公开(公告)号：US20090121668A1

公开(公告)日：2009-05-14

申请号：US12240378

申请日：2008-09-29

申请人： Stephen T. West ,  Wei D. Wang

发明人： Stephen T. West ,  Wei D. Wang

IPC分类号： H02H7/08

CPC分类号： B60W20/50 ,  B60K6/44 ,  B60W10/06 ,  B60W10/08 ,  B60W10/26 ,  B60W20/00 ,  Y02T10/623 ,  Y02T10/6286 ,  Y02T10/7258

摘要： A diagnostic system for a hybrid vehicle comprises a motor control module and a fault diagnostic module. The motor control module controls torque output of an electric motor having a predetermined number of phases. The fault diagnostic module determines a position of a rotor of the electric motor, aligns the rotor with a phase angle of one of the phases, selectively diagnoses a fault based on a current of at least one of the phases, and selectively disables the electric motor based on the diagnosis.

摘要翻译： 一种用于混合动力车辆的诊断系统包括马达控制模块和故障诊断模块。 电动机控制模块控制具有预定数量相位的电动机的转矩输出。 故障诊断模块确定电动机的转子的位置，使转子与其中一相的相位角对准，基于至少一相的电流选择性地诊断故障，并且选择性地禁用电动机 基于诊断。

公开(公告)号：US06837975B2

公开(公告)日：2005-01-04

申请号：US10211473

申请日：2002-08-01

申请人： Wei D. Wang ,  Praburam Gopalraja

发明人： Wei D. Wang ,  Praburam Gopalraja

IPC分类号： C23C14/04 ,  C23C14/16 ,  C23C14/35 ,  H01J37/34 ,  H01L21/768

CPC分类号： H01J37/3455 ,  C23C14/046 ,  C23C14/165 ,  C23C14/35 ,  H01J37/3405 ,  H01L21/76877

摘要： A magnetron system for a sputtering target having an annular vault facing the wafer to be coated and having inner and outer sidewalls and a roof. A small magnetron is positioned over the roof. A first magnet assembly having a first magnet polarity along the target axis is positioned behind the inner sidewall. A second magnet assembly having an opposed second opposed magnetic polarity is disposed in back of the outer sidewall and has magnetic strength much greater than the first magnet assembly but its strength is asymmetrically distributed about the target axis. The second magnet assembly and the roof assembly are rotated together about the target axis. The rotating asymmetric sidewall magnet assembly may also be used with a hollow-cathode target, with or without a roof magnetron.

摘要翻译： 一种用于溅射靶的磁控管系统，其具有面向待涂覆的晶片的环形拱顶并具有内侧壁和外侧壁以及屋顶。 一个小磁控管位于屋顶上。 沿着目标轴线具有第一磁体极性的第一磁体组件位于内侧壁的后面。 具有相对的第二相对磁极性的第二磁体组件设置在外侧壁的后部，并且具有比第一磁体组件大得多的磁强度，但是其强度围绕目标轴线不对称地分布。 第二磁体组件和屋顶组件围绕目标轴线一起旋转。 旋转的不对称侧壁磁体组件也可以与具有或不具有屋顶磁控管的中空阴极靶一起使用。

公开(公告)号：US06277249B1

公开(公告)日：2001-08-21

申请号：US09518180

申请日：2000-03-02

申请人： Praburam Gopalraja ,  Jianming Fu ,  Fusen Chen ,  Girish Dixit ,  Zheng Xu ,  Sankaram Athreya ,  Wei D. Wang ,  Ashok K. Sinha

发明人： Praburam Gopalraja ,  Jianming Fu ,  Fusen Chen ,  Girish Dixit ,  Zheng Xu ,  Sankaram Athreya ,  Wei D. Wang ,  Ashok K. Sinha

IPC分类号： C23C1435

CPC分类号： H01L21/76844 ,  C23C14/35 ,  H01J37/3405 ,  H01J37/342 ,  H01J37/3423 ,  H01J37/3455 ,  H01J37/3458 ,  H01L21/2855 ,  H01L21/76805 ,  H01L21/76843 ,  H01L21/76862 ,  H01L21/76865 ,  H01L21/76873 ,  H01L2221/1089

摘要： A target and magnetron for a plasma sputter reactor. The target has an annular trough facing the wafer to be sputter coated. Various types of magnetic means positioned around the trough create a magnetic field supporting a plasma extending over a large volume of the trough. For example, the magnetic means may include magnets disposed on one side within a radially inner wall of the trough and on another side outside of a radially outer wall of the trough to create a magnetic field extending across the trough, to thereby support a high-density plasma extending from the top to the bottom of the trough. The large plasma volume increases the probability that the sputtered metal atoms will become ionized. The magnetic means may include a magnetic coil, may include additional magnets in back of the trough top wall to increase sputtering there, and may include confinement magnets near the bottom of the trough sidewalls. The magnets in back of the top wall may have an outer magnet surrounding an inner magnet of the opposite polarity. The high aspect ratio of the trough also reduces asymmetry in coating the sidewalls of a deep hole at the edge of the wafer. An integrated copper via filling process includes a first step of highly ionized sputter deposition of copper, a second step of more neutral, lower-energy sputter deposition of copper to complete the seed layer, and electroplating copper into the hole to complete the metallization.

摘要翻译： 用于等离子体溅射反应器的靶和磁控管。 目标具有面向待溅射涂覆的晶片的环形槽。 位于槽周围的各种磁性装置形成一个支撑等离子体的磁场，该等离子体延伸在大容积的槽上。 例如，磁性装置可以包括设置在槽的径向内壁中的一侧上并且在槽的径向外壁外侧的另一侧上的磁体，以产生延伸穿过槽的磁场， 密度等离子体从槽的顶部延伸到底部。 大的等离子体体积增加了溅射的金属原子将被电离的可能性。 磁性装置可以包括磁性线圈，可以在槽顶壁的后面包括另外的磁体，以在那里增加溅射，并且可以包括靠近槽侧壁底部的约束磁体。 顶壁后面的磁体可以具有围绕相反极性的内磁体的外磁体。 槽的高纵横比也降低了在晶片边缘涂覆深孔侧壁的不对称性。 集成的铜通孔填充工艺包括铜的高度电离溅射沉积的第一步骤，更中性的，更低能量的溅射沉积铜以完成种子层的第二步骤，以及将铜电镀到孔中以完成金属化。

公开(公告)号：US08635033B2

公开(公告)日：2014-01-21

申请号：US12718016

申请日：2010-03-05

申请人： S. M. Nayeem Hasan ,  David P. Tasky ,  Mohammad N. Anwar ,  Wei D. Wang

发明人： S. M. Nayeem Hasan ,  David P. Tasky ,  Mohammad N. Anwar ,  Wei D. Wang

IPC分类号： G01R31/02 ,  G06F19/00

CPC分类号： G01R31/02 ,  G01R31/025 ,  G06F19/00

摘要： A method for monitoring electric isolation of a high voltage DC bus to detect ground isolation faults includes monitoring voltage differentials between a positive DC electric power bus and a negative DC electric power bus and a chassis ground. Electrical isolation between each of the positive and negative DC electric power buses and the chassis ground is monitored using a ratio of the voltage differentials.

摘要翻译： 用于监视高压DC总线的电隔离以检测接地隔离故障的方法包括监视正直流电力总线与负直流电力总线与底盘接地之间的电压差。 使用电压差的比率监视正和负直流电力总线和底盘接地中的每一个之间的电隔离。

公开(公告)号：US08497687B2

公开(公告)日：2013-07-30

申请号：US12690986

申请日：2010-01-21

申请人： Harry J. Bauer ,  Wei D. Wang ,  James E. Tarchinski

发明人： Harry J. Bauer ,  Wei D. Wang ,  James E. Tarchinski

IPC分类号： G01R31/14

CPC分类号： B60L11/14 ,  B60L3/0069 ,  B60L11/123 ,  B60L15/007 ,  G01R31/025 ,  Y02T10/6217 ,  Y02T10/645 ,  Y02T10/7077

摘要： A method for monitoring operation of a vehicle including a high voltage electrical system including an electrical energy storage device electrically connected to switching circuits of an inverter device via a high voltage bus, the inverter device configured to transfer electric power to an electric machine via activation of a plurality of switch devices, includes monitoring electrical ground isolation of the high voltage electrical system during ongoing operation of the vehicle, detecting an electrical ground isolation fault in the high voltage electrical system, and detecting a location of the electrical ground isolation fault associated with at least one of the electrical energy storage device, the high voltage bus, the inverter device, and the electric machine subsequent to a vehicle key-off event.

摘要翻译： 一种用于监视包括高电压电气系统的车辆的操作方法，所述高压电气系统包括经由高压母线电连接到逆变器装置的开关电路的电能存储装置，所述逆变器装置被配置为通过激活将电力传送到电机 多个开关装置包括在车辆的正在进行的操作期间监测高压电气系统的电接地隔离，检测高压电气系统中的电接地隔离故障，以及检测与之相关联的电接地隔离故障的位置 在车辆关闭事件之后的至少一个电能存储装置，高压总线，逆变器装置和电机。

公开(公告)号：US08216933B2

公开(公告)日：2012-07-10

申请号：US12872522

申请日：2010-08-31

申请人： Wei D. Wang ,  Srinivas Gandikota ,  Kishore Lavu

发明人： Wei D. Wang ,  Srinivas Gandikota ,  Kishore Lavu

IPC分类号： H01L21/02

CPC分类号： C23C14/16 ,  C23C14/0641 ,  H01L21/28061 ,  H01L29/4941

摘要： A method of depositing a bilayer of tungsten over tungsten nitride by a plasma sputtering process in which krypton is used as the sputter working gas during the tungsten deposition. Argon may be used as the sputtering working gas during the reactive sputtering deposition of tungsten nitride. The beneficial effect of reduction of tungsten resistivity is increased when the thickness of the tungsten layer is less than 50 nm and further increased when less than 35 nm. The method may be used in forming a gate stack including a polysilicon layer over a gate oxide layer over a silicon gate region of a MOS transistor in which the tungsten nitride acts as a barrier. A plasma sputter chamber in which the invention may be practiced includes gas sources of krypton, argon, and nitrogen.

摘要翻译： 通过等离子体溅射工艺在钨沉积中使用氪作为溅射工作气体的钨沉积钨层的方法。 在氮化钨的反应溅射沉积期间，可以使用氩作为溅射工作气体。 当钨层的厚度小于50nm时，降低钨电阻率的有益效果增加，当小于35nm时，钨电阻率的降低进一步增加。 该方法可以用于在MOS晶体管的硅栅极区域上的栅极氧化物层上形成包括多晶硅层的栅极堆叠，其中氮化钨作为势垒。 可以实施本发明的等离子体溅射室包括氪气，氩气和氮气的气源。

公开(公告)号：US08198841B2

公开(公告)日：2012-06-12

申请号：US12543708

申请日：2009-08-19

申请人： Wei D. Wang ,  Bon Ho Bae ,  Stephen T. West ,  Rick H. Schroeder

发明人： Wei D. Wang ,  Bon Ho Bae ,  Stephen T. West ,  Rick H. Schroeder

IPC分类号： H02P6/16

CPC分类号： G01D5/24476

摘要： A method of processing a resolver fault in a motor generator unit (MGU) includes receiving a position signal from a resolver describing a measured angular position of a rotor of the MGU, determining the presence of the resolver fault using the position signal, and calculating or extrapolating an estimated rotor position when the resolver fault is determined. A predetermined resolver fault state may be determined using a measured duration of the resolver fault, and the MGU may be controlled using the estimated rotor position for at least a portion of the duration of the resolver fault. A motor control circuit is operable for processing the resolver fault using the above method, and may automatically vary a torque output or a pulse-width modulation (PWM) of the MGU depending on the duration of the resolver fault.

摘要翻译： 一种处理电动发电机单元（MGU）中的解算器故障的方法包括从解析器接收描述MGU的转子的测量角位置的位置信号，使用位置信号确定解析器故障的存在，以及计算或 当确定旋转变压器故障时，外推估计的转子位置。 可以使用解析器故障的测量持续时间来确定预定的解算器故障状态，并且可以使用估计的转子位置来控制解调器故障持续时间的至少一部分的MGU。 电动机控制电路可操作以使用上述方法处理旋转变压器故障，并且可以根据解算器故障的持续时间自动地改变MGU的转矩输出或脉冲宽度调制（PWM）。

公开(公告)号：US08119525B2

公开(公告)日：2012-02-21

申请号：US12037578

申请日：2008-02-26

申请人： Jick M. Yu ,  Wei D. Wang ,  Rongjun Wang ,  Hua Chung

发明人： Jick M. Yu ,  Wei D. Wang ,  Rongjun Wang ,  Hua Chung

IPC分类号： H01L21/44

CPC分类号： H01L21/76879 ,  C25D5/02 ,  H01L21/76856 ,  H01L21/76859 ,  H01L21/76862 ,  H01L21/76873

摘要： Methods of controlling deposition of metal on field regions of a substrate in an electroplating process are provided. In one aspect, a dielectric layer is deposited under plasma on the field region of a patterned substrate, leaving a conductive surface exposed in the openings. Electroplating on the field region is reduced or eliminated, resulting in void-free features and minimal excess plating. In another aspect, a resistive layer, which may be a metal, is used in place of the dielectric. In a further aspect, the surface of the conductive field region is modified to change its chemical potential relative to the sidewalls and bottoms of the openings.

摘要翻译： 提供了在电镀工艺中控制金属在基片的场区上沉积的方法。 在一个方面，电介质层在等离子体上沉积在图案化衬底的场区上，留下在开口中暴露的导电表面。 场区域上的电镀被减少或消除，导致无空隙特征和最小的多余电镀。 在另一方面，可以使用可以是金属的电阻层来代替电介质。 在另一方面，导电场区域的表面被修改以相对于开口的侧壁和底部改变其化学势。

公开(公告)号：US20110288699A1

公开(公告)日：2011-11-24

申请号：US12784792

申请日：2010-05-21

申请人： Jihoon Jang ,  Bon Ho Bae ,  Wei D. Wang ,  Jeong J. Park ,  Harry J. Bauer

发明人： Jihoon Jang ,  Bon Ho Bae ,  Wei D. Wang ,  Jeong J. Park ,  Harry J. Bauer

IPC分类号： G06F19/00

CPC分类号： B60W20/50 ,  B60K6/48 ,  B60L2200/26 ,  B60L2240/421 ,  B60L2240/423 ,  B60W10/08 ,  B60W20/00 ,  B60W50/023 ,  B60W50/029 ,  B60W50/038 ,  B60W2510/081 ,  B60W2510/083 ,  B60Y2400/3084 ,  G06F7/02 ,  H02P29/032 ,  Y02T10/6221 ,  Y02T10/642 ,  Y02T10/7258

摘要： Methods and systems for controlling motor torque in a hybrid vehicle are provided. A current sensor provides a feedback current when the sensor is operating properly. A processor controls the motor torque using the feedback current if the current sensor is operating properly. The processor controls the motor torque using a slip value for the hybrid vehicle if the current sensor is not operating properly.

摘要翻译： 提供了用于控制混合动力车辆中的电动机转矩的方法和系统。 当传感器正常工作时，电流传感器提供反馈电流。 如果电流传感器正常工作，则处理器使用反馈电流控制电机转矩。 如果电流传感器运行不正常，则处理器使用混合动力车辆的滑差值来控制电动机转矩。

公开(公告)号：US07834576B2

公开(公告)日：2010-11-16

申请号：US11748054

申请日：2007-05-14

申请人： David T Fu ,  Wei D. Wang

发明人： David T Fu ,  Wei D. Wang

IPC分类号： G05B1/06

CPC分类号： G01D18/00 ,  G01D3/08 ,  H03M1/1071 ,  H03M1/485

摘要： Apparatus and methods are provided for diagnosing faults in multiple, associated motor-resolver systems. One apparatus includes a swapping circuit coupling a first resolver to a first or second decoder, and a swapping circuit coupling a second resolver to the first or second decoder. One method includes applying a signal from a resolver to a first decoder to determine that the first decoder is malfunctioning if the first decoder continues to generate a fault signal, and applying a signal from a different resolver to a second decoder to determine that a motor associated with the first decoder is malfunctioning if the second decoder generates a fault signal. Another method includes transmitting a signal from a resolver to first and second decoders, transmitting a signal from a different resolver to the first and second decoders, and determining if the first decoder, second decoder, a first motor, or a second motor is malfunctioning.

摘要翻译： 提供了用于诊断多个相关联的电动机 - 解算器系统中的故障的装置和方法。 一种装置包括将第一解析器耦合到第一或第二解码器的交换电路和将第二解析器耦合到第一或第二解码器的交换电路。 一种方法包括：将来自解算器的信号应用于第一解码器，以确定第一解码器是否故障，如果第一解码器继续产生故障信号，以及将来自不同解析器的信号施加到第二解码器，以确定电动机相关联 如果第二解码器产生故障信号，则第一解码器出现故障。 另一种方法包括将来自解算器的信号发送到第一和第二解码器，将来自不同分解器的信号发送到第一和第二解码器，以及确定第一解码器，第二解码器，第一电动机或第二电动机是否发生故障。