公开(公告)号：US07937968B2

公开(公告)日：2011-05-10

申请号：US11038789

申请日：2005-01-18

申请人： Armin Maul ,  Thorsten Herbert ,  Jürgen Weber ,  Waltraud Werdecker ,  Rolf Gerhardt

发明人： Armin Maul ,  Thorsten Herbert ,  Jürgen Weber ,  Waltraud Werdecker ,  Rolf Gerhardt

IPC分类号： C03B19/01 ,  C03B19/06 ,  C03C17/02 ,  C03C27/00

CPC分类号： C03C1/008 ,  C03B19/06 ,  C03B37/0126 ,  C03C27/06 ,  C03C27/10

摘要： In a known method for bonding components made of material with a high silicic acid content by means of a substance to substance bond, a SiO2-containing bonding mass is formed between connecting surfaces of the components. In order to provide for cost-efficient manufacture of a thermally stable composite, the invention proposes to generate a SiO2-containing bonding mass that is generic with regard to the material with a high silicic acid content, comprising the following procedural steps: provision of a slurry containing amorphous SiO2 particles; formation of a slurry mass between the connecting surfaces which are fixed in position with regard to each other; drying of the slurry mass; and solidification of the slurry mass by heating under formation of the SiO2-containing bonding mass. A component assembly manufactured according to the method of the invention shows high temperature resistance and thermal fatigue resistance and can also be used in contamination-sensitive applications. The component assembly is characterized by an amorphous SiO2-containing bonding mass, whose chemical composition is generic with regard to the material with the high silicic acid content of the basic material of the components, whereby the specific density of the SiO2-containing bonding mass is at least 2.0 g/cm3.

摘要翻译： 在通过物质与物质接合的用于将由高硅酸含量的材料制成的部件的已知方法中，在部件的连接表面之间形成含SiO 2的粘结物质。 为了提供热稳定复合材料的成本有效的制造，本发明提出产生相对于具有高硅酸含量的材料而言通用的含SiO 2的粘结物质，包括以下程序步骤：提供 含有无定形SiO 2颗粒的浆料; 在连接表面之间形成相对于彼此固定的位置的浆料; 干燥浆料; 并在形成含SiO 2的结合物质的同时通过加热固化浆料。 根据本发明的方法制造的组件组件显示出耐高温性和耐热疲劳性，并且还可以用于污染敏感的应用中。 组分组合物的特征在于含有非晶态SiO 2的结合物质，其化学组成对于组分的碱性材料的高硅酸含量的材料而言是通用的，由此含SiO 2的粘合物质的比密度为 至少2.0g / cm 3。

公开(公告)号：US20110059837A1

公开(公告)日：2011-03-10

申请号：US12736398

申请日：2009-03-25

申请人： Waltraud Werdecker

发明人： Waltraud Werdecker

IPC分类号： C03C3/04

CPC分类号： C03B19/01 ,  C03B19/1415 ,  Y02P40/57

摘要： In a known exterior deposition method for producing synthetic quartz glass, amorphous quartz glass powder particles (13) are fed to a reaction zone (12), the quartz glass powder particles are heated in the reaction zone (12) and deposited on the exterior side of a carrier (10) rotating about an axis of rotation. In order, proceeding from this, to specify a method which is distinguished by a high deposition efficiency, according to the invention it is proposed that amorphous quartz glass powder particles having a particle size of at least 3 μm together with a silicon-containing starting substance (14) are fed to the reaction zone (12), wherein the silicon-containing starting substance (14) is converted to SiO2 particles in the reaction zone, and the SiO2 particles are deposited in Co-15 deposition with the quartz glass powder particles on the carrier to form an SiO2-containing layer (11) in which the quartz glass powder particles (13) make up a proportion by weight of SiO2 in the range of 30% to 95%.

摘要翻译： 在已知的用于制造合成石英玻璃的外部沉积方法中，将无定形石英玻璃粉末颗粒（13）进料到反应区域（12）中，将石英玻璃粉末颗粒在反应区域（12）中加热并沉积在外部 的绕旋转轴线旋转的载体（10）。 为此，为了指出以高沉积效率区分的方法，根据本发明，提出了具有至少3μm的粒度的无定形石英玻璃粉末颗粒和含硅起始物质 （14）进料到反应区（12），其中在反应区中将含硅起始物质（14）转化为SiO 2颗粒，并将SiO 2颗粒沉积在Co-15沉积物中，石英玻璃粉末颗粒 在载体上形成含SiO 2的层（11），其中石英玻璃粉末颗粒（13）占SiO 2重量比在30％至95％的范围内。

公开(公告)号：US20080066497A1

公开(公告)日：2008-03-20

申请号：US11630405

申请日：2006-03-30

申请人： Juergen Weber ,  Tobias Pogge ,  Martin Trommer ,  Bodo Kuehn ,  Ulrich Kirst ,  Waltraud Werdecker

发明人： Juergen Weber ,  Tobias Pogge ,  Martin Trommer ,  Bodo Kuehn ,  Ulrich Kirst ,  Waltraud Werdecker

IPC分类号： C03C3/06 ,  C03B19/14 ,  H01L21/00

CPC分类号： C03C3/06 ,  C03B19/06 ,  C03B19/09 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/24 ,  C03B2201/32 ,  C03C15/00 ,  C03C19/00 ,  C03C23/0025 ,  C03C23/006 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/32 ,  C03C2201/50 ,  C03C2203/54 ,  C30B25/12 ,  C30B31/14 ,  C30B35/00 ,  Y02P40/57

摘要： An ideal quartz glass for a wafer jig for use in an environment having an etching effect is distinguished by both high purity and high resistance to dry etching. To indicate a quartz glass that substantially fulfills these requirements, it is suggested according to the invention that the quartz glass is doped with nitrogen at least in a near-surface area, has a mean content of metastable hydroxyl groups of less than 30 wt ppm and that its fictive temperature is below 1250° C. and its viscosity is at least 1013 dPa·s at a temperature of 1200° C. An economic method for producing such a quartz glass comprises the following method steps: melting an SiO2 raw material to obtain a quartz glass blank, the SiO2 raw material or the quartz glass blank being subjected to a dehydration measure, heating the SiO2 raw material or the quartz glass blank to a nitriding temperature in the range between 1050° C. and 1850° C. in an ammonia-containing atmosphere, a temperature treatment by means of which the quartz glass of the quartz glass blank is set to a fictive temperature of 1250° C. or less, and a surface treatment of the quartz glass blank with formation of the quartz glass jig.

摘要翻译： 用于具有蚀刻效果的环境中的晶片夹具的理想石英玻璃的特征在于高纯度和高耐干蚀刻性。 为了表明基本满足这些要求的石英玻璃，根据本发明提出，石英玻璃至少在近表面积中掺杂氮，其平均含量小于30重量ppm， 其假想温度低于1250℃，在1200℃的温度下其粘度至少为10-13Pa。制备这种石英玻璃的经济方法包括以下方法步骤 ：将SiO 2原料熔化，得到石英玻璃坯料，将SiO 2原料或石英玻璃坯料进行脱水处理，加热SiO _{2 原料或石英玻璃坯料，在含氨气氛中在1050℃至1850℃的范围内的氮化温度，使用石英玻璃的石英玻璃 将玻璃坯料设定为1250℃以下的假想温度，进行表面处理 石英玻璃夹具形成石英玻璃夹具。}

公开(公告)号：US06381987B1

公开(公告)日：2002-05-07

申请号：US09484103

申请日：2000-01-14

申请人： Waltraud Werdecker ,  Johann Leist ,  Heinz Fabian ,  Rolf Göbel ,  Bruno Uebbing ,  Erich Rosin

发明人： Waltraud Werdecker ,  Johann Leist ,  Heinz Fabian ,  Rolf Göbel ,  Bruno Uebbing ,  Erich Rosin

IPC分类号： C03B1900

CPC分类号： C03C3/06 ,  C03B19/09 ,  C03B19/095 ,  C30B31/10 ,  C30B35/002

摘要： Based on a known process for the manufacture of opaque quartz glass, by mixing SiO2 particles and an additive which is volatile at a melting temperature, forming a body and melting said body with an advancing melt front forming in the body, it is proposed according to the invention that in order to reduce the danger of contamination, a body (1) be formed with an inner bore (6) and be heated in such a manner that the melt front (10) advances from the inner bore (6) to the outside. The article of pure opaque quartz glass according to the invention has high resistance to temperature change, high mechanical strength and good chemical durability. It is distinguished by an opening (6) enclosed by an inner wall (9), with an inner SiO2 surface layer (15) having a layer thickness ranging from 30 mm to 500 mm and a density of at least 2.15 g/cm3.

摘要翻译： 基于用于制造不透明石英玻璃的已知方法，通过混合SiO 2颗粒和在熔融温度下挥发的添加剂，形成主体并且在体内形成前进的熔体前端来熔化所述主体，根据 本发明为了减少污染的危险，本体（1）形成有内孔（6）并被加热，使得熔体前部（10）从内孔（6）前进到 外。 根据本发明的纯不透明石英玻璃的制品具有高的耐温变化性，高机械强度和良好的化学耐久性。 其特征在于由内壁（9）包围的开口（6），具有层厚度范围为30mm至500mm，密度至少为2.15g / cm 3的内部SiO 2表面层（15）。

公开(公告)号：US4627815A

公开(公告)日：1986-12-09

申请号：US660499

申请日：1984-10-12

申请人： Fritz Aldinger ,  Waltraud Werdecker

发明人： Fritz Aldinger ,  Waltraud Werdecker

IPC分类号： C04B35/581 ,  C30B15/10 ,  C30B35/00 ,  F27D7/00

CPC分类号： C04B35/581 ,  C30B15/10 ,  C30B35/002

摘要： The temperature stabilization body is made of pulverized aluminum nitride with a first additive of pulverized aluminum present between 0.05% to 2%, and a grain size of under 1 micrometer, and a second additive of from 0.1% to 10% of an oxide, preferably yttrium oxide, present at about 1%--all precentages by weight, in which the mixture is ground in a ceramic ball mill to a grain size of not over 0.1 mm, subjected to cold isostatic pressure in the order of 2500 bar to form a green, pressed body, and then sintered at a sintering temperature of between 1750.degree. C. to 2000.degree. C. The heat conductivity of the densely sintered aluminum nitride body will then be at least 140 W/m .degree.K., and a heat conductivity of twice as much can be obtained, the body being non-toxic and not subject to creep under temperatures up to at least 1700.degree. C.

摘要翻译： 温度稳定体由粉碎的氮化铝制成，粉碎铝的第一添加剂存在于0.05％至2％之间，粒径小于1微米，第二添加剂为0.1％至10％的氧化物 氧化钇以约1％的重量百分比存在，其中将混合物在陶瓷球磨机中研磨至不超过0.1mm的粒度，经受2500巴的冷等静压力以形成绿色 ，压制体，然后在1750℃至2000℃的烧结温度下烧结。密实烧结的氮化铝体的导热率将至少为140W / m·K，并且热导率 可以获得两倍的体积，身体是无毒的，在高达至少1700℃的温度下不会发生蠕变。

公开(公告)号：US08209998B2

公开(公告)日：2012-07-03

申请号：US13340632

申请日：2011-12-29

申请人： Waltraud Werdecker ,  Norbert Traeger ,  Juergen Weber

发明人： Waltraud Werdecker ,  Norbert Traeger ,  Juergen Weber

IPC分类号： C03B20/00

CPC分类号： C03C17/02 ,  C03B19/06 ,  C03B19/066 ,  C03B20/00 ,  C03C2218/11

摘要： SiO2 slurry for the production of quartz glass contains a dispersion liquid and amorphous SiO2 particles with particle sizes to a maximum of 500 μm. The largest volume fraction is SiO2 particles with particle sizes of 1 μm-60 μm, as well as SiO2 nanoparticles with particle sizes less than 100 nm constituting 0.2-15% volume by weight of the entire solids content. To prepare the slurry for use and optimize its flow behavior for later processing by dressing or pouring the slurry mass, and for later drying and sintering without cracks, the slurry has SiO2 particles with a multimodal distribution of particle sizes, with a first maximum in the range 1 μm-3 μm and a second maximum in the range 5 μm-50 μm, and an 83%-90% solids content by weight of the SiO2 particles and the SiO2 nanoparticles together.

摘要翻译： 用于生产石英玻璃的SiO2浆料含有粒径达500μm的分散液和无定形SiO 2颗粒。 最大的体积分数是粒径为1μm-60μm的SiO 2颗粒，以及粒径小于100nm的SiO 2纳米颗粒，占整个固体含量的0.2-15重量％。 为了制备使用的浆料并优化其流动行为以便随后通过修整或倾倒浆料进行加工，并且为了稍后的干燥和烧结而没有裂缝，该浆料具有多晶粒度分布的SiO 2颗粒，其中第一最大值在 范围为1μm-3μm，第二最大值为5μm-50μm，并且SiO 2颗粒和SiO 2纳米颗粒的固体含量为83％-90％。

公开(公告)号：US20110183138A1

公开(公告)日：2011-07-28

申请号：US12737468

申请日：2009-07-16

申请人： Martin Trommer ,  Stefan Ochs ,  Juergen Weber ,  Waltraud Werdecker ,  Norbert Traeger ,  Helmut Leber

发明人： Martin Trommer ,  Stefan Ochs ,  Juergen Weber ,  Waltraud Werdecker ,  Norbert Traeger ,  Helmut Leber

IPC分类号： C03B20/00 ,  C03B17/04 ,  C03B19/06 ,  C03B19/09

CPC分类号： C03B19/1095 ,  C03B17/04 ,  C03B19/095 ,  C03B19/106 ,  C03B2201/24 ,  Y02P40/57 ,  Y10T428/268 ,  Y10T428/2982

摘要： In a known method for producing quartz glass that is doped with nitrogen, an SiO2 base product is prepared in the form of SiO2 grains or in the form of a porous semi-finished product produced from the SiO2 grains and the SiO2 base product is processed into the quartz glass with the nitrogen chemically bound therein in a hot process in an atmosphere containing a reaction gas containing nitrogen. From this starting point, a method is provided for achieving nitrogen doping in quartz glass with as high a fraction of chemically bound nitrogen as possible. This object is achieved according to the invention in that a nitrogen oxide is used as the nitrogen-containing reaction gas, and that a SiO2 base product is used that in the hot process has a concentration of oxygen deficient defects of at least 2×1015 cm−3, wherein the SiO2 base product comprises SiO2 particles having an average particle size in the range of 200 nm to 300 μm (D50 value).

摘要翻译： 在制造掺杂有氮的石英玻璃的已知方法中，SiO 2基底产物以SiO 2晶粒的形式制备，或以由SiO 2晶粒生成的多孔半成品的形式制备，将SiO 2基产物加工成 在含有含氮反应气体的气氛中，在热过程中氮化学结合的石英玻璃。 从这个起点，提供了一种在石英玻璃中实现氮掺杂的方法，尽可能高的一部分化学键合的氮。 根据本发明的目的是根据本发明实现氮氧化物作为含氮反应气体，并且使用SiO 2基产物，其在热处理中具有至少2×1015cm的缺氧缺陷浓度 -3，其中SiO 2基产物包含平均粒度在200nm至300μm（D50值）范围内的SiO 2颗粒。

公开(公告)号：US20100316796A1

公开(公告)日：2010-12-16

申请号：US12792699

申请日：2010-06-02

申请人： Juergen Weber ,  Norbert Traeger ,  Thilo Braemer ,  Waltraud Werdecker ,  Maximilian Kara

发明人： Juergen Weber ,  Norbert Traeger ,  Thilo Braemer ,  Waltraud Werdecker ,  Maximilian Kara

IPC分类号： B05D3/02

CPC分类号： C03C17/001 ,  B41M1/12 ,  B41M1/34 ,  B41M3/003 ,  C03C17/04 ,  C03C2218/11

摘要： In a known method for producing a raised marking on a glass object, a suspension containing SiO2 particles is applied to a surface of the glass object as a pattern, and the pattern is compacted to form the marking. Starting from this, in order to enable a cost-effective production of an optically appealing and uniform marking on an object made of quartz glass, which marking is also suited for applications at high temperature or in a contamination-sensitive environment, such as in solar cell and semiconductor production, it is suggested according to the invention that a binder-free suspension be used to create a marking on a quartz glass object, the suspension containing a dispersion liquid and amorphous SiO2 particles having particle sizes of up to a maximum of 500 μm, of which are between 0.2% by wt. and 15% by wt. SiO2 nanoparticles having particle sizes of less than 100 nm, and the solids content thereof, i.e. the weight proportion of the SiO2 particles and of the SiO2 nanoparticles together, is in the range between 60% and 90%.

摘要翻译： 在玻璃制品上制造凸起标记的已知方法中，将含有SiO 2颗粒的悬浮液作为图案施加到玻璃物体的表面，并且将图案压实以形成标记。 从此开始，为了能够在由石英玻璃制成的物体上成本有效地生产光学吸引和均匀的标记，该标记也适用于高温或污染敏感环境中的应用，例如太阳能 电池和半导体生产中，根据本发明提出，使用无粘合剂的悬浮液在石英玻璃物体上产生标记，该悬浮液含有分散液和粒径可达最大值为500的分散液和无定形SiO 2颗粒 μm，其为0.2重量％。 和15重量％。 粒径小于100nm的SiO 2纳米颗粒，其固体含量，即SiO 2颗粒和SiO 2纳米颗粒的重量比在一起在60％至90％的范围内。

公开(公告)号：US07637126B2

公开(公告)日：2009-12-29

申请号：US10582117

申请日：2004-11-30

申请人： Rainer Koeppler ,  Bodo Kuehn ,  Waltraud Werdecker ,  Ulrich Kirst ,  Walter Lehmann

发明人： Rainer Koeppler ,  Bodo Kuehn ,  Waltraud Werdecker ,  Ulrich Kirst ,  Walter Lehmann

IPC分类号： C03B37/075

CPC分类号： C03C4/0071 ,  C03B19/06 ,  C03B19/063 ,  C03B19/066 ,  C03B19/1005 ,  C03B19/1065 ,  C03B19/108 ,  C03B19/1095 ,  C03B20/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/34 ,  C03C1/026 ,  C03C3/06 ,  C03C2201/23 ,  C03C2201/3411 ,  C03C2201/3435 ,  C03C2201/3488 ,  C03C2201/36 ,  C03C2203/22 ,  C03C2203/30 ,  C03C2203/44 ,  C03C2203/52

摘要： The invention relates to a method for the economic production of a blank for a component made from laser-active quartz glass in any form or dimension. The method comprises the following method steps: a) preparation of a dispersion with a solids content of at least 40 wt. %, comprising SiO2 nanopowder and doping agents, including a cation of the rare earth metals and transition metals in a fluid, b) granulation by agitation of the dispersion, with removal of moisture to form a doped SiO2 granulate of spherical porous granular particles with a moisture content of less than 35 wt. % and a density of at least 0.95 g/cm3, c) drying and purification of the SiO2 granulate, by heating to a temperature of at least 1000° C. to form doped porous SiO2 grains with an OH content of less than 10 ppm and d) sintering or fusing the doped SiO2 grains in a reducing atmosphere to give the blank made from doped quartz glass.

摘要翻译： 本发明涉及一种用于经济地生产用于由任何形式或尺寸的激光 - 活性石英玻璃制成的部件的坯料的方法。 该方法包括以下方法步骤：a）制备固体含量为至少40wt。 ％，包括SiO 2纳米粉末和掺杂剂，其包括流体中的稀土金属和过渡金属的阳离子，b）通过搅拌分散体制粒，除去水分以形成掺杂的SiO 2颗粒的球形多孔颗粒，其具有 含水量小于35wt。 ％和密度至少为0.95g / cm 3，c）通过加热到至少1000℃的温度来干燥和纯化SiO 2颗粒，以形成OH含量低于10ppm的掺杂多孔SiO 2颗粒，以及 d）在还原气氛中烧结或熔融掺杂的SiO 2晶粒，得到由掺杂的石英玻璃制成的坯料。

公开(公告)号：US20070145332A1

公开(公告)日：2007-06-28

申请号：US10582117

申请日：2004-11-30

申请人： Rainer Koeppler ,  Bodo Kuehn ,  Waltraud Werdecker ,  Ulrich Kirst ,  Walter Lehmann

发明人： Rainer Koeppler ,  Bodo Kuehn ,  Waltraud Werdecker ,  Ulrich Kirst ,  Walter Lehmann

IPC分类号： C09K11/66 ,  C03B8/00 ,  C03B19/00

CPC分类号： C03C4/0071 ,  C03B19/06 ,  C03B19/063 ,  C03B19/066 ,  C03B19/1005 ,  C03B19/1065 ,  C03B19/108 ,  C03B19/1095 ,  C03B20/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/34 ,  C03C1/026 ,  C03C3/06 ,  C03C2201/23 ,  C03C2201/3411 ,  C03C2201/3435 ,  C03C2201/3488 ,  C03C2201/36 ,  C03C2203/22 ,  C03C2203/30 ,  C03C2203/44 ,  C03C2203/52

摘要： The invention relates to a method for the economic production of a blank for a component made from laser-active quartz glass in any form or dimension. The method comprises the following method steps: a) preparation of a dispersion with a solids content of at least 40 wt. %, comprising SiO2 nanopowder and doping agents, including a cation of the rare earth metals and transition metals in a fluid, b) granulation by agitation of the dispersion, with removal of moisture to form a doped SiO2 granulate of spherical porous granular particles with a moisture content of less than 35 wt. % and a density of at least 0.95 g/cm3, c) drying and purification of the SiO2 granulate, by heating to a temperature of at least 1000° C. to form doped porous SiO2 grains with an OH content of less than 10 ppm and d) sintering or fusing the doped SiO2 grains in a reducing atmosphere to give the blank made from doped quartz glass.

摘要翻译： 本发明涉及一种用于经济地生产用于由任何形式或尺寸的激光 - 活性石英玻璃制成的部件的坯料的方法。 该方法包括以下方法步骤：a）制备固体含量为至少40wt。 ％，包括SiO 2纳米粉末和掺杂剂，其包括流体中的稀土金属和过渡金属的阳离子，b）通过搅拌分散体制粒，除去水分以形成掺杂的SiO 水分含量小于35重量％的球形多孔粒状颗粒颗粒。 ％，密度至少为0.95g / cm 3，c）通过加热到至少1000℃的温度来干燥和纯化SiO 2颗粒。 以形成OH含量小于10ppm的掺杂多孔SiO 2颗粒，以及d）在还原气氛中烧结或熔合掺杂的SiO 2颗粒，得到坯料 来自掺杂石英玻璃。