Acoustically coupled thin-film resonators
    22.
    发明申请
    Acoustically coupled thin-film resonators 有权
    声耦合薄膜谐振器

    公开(公告)号:US20060091978A1

    公开(公告)日:2006-05-04

    申请号:US10980562

    申请日:2004-11-03

    Abstract: Acoustically coupled resonators include a first and a second acoustic resonator. Both the first and second acoustic resonators include a first electrode, a layer of piezoelectric material, and a second electrode. The first electrode is adjacent a first surface of the layer of piezoelectric material. The second electrode is adjacent a second surface of the layer of piezoelectric material. At least the second electrode has an edge that is tapered.

    Abstract translation: 声耦合谐振器包括第一和第二声谐振器。 第一和第二声谐振器都包括第一电极,压电材料层和第二电极。 第一电极邻近压电材料层的第一表面。 第二电极邻近压电材料层的第二表面。 至少第二电极具有渐缩的边缘。

    ACOUSTIC RESONATOR PERFORMANCE ENHANCEMENT USING FILLED RECESS REGION
    23.
    发明申请
    ACOUSTIC RESONATOR PERFORMANCE ENHANCEMENT USING FILLED RECESS REGION 有权
    使用填充区域的声学谐振器性能提升

    公开(公告)号:US20080060181A1

    公开(公告)日:2008-03-13

    申请号:US11938078

    申请日:2007-11-09

    Abstract: An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a fill region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The fill region is in one of the first and second electrodes.

    Abstract translation: 声谐振器,其包括基板,第一电极,压电材料层,第二电极和填充区域。 第一电极与衬底相邻,并且第一电极具有外周边。 压电层与第一电极相邻。 第二电极邻近压电层,第二电极具有外周。 填充区域位于第一和第二电极之一中。

    Electronic device on substrate with cavity and mitigated parasitic leakage path
    24.
    发明申请
    Electronic device on substrate with cavity and mitigated parasitic leakage path 失效
    衬底上的电子器件具有空腔和减轻的寄生泄漏路径

    公开(公告)号:US20070236310A1

    公开(公告)日:2007-10-11

    申请号:US11373434

    申请日:2006-03-10

    CPC classification number: H03H9/02118 H03H3/02 H03H9/02125 H03H9/172

    Abstract: An electronic device. The electronic device includes a first electrode and a coating layer. The electronic device is fabricated on a substrate; the substrate has a cavity created in a top surface of the substrate; and the first electrode is electrically coupled to the substrate. The coating layer coats at least part of a substrate surface in the cavity, and the presence of the coating layer results in a mitigation of at least one parasitic leakage path between the first electrode and an additional electrode fabricated on the substrate.

    Abstract translation: 电子设备。 电子器件包括第一电极和涂层。 电子器件制造在衬底上; 衬底具有在衬底的顶表面中产生的空腔; 并且第一电极电耦合到衬底。 涂层涂覆在空腔中的基底表面的至少一部分,并且涂层的存在导致在第一电极和在基底上制造的附加电极之间的至少一个寄生泄漏路径的减轻。

    Acoustically coupled resonators and method of making the same
    27.
    发明申请
    Acoustically coupled resonators and method of making the same 有权
    声耦合谐振器及其制作方法

    公开(公告)号:US20060232361A1

    公开(公告)日:2006-10-19

    申请号:US11109596

    申请日:2005-04-18

    Abstract: An apparatus includes a substrate with a cavity and a two-stage resonator filter fabricated over the cavity. The two-stage resonator filter includes a first stage and a second stage. The first stage includes a first resonator and a second resonator, the second resonator acoustically coupled to the first resonator. The second stage includes a third resonator and a fourth resonator, the fourth resonator acoustically coupled to the third resonator. The second resonator and the third resonators are electrically coupled. A decoupling layer couples the first resonator and the second resonator. The decoupling layer extends between the third resonator and the fourth resonator. The first resonator and the fourth resonator are above the substrate. The decoupling layer is above the first resonator and the fourth resonator. The second resonator and the third resonators are above the decoupling layer.

    Abstract translation: 一种装置包括具有空腔的衬底和在空腔上制造的两级谐振器滤波器。 两级谐振滤波器包括第一级和第二级。 第一级包括第一谐振器和第二谐振器,第二谐振器声耦合到第一谐振器。 第二级包括第三谐振器和第四谐振器,第四谐振器声耦合到第三谐振器。 第二谐振器和第三谐振器电耦合。 去耦层耦合第一谐振器和第二谐振器。 解耦层在第三谐振器和第四谐振器之间延伸。 第一谐振器和第四谐振器在衬底之上。 去耦层位于第一谐振器和第四谐振器之上。 第二谐振器和第三谐振器在去耦层之上。

    Acoustic resonator performance enhancement using filled recessed region
    28.
    发明申请
    Acoustic resonator performance enhancement using filled recessed region 有权
    使用填充凹陷区域的声谐振器性能提升

    公开(公告)号:US20060226932A1

    公开(公告)日:2006-10-12

    申请号:US11100311

    申请日:2005-04-06

    Abstract: An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a fill region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The fill region is in one of the first and second electrodes.

    Abstract translation: 声谐振器,其包括基板,第一电极,压电材料层,第二电极和填充区域。 第一电极与衬底相邻,并且第一电极具有外周边。 压电层与第一电极相邻。 第二电极邻近压电层,第二电极具有外周。 填充区域位于第一和第二电极之一中。

    Film-bulk acoustic wave resonator with motion plate
    29.
    发明申请
    Film-bulk acoustic wave resonator with motion plate 有权
    具有运动板的膜 - 体声波谐振器

    公开(公告)号:US20060197411A1

    公开(公告)日:2006-09-07

    申请号:US11073345

    申请日:2005-03-04

    CPC classification number: G01P15/097 G01L1/165

    Abstract: An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an acoustic reflector formed in an FBAR wafer and a surface. A first electrode is formed on the surface of the acoustic reflector and has a surface. A piezoelectric layer is formed on the surface of the first electrode and has a surface. A second electrode is formed on the surface of the piezoelectric layer. A motion plate is suspended in space at a predetermined distance relative to the surface of the second electrode and is capacitively coupled to the FBAR.

    Abstract translation: 一种用于测量采用具有运动板的膜 - 体声波谐振器的目标环境变量(TEV)的装置和方法。 膜 - 体声波谐振器(FBAR)包括形成在FBAR晶片和表面中的声反射器。 第一电极形成在声反射体的表面上并具有表面。 在第一电极的表面上形成压电层并具有表面。 第二电极形成在压电层的表面上。 运动板相对于第二电极的表面以预定距离悬挂在空间中,并且电容耦合到FBAR。

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