 and the substrate holder 5 to restrict the plasma formation space, and an electric field establishment means 8 may set up an electric field for extracting the ionized sputter particles from the plasma P and directing them at the substrate 50.
摘要翻译:为了通过电离溅射形成具有高纵横比的孔的良好底部覆盖的膜,并且为了简化溅射室内部和外部的结构,在装备有排气系统11的溅射室1的内部设置靶2,并且 通过溅射电源3溅射。释放的溅射颗粒被制成到达基板50以形成膜。 溅射电源3将至少5W / cm 2的电力发送到目标2,并且溅射颗粒在仅由该电力形成的等离子体中离子化。 可以在目标2和基板保持器5之间设置圆柱形屏蔽件6以限制等离子体形成空间,并且电场建立装置8可以设置用于从等离子体P中提取离子化的溅射颗粒的电场并将它们引导到 基板50。
摘要:
A plasma enhanced CVD apparatus includes a processing chamber, a pumping system for evacuating the processing chamber, a gas inlet system for introducing a source gas, and a plasma generating electrode provided in the processing chamber for depositing a film on a substrate in the processing chamber by plasma generated by electrical power supplied to the plasma generating electrode; the plasma generating electrode has two terminals, one of the terminals is connected to a radio frequency power source and other of the terminals is grounded through an electrode potential controlling system; and the processing chamber is grounded through an inner wall potential controlling system. The present invention is further directed to a plasma enhanced CVD process, a dry etching apparatus, and a dry etch process.
摘要:
A modular plug and cover therefor includes a plug body having an insert portion and a rear portion having an indentation. The rear portion receives a cable for connection to the insert portion. A cover for the modular plug is of a substantially rectangular configuration having an open end fitting over the rear portion of the plug body. The cover portion is engageable with the plug body such that an enclosed space is defined between an end of the rear portion of the plug and an opposing inner wall of the cover. The cover is further provided with a tapered projection on an inner surface thereof which corresponds to the location of the indentation and an access opening through which a cable connected to the modular plug is passed. The cover portion may also be engaged with the plug in an inverted state to change the direction in which the cable is oriented.
摘要:
A silver halide photographic light-sensitive material having a support with at least one silver halide emulsion layer is provided. The silver halide emulsion layer containing in combination at least one yellow dye image-forming coupler of Formula I and at least one high-boiling organic solvent of Formula II to reduce the light discoloration of a yellow dye image.
摘要:
A silver halide photographic material having one or more silver halide emulsion layers formed on a reflective support is disclosed, wherein at least one of the silver halide emulsion layers contains at least one cyan coupler of formula (I) dispersed therein with the aid of at least one high-boiling organic solvent having a dielectric constant of 6.1 or more, and wherein at least one photographic layer contains at least one dye of formula (II) and/or formula (III): ##STR1## wherein R.sub.1 is a straight- or branched-chain alkyl group having 2 to 4 carbon atoms; R.sub.2 is a ballast group; and X is a hydrogen atom or a group capable of leaving upon coupling reaction with the oxidized product of a color developing agent; ##STR2## wherein R.sub.3 and R.sub.5 are each a hydrogen atom, an alkyl group or an aryl group; R.sub.4 and R.sub.6 are each an aryl group or a hetero ring having at least one sulfonic acid group or carboxyl group either directly or via an alkylene group having 1 to 4 carbon atoms; and n is an integer of 0, 1 or 2; ##STR3## wherein R.sub.7, R.sub.10, R.sub.11 and R.sub.14 are each a hydrogen atom, a hydroxyl group, --OR (wherein R is alkyl or aryl), ##STR4## (wherein R' and R" are each a hydrogen atom or an alkyl or aryl group having at least one sulfonic acid group or carboxyl group); R.sub.8, R.sub.9, R.sub.12 and R.sub.13 are each a hydrogen atom, a sulfonic acid group, a carboxyl group, or an alkyl or aryl group having at least one sulfonic acid group or carboxyl group.
摘要:
Ultrathin membranes for separating substances are obtained by exposing shaped articles comprising a water-soluble polymer or a mixture of a water-soluble polymer and water-insoluble polymer to a plasma of a gas selected from helium, argon, nitrogen, hydrogen, oxygen, carbon monoxide, carbon dioxide, ammonia, a hydrocarbon having 1 to 10 carbon atoms, an epoxide having 2 to 10 carbon atoms, or an alkylamine, or a mixture of these substances to crosslink the surface layer, and then washing the exposed articles with water to remove the unreacted portions. The membrane exhibits outstanding performance characteristics when used in the processes for separating or concentrating substances, such as reverse osmosis, ultrafiltration, and the like.
摘要:
Paper feed mechanism of a printer is disclosed for exactly transmitting rotative force of a drive shaft which interlocks a drive mechanism to a sprocket wheel which is provided for feeding a printing paper without play, and for locating and detaining the sprocket wheel at a desired position by an easy operation.The above-said mechanism comprises a disc which is fixed to the sprocket wheel, a detaining knob which has a shaft hole for inserting the drive shaft and fitted rotatably to the disc via a pair of snap shafts, a C-shaped spring, one end of which is fixed to the disc, the other end to the detaining knob, for turning each of them conversely.By these provisions, the inner circumference of the shaft hole which is provided at the center of the detaining knob comes into close contact with the drive shaft by the spreading force of the above-said C-shaped spring, therefore, the play between the shaft hole and the drive shaft is excluded to feed the printing paper exactly by the sprocket wheel and an improved printing quality can be obtained. Further to that, the sprocket wheel can easily be detained at desired position by turning the detaining knob against the force of the C-shaped spring.
摘要:
A new and novel dot printer for printing characters of dot matrix or the like by sliding a slide member in the direction of a row, said slide member being provided with a plurality of dot printing elements which are arranged in line thereon at a predetermined distance, wherein plate springs are provided on both ends of the slide member as a guide, support and return mechanism so that guide, support as well as return power are assured for said slide member.
摘要:
A method for the preparation of semipermeable membranes is disclosed which comprises exposing porous shaped articles of polyacrylonitrile or copolymers containing acrylonitrile in an amount of more than 40% by mole to a plasma consisting essentially of a gaseous organic compound or the mixture of said gaseous organic compound and an inert gas at room temperature under a pressure of 0.01 to 10 Torr.