公开(公告)号：US07718559B2

公开(公告)日：2010-05-18

申请号：US11738030

申请日：2007-04-20

Applicant: Jie Yuan ,  Jennifer Y. Sun ,  Renguan Duan

Inventor： Jie Yuan ,  Jennifer Y. Sun ,  Renguan Duan

IPC: C03C3/06 ,  C03C3/04

CPC classification number: C03C3/06 ,  C03B32/00 ,  C03B2201/24 ,  C03B2201/34 ,  C03B2201/36 ,  C03C2201/3411 ,  C03C2201/36 ,  C03C2203/54 ,  H01L21/67069 ,  H01L21/68721 ,  H01L21/68735 ,  H01L21/68757 ,  Y02P40/57 ,  Y10S156/915

Abstract: A method of fabricating doped quartz component is provided herein. In one embodiment, the doped quartz component is a yttrium doped quartz ring configured to support a substrate. In another embodiment, the doped quartz component is a yttrium and aluminum doped cover ring. In yet another embodiment, the doped quartz component is a yttrium, aluminum and nitrogen containing cover ring.

Abstract translation: 本文提供了一种制造掺杂石英组分的方法。 在一个实施例中，掺杂的石英组件是被配置为支撑衬底的掺钇的石英环。 在另一个实施例中，掺杂的石英组件是掺钇和铝的覆盖环。 在另一个实施方案中，掺杂的石英组分是含钇，铝和氮的覆盖环。

公开(公告)号：US20090163344A1

公开(公告)日：2009-06-25

申请号：US12226861

申请日：2007-09-04

Applicant: Juergen Weber ,  Tatsuhiro Sato ,  Ralf Schneider ,  Achim Hofmann ,  Christian Gebauer

Inventor： Juergen Weber ,  Tatsuhiro Sato ,  Ralf Schneider ,  Achim Hofmann ,  Christian Gebauer

IPC: C03C3/04 ,  C03B19/06 ,  C03B20/00

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/066 ,  C03B20/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/24 ,  C03B2201/34 ,  C03B2201/36 ,  C03C4/20 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/3411 ,  C03C2201/3435 ,  C03C2203/10 ,  C03C2203/54

Abstract: The invention starts from a known component of quartz glass for use in semiconductor manufacture, which component at least in a near-surface region shows a co-doping of a first dopant and of a second oxidic dopant, said second dopant containing one or more rare-earth metals in a concentration of 0.1-3% by wt. each (based on the total mass of SiO2 and dopant). Starting from this, to provide a quartz glass component for use in semiconductor manufacture in an environment with etching action, which component is distinguished by both high purity and high resistance to dry etching and avoids known drawbacks caused by co-doping with aluminum oxide, it is suggested according to the invention that the first dopant should be nitrogen and that the mean content of metastable hydroxyl groups of the quartz glass is less than 30 wtppm.

Abstract translation: 本发明从用于半导体制造的石英玻璃的已知组件开始，至少在近表面区域中的该组分表现出第一掺杂剂和第二氧化物掺杂剂的共掺杂，所述第二掺杂剂含有一种或多种稀有金属 - 浓度为0.1-3重量％的矿物金属。 每个（基于SiO 2和掺杂剂的总质量）。 从此开始，为了在具有蚀刻作用的环境中提供用于半导体制造的石英玻璃组分，该组分通过高纯度和高耐干蚀刻性而被区分，并避免了与氧化铝共掺杂引起的已知缺点。 根据本发明建议第一掺杂剂应为氮，并且石英玻璃的亚稳态羟基的平均含量小于30重量ppm。

公开(公告)号：US06924928B2

公开(公告)日：2005-08-02

申请号：US10261619

申请日：2002-10-02

Applicant: Michael Dennis ,  Brian Cole

Inventor： Michael Dennis ,  Brian Cole

IPC: C03C3/06 ,  C03C3/095 ,  C03C13/04 ,  H01S3/00 ,  H01S3/067 ,  H01S3/16 ,  H01S3/17

CPC classification number: H01S3/06716 ,  C03C3/06 ,  C03C3/095 ,  C03C13/046 ,  C03C2201/30 ,  C03C2201/3411 ,  C03C2201/347 ,  C03C2201/3482 ,  C03C2201/40 ,  H01S3/06754 ,  H01S3/06775 ,  H01S3/1603 ,  H01S3/161 ,  H01S3/1616 ,  H01S3/1698 ,  H01S3/17

Abstract: A device amplifies light at wavelengths in the vicinity of 1420-1530 nm, using thulium doped silica-based optical fiber. This wavelength band is of interest as it falls in the low-loss optical fiber telecommunications window, and is somewhat shorter in wavelength than the currently standard erbium doped silica fiber amplifier. The device thus extends the band of wavelengths which can be supported for long-distance telecommunications. The additional wavelength band allows the data transmission rate to be substantially increased via wavelength division multiplexing (WDM), with minimal modification to the standard equipment currently used for WDM systems. The host glass is directly compatible with standard silica-based telecommunications fiber. The invention also enables modified silicate based amplifiers and lasers on a variety of alternative transitions. Specifically, an S-band thulium doped fiber amplifier (TDFA) using a true silicate fiber host is described.

Abstract translation: 器件利用ium掺杂的二氧化硅基光纤放大1420-1530nm附近波长的光。 该波长带在低损耗光纤通信窗口中是有意义的，并且其波长比当前标准的掺铒二氧化硅光纤放大器稍短。 因此，该装置延长了可被长距离通信支持的波长带。 附加波长带允许通过波分复用（WDM）大幅增加数据传输速率，对目前用于WDM系统的标准设备进行最小修改。 主机玻璃与标准的二氧化硅电信光纤直接兼容。 本发明还使得能够在各种替代转变上改性硅酸盐基放大器和激光器。 具体来说，描述了使用真硅酸盐纤维主体的S波段ium掺杂光纤放大器（TDFA）。

公开(公告)号：US20030030892A1

公开(公告)日：2003-02-13

申请号：US10261619

申请日：2002-10-02

Inventor： Michael Dennis ,  Brian Cole

IPC: H01S003/067 ,  G02B006/26

CPC classification number: H01S3/06716 ,  C03C3/06 ,  C03C3/095 ,  C03C13/046 ,  C03C2201/30 ,  C03C2201/3411 ,  C03C2201/347 ,  C03C2201/3482 ,  C03C2201/40 ,  H01S3/06754 ,  H01S3/06775 ,  H01S3/1603 ,  H01S3/161 ,  H01S3/1616 ,  H01S3/1698 ,  H01S3/17

Abstract: A device amplifies light at wavelengths in the vicinity of 1420-1530 nm, using thulium doped silica-based optical fiber. This wavelength band is of interest as it falls in the low-loss optical fiber telecommunications window, and is somewhat shorter in wavelength than the currently standard erbium doped silica fiber amplifier. The device thus extends the band of wavelengths which can be supported for long-distance telecommunications. The additional wavelength band allows the data transmission rate to be substantially increased via wavelength division multiplexing (WDM), with minimal modification to the standard equipment currently used for WDM systems. The host glass is directly compatible with standard silica-based telecommunications fiber. The invention also enables modified silicate based amplifiers and lasers on a variety of alternative transitions. Specifically, an S-band thulium doped fiber amplifier (TDFA) using a true silicate fiber host is described.

Abstract translation: 器件利用ium掺杂的二氧化硅基光纤放大1420-1530nm附近波长的光。 该波长带在低损耗光纤通信窗口中是有意义的，并且其波长比当前标准的掺铒二氧化硅光纤放大器稍短。 因此，该装置延长了可被长距离通信支持的波长带。 附加波长带允许通过波分复用（WDM）大幅增加数据传输速率，对目前用于WDM系统的标准设备进行最小修改。 主机玻璃与标准的二氧化硅电信光纤直接兼容。 本发明还使得能够在各种替代转变上改性硅酸盐基放大器和激光器。 具体来说，描述了使用真硅酸盐纤维主体的S波段ium掺杂光纤放大器（TDFA）。

公开(公告)号：US20020064366A1

公开(公告)日：2002-05-30

申请号：US09967942

申请日：2001-10-02

Inventor： Brian J. Cole ,  Michael L. Dennis

IPC: C03C003/095 ,  G02B006/16

CPC classification number: C03C3/095 ,  C03C3/06 ,  C03C13/046 ,  C03C2201/30 ,  C03C2201/3411 ,  C03C2201/347 ,  C03C2201/3482 ,  C03C2201/40 ,  H01S3/06716 ,  H01S3/1603 ,  H01S3/1698 ,  H01S3/17

Abstract: A modified silica glass composition for providing a reduction in the multiphonon quenching for a rare-earth dopant comprising: SiO2 in a host material; a rare-earth dopant; a first SiO2 modifier; and a second SiO2 modifier; such that said first modifier and said second modifier reduce multiphonon quenching of the rare-earth dopant contained therein.

Abstract translation: 一种改进的二氧化硅玻璃组合物，用于减少稀土掺杂物的多谐振子淬火，包括：主体材料中的SiO 2; 稀土掺杂剂; 第一个SiO 2改性剂; 和第二SiO 2改性剂; 使得所述第一改性剂和所述第二改性剂减少其中所含的稀土掺杂剂的多谐振猝灭。

公开(公告)号：US07905932B2

公开(公告)日：2011-03-15

申请号：US11897406

申请日：2007-08-30

Applicant: Tatsuhiro Sato

Inventor： Tatsuhiro Sato

IPC: C03C8/02 ,  C03C8/00 ,  C03C8/14 ,  C03C8/20 ,  C03C6/06

CPC classification number: C03C1/00 ,  C03B19/063 ,  C03B32/005 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/24 ,  C03B2201/36 ,  C03C3/06 ,  C03C3/112 ,  C03C4/20 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/26 ,  C03C2201/32 ,  C03C2201/3411 ,  C03C2201/3435 ,  C03C2201/36

Abstract: A mixed quartz powder contains quartz powder and two or more types of doping element in an amount of from 0.1 to 20 mass %. The aforementioned doped elements include a first dope element selected from the group consisting of N, C and F, and a second dope element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, the lanthanides and the actinides. The “quartz powder” is a powder of crystalline quartz or it is a powder of glassy SiO2 particles. It is made form natural occurring quartz or it is fabricated synthetically. The “quartz powder” may be doped. The compounding ratio of the total amount (M1) of the aforementioned first elements and the total amount (M2) of the aforementioned second elements as the ratio of the number of atoms (M1)/(M2) is preferably from 0.1 to 20. Al as well as the aforementioned doped elements is preferably included in a mixed quartz powder of this invention.

Abstract translation: 混合石英粉含有0.1〜20质量％的石英粉和2种以上的掺杂元素。 上述掺杂元素包括选自N，C和F的第一掺杂元素和选自Mg，Ca，Sr，Ba，Sc，Y，Ti，Zr，Hf的第二掺杂元素， 镧系元素和锕系元素。 “石英粉”是结晶石英粉，或是玻璃状SiO 2粉末的粉末。 它由天然石英制成，或者由合成制成。 可以掺杂“石英粉”。 上述第一元素的总量（M1）与上述第二元素的总量（M2）的配位比优选为0.1〜20。作为原子数（M1）/（M2）的比例，优选为0.1〜20。 以及上述掺杂元素优选包括在本发明的混合石英粉末中。

公开(公告)号：US20080261800A1

公开(公告)日：2008-10-23

申请号：US11738030

申请日：2007-04-20

Applicant: Jie Yuan ,  Jennifer Y. Sun ,  Renguan Duan

Inventor： Jie Yuan ,  Jennifer Y. Sun ,  Renguan Duan

IPC: C04B35/505

CPC classification number: C03C3/06 ,  C03B32/00 ,  C03B2201/24 ,  C03B2201/34 ,  C03B2201/36 ,  C03C2201/3411 ,  C03C2201/36 ,  C03C2203/54 ,  H01L21/67069 ,  H01L21/68721 ,  H01L21/68735 ,  H01L21/68757 ,  Y02P40/57 ,  Y10S156/915

Abstract: A method of fabricating doped quartz component is provided herein. In one embodiment, the doped quartz component is a yttrium doped quartz ring configured to support a substrate. In another embodiment, the doped quartz component is a yttrium and aluminum doped cover ring. In yet another embodiment, the doped quartz component is a yttrium, aluminum and nitrogen containing cover ring.

Abstract translation: 本文提供了一种制造掺杂石英组分的方法。 在一个实施例中，掺杂的石英组件是被配置为支撑衬底的掺钇的石英环。 在另一个实施例中，掺杂的石英组件是掺钇和铝的覆盖环。 在另一个实施方案中，掺杂的石英组分是含钇，铝和氮的覆盖环。

公开(公告)号：US07407604B2

公开(公告)日：2008-08-05

申请号：US11029556

申请日：2005-01-05

Applicant: Bernard H. Kear ,  Christopher D. Haines ,  George H. Sigel ,  Lisa C. Klein ,  Varadh Ranganathan

Inventor： Bernard H. Kear ,  Christopher D. Haines ,  George H. Sigel ,  Lisa C. Klein ,  Varadh Ranganathan

IPC: C09K11/02 ,  C09K11/59 ,  C09K11/64 ,  C09K11/79

CPC classification number: C09K11/7706 ,  C03B19/06 ,  C03B19/106 ,  C03B19/1065 ,  C03B19/14 ,  C03B37/018 ,  C03B2201/34 ,  C03B2201/36 ,  C03C1/006 ,  C03C1/026 ,  C03C4/12 ,  C03C2201/3411 ,  C03C2201/3429 ,  C03C2201/3447 ,  C03C2201/3458 ,  C03C2201/3476 ,  C03C2201/36 ,  C03C2203/22 ,  C03C2203/40 ,  C09K11/7774 ,  H01S3/06754 ,  H01S3/1608 ,  H01S3/169 ,  Y10S977/778 ,  Y10S977/811 ,  Y10S977/834

Abstract: A new class of nanostructured RE-doped SiO2-base materials that display superior fluorescence properties is provided. In particular, high gain combined with a broad and flat spectral band width is observed in material composed of a high fraction of a nano-dispersed metastable silicate phase in a glassy SiO2 matrix, produced by partial devitrification (crystallization) of several glassy Al2O3/Er2O3- and Y2O3/Er2O3-doped SiO2 compositions. Also, a highly deconvoluted spectral emission, with several prominent peaks, is observed in completely devitrified material, consisting of a uniform nano-dispersion of an equilibrium silicate phase in a crystobalite SiO2 matrix. Such enhanced fluorescence properties were observed in heat treated nanopowders prepared by vapor-phase, solgel, rapid solidification, and spray-pyrolysis methods.

Abstract translation: 提供了一类新型的具有优异荧光性能的纳米结构的RE掺杂SiO 2基体材料。 特别地，在通过部分失透反应产生的玻璃状SiO 2基体中的高分数纳米分散的亚稳态硅酸盐相组成的材料中观察到具有宽的和平坦的光谱带宽的高增益（ 几个玻璃状的Al 2 O 3 / O 2 O 3 - 和Y 2的结晶， O 3组成的二氧化硅组合物。 此外，在完全失透的材料中观察到具有几个突出的峰的高度去卷积的光谱发射，由平底硅酸盐相在均匀的SiO 2基体中的均匀的纳米分散体组成。 在通过气相，溶胶凝胶，快速凝固和喷雾热解方法制备的热处理纳米粉末中观察到这种增强的荧光性质。

公开(公告)号：US20080053151A1

公开(公告)日：2008-03-06

申请号：US11897406

申请日：2007-08-30

Applicant: Tatsuhiro Sato

Inventor： Tatsuhiro Sato

IPC: C03B19/00 ,  C03C3/078 ,  C03C3/095 ,  C03C3/112

CPC classification number: C03C1/00 ,  C03B19/063 ,  C03B32/005 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/24 ,  C03B2201/36 ,  C03C3/06 ,  C03C3/112 ,  C03C4/20 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/26 ,  C03C2201/32 ,  C03C2201/3411 ,  C03C2201/3435 ,  C03C2201/36

Abstract: A mixed quartz powder contains quartz powder and two or more types of doping element in an amount of from 0.1 to 20 mass %. The aforementioned doped elements include a first dope element selected from the group consisting of N, C and F, and a second dope element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, the lanthanides and the actinides. The “quartz powder” is a powder of crystalline quartz or it is a powder of glassy SiO2 particles. It is made form natural occurring quartz or it is fabricated synthetically. The “quartz powder” may be doped. The compounding ratio of the total amount (M1) of the aforementioned first elements and the total amount (M2) of the aforementioned second elements as the ratio of the number of atoms (M1)/(M2) is preferably from 0.1 to 20. Al as well as the aforementioned doped elements is preferably included in a mixed quartz powder of this invention.

Abstract translation: 混合石英粉含有0.1〜20质量％的石英粉和2种以上的掺杂元素。 上述掺杂元素包括选自N，C和F的第一掺杂元素和选自Mg，Ca，Sr，Ba，Sc，Y，Ti，Zr，Hf的第二掺杂元素， 镧系元素和锕系元素。 “石英粉”是结晶石英的粉末，或是玻璃状SiO 2颗粒的粉末。 它由天然石英制成，或者由合成制成。 可以掺杂“石英粉”。 上述第一元素的总量（M1）与上述第二元素的总量（M2）的配位比优选为0.1〜20。作为原子数（M1）/（M2）的比例，优选为0.1〜20。 以及上述掺杂元素优选包括在本发明的混合石英粉末中。

公开(公告)号：US07064094B2

公开(公告)日：2006-06-20

申请号：US10718575

申请日：2003-11-24

Applicant: Yoshinori Harada ,  Shuzo Mizutani ,  Shinkichi Hashimoto ,  Masakazu Kudoh ,  Naoki Miura ,  Katsufumi Takahashi ,  Hideki Kiyohara

Inventor： Yoshinori Harada ,  Shuzo Mizutani ,  Shinkichi Hashimoto ,  Masakazu Kudoh ,  Naoki Miura ,  Katsufumi Takahashi ,  Hideki Kiyohara

IPC: C03C3/06

CPC classification number: C03B19/01 ,  C03B19/095 ,  C03B19/1423 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/40 ,  C03B2201/54 ,  C03C3/06 ,  C03C2201/34 ,  C03C2201/3411 ,  C03C2201/40 ,  C03C2201/54 ,  Y02P40/57

Abstract: Highly durable silica glass containing 0.01% to 2% by weight of at least one element selected from magnesium, calcium, strontium, barium, yttrium, hafnium and zirconium. The silica glass is produced by melting a powdery material comprising a finely divided silica powder and a finely divided zirconium-containing substance by oxyhydrogen flame or plasma are to form an accumulated molten material layer, and extending the molten material layer outwardly in radial directions.

Abstract translation: 含有0.01重量％至2重量％的选自镁，钙，锶，钡，钇，铪和锆中的至少一种元素的高耐用二氧化硅玻璃。 二氧化硅玻璃是通过熔化包含细碎的二氧化硅粉末和细分的含锆物质的粉末状材料通过氢氧焰或等离子体而形成的，以形成聚集的熔融材料层，并使熔融材料层沿径向向外延伸。