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公开(公告)号：US10146233B2
公开(公告)日：2018-12-04
申请号：US15091442
申请日：2016-04-05
发明人： Toshihiro Kashima , Kohei Honda , Tatsuya Hayashi
IPC分类号： G05D11/13
摘要： Provided is a flow rate ratio control device that even in change periods during which the actual flow rates of component gases change along with a change in the target total flow rate or target mixing ratio of mixed gas, can keep the actual total flow rate or actual mixing ratio of the mixed gas constant. Target flow rates set in flow rate control devices have continuous change periods during which target flow rate values continuously change from pre-change to post-change target flow rate values, respectively and correspondingly; and the time lengths of the continuous change periods are set to at least a followable time during which a flow rate control device of which a response speed to an actual component fluid flow rate is lowest allows the actual component fluid flow rate to substantially follow the target flow rate in the continuous change periods.
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公开(公告)号：US09897503B2
公开(公告)日：2018-02-20
申请号：US14894094
申请日：2014-11-25
发明人： Sotaro Kishida , Takehisa Hataita , Akira Kuwahara
CPC分类号： G01L9/0072 , G01L9/0042 , G01L19/0084 , G01L19/04 , G01L19/069
摘要： Provided is a capacitive pressure sensor that prevents not only a change in temperature but also electromagnetic noise in the air from affecting the measurement value of pressure. In the capacitive pressure sensor, an electrode member includes: a measurement electrode fixed to an insulating positioning member and having an electrode face; a signal extraction electrode fixed with an insulating seal sealing the other end of the body; and a flexible connection member for electrically connecting the measurement electrode and the signal electrode. Moreover, the flexible connection member is accommodated in the accommodating depressed portion formed in the measurement electrode or the signal extraction electrode.
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公开(公告)号：US09823667B2
公开(公告)日：2017-11-21
申请号：US14814340
申请日：2015-07-30
发明人： Kotaro Takijiri , Yuki Tanaka , Atsushi Ieki
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , Y10T137/7761
摘要： In order to keep a stable flow rate at a set flow rate value when a pressure fluctuation occurs in an upstream side of a valve, without providing an additional sensor for detecting a pressure fluctuation, a flow rate control apparatus is provided with: the valve; a flow rate sensor; a valve control part configured to control the valve so that a deviation between a set flow rate value and a measurement flow rate value is reduced, on the basis of the deviation and a set control coefficient; and a control coefficient setting part configured to set the control coefficient so that when a pressure rise occurs in the upstream side of the valve, a decreased amount in flow due to a decreased opening of the valve and an increased amount in flow due to an increased amount of a differential pressure before and after the valve, are balanced.
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公开(公告)号：US09823181B2
公开(公告)日：2017-11-21
申请号：US15240235
申请日：2016-08-18
IPC分类号： G01J5/02 , G01N21/05 , G01N21/3504 , G01N21/03
CPC分类号： G01N21/05 , G01N21/3504 , G01N2021/0389
摘要： The present invention intends to provide a Cp2Mg concentration measuring device capable of accurately measuring the concentration of Cp2Mg to be supplied to a process chamber without being affected by spontaneous decomposition, and is adapted to measure light intensity in a predetermined wavelength band around 12.8 μm and on the basis of the light intensity, calculate the concentration of Cp2Mg in a material gas.
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公开(公告)号：US09746102B2
公开(公告)日：2017-08-29
申请号：US14226167
申请日：2014-03-26
CPC分类号： F16K41/10 , F16K31/007 , Y10T137/7895
摘要： In order to make it possible to increase a diameter and output thereof, a diaphragm structure is provided that has low repulsiveness, can be largely deformed to increase a stroke even without being applied with a large force from an actuator, and is unlikely to give rise to a defect or fault even when formed thin, and a fluid control valve is provided with the diaphragm structure and the actuator that presses the diaphragm structure, wherein the diaphragm structure is provided with: a protruding part that is formed in a tubular shape and pressed by the actuator; a brim part that spreads from a base end of the protruding part outward with respect to the protruding part; and a support part that is formed on an outer circumference of the brim part and attached to another member, and the brim part is formed in a film shape.
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公开(公告)号：US20170170000A1
公开(公告)日：2017-06-15
申请号：US15370365
申请日：2016-12-06
CPC分类号： H01J49/16 , H01J27/205 , H01J49/0027 , H01J49/147 , H01J49/42
摘要： In order to attain a main objective of the present invention to provide an ion source capable of efficiently extracting ions, the ion source is configured to include: a conductive tubular body having an ion emitting aperture in a tip surface thereof and a penetration portion in a side wall thereof allowing thermo-electrons to pass through from an outside toward an inside; a mesh surrounding an outer periphery of the penetration portion; and a thermionic emission filament surrounding an outer periphery of the mesh, such that the thermo-electrons emitted from the thermionic emission filament pass through the mesh and reach the inside of the conductive tubular body through the penetration portion.
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公开(公告)号：US20170101715A1
公开(公告)日：2017-04-13
申请号：US15291264
申请日：2016-10-12
IPC分类号： C23C16/52 , G01N21/3504 , C23C16/448 , G01N21/84
CPC分类号： C23C16/52 , C23C16/4481 , C23C16/4482 , G01N21/3504 , G01N21/84 , G01N33/0004 , G01N2021/8411 , G01N2021/8578 , G05D11/00 , Y10T137/0329 , Y10T137/2499 , Y10T137/2509
摘要： A gas control system includes: a first valve that is provided in a carrier gas line or in a gas supply line; a flow rate control mechanism that is provided in a diluent gas line and includes a flow rate sensor and a second valve; a contactless type first concentration sensor; a first valve control part; a diluent gas setting flow rate calculation part adapted to, on the basis of a preset setting total flow rate of a post-dilution mixed gas and a post-dilution measured concentration, calculate a diluent gas setting flow rate that is a flow rate of a diluent gas to be flowed through the diluent gas line; and a second valve control part adapted to control the opening level of the second valve so as to decrease the deviation between the diluent gas setting flow rate and a measured flow rate measured by the flow rate sensor.
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28.发明申请公开(公告)号：US20160245783A1
公开(公告)日：2016-08-25
申请号：US14953703
申请日：2015-11-30
发明人： Tomohiro SASAKI , Tsuneaki MAEDA
IPC分类号： G01N30/84
CPC分类号： G01N30/84 , G01N2030/8435
摘要： To provide a gas chromatograph allowing a substance led out from a measurement target component to reach a reduction reaction part and capable of preventing occurrence of a quantification error while preventing corrosion and sensitivity deterioration of a metal pipeline due to measurement non-related components such as halogen, sulfur and the like. The gas chromatograph includes: an oxidation reaction part into which a sample gas passed through a column is introduced and which oxidizes the measurement target component and converts the resultant measurement target component to a prescribed intermediate component to be led out therefrom; and an intermediate gas flow path for deriving the intermediate component from the oxidation reaction part, and in this configuration, a reagent to be reacted with measurement non-related components is provided in the intermediate gas flow path, and the reagent contains a metal element to be reacted with only oxygen.
摘要翻译： 提供允许从测量对象成分引出的物质到达还原反应部分并能够防止定量误差发生的气相色谱仪，同时防止金属管道由于诸如卤素等非相关成分的测量而导致的腐蚀和灵敏度劣化 ，硫等。 气相色谱仪包括：引入通过柱的样品气体的氧化反应部分，并将测量对象成分氧化并将所得到的测量对象成分转换为规定的中间成分从而引出; 以及用于从氧化反应部导出中间成分的中间气体流路，在该结构中，在中间气体流路中设置有与测定非相关成分反应的试剂，试剂含有金属元素 只与氧气反应。
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29.发明授权Plate-type capillary column, capillary column unit, and chromatograph using same 有权板式毛细管柱，毛细管柱单元和使用其的色谱仪公开(公告)号：US09354210B2
公开(公告)日：2016-05-31
申请号：US14233490
申请日：2012-08-03
申请人： Takahiro Otsuka
发明人： Takahiro Otsuka
CPC分类号： G01N30/606 , B01D53/025 , G01N30/467 , G01N30/468 , G01N30/6039 , G01N30/6095 , G01N2030/8881
摘要： A plate-type capillary column has extensibility that enables a capillary to be extended as a whole to improve resolution of a chromatograph by stacking respective plate-type capillary columns. The capillary column is provided with a plate having first and second face plate parts that face each other; a capillary that is formed inside the plate; a first bottom-equipped hole connected to one end part of the capillary and formed to open in the first face plate part; and a second bottom-equipped hole connected to the other end part and formed to open in the second face plate part, wherein as viewed from a direction vertical to the first face plate part or the second face plate part, on a capillary column first virtual circle, passing through the second bottom-equipped hole, one or more through-holes penetrating through the first face plate part and the second face plate part are formed.
摘要翻译： 板式毛细管柱具有伸长性，使毛细管作为整体延伸，以通过堆叠相应的板式毛细管柱来提高色谱分离度。 毛细管柱设置有具有彼此相对的第一和第二面板部分的板; 形成在板内的毛细管; 连接到毛细管的一个端部并形成为在第一面板部分中打开的第一底部设有孔; 以及与所述另一端部连接并形成为在所述第二面板部开口的第二底部配置孔，其中，从垂直于所述第一面板部或所述第二面板部的方向观察，在毛细管柱上， 圆通过第二底部设置的孔，形成穿过第一面板部和第二面板部的一个或多个通孔。
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公开(公告)号：US09328826B2
公开(公告)日：2016-05-03
申请号：US14141371
申请日：2013-12-26
发明人： Shigeyuki Hayashi
CPC分类号： F16K1/42 , F16K31/007 , G05D7/0635 , Y10T137/7759
摘要： In order to, in a short period of time, reduce to zero a measured flow rate value measured after fully closing a fluid control valve, the fluid control valve having a configuration suitable to decrease the inside volume of the fluid control valve is configured together with a valve element member, and a valve seat block provided with: an in-valve flow path that is formed inside of the valve seat block; and a valve seat surface that is brought into contact with or separated from a seating surface of the valve element member is provided with a cutout that is formed in a part of a protruded rim so as to be communicatively connected to a downstream side flow path.
摘要翻译： 为了在短时间内将完全关闭流体控制阀之后测量的流量值降低到零，具有适于减小流体控制阀的内部体积的结构的流体控制阀与 阀芯构件和阀座块，其设置有形成在阀座块内部的阀内流路; 并且与阀元件的座面接触或分离的阀座面设置有形成在凸缘的一部分中以与下游侧流路连通的切口。
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