Integrated circuit memory devices having metal straps to improve word
line driver reliability
    22.
    发明授权
    Integrated circuit memory devices having metal straps to improve word line driver reliability 失效
    具有金属带的集成电路存储器件,以提高字线驱动器的可靠性

    公开(公告)号:US5768174A

    公开(公告)日:1998-06-16

    申请号:US761300

    申请日:1996-12-06

    CPC分类号: H01L27/105

    摘要: Integrated circuit memory devices having metal straps include an array of memory devices arranged as a plurality of sub memory blocks (SMB) in a semiconductor substrate, and a plurality of sub word line drivers (SWD) disposed between adjacent sub memory blocks in the substrate. In particular, a plurality of first signal lines at a first metal level (M1) and extending in a first direction on the array are provided. The first signal lines are directly connected to a first sub word line driver at a face of the substrate. In addition, a plurality of second signal lines are provided at a first metal level (M1) and extend in a second direction, orthogonal to the first direction, from the first sub word line driver across at least one sub memory block SMB. At least one metal strap is also provided at a second metal level (M2), above the first metal level. The metal strap preferably crosses the plurality of first signal lines and extends from a first side of the first sub word line driver to a second opposing side of the first sub word line driver. Thus, it is unnecessary to provide the first signal lines at the second metal level or provide metal segments or islands to interconnect the first signal lines to metallization at the first metal level and to the first sub word line driver. Accordingly, the memory device of the present invention can be more highly integrated and less susceptible to defects caused by bridge "shorts".

    摘要翻译: 具有金属带的集成电路存储器件包括布置在半导体衬底中的多个子存储器块(SMB)的存储器件阵列和设置在衬底中的相邻子存储块之间的多个子字线驱动器(SWD)。 特别地,提供了在第一金属级(M1)处并在阵列上沿第一方向延伸的多条第一信号线。 第一信号线在衬底的表面直接连接到第一子字线驱动器。 此外,多个第二信号线被设置在第一金属级(M1)处并且沿着与第一方向正交的第二方向从第一子字线驱动器跨越至少一个子存储器块SMB延伸。 在第一金属层上方的第二金属层(M2)上还设有至少一个金属带。 金属带优选地跨越多个第一信号线并且从第一子字线驱动器的第一侧延伸到第一副字线驱动器的第二相对侧。 因此,不需要在第二金属级提供第一信号线,或者提供金属段或岛以将第一信号线与第一金属级和第一子字线驱动器之间的金属化互连。 因此,本发明的存储器件可以更高度集成,并且不易受到桥“短路”引起的缺陷的影响。